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TW200834033A - A thickness measuring system with astigmatic method for transparent and semi-transparent objects - Google Patents

A thickness measuring system with astigmatic method for transparent and semi-transparent objects

Info

Publication number
TW200834033A
TW200834033A TW96105486A TW96105486A TW200834033A TW 200834033 A TW200834033 A TW 200834033A TW 96105486 A TW96105486 A TW 96105486A TW 96105486 A TW96105486 A TW 96105486A TW 200834033 A TW200834033 A TW 200834033A
Authority
TW
Taiwan
Prior art keywords
transparent
semi
measuring system
astigmatic
thickness measuring
Prior art date
Application number
TW96105486A
Other languages
Chinese (zh)
Other versions
TWI318681B (en
Inventor
Chien-Hong Liu
Wen-Yuh Jywe
De-Hua Fang
Liang-Wen Ji
zong-han Li
xian-chang Ye
Original Assignee
Univ Nat Formosa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Formosa filed Critical Univ Nat Formosa
Priority to TW96105486A priority Critical patent/TW200834033A/en
Publication of TW200834033A publication Critical patent/TW200834033A/en
Application granted granted Critical
Publication of TWI318681B publication Critical patent/TWI318681B/zh

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

This invention relates to a thickness measuring system with astigmatic method for transparent and semi-transparent objects. It utilizes a laser source to emit a light beam through the objective lens and cylinder lens, and then focuses on a quadrant optical detector. When a transparent or semi-transparent object is placed between the cylinder lens and the quadrant optical detector, it takes place astigmatism. Using the light spot position measurement method, the transparent or semi-transparent object can be adjusted so as to be perpendicular to the optical axis. When the light spot is adjusted to the exact center of the quadrant optical detector, it assures that the transparent or semi-transparent object is perfectly perpendicular to the optical axis. Afterwards, it converts to the astigmatic measuring method, and then obtains the focusing error due to astigmatism. Finally, using geometric optical formulas, it determines the thickness of the measured object.
TW96105486A 2007-02-14 2007-02-14 A thickness measuring system with astigmatic method for transparent and semi-transparent objects TW200834033A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96105486A TW200834033A (en) 2007-02-14 2007-02-14 A thickness measuring system with astigmatic method for transparent and semi-transparent objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96105486A TW200834033A (en) 2007-02-14 2007-02-14 A thickness measuring system with astigmatic method for transparent and semi-transparent objects

Publications (2)

Publication Number Publication Date
TW200834033A true TW200834033A (en) 2008-08-16
TWI318681B TWI318681B (en) 2009-12-21

Family

ID=44819331

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96105486A TW200834033A (en) 2007-02-14 2007-02-14 A thickness measuring system with astigmatic method for transparent and semi-transparent objects

Country Status (1)

Country Link
TW (1) TW200834033A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8557637B2 (en) 2011-07-04 2013-10-15 Industrial Technology Research Institute Method for fabricating the flexible electronic device
CN110664369A (en) * 2019-09-19 2020-01-10 哈尔滨工业大学 An adaptive confocal line scan harmonic microscopy imaging method and device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6079697B2 (en) * 2013-07-11 2017-02-15 株式会社村田製作所 Method for measuring thickness of electronic component, method for manufacturing electronic component series using the same, electronic component series manufactured thereby, and electronic component inspection apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8557637B2 (en) 2011-07-04 2013-10-15 Industrial Technology Research Institute Method for fabricating the flexible electronic device
CN110664369A (en) * 2019-09-19 2020-01-10 哈尔滨工业大学 An adaptive confocal line scan harmonic microscopy imaging method and device
CN110664369B (en) * 2019-09-19 2022-05-13 哈尔滨工业大学 Self-adaptive confocal line scanning harmonic microscopic imaging method and device

Also Published As

Publication number Publication date
TWI318681B (en) 2009-12-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees