200829441 九、發明說明： 、 【發明所屬之技術領域】 本發明係有關一種噴墨裝置， 噴墨裝置及方法。 疋一種應用於基板之 【先前技術】200829441 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to an inkjet device, an inkjet device and a method.疋A kind of application to a substrate [Prior Art]
Γ7精…度喷墨裝置以噴墨控制器驅 件’其產生噴墨係相對於第一點 ？碩或贺墨兀 -般而言，第-點喷墨位置係以試ς法^產生噴墨行為， 以人工方式找出噴墨訊號啟動位置。位-衫位置’即 費==位置，所以更換喷墨基板時需重新定位，耗 +第1圖所示為習知噴墨製程之示意圖，噴嘴 =訊號後將墨滴32噴落於基板80之噴 此喩專: 誤’則所有墨滴32之位置亦錯誤，因 噴w啟動點於喷嘴裝置31進行喷墨製程中 :二然目前喷墨啟動點係以試誤法決定，：： 新定位，極為耗時費功。 而要重 黑啟:人於噴墨製程中需要控制基板載台的速度、邦斷喷 =動點之位置及喷墨頻率，如第2圖所示為、 置之喷墨控制流程，其步驟如下·· 贺墨衣 二驟91 ’設定基板载台逮度及設定喷墨啟動點。 噴墨於基板的喷墨圖索上，依據已設定之喷墨頻率累 ^脅射於設定之噴墨區域。步驟93,判斷第-點噴墨位置I 正確，第一點噴墨位置影響噴墨是否能正確喷射於噴墨= 5 200829441Γ7 fine...degree inkjet device with inkjet controller driver's which produces an inkjet system relative to the first point? Shuo or He Mozhen Generally speaking, the first-point ink-jet position is to detect the ink-jet signal by manually detecting the ink-jet signal. The position of the position-shirt is the cost == position, so the inkjet substrate needs to be repositioned when replacing the inkjet substrate. The consumption is shown in Fig. 1 as a schematic diagram of a conventional inkjet process. After the nozzle=signal, the ink droplet 32 is sprayed on the substrate 80. This spray special: wrong 'the position of all the ink drops 32 is also wrong, because the spray w start point in the nozzle device 31 for the inkjet process: Secondly, the current inkjet start point is determined by trial and error, :: New Positioning is extremely time consuming and costly. It is necessary to re-enable the black start: in the inkjet process, the speed of the substrate stage, the position of the break spray = the position of the moving point and the ink jet frequency need to be controlled, as shown in Fig. 2, the ink jet control flow, the steps thereof As follows: · He Moyi 2 Step 91 'Set the substrate carrier catch and set the inkjet start point. The ink is ejected onto the ink-jet image of the substrate, and is incident on the set ink-jet region according to the set ink-jet frequency. In step 93, it is judged that the first-point ink-jetting position I is correct, and the first-point ink-jetting position affects whether the inkjet can be correctly ejected to the inkjet=5 200829441
案上’若是錯誤’將影響後續所有之噴墨行為，目前以試誤 法找出其喷墨啟動點，若是噴墨啟動點錯誤則重新進行步驟 9卜92。步驟94 ’當噴墨啟動點正確’則進行噴墨程序 墨結束。 V 由上述可知開發新噴4裝置及新的噴墨製程仍為高精密 度噴墨製程的一重要課題。 【發明内容】If the error is on the case, it will affect all subsequent inkjet behaviors. At present, the inkjet starting point is found by trial and error. If the inkjet starting point is wrong, the process is repeated. Step 94 ' When the ink ejection starting point is correct', the ink jet process is terminated. V From the above, it is known that the development of the new spray 4 device and the new ink jet process are still an important subject of the high precision ink jet process. [Summary of the Invention]
為了解決上述問題，本發明之-目的係提供-種噴墨裝 置，取代習知的試誤法，採則貞測_噴墨標示以啟動嘴墨行 為。 本發明之另-目的係提供一種高精密度喷墨方法，控制 噴墨時之❹速度、噴_率及崎噴墨⑽之訊號藉以啟 動噴墨行為。 為了達到上述 、、 …… 錢他例之噴墨裝置，包括 主控制器；-影像感測控制器設置於主控制器與—影像感測 裝置之m控制影像感測裝置；1墨控儀設置於主控 制器與-喷嘴之間，纽㈣倾之魏行H墨鮮控制器設 置於主控制n.辭接㈣之間，収_解減如產 訊號；-基域台駐浦ϋ連接，“錢基板；—騎位置回ς 控制器包含多個位置感應器’設置於主控制器及位置感應器之間， 以計算基板載台的位置及旋_度，並產錄親號；—馬達驅 動迴路包含與位置感應II對應之多個馬達，設置於主控制器及馬達 之間，依據位置調整訊號，用以移動基板载台及旋轉至正確:位置及 角度。 200829441 其次’本發明之實施例之基板载台之位置感應裝置用以細基板 ^喷墨標示的位置及方向，通常具有四個位置感應裝置以分別標示出 喷墨標示之X、γ、Z及減，？個馬達相設置對應於位置感應裝 置，經由馬達驅動迴路移動基板載台至正確的位置及方向。 再者本發明一實施例之喷墨方法，依據喷墨標示而產 生喷墨行為，提供-具有噴細案及喷難示之基板後，設定喷墨 裝置之基板載㈣鶴鱗。義姻魅標示减生—喷墨訊號並 計算/出其噴_率後產生喷墨頻率訊號。之後根射墨鮮訊號產生 噴墨灯為纟細率係絲域台之移動速率與二喷墨標示間之距離 的比值，若使用倍頻驅動，則為比值的整數倍。 一ί本t月之m施例中的喷墨標示可表示位置及方向，ϋ 膜•曰▲陣;丨:f作為噴墨標不。噴墨圖案係喷墨區域，若應用於薄 膜包曰曰體陣列基板，則為薄膜電晶體 基板，職4鱗狀_。 ，讀祕七色處先 之試—種啟動噴墨標示來啟動噴墨行為，避免習知 «試誤法^雜=正及麵設定之步驟，對整個噴墨方法而言能 【實施方式】 圖案及二進行噴墨的技術需要噴墨裝置、噴墨 明本發明之内容7 °Η刀配合’以下以實施例並配合圖式以說 置210及主控器、Λ ‘測控制斋200設置於影像感測裝 感測裝置用以控制影像感測裝置210 ’影像 、 擷取基板上噴墨圖案的影像。其次，喷 7 200829441 墨控制器300設置於喷嘴310及主控制器1〇〇之間，用以控 - 制噴嘴310進行噴墨行為。 喷墨頻率控制器400設置於頻率接收器410及主控制器 100之間’以控制頻率接收器41 〇。藉由頻率接收器41 〇债測 一基板上之噴墨標示偵測出啟動喷墨之正確位置，並計算出 喷墨頻率及產生噴墨頻率訊號。於一實施例中，頻率接收器 410為一種感測裝置，例如接觸式感測裝置或非接觸式感測 裝置。接觸式感測裝置，例如探針感測裝置，係直接與基板 接觸以感測噴墨標示。非接觸式感測裝置，例如光學式感測 •裝置或磁學式感測裝置，其不與基板直接接觸而以光學感測 或磁場感測出噴墨標示。 再者，繼續參照第3圖，馬達位置回授控器500包含多 個位置感應器，設置於主控制器10〇與位置感應器之間，用 以計算基板載台700之位移及旋轉角度之修正量，並產生基 板載台7〇〇之移動與旋轉訊號，如圖中X、γ、z位置感應器 510、520、530及旋轉位置感應器54〇，分別感應出基板的X、 Y、Z及旋轉角度，並計算出其修正量及產生位置調整訊號。 • 其次’馬達驅動迴路600包含與位置感應器對應之多個 馬達，設置於主控制器1〇〇與馬達之間，用以控制馬達，藉 由馬達驅動基板載台7〇〇移動至正確之位置，如圖中之X、 Υ、Ζ馬達610、620、63〇及旋轉馬達64〇，依據位置修正量 驅動基板載台700將基板移至正確之位置。基板載台7〇〇則 用以承載基板，其中基板包含喷墨圖案及噴墨標示。 參考第4圖，說明本發明一實施例之基板8〇〇的結構， 基板800包含喷墨圖案812及喷墨標示811。本實施例之喷 ’ 墨圖案812為一晝素矩陣圖案，若應用於薄膜電晶體陣列基 ν 板’則為薄膜電晶體陣列基板上之薄膜電晶體陣列之圖案； 8 200829441 ^ 若應用於彩色濾光基板，則為畫素陣列之圖案。本實施例之 . 喷墨標示811，設置於喷墨圖案812旁，標示出喷墨啟動位 置，因喷墨標示811與噴墨圖案812之相對位置固定，精確 標示出喷墨啟動位置及方向，故可取代傳統的試誤法，一次 噴墨係對一畫素喷墨。 參考第5圖，說明本發明另一實施例之基板800的結構， 與第4圖之實施例之差異在於喷墨圖案812中之晝素及噴墨 標示811並不一 一對應。當對大尺寸的基板進行噴墨時，一 次喷墨可以橫跨數個畫素，故噴墨標示811之間距，即表示 ® —次喷墨之距離包含數個畫素之長度。 以下介紹喷墨基板之製作，請參考第6A〜6C圖，藉以說 明本發明一實施例之基板上製作喷墨標示的製作流程，以下 說明實施例之步驟。 第6A圖所示，於基板800上形成薄膜810，若應用於薄 膜電晶體陣列基板即對應其閘極層，若應用於彩色濾光基板 即對應其鍍鉻層，並於薄膜810上形成一光阻層820。如第 6B圖所示，利用具有喷墨圖案及噴墨標示的光罩，令基板 Φ 800在此光罩下經過一曝光及顯影之過程，光阻層820形成 畫素矩陣之噴墨圖案及喷墨標示之圖案。如第6C圖所示， 顯影後之基板800經過蝕刻之過程，其上之薄膜81〇形成晝 素矩陣之噴墨圖案及喷墨標示之圖案，最後去光阻即完成喷 墨基板之製作，其俯視圖如第4及5圖，而詳細的噴墨標示 圖案如第7圖所示。 第7圖說明本發明一實施例之噴墨標示811的圖案，喷 墨；^示811可標示出喷墨圖案812之位置與方向，本實施例 * 中的喷墨標示811為包含四個矩形陣列之圖案，可標示出與 200829441 喷墨圖案812之相對位署芬甘 形陣列之矩形數量並不_ 墨標示811内之矩 晝素之長度D’二;圖案為矩形晝素陣列，單- 賀墨軚不間包含η個晝素，其中n=1，2， ，並將基板安置於噴 方法之步驟： 裝置之基板載台上，以下說明噴墨 裝置之载台速”及 率f與M、v之關係如下心倍頻驅動之倍率，故喷墨頻 f=MV/R’其中次噴墨之移動距離，—次喷累之 夕距離係約為二噴墨標示之間的距離n D ’故得下列關係： 累/二:=1 ’ 2 ’ 3.·.，如第5圖之實施例中二嘖 ，不間包含3個晝素之長度n = 3(即R=3D)，而在第4 ; L兩個噴墨標示間僅包含—個晝素之長度叫即r圖 故侍贺墨頻率f =MV/nD，即1宕Μ ν β η ) 墨頻率。 卩口又疋M、vm即可決定噴 圍 步驟912，移動基板載台藉以使基板進入喷嘴的喷墨範 示產Γ:9:虎產生噴墨訊號，利用頻率接收器感測噴墨標 里步驟914，產生喷墨頻率訊號，噴墨頻率控制器接收嘖 墨訊號’依據設定步驟911之設定值計算出喷 = 生噴墨頻率訊號。 、午亚產 步驟915’啟動噴墨，主控制器於接收噴墨頻率 之訊號啟動喷墨控制器以驅動喷嘴進行一次喷墨行為 °° 10 200829441 步驟916，停止喷墨，主控制器依據設定步驟911之設 定值而停止本次噴墨行為。 步驟917，偵測基板載台是否繼續移動，主控制台依據 基板載台是否繼續移動作為整個喷墨行為是否結束之依據。 若基板載台繼續移動，表示整個喷墨並未結束，等待一 喷墨訊號進行下一次噴墨行為，即由步驟913產生喷墨訊號 重複進行一次噴墨行為。 步驟918，結束喷墨，當基板載台停止移動，判斷為結 束整個喷墨行為。 本發明可應用於薄膜電晶體陣列基板與彩色濾光基板之 製作，尤其應用於彩色濾光基板時，每一畫素包含三個子晝 素（即RGB)，一般使用三道光罩之製程，而利用本發明不需 要此三道光罩之製程，而係採用喷墨方法代替，如此完成彩 色濾光基板之製作，大幅降低製作成本。 以上所述之實施例僅係為說明本發明之技術思想及特 點，其目的在使熟習此項技藝之人士能夠瞭解本發明之内容 並據以實施，當不能以之限定本發明之專利範圍，即大凡依 本發明所揭示之精神所作之均等變化或修飾，仍應涵蓋在本 發明之專利範圍内。 【圖式簡單說明】 第1圖所示為習知之喷墨裝置之喷墨示意圖。 第2圖所示為習知之喷墨方法流程圖。 第3圖所示為根據本發明一實施例之噴墨裝置示意圖。 第4圖所示為根據本發明之一實施例之喷墨基板俯視示意圖。 11 200829441 第圖4根據本發g月之另一實施例之喷墨基板俯視示意圖。 Ϊΐ二二i 6C圖所示為板據本發明—實施例之噴墨基板製程在不 同階段之側面剖視示意圖。 第8圖所轉根據本發奴_實施例之噴墨紐之祕圖。In order to solve the above problems, it is an object of the present invention to provide an ink jet apparatus which replaces the conventional trial and error method and which uses the ink jet label to activate the nozzle ink behavior. Another object of the present invention is to provide a high-precision ink jet method for controlling the ink jetting behavior by controlling the speed of the ink jet, the jetting rate, and the signal of the ink jet (10). In order to achieve the above, the ..., the inkjet device of the example, including the main controller; the image sensing controller is disposed on the main controller and the image sensing device, the m image control device; 1 the ink controller setting Between the main controller and the - nozzle, the New (four) tilting Wei X H ink fresh controller is set between the main control n. Resignation (four), receiving _ solution minus the production signal; - the base station station in Pu'er connection, "Money substrate; - riding position feedback controller includes a plurality of position sensors" is disposed between the main controller and the position sensor to calculate the position and rotation degree of the substrate stage, and produces the pro number; The driving circuit includes a plurality of motors corresponding to the position sensing II, and is disposed between the main controller and the motor to adjust the signal according to the position for moving the substrate stage and rotating to the correct position and angle. 200829441 Next, the implementation of the present invention The position sensing device of the substrate stage is used for the position and direction of the fine substrate ^ inkjet marking, and generally has four position sensing devices for respectively marking the X, γ, Z and subtraction of the inkjet marking, and the motor phase setting. Corresponding to position sensing The substrate driving stage is moved to the correct position and direction via the motor driving circuit. Further, the inkjet method according to an embodiment of the present invention generates inkjet behavior according to the inkjet marking, providing - having a spray pattern and spraying After the substrate, the substrate of the inkjet device is set to carry the (four) crane scale. The symbol of the subtraction-inkjet signal is calculated and the inkjet frequency signal is generated after the ejection rate is generated. After that, the inkjet lamp generates the inkjet lamp. The ratio of the moving rate of the filament region to the distance between the two inkjet markers is an integer multiple of the ratio if the frequency multiplier is used. The inkjet marking in the example of the present month can be expressed. Position and direction, ϋ film • 曰 ▲ array; 丨: f as an inkjet standard. Inkjet pattern is an inkjet area, if applied to a film-coated body array substrate, it is a thin film transistor substrate, 4 squamous _., read the secret seven-color test first - start the inkjet mark to start the inkjet behavior, avoid the conventional «trial and error method = positive face setting steps, for the entire inkjet method can be [implementation 】 Pattern and two inkjet technology require inkjet device, inkjet The contents of the present invention are as follows: "The following embodiment is combined with the diagram to describe the 210 and the main controller, and the control panel 200 is set in the image sensing device to control the image sensing device. 210 'Image, capturing the image of the inkjet pattern on the substrate. Secondly, the spray 7 200829441 The ink controller 300 is disposed between the nozzle 310 and the main controller 1 , to control the nozzle 310 to perform the ink ejection behavior. The ink frequency controller 400 is disposed between the frequency receiver 410 and the main controller 100 to control the frequency receiver 41. The frequency receiver 41 detects the inkjet mark on the substrate to detect the start of the inkjet. The correct position, and the ink jet frequency is calculated and the ink jet frequency signal is generated. In one embodiment, the frequency receiver 410 is a sensing device, such as a contact sensing device or a non-contact sensing device. A touch sensing device, such as a probe sensing device, is in direct contact with the substrate to sense the ink jet marking. A non-contact sensing device, such as an optical sensing device or a magnetic sensing device, that is in direct contact with the substrate to sense the ink jet marking with optical sensing or magnetic field. Furthermore, referring to FIG. 3, the motor position return controller 500 includes a plurality of position sensors disposed between the main controller 10A and the position sensor for calculating the displacement and rotation angle of the substrate stage 700. Correcting the amount, and generating the movement and rotation signals of the substrate stage 7〇〇, such as the X, γ, z position sensors 510, 520, 530 and the rotational position sensor 54〇, respectively, sensing the X, Y, and Z and the angle of rotation, and calculate the correction amount and generate the position adjustment signal. • Secondly, the motor drive circuit 600 includes a plurality of motors corresponding to the position sensors, which are disposed between the main controller 1 and the motor for controlling the motor, and the substrate is driven to the correct position by the motor drive substrate 7 The position, as shown in the figure X, Υ, Ζ motor 610, 620, 63 〇 and the rotary motor 64 〇, drives the substrate stage 700 to move the substrate to the correct position in accordance with the position correction amount. The substrate stage 7 is used to carry the substrate, wherein the substrate comprises an inkjet pattern and an inkjet marking. Referring to Fig. 4, a structure of a substrate 8A according to an embodiment of the present invention will be described. The substrate 800 includes an inkjet pattern 812 and an inkjet marker 811. The sprayed ink pattern 812 of the present embodiment is a halogen matrix pattern, and if applied to the thin film transistor array base plate, the pattern of the thin film transistor array on the thin film transistor array substrate; 8 200829441 ^ If applied to color The filter substrate is a pattern of a pixel array. In this embodiment, the inkjet marking 811 is disposed beside the inkjet pattern 812, indicating the inkjet starting position, and the relative position of the inkjet marking 811 and the inkjet pattern 812 is fixed, and the inkjet starting position and direction are accurately indicated. Therefore, it can replace the traditional trial and error method, one inkjet is a one-pixel inkjet. Referring to Fig. 5, a structure of a substrate 800 according to another embodiment of the present invention will be described. The difference from the embodiment of Fig. 4 is that the elements of the ink jet pattern 812 and the ink jet markings 811 do not correspond one-to-one. When inkjetting a large-sized substrate, one inkjet can span several pixels, so the distance between the inkjet markings 811 indicates that the distance of the secondary inkjet contains a number of pixels. Hereinafter, the fabrication of the ink-jet substrate will be described. Referring to Figures 6A to 6C, the fabrication flow of the ink-jet label on the substrate of one embodiment of the present invention will be described. The steps of the embodiment will be described below. As shown in FIG. 6A, a thin film 810 is formed on the substrate 800, and if it is applied to the thin film transistor array substrate, that is, corresponding to the gate layer, if it is applied to the color filter substrate, it corresponds to the chrome plating layer, and a light is formed on the film 810. Resistive layer 820. As shown in FIG. 6B, using a photomask having an inkjet pattern and an inkjet marking, the substrate Φ800 is subjected to an exposure and development process under the mask, and the photoresist layer 820 forms an inkjet pattern of the pixel matrix and Inkjet marking pattern. As shown in FIG. 6C, the substrate 800 after development is subjected to an etching process, and the film 81 on the film is formed into an inkjet pattern of a halogen matrix and an inkjet marking pattern, and finally, the photoresist is completed to complete the fabrication of the inkjet substrate. The top view is shown in Figures 4 and 5, and the detailed ink jet marking pattern is shown in Figure 7. Figure 7 illustrates a pattern of an inkjet marking 811 according to an embodiment of the present invention. The inkjet marking 811 can indicate the position and orientation of the inkjet pattern 812. The inkjet marking 811 in this embodiment* comprises four rectangles. The pattern of the array can indicate the number of rectangles corresponding to the 200829441 inkjet pattern 812. The length of the matrix is not _ The length of the matrix of the matrix in the 811 is DD; the pattern is a rectangular pixel array, single- He Mozhen does not contain η 昼 ,, where n = 1, 2, and the substrate is placed in the spraying method: on the substrate stage of the device, the following describes the stage speed of the inkjet device and the rate f and The relationship between M and v is as follows: the magnification of the heart frequency multiplication, so the inkjet frequency f=MV/R' the moving distance of the secondary inkjet, and the distance of the secondary inkjet is about the distance between the two inkjet markings. D 'so the following relationship: Tired / two: = 1 ' 2 ' 3.·., as in the example of Figure 5, the length of the three alizarins is n = 3 (ie R = 3D) And in the 4th; L two inkjet markings only contain the length of a single element called r, so the ink frequency f = MV / nD, that is, 1 宕Μ ν β η) The mouth and the mouth M and vm can determine the spraying step 912, and the ink substrate of the substrate carrying table to make the substrate enter the nozzle is produced. 9: The tiger generates an inkjet signal, and the frequency receiver is used to sense the inkjet target. Step 914, generating an inkjet frequency signal, and the inkjet frequency controller receives the inkjet signal 'calculates the sprayed inkjet frequency signal according to the set value of the setting step 911. The lunchtime production step 915' starts the inkjet, the main controller The inkjet controller is activated to receive the inkjet frequency to drive the nozzle to perform an inkjet behavior. ° 10 200829441 Step 916, the inkjet is stopped, and the main controller stops the inkjet behavior according to the setting value of the setting step 911. 917, detecting whether the substrate carrier continues to move, and whether the main console continues to move according to whether the substrate carrier continues to move. If the substrate carrier continues to move, indicating that the entire inkjet does not end, waiting for an inkjet. The signal performs the next ink ejection behavior, that is, the ink ejection signal is generated by the step 913 to repeat the ink ejection behavior. Step 918, the ink ejection is finished, and when the substrate stage stops moving, the signal is judged. In order to complete the entire inkjet behavior, the present invention can be applied to the fabrication of a thin film transistor array substrate and a color filter substrate, especially when applied to a color filter substrate, each pixel contains three sub-halogens (ie, RGB), which are generally used. The process of the three masks, and the process of the three masks is not required by the invention, and the inkjet method is used instead, so that the fabrication of the color filter substrate is completed, and the manufacturing cost is greatly reduced. The embodiment described above is only The technical idea and the features of the present invention are described in order to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, and the scope of the present invention cannot be limited thereto, that is, the spirit of the present invention is disclosed. Equal variations or modifications are still intended to be included within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the ink jet of a conventional ink jet device. Figure 2 is a flow chart showing a conventional ink jet method. Figure 3 is a schematic view of an ink jet apparatus in accordance with an embodiment of the present invention. Fig. 4 is a top plan view showing an ink jet substrate according to an embodiment of the present invention. 11 200829441 FIG. 4 is a top plan view of an ink jet substrate according to another embodiment of the present invention. The Fig. 22 shows the side cross-sectional view of the ink jet substrate process in accordance with the present invention. Figure 8 is a schematic diagram of an inkjet button according to the present invention.
^主要元件符號說明】 32 噴嘴裝置 80 墨滴 81 基板 91、92、93、94 100 噴墨圖案 步驟 200 主控制器 21〇 影像感測控制器 300 影像感測裝置 31〇 噴墨控制器 4〇〇 噴嘴 41〇 噴墨頻率控制器 5〇〇 頻率接收器 51〇 馬達位置回授控制器 520 X位置感應器 53〇 γ位置感應器 540 ζ位置感應器 6〇〇 旋轉位置感應器 61〇 馬達驅動迴路 620 X馬達 Υ馬達 12 200829441 630 Z馬達 640 旋轉馬達 700 基板載台 800 基板 810 薄膜 820 光阻層 811 噴墨標示 812 噴墨圖案 911、912、913、914 915、916、917、918 步驟 13^Main component symbol description] 32 nozzle device 80 ink droplet 81 substrate 91, 92, 93, 94 100 inkjet pattern step 200 main controller 21 image sensing controller 300 image sensing device 31 inkjet controller 4 〇 nozzle 41 〇 inkjet frequency controller 5 〇〇 frequency receiver 51 〇 motor position feedback controller 520 X position sensor 53 〇 γ position sensor 540 ζ position sensor 6 〇〇 rotational position sensor 61 〇 motor drive Circuit 620 X Motor Υ Motor 12 200829441 630 Z Motor 640 Rotary Motor 700 Substrate Stage 800 Substrate 810 Film 820 Photoresist Layer 811 Inkjet Marker 812 Inkjet Patterns 911, 912, 913, 914 915, 916, 917, 918 Step 13