200824030 九、發明說明 【發明所屬之技術領域】 本發明是關於用以搬運玻璃基板等的各種基板的搬運 滾子及基板搬運裝置者。 【先前技術】 在液晶面板或半導體元件的製造工程中，爲了提高對 於各種基板的處理效率，沿著基板的搬運線配置各種處理 裝置，一面藉由搬運滾子來搬運基板一面在基板進行各種 處理的製程爲既知（例如，參照專利文獻1 )。在該線內 方式的基板處理系統中，沿著基板搬運方向配置搬運滾子 ，在搬運滾子上搬運玻璃基板，而在搬運中進行顯像處理 或洗淨處理等的各種處理。 專利文獻1:日本特開2004-281991號公報 【發明內容】 在依線內方式的基板處理系統中，隨著基板尺寸的大 型化爲了令搬運滾子長尺寸化，撓曲容易發生在搬運滾子 本體。當搬運滾子撓曲，對於基板的搬運速度或搬運性能 成爲不穩定，會產生各處理工程的處理品質降低的不方便 。又，不但大型尺寸的基板，而且小型尺寸的基板也必須 處理，又因縮短節拍時間的必要性，也必須並列複數基板 進行搬運。但是，若搬運滾子的旋轉精度及水平精度惡化 ，則在滾子軸線方向發生速度分布，而在搬運中的基板發 -4- 200824030 生蛇行，會發生基板彼此間接觸的不方便。因此，在習知 的基板處理系統中，很難並列複數基板來進行處理的情形 〇 本發明的目的是在於提供即使搬運滾子長尺寸化，也 具有穩定的搬運性能的搬運滾子。 又，本發明的目的是在於提供穩定地可搬運各種基板 的基板搬運裝置。 本發明的其他目的是在於提供可搬運並列複數基板的 基板搬運裝置。 依本發明的搬運滾子，是屬於搬運各種基板的搬運滾 子，特徵爲：具有：圓筒狀軸，及被嵌合於軸，而且沿著 滾子軸線方向所配置，與須搬運的基板抵接而將搬運力傳 達至基板的複數小滾子，及嵌合於上述軸，而且將鄰接的 兩個小滾子之間維持在所定間隔，連結鄰接的小滾子彼此 間的間隔件，及被固定於上述軸，而且被連結於上述小滾 子，固定小滾子及間隔件的至少一對卡止構件。 在本發明，將搬運力傳達至須搬運的基板的複數小滾 子對於軸保持在自由的狀態，經由螺定於軸的卡止構件連 結於軸之故，因而防止依螺定的不期望的應力變形發生在 小滾子的不方便。結果，對於基板達成穩定的搬運性能。 依本發明的基板搬運裝置，是具有：沿著基板搬運方 向具備複數搬運滾子，將複數搬運滾子在搬運滾子的軸兩 端互相地連結的連結框，及被連結於該搬運滾子，並將旋 轉驅動力傳動至搬運滾子的驅動機構，及被連結於該連結 •5- 200824030 框，調整搬運滾子的水平度的水平度調整機構。 在並列複數基板而同時地處理的基板處理系統中，在 滾子軸線方向形成速度分布於搬運滾子，則會發生蛇行等 的搬運障礙。尤其是使用長尺寸的搬運滾子來搬運複數基 板時，即使在滾子的水平度發生些微不均衡，水平度的不 均衡也會被增幅之故，因而在一方或雙方基板會發生蛇行 ，會發生基板彼此間接觸的不方便。如此，在本發明中， 在搬運滾子的一端側的腔外部設置調整搬運滾子的水平度 的水平度調整機構。藉由設置水平度調整機構，作爲基板 處理系統全體可得到穩定的搬運性能，而並列複數基板成 爲可同時地處理。又，藉由將搬運滾子的各小滾子對於軸 保持自由的狀態，經由鍵結合的卡止構件連結於軸，針對 於將搬運力直接傳達至基板的各小滾子也可得到穩定的搬 運力之故，因而與水平度調整機構相輔相成。穩定地可搬 運大型基板，而且並列複數基板成爲可進行搬運處理。 因防止發生將小滾子連結於軸之際所發生的應力變形 ，因此可實現具有穩定的搬運力的搬運滾子。 又，因在各搬運滾子，水平度調整機構設於腔外部， 因此成爲可防止發生蛇行等的搬運障礙。 【實施方式】 第1圖是表示線的方式的基板處理系統的一例的圖式 。在本例中，針對於適用於顯像處理及洗淨處理的例加以 說明。沿著基板搬運線L配置有顯像單元1 (僅表示顯像 -6- 200824030 單元的一部分）及洗淨單元2，基板3是在沿著搬運線L 而在通過顯像單元及洗淨單元之期間進行顯像處理及洗淨 處理。基板搬運系統是具有沿著搬運線L以所定間隔所配 置的複數搬運滾子4 (僅針對於1支搬運滾子附與符號） ，各基板3是藉由搬運滾子的旋轉驅動力沿著搬運線L行 進。 顯像單元1是具有顯像腔1 〇，在當該顯像腔內隔著搬 運滾子上下地配置有顯像噴嘴11 (爲了圖式明瞭，僅針對 於1個顯像噴嘴附與符號），基板3是在搬運中藉由從顯 像噴嘴所噴射的顯像液施以顯像處理。 當結束顯像處理，基板3是從顯像腔1 0被搬出，而 被搬進洗淨腔20。洗淨腔20是隔著沿著搬運線方向配列 的搬運滾子上下地配置有複數洗淨噴嘴，而殘留顯像液的 基板，是在搬運中藉由從洗淨噴嘴所噴射的洗淨液被洗淨 〇 第2圖是表示搬運滾子的一例。搬運滾子是具有以圓 筒狀金屬製管所構成的軸3 0，而將小滾子3 1〜3 8以所定間 隔嵌合設於軸的外周。此些小滾子是與所搬運的基板背面 抵接而發揮將搬運力傳達到基板的作用，以具有耐藥品性 的合成樹脂材料所構成。在鄰接的小滾子間嵌合裝設間隔 件4 1〜46。間隔件也以小滾子相同的合成樹脂材料所構成 ’藉由鍵結合發揮機械式連結互相鄰接的小滾子彼此間的 作用。小滾子及間隔件是對於軸未螺定，而對於軸裝設成 可旋轉或可移動。 200824030 又，裝設於軸30的小滾子與間隔件的數量是用應於 滾子長度可加以設定，例如搬運大型基板時，藉由增加被 嵌合裝設於軸3 0的小滾子與間隔件之數量，就可對應於 基板的大型化。 裝設卡止構件50a，50b成爲鄰接於小滾子3 1，34， 而且裝設卡止構件50c，5 0d成爲鄰接於小滾子35，38。 此些卡止構件是以環狀金屬材料或合成樹脂材料所構成， 而對於軸3 0施以螺定。卡止構件是與鄰接的小滾子被鍵 結合，而發揮將軸的旋轉驅動力傳達到小滾子的作用。因 此，當軸進行旋轉，則該旋轉驅動力是被傳達到卡止構件 ，而從卡止構件經由鍵結合被傳達到小滾子及間隔件之後 被傳達到所有小滾子。所有小滾子是未被螺定於軸而被維 持在自由狀態之故，因而不會發生不必要的變形，可得到 穩定的旋轉精度及搬運性能。 在軸3 0的大約中央，裝設比小滾子的外徑尺寸還小 外徑的軸承等的旋轉支撐構件5 1，而在其兩側配置卡止構 件5 0e，5 Of而將旋轉支撐構件51固定在軸。旋轉支撐構 件51是經由支柱52被支撐在腔的底座60。搬運大型玻璃 基板時，有相當荷重施加於搬運滾子，而在搬運滾子有發 生撓曲之虞。如此，在本例中，將搬運滾子的大約中央部 位經由旋轉支撐構件支撐於腔的底座，以防止發生撓曲。 又，藉由旋轉支撐構件的支撐，是不僅一處，在滾子軸線 方向的複數部位也可支撐。 軸3 0的兩端部分，是經由軸承6 1 a，6 1 b而藉由腔側 -8- 200824030 壁62a，62b被支撐。因此，本例的搬運滾子是成爲藉由 滾子的兩端及中央部分的三點所支撐。又，對於側壁62a ，因進行下述的水平度的調整，因此經由軸承被支撐成可 旋轉而且被支撐成可上下移動。 在突出於軸30的腔側壁62a的外部的部分固裝齒輪 (斜齒輪）70，將經由旋轉驅動機構所傳達的旋轉驅動力 傳達到軸。作爲旋轉驅動機構，將斜齒輪7 1所連結的驅 動軸72朝與紙面正交的方向延伸而將旋轉驅動力傳達到 各搬運滾子。又，在軸30，將下述的水平度調整機構連結 於腔側壁62a的外側。並列兩枚基板而進行處理時及處理 大型基板時，則搬運滾子會長尺寸化，而會容易發生撓曲 。當發生撓曲，則出現起因於搬運滾子的水平度爲非平衡 的不良影響，而發生蛇行等的搬運障礙。如此，藉由在腔 外部設置水平度調整機構，成爲從腔外部可調整搬運滾子 的水平度。結果，即使並列兩枚基板進行處理時，也不會 發生蛇行等不方便，而可解決基板彼此間接觸的不良情形 。又’水平度調整機構是不但設在搬運滾子的一側。也可 設在搬運滾子的兩側。 第3圖是擴大表示圖示於第2圖的搬運滾子的一部分 的斷面圖，使用當該第3圖，來說明軸，卡止構件，小滾 子及間隔件的連結狀態。在圓筒狀軸3 0嵌合裝設四個小 滾子31〜34。各小滾子是移動自如地被裝設於滾子軸線方 向及滾子圓周方向。在鄰接的小滾子間嵌合裝設間隔件 4 1〜4 3 °各間隔件是與小滾子同樣地移動自如地裝設於滾 -9 - 200824030 子軸方向及滾子圓周方向。與小滾子3 1，3 4相鄰接般地 將環狀卡止構件50a，50b固定於軸。卡止構件是對於軸 進行螺定。卡止構件是以金屬材料所構成之故，因而即使 施以螺定也不會發生變形所發生的不方便，惟小滾子及間 隔件是合成樹脂材料之故，因而在螺定之際發生應力變形 ，而會降低真圓度等的滾子性能。如此，在本發明中，對 於軸將小滾子及間隔件裝設成自由狀態，而且小滾子與卡 止構件及間隔件之間是藉由鍵結合加以連結而將被傳達到 軸的旋轉驅動力經由鍵結合被傳達到各小滾子。小滾子爲 對於軸處於自由的狀態之故，因而在小滾子不會發生不必 要的應力及變形，作爲滾子可得到極良好的真圓度，而可 達成穩定的滾子旋轉精度。 在本例中，在各小滾子31〜34形成鍵溝，而且在卡止 構件50a，50b及間隔件41〜43形成鍵俾形成鍵結合。因 此’被傳達到軸30的旋轉驅動力是被傳達到卡止構件50a ’ 50b，而藉由形成在卡止構件與小滾子之間的鍵結合被 傳達到鄰接的小滾子3 1，3 4。被傳達到此些小滾子的旋轉 驅動力是經由間隔件41，43被傳達到小滾子32，33。 以下，針對於依本發明的基板搬運裝置的搬運滾子的 水平度調整機構加以說明。第4圖是表示從腔外部朝搬運 滾子的軸線方向觀看的側面圖。作爲一例，針對於調整5 支搬運滾子的水平度的機構加以說明。在各搬運滾子結合 有斜齒輪70 (爲了將圖式作成明瞭，僅將一支搬運滾子附 與符號），而斜齒輪70是連結有被結合於驅動軸72的斜 -10- 200824030 齒輪7 1，使得驅動軸72的旋轉驅動力被傳達到各搬運滾 子。驅動軸72是藉由四個垂直框8 0 a〜8 0d旋轉自如地被 支撐，而此些四個垂直框是被安裝於底座框81。底座框 81是經由昇降機構82被固定在底座60，而藉由調整昇降 機構82，可調整驅動軸72的垂直方向的高度，成爲搬運 滾子的垂直方向的高度被調整。藉由調整該垂直方向的高 度，來調整搬運滾子的水平度。又，該水平度調整機構是 可設於搬運滾子的兩側。又，在本例中，作爲調整五支搬 運滾子的水平度的機構，惟搬運滾子的支數是一例。 本發明是並不被僅限定於上述的實施例，可進行各種 變形或變更。例如在上述的實施例中，以顯像工程及洗淨 工程作爲例子加以說明，惟此些的工程以外的各種工程也 可適用。 【圖式簡單說明】 第1圖是表示基板處理系統的一例的圖式。 第2圖是表示搬運滾子的一例的圖式。 第3圖是擴大表示圖示於第2圖的搬運滾子的一部分 的斷面圖。 第4圖是表示從腔的外側觀看搬運滾子的側面圖。 【主要元件符號說明】 1 :顯像單元 2 :洗淨單元 -11 - 200824030 3 :基板 4 :搬運滾子 1 0 :顯像腔 1 1 :顯像噴嘴 20 :洗淨腔 3 0 ··軸 3 1〜3 8 :小滾子 4 1〜46 :間隔件 50a〜50f:卡止構件 5 1 :旋轉支撐構件 60 :底座 70 :齒輪（斜齒輪） 71 :斜齒輪 7 2 :驅動軸 8 0&〜80(1:垂直框 81 :水平框 82 :昇降機構[Technical Field] The present invention relates to a carrier roller and a substrate transfer device for transporting various substrates such as a glass substrate. [Prior Art] In the manufacturing process of a liquid crystal panel or a semiconductor device, in order to improve the processing efficiency for various substrates, various processing devices are disposed along the carrier line of the substrate, and various substrates are processed on the substrate while transporting the substrate by transporting the rollers. The process is known (for example, refer to Patent Document 1). In the in-line substrate processing system, the transport roller is disposed along the substrate transport direction, and the glass substrate is transported on the transport roller to perform various processes such as development processing or cleaning processing during transport. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004-281991. SUMMARY OF THE INVENTION In the substrate processing system according to the in-line type, as the size of the substrate is increased, the deflection of the transport roller is likely to occur in the transport roller. Sub-ontology. When the conveyance roller is deflected, the conveyance speed or the conveyance performance of the substrate becomes unstable, which causes an inconvenience in that the processing quality of each treatment process is lowered. Further, not only a large-sized substrate but also a small-sized substrate must be handled, and it is necessary to carry out a plurality of substrates in parallel by shortening the necessity of the tact time. However, if the rotation accuracy and the horizontal accuracy of the conveyance roller are deteriorated, a speed distribution occurs in the roller axis direction, and the substrate -4-200824030 during conveyance is snaking, which may cause inconvenience in contact between the substrates. Therefore, in the conventional substrate processing system, it is difficult to process a plurality of substrates in parallel. 〇 It is an object of the present invention to provide a transport roller having stable handling performance even if the transport roller is elongated. Further, an object of the present invention is to provide a substrate transfer apparatus which can stably carry various substrates. Another object of the present invention is to provide a substrate transfer apparatus that can transport a plurality of substrates in parallel. The transport roller according to the present invention is a transport roller that transports various substrates, and has a cylindrical shaft and a shaft that is fitted to the shaft and arranged along the axis of the roller, and a substrate to be transported. a plurality of small rollers that transmit the conveying force to the substrate, and are fitted to the shaft, and maintain a predetermined interval between the two adjacent small rollers, and connect the spacers between the adjacent small rollers. And at least one pair of locking members that are fixed to the shaft and that are coupled to the small roller and that fix the small roller and the spacer. According to the present invention, the plurality of small rollers that transmit the transporting force to the substrate to be transported are held in a free state with respect to the shaft, and are coupled to the shaft via the locking member that is screwed to the shaft, thereby preventing undesired undulations. Stress deformation occurs in the inconvenience of small rollers. As a result, stable handling performance is achieved for the substrate. According to the substrate transfer device of the present invention, the plurality of transport rollers are provided along the substrate transport direction, and the plurality of transport rollers are coupled to each other at the axial ends of the transport roller, and are coupled to the transport roller. And drive the rotational driving force to the driving mechanism of the carrying roller, and the leveling mechanism that is connected to the frame of the connection and is adjusted to adjust the level of the carrying roller. In the substrate processing system in which a plurality of substrates are juxtaposed and processed at the same time, a speed is distributed in the roller axis direction to the conveyance roller, and a conveyance failure such as meandering occurs. In particular, when a large number of transport rollers are used to transport a plurality of substrates, even if the level of the rollers is slightly uneven, the level imbalance will increase, so that one or both of the substrates will be snaked. The inconvenience of contacting the substrates with each other occurs. As described above, in the present invention, a level adjustment mechanism for adjusting the level of the conveyance roller is provided outside the chamber on the one end side of the conveyance roller. By providing the level adjustment mechanism, stable handling performance can be obtained as a whole of the substrate processing system, and the plurality of substrates can be processed simultaneously. Further, by keeping the small rollers of the transport roller in a state in which the shaft is free from the shaft, the lock member is coupled to the shaft via the key, and the small rollers that directly transmit the transport force to the substrate can be stably obtained. The handling force is therefore complementary to the leveling mechanism. The large-sized substrate can be transported stably, and a plurality of substrates can be stacked to be handled. Since the stress deformation occurring when the small roller is coupled to the shaft is prevented from occurring, the conveyance roller having a stable conveying force can be realized. Moreover, since the leveling mechanism is provided outside the chamber for each of the transport rollers, it is possible to prevent the occurrence of a meandering obstacle. [Embodiment] Fig. 1 is a view showing an example of a substrate processing system of a line type. In this example, an example applied to the development processing and the cleaning processing will be described. The development unit 1 (only a part of the development -6-200824030 unit) and the cleaning unit 2 are disposed along the substrate conveyance line L, and the substrate 3 passes through the development unit and the cleaning unit along the conveyance line L. The development process and the cleaning process are performed during the period. The substrate conveyance system has a plurality of conveyance rollers 4 disposed at predetermined intervals along the conveyance line L (only for one conveyance roller is attached with a symbol), and each of the substrates 3 is driven by the rotational driving force of the conveyance rollers. The conveying line L travels. The developing unit 1 has a developing chamber 1 〇, and the developing nozzle 11 is disposed above and below the transport roller in the developing chamber (for the sake of clarity, only one developing nozzle is attached with a symbol) The substrate 3 is subjected to a development process by a developing solution sprayed from the developing nozzle during transportation. When the development processing is finished, the substrate 3 is carried out from the developing chamber 10, and is carried into the cleaning chamber 20. The cleaning chamber 20 is a substrate in which a plurality of cleaning nozzles are disposed above and below the conveying roller arranged along the conveying line direction, and the substrate that retains the developing liquid is a cleaning liquid that is ejected from the cleaning nozzle during transportation. FIG. 2 is an example of the conveyance roller. The transport roller has a shaft 30 formed of a cylindrical metal tube, and the small rollers 3 1 to 3 8 are fitted to the outer circumference of the shaft at a predetermined interval. These small rollers function to convey the conveying force to the substrate by abutting against the back surface of the substrate to be conveyed, and are composed of a synthetic resin material having chemical resistance. Spacers 4 1 to 46 are fitted between adjacent small rollers. The spacers are also made of the same synthetic resin material as the small rollers. The small rollers that are adjacent to each other by mechanical bonding are bonded to each other by a key bond. The small rollers and spacers are not threaded for the shaft and are rotatable or movable for the shaft. 200824030 Moreover, the number of small rollers and spacers mounted on the shaft 30 can be set according to the length of the roller, for example, when the large substrate is transported, by adding a small roller that is fitted to the shaft 30. The number of spacers can correspond to the enlargement of the substrate. The mounting locking members 50a, 50b are adjacent to the small rollers 3, 34, and the locking members 50c are provided, and 50d is adjacent to the small rollers 35, 38. These locking members are made of a ring-shaped metal material or a synthetic resin material, and are screwed to the shaft 30. The locking member is keyed to the adjacent small roller, and functions to transmit the rotational driving force of the shaft to the small roller. Therefore, when the shaft rotates, the rotational driving force is transmitted to the locking member, and is transmitted to all the small rollers after being transmitted from the locking member to the small roller and the spacer via the key combination. All the small rollers are not fixed to the shaft and are maintained in a free state, so that unnecessary deformation does not occur, and stable rotation accuracy and handling performance can be obtained. A rotation support member 51 such as a bearing having a smaller outer diameter than the outer diameter of the small roller is provided at approximately the center of the shaft 30, and the locking members 50e, 5 Of are disposed on both sides thereof to rotate the support The member 51 is fixed to the shaft. The rotary support member 51 is a base 60 that is supported by the cavity via the struts 52. When a large glass substrate is transported, a considerable load is applied to the transport roller, and the transport roller is deflected. Thus, in this example, the approximately central portion of the carrying roller is supported by the base of the cavity via the rotating support member to prevent deflection. Further, by the support of the rotary support member, not only one portion but also a plurality of portions in the direction of the roller axis can be supported. Both end portions of the shaft 30 are supported by the cavities -8 - 200824030 walls 62a, 62b via bearings 6 1 a, 6 1 b. Therefore, the carrying roller of this example is supported by three points of the both ends and the central portion of the roller. Further, since the side wall 62a is adjusted in the following degree, it is supported by the bearing so as to be rotatable and supported to be movable up and down. A portion of the fixed gear (helical gear) 70 projecting from the outside of the cavity side wall 62a of the shaft 30 transmits the rotational driving force transmitted via the rotary drive mechanism to the shaft. As the rotation drive mechanism, the drive shaft 72 to which the helical gear 71 is coupled extends in a direction orthogonal to the plane of the paper, and the rotational driving force is transmitted to each of the conveyance rollers. Further, in the shaft 30, the following level adjustment mechanism is coupled to the outside of the cavity side wall 62a. When two substrates are arranged in parallel for processing and when a large substrate is processed, the conveyance roller is elongated and the deflection is likely to occur. When the deflection occurs, there is a problem that the level of the conveyance roller is unbalanced, and the transportation obstacle such as meandering occurs. Thus, by providing the level adjustment mechanism outside the chamber, the level of the transport roller can be adjusted from the outside of the chamber. As a result, even when two substrates are processed in parallel, inconvenience such as meandering does not occur, and the problem that the substrates are in contact with each other can be solved. Further, the level adjustment mechanism is provided not only on the side where the rollers are conveyed. It can also be placed on both sides of the carrying roller. Fig. 3 is a cross-sectional view showing a part of the transport roller shown in Fig. 2 in an enlarged manner, and the connection state of the shaft, the locking member, the small roller and the spacer will be described using the third drawing. Four small rollers 31 to 34 are fitted to the cylindrical shaft 30. Each of the small rollers is movably mounted in the direction of the axis of the roller and the circumferential direction of the roller. The spacers are fitted between the adjacent small rollers. 4 1 to 4 3 ° The spacers are movably attached to the roller -9 - 200824030 sub-axis direction and the roller circumferential direction in the same manner as the small rollers. The annular locking members 50a, 50b are fixed to the shaft in the vicinity of the small rollers 3 1, 3 4 . The locking member is screwed to the shaft. Since the locking member is made of a metal material, the inconvenience caused by deformation does not occur even if the locking member is applied, but the small roller and the spacer are synthetic resin materials, so that stress occurs at the time of screwing. Deformation, which reduces the performance of the roller such as roundness. As described above, in the present invention, the small roller and the spacer are mounted in a free state with respect to the shaft, and the small roller and the locking member and the spacer are coupled by a key joint to be transmitted to the shaft. The driving force is transmitted to each small roller via a key combination. The small roller is in a free state for the shaft, so that unnecessary stress and deformation do not occur in the small roller, and excellent roundness can be obtained as the roller, and stable roller rotation accuracy can be achieved. In this example, the key rollers are formed in the small rollers 31 to 34, and the key members are formed in the locking members 50a and 50b and the spacers 41 to 43 to form a key bond. Therefore, the rotational driving force transmitted to the shaft 30 is transmitted to the locking members 50a' 50b, and is transmitted to the adjacent small rollers 31 by the key combination formed between the locking members and the small rollers. 3 4. The rotational driving force transmitted to the small rollers is transmitted to the small rollers 32, 33 via the spacers 41, 43. Hereinafter, the level adjustment mechanism of the transport roller of the substrate transfer device according to the present invention will be described. Fig. 4 is a side view showing the outer side of the chamber as viewed in the axial direction of the conveying roller. As an example, a mechanism for adjusting the level of the five transport rollers will be described. A helical gear 70 is coupled to each of the transport rollers (only one of the transport rollers is attached to the symbol for clarity of the drawing), and the helical gear 70 is coupled with an oblique 10-200824030 gear coupled to the drive shaft 72. 7 1, the rotational driving force of the drive shaft 72 is transmitted to each of the transport rollers. The drive shaft 72 is rotatably supported by four vertical frames 80 0 to 80 0d, and the four vertical frames are mounted to the base frame 81. The base frame 81 is fixed to the base 60 via the elevating mechanism 82, and by adjusting the elevating mechanism 82, the height of the drive shaft 72 in the vertical direction can be adjusted, and the height in the vertical direction of the transport roller can be adjusted. The level of the carrying roller is adjusted by adjusting the height in the vertical direction. Further, the level adjustment mechanism can be provided on both sides of the conveyance roller. Further, in this example, as a mechanism for adjusting the level of the five transport rollers, the number of the rollers to be transported is an example. The present invention is not limited to the above-described embodiments, and various modifications and changes can be made. For example, in the above-described embodiments, the development project and the cleaning project are explained as an example, but various projects other than the above-described projects are also applicable. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an example of a substrate processing system. Fig. 2 is a view showing an example of a conveyance roller. Fig. 3 is a cross-sectional view showing a part of the transport roller shown in Fig. 2 in an enlarged manner. Fig. 4 is a side view showing the transport roller viewed from the outside of the chamber. [Description of main component symbols] 1 : Development unit 2 : Cleaning unit-11 - 200824030 3 : Substrate 4 : Transport roller 1 0 : Development chamber 1 1 : Development nozzle 20 : Cleaning chamber 3 0 ··Axis 3 1 to 3 8 : small rollers 4 1 to 46 : spacers 50a to 50f : locking member 5 1 : rotating support member 60 : base 70 : gear (helical gear) 71 : helical gear 7 2 : drive shaft 8 0& ;~80 (1: vertical frame 81: horizontal frame 82: lifting mechanism