200819756 九、發明說明 【發明所屬之技術領域】 本發明是關於在電特性檢查用的針（探針）、醫療用 的針、縫紉用的針等之針狀物的製程中進行尖端部分的精 密加工或是針狀物的使用前後，用來該尖端部分予以清潔 之探針清潔器及清潔方法，尤其，用來將半導體裝置的檢 查步驟中用於電特性檢查等之探針的尖端部分所附著的異 物予以除去之探針清潔器及清潔方法。 【先前技術】 半導體裝置的的製程中’爲了要使該製造效率提升， 令探針與組裝在半導體晶圓上之複數個晶片的電極片相接 觸，透過該探針來施加測試訊號或進行檢測，以檢查各晶 片的電特性。 一般，探針是由鎢、鈹等的硬質材料所形成。一方 面，電極片是由鋁等比較軟質的材料所形成，當探針接觸 到電極片時，會在探針的尖端部分（尖端及尖端附近的側 面）附著電極片的鋁等的異物’因而降低檢查精度。另 外，探針上附著大型的異物，則會導致相鄰的探針彼此間 短路，致使破壞晶片。因而，清潔探針的尖端部分，將異 物除去。 清潔探針的尖端部分’過去是使用由清潔用薄片所組 成之探針清潔器，該清潔用薄片則是由混入了磨石粒子 (由氧化錦、碳化政、鑽石等所組成的硬質粒子）之政酮 -4- 200819756 橡膠、聚胺酯橡膠等的彈性材所組成（例如，參考專利文 獻1、2)，將探針的尖端部分從該探針清潔器之彈性材的 表面刺入到內部，使固定在彈性材的磨石粒子與探針尖端 部分產生作用，將異物除去。 ^ 另外，使用由在表面形成有微小的凹凸之板的表面形 ν 成了具有黏著性的膠質層之清潔用薄片所組成之探針清潔 器，該探針清潔器則是將探針的尖端部分，從膠質層的表 • 面，刺入到內部，一面使探針的尖端接觸到板表面的凹 凸，一面使探針移動，將異物從探針的尖端除去（例如， 參考專利文獻3)。 近年，隨著晶片尺寸的小型化，形成在晶片上之電極 片也跟著變小，導致電極片彼此間也要相接近地設置。因 而，必須使探針的尺寸變更細，又爲了要提升或是至少維 持檢查精度，導致探針要由例如如同鈹-銅的合金，具有 高度電特性的較軟質的材料所形成。 # 但是，這樣的探針，使用如同上述之習知的探針清潔 器，則會有進行清潔時容易磨損，探針的壽命變短的問 - 題，還會發生因該磨損而檢查晶片的電特性產生誤差的問 • 題。 另外，爲了要與晶片的電極片確實地接觸，如第5Α 圖和第5Β圖所示，所使用探針爲探針尖端30、33形成有 凹部32、35或凸部31、34 (例如，參考專利文獻4)。 但是，清潔這種探針的尖端部分，即使使用如同上述 之習知的探針，仍會有無法完全除去附著在該尖端的凹部 -5- 200819756 內的異物，且進行清潔時會磨損探針尖端的凸部的問題。 專利文獻1 :日本專利特開平7 — 2 4 4 0 7 4號公報 專利文獻2 :日本專利特開2 0 0 4 — 1 4 0 0 1 3號公報 專利文獻3:日本專利特表2005— 515645號公報 專利文獻4 :日本專利特開平8 — 3 0 6 7 4 9號公報 【發明內容】 <發明所欲解決之課題> 因此’本發明的目的係提供清潔時探針不容易磨損， 且可以探針的尖端部分予以清潔之探針清潔器，尤其，本 發明的目的還提供可以將尖端形成有凹部或凸部之探針的 尖端部分予以清潔之探針清潔器。 <用以解決課題之手段> 本發明爲用來除去附著在探針的尖端部分的異物之探 針清潔器及清潔方法，尤其，適用於將尖端形成有凹部或 凸部之探針的尖端部分所附著的異物予以除去之探針清潔 器及清潔方法。 <探針清潔器> 爲了要達成上述目的，本發明的探針清潔器係由具有 以微細纖維所形成的表面部分之清潔用薄片所組成，在位 於該清潔用薄片的至少表面部分之微細纖維的表面上，固 定磨石粒子。 -6- 200819756 清潔中，位於該清潔用薄片的表面部分之微細纖維的 表面上所固定的磨石粒子’與探針的尖端部分產生作用， 將探針的尖端部分所附著的異物予以除去。 微細纖維的纖維直徑爲在0.1 A m以上、2 0 # Π1以下 的範圍。最好是在以上、以下的朝圍。 ^ 微細纖維的表面所固定之磨石粒子的平均粒徑爲在 0.0 5 # m以上、3 · 0 // m以下的範圍，含有由氧化鋁、碳化 φ 矽、氧化矽、氧化锆、氫氧化鋁或是鑽石所組成的粒子， 作爲前述磨石粒子。 上述的清潔用薄片是由在基體薄片的表面上予以植毛 之前述微細纖維所組成之植毛薄片，在該植毛薄片之微細 纖維的表面固定上述的磨石粒子。然後，已在表面固定了 磨石粒子之微細纖維彼此間，處在未固著的狀態。即是固 定磨石粒子之微細纖維每1條，處在相互從其他的微細纖 維獨立而能自由地運動的狀態。 • 變形的上述清潔用薄片則爲由微細纖維所組成的織布 或是不織布薄片，在該清潔用薄片之微細纖維的表面，固 、 定上述的磨石粒子。 <探針清潔方法> 附著在探針的尖端部分的異物，經由將上述本發明的 探針清潔器安裝在工作台的表面，將探針的尖端部分刺入 到清潔用薄片的表面部分的內部，令探針在清潔用薄片之 表面部分的厚度方向上往復移動，予以除去。 -7· 200819756 探針的尖端部分也可以在刺入到清潔用薄片的表面部 分的內部之後，從該表面部分拔出，還可以在維持刺入到 清潔用薄片的表面部分的內部的狀態下，令探針在清潔用 薄片的表面部分的厚度方向上往復移動。 〔發明效果〕 因本發明是由以上的方式所構成，所以即使是在尖端 形成有凹部或凸部之探針，仍會達到清潔時不容易磨損探 針，且可以將探針的尖端部予以清潔的效果。 【實施方式】 <探針清潔器> 如第1A圖和第1B圖所示，用來除去附著在探針（第 2圖中的圖號1 2 )的尖端部分的異物之本發明的探針清潔 器20，由清潔用薄片21所組成，該清潔用薄片則是具有 由微細纖維25所組成的表面部分24，在位於該清潔用薄 片21的至少表面部分24之微細纖維25的表面，固定磨 石粒子26。 如第1B圖所示，磨石粒子26係用黏著劑27來固定 在微細纖維25的表面。 表面部分24是指與探針1 2的尖端部分產生作用的部 分（參考第2A圖和第2B圖）。該表面部分24的厚度 (或高度），並沒有特別的限定，至少要有應進行清潔之 探針12的尖端部分的長度量即可，在100#m以上、1〇〇〇 200819756 /z m的範圍，如第2A圖和第2B圖所示，探針12的尖端 部分（尖端和尖端附近的側面），係將探針1 2的尖端部 分，針對清潔用薄片21的表面部分24，進行刺入（使工 作台1 1朝箭頭T2的方向移動、或使探針12朝箭頭T1的 方向移動）、進行拔出（使工作台1 1朝箭頭T 1的方向移 動、或使探針1 2朝箭頭T2的方向移動），進行清潔。該 清潔中，位於該清潔用薄片21的表面部分24之微細纖維 25上所固定的磨石粒子26，與探針1 2的尖端部分產生作 用，除去附著在探針1 2的尖端部分的異物。 微細纖維25的纖維直徑爲在0.1 // m以上、20 // m以 下的範圍，最好是在0.1//m以上、10/zm以下的範圍。 微細纖維2 5使用由尼龍、聚丙烯、聚乙烯、聚對苯 二甲酸乙二醇酯、聚胺酯、丙烯酸、聚氯乙烯、維尼綸 (vinylon )或嫘縈（ray on )所組成的合成纖維。 微細纖維25的表面所固定之磨石粒子26的尺寸，最 好是小於微細纖維25的纖維直徑，在纖維直徑的2分之1 以下的範圍。這點是因磨石粒子26太大，則磨石粒子對 纖維表面（曲面）的固定力會降低，清潔中，與探針12 的尖端部分產生作用的磨石粒子26，會從微細纖維25上 脫落，脫落的磨石粒子成爲異物附著在探針1 2的尖端部 分之故。最好是使用的磨石粒子26爲在平均粒徑爲〇.〇5 以上、3.0/zm以下的範圍。 磨石粒子2 6的材料，並沒有特別的限定，可以使用 一般硏磨所使用的磨石粒子，最好是使用由氧化鋁、氧化 -9- 200819756 矽、氧化鉻、氫氧化鋁或是鑽石所組成的粒子。 清潔用薄片21係如第3圖和第4圖所不’是由在基 體薄片2 8的表面上予以植毛之前述微細纖維2 5所組成之 植毛薄片，在該植毛薄片的微細纖維25的表面上固定上 述的磨石粒子26。然後，已在表面上固定了磨石粒子26 之微細纖維2 5彼此間處在未固著的狀態。 即是固定磨石粒子26之微細纖維25每1條，處在相 互從其他的微細纖維25獨立而能自由地運動的狀態。 植毛薄片之微細纖維25的長度爲在1 00 // m以上、 1 000 // m ( 1 ·0 mm )的範圍，最好是在400//m以上、600 /z m以下的範圍。這點是因長度太短，則纖維的運動會降 低，過長，則微細纖維2 5每1條無法獨立，而交纏在一 起，導致使磨石粒子26各別附著在各別微細纖維25上會 有困難之故。 最好是溫度變化造成的熱變形很小的基體薄片2 8，機 械特性上，使用在25 °C以上、150°C以下的範圍，熱收縮 率爲2%以下的範圍之薄片。基體薄片28的尺寸和材料， 並沒有特別的限定，厚度爲在5 0 // m以上、1 8 8 // m以下 的範圍，基體薄片則是使用由PET (聚對苯二甲酸乙二醇 酯）、PEN (聚奈二甲酸二乙酯）、PPS (聚苯硫醚）、 PEI (聚醚醯亞胺）、PI (聚醯亞胺）、PC (聚碳酸 酯）、PVC (聚氯乙烯）、PP (聚丙烯）、PVDC (聚偏 二氯乙烯）、尼龍、PE (聚乙烯）或是PES (聚醚颯）所 組成的薄片，最好是使用PET薄片。 -10- 200819756 實用上，在基體薄片2 8的背面，形成黏膠層（第1 a 圖中的圖號22 )，再該在黏膠層22的表面，可撕黏地黏 貼在護膠紙（第1A圖中的圖號23 )。然後，該護膠紙23 從黏膠層22的表面剝離，本發明的探針清潔器20，介於 該黏膠層22，如第2C圖所示，黏貼在探針清潔器裝置10 的工作台1 1上。 變形的本發明的探針清潔器20之清潔用薄片21，可 以使用由上述的微細纖維2 5所組成的織布或是不織布薄 片，至少在位於該清潔用薄片2 1的表面部分24之微細纖 維25的表面，固定上述的磨石粒子26(參考第1B圖） 該清潔用薄片21也可以在該背面形成黏膠層22，介 於該黏膠層22，黏貼在該探針清潔器裝置1 0的工作台1 1 上，還可以將該清潔用薄片21固定在基體薄片（未圖 示）的表面，在該基體薄片的表面形成黏膠層（如同第 1 A圖中的圖號22所示的黏膠層），介於該黏膠層，黏貼 在探針清潔器裝置1 〇的工作台1 1上。 最好是與上述的植毛薄片的基體薄板同樣，溫度變化 造成的熱變形很小的基體薄片。機械特性上，使用具有上 述的熱收縮率之薄片。與上述的植毛薄片基體薄片同樣， 基體薄片的尺寸和材料，並沒有特別的限定，厚度爲在5 0 //m以上、188/zm以下的範圍’基體薄片使用由聚丙 烯、聚乙烯等的合成樹脂所組成的薄片。 實用上，在基體薄片的背面所形成之黏膠層的表面， 可撕黏地黏貼護膠紙（第1A圖中的圖號23所示的護膠 200819756 紙）。該護膠紙從黏膠層的表面剝離，本發明的探針清潔 器20，與上述的植毛薄片同樣，介於該黏膠層22，如第 2C圖所示，黏貼在探針清潔器裝置1〇的工作台n上。 <製造方法> 上述本發明的探針清潔器2 0係以讓磨石粒子散播在 樹脂溶液中並且添加了硬化劑的塗料，利用凹版滾筒塗 佈、凹版印刷塗佈等的既有的塗佈工法，進行塗佈並予以 乾燥的方式進行製造。 樹脂溶液爲從由聚酯樹脂、聚胺酯樹脂、共聚合乙烯 系樹脂、環氧樹脂、酚酵樹脂等所選出的一種或二種以上 的樹用溶劑溶解之溶液。溶劑包含有甲苯、二甲苯、MEK (丁酮）、乙酸乙酯、環己酮、丙酮、乙醇等。硬化劑包 含有異氰酸酯系的硬化劑。 塗料的4度爲在2 0 c p以上、3 〇 0 c p以下的範圍，最 好是50 cp以上、150 cp以下的範圍。 塗料的黏度過低（不到2 0 cp的範圍）的話，塗料會 落在清潔用薄片的表面部分的下層側，在位於清潔用薄片 2 1的表面部分24之微細纖維2 5的表面，未固定充足量的 磨石粒子2 6，清潔中，就無法使磨石粒子充分地與探針的 尖端部分產生作用。一方面，塗料的黏度過高（超過300 cp的範圍）的話，塗料會停滯在清潔用薄片21的表面部 分24的上層，磨石粒子26用樹脂（黏著劑27 )固定在清 潔用薄片2 1的表面部分24之層，以相鄰的微細纖維25 -12- 200819756 彼此間相固著的方式形成，該層則會變成磨損探針]2的 尖端部分之原因。 塗料中之磨石粒子26的調配比例爲在60重羹％以上 的範圍，最好是在80重量％以上、98重量％以下的範 圍。這點是因磨石粒子26的比例過小（不到60重量 % )，則相鄰的微細纖維25彼此間會相固著，形成如同 上述的層之故。 塗料的組成顯示在下述的表1中。 <表1 > 塗料的組成 磨石粒子 60重量％〜98重量％ 樹脂溶液 1重量％〜35重量％ 硬化劑 1重量％〜5重量％ 最好是使用：將由6 0重量％〜9 8重量％的碳化砂所組 成的磨石粒子予以加熱並乾燥之後，與將1重量％〜3 5重 量％的飽和聚酯樹脂溶解在甲苯、二甲苯、乙酸乙酯和 MEK的混合溶媒中之樹脂溶液相混合，經過攪拌來將磨石 粒子散播在樹脂溶液中之後加以過濾，在塗佈在清潔用薄 片上之前，添加1重量％〜5重量％之異氰酸酯系的硬化 劑，將塗料的黏度調整到3 0 cp〜1 5 0 cp之塗料。 <探針清潔方法> 如第2C圖所示，介於黏著材層（第i a圖中的圖號 -13- 200819756 22 )，將本發明的探針清潔器20，黏貼在工作亡 面上。如第2Α圖〜第2€圖所示，將探針12的 配置在該清潔用薄片21的表面上，使工作台] Τ2的方向移動，將探針1 2的尖端部分刺入到清 21的表面部分24內之後予以拔出（使工作台 Τ1的方向移動）。利用朝該箭頭Τ1、Τ2的方向 動’藉由表面部分來除去附著在探針12的尖端 物。 <清潔測試> 製造實施例和比較例的探針清潔器，使用這 潔器，進行尖端具有凹凸部之探針的尖端部分 試。針對清潔之後探針的尖端的凹部及凸部中的 去率及該兩凹部和凸部的耗損的有無進行比較。 該兩凹部和凸部的耗損的有無則是使用顯微鏡 察。 清潔實驗中，如第4 Α圖和第4 Β圖分別所示 有尖端的2種探針。以下，將該兩探針稱爲r A」和「測試探針B」。 測試探針A爲與第5 A圖所示的尖端之形狀 探針，尖端具有複數個凹凸部（底面的尺寸：約 約90#m，局度：約70//πι，凹部口徑：約50 深度：約7 0 // m )。（該「測試探針a」中，形 外圍部分爲凸部） 11的表 尖端部分 1朝箭頭 潔用薄片 11朝箭頭 的往復移 部分的異 些探針清 之清潔測 異物之除 除去率及 來進行觀 ，使用具 測試探針 相對應的 9 0 // m X :m，凹部 成凹部之 -14- 200819756 測試探針B爲與第5 B圖所示的尖端之形狀相對應的 探針，尖端具有複數個凹凸部（底面：約30#m X約30 # m，高度：約1 0 0 # m )。（該「測試探針B」中，凸部 與凹部之間的谷間爲凹部。） 進行清潔測試係使用第2C圖所示的清潔器裝置。清 潔條件與各實施例和比較例相同，在探針A、B接觸到各 實施例和比較例之探針清潔器的清潔用薄片的表面部分之 次數爲1千次、1萬次以及1 0萬次的時間點，觀察探針的 尖端之凹凸部之磨損的有無，且在接觸次數達到1 0萬次 的時間點，觀察附著在探針的尖端的凹凸部之異物的有 Μ 〇 y、λ、 <實施例1 > 製造實施例1的探針清潔器。 塗料係以由碳化矽所組成之平均粒徑0.0 5 m的磨石 粒子（1 Kg )予以加熱並乾燥之後，與將飽和聚酯樹脂 (3 10g)溶解在甲苯、二甲苯、乙酸乙酯和MEK的混合 溶媒中之樹脂溶液相混合，經過攪拌來將磨石粒子散播在 樹脂溶液中之後，加以過濾，在塗佈在清潔用薄片上之 前’添加異氰酸酯系的硬化劑（60g)來予以調整的方式 進行製造。塗料的黏度爲50 cp。 將該塗料塗佈在植毛部分的表面部分之微細纖維各別 的表面並進行乾燥，以製造實施例1的探針清潔器。 此處’塗料進行塗佈係使用# 50的凹版滾筒（形成夾 -15- 200819756 角4 5度的等間隔之直線狀的溝槽）。 另外’使用：將由平均纖維直徑1 0 // m、平均長度 500 # m ( 500 /z m ±100 # m )的尼龍所組成之微細纖維， 植毛在50//m的PET薄片之植毛薄片。 <實施例2 > 製造實施例2的探針清潔器。除了將磨石粒子的平均 粒徑變更成0 · 3 // m之外，以與上述實施例1相同的材料 和方法，製造實施例2的探針清潔器。 <實施例3 > 製造實施例3的探針清潔器。除了將磨石粒子的平均 粒徑變更成〇 · 3 // m之外，以與上述實施例1相同的材料 和方法，製造實施例3的探針清潔器。 <實施例4 > 製造實施例4的探針清潔器。除了使用平均纖維直徑 0.1 // m的微細纖維，作爲植毛薄片之外，以與上述實施例 1相同的材料和方法’製造實施例4的探針清潔器。 <實施例5 > 製造實施例5的探針清潔器。除了使用平均纖維直徑 3 # m的微細纖維’作爲植毛薄片之外’以與上述實施例1 相同的材料和方法，製造實施例5的探針清潔器。 -16- 200819756 <實施例6 > 製造實施例6的探針清潔器。除了使用平均纖維直徑 2 0// m的微細纖維’作爲植毛薄片之外，以與上述實施例 1相同的材料和方法，製造實施例6的探針清潔器。 <實施例7 > φ 製造實施例7的探針清潔器。除了使用氧化鋁，作爲 磨石粒子之外，以與上述實施例1相同的材料和方法，製 造實施例7的探針清潔器。 <實施例8 > 製造實施例8的探針清潔器。除了使用鑽石，作爲磨 石粒子之外，以與上述實施例1相同的材料和方法，製造 實施例8的探針清潔器。 <比較例1 > . 製造比較例1的探針清潔器。除了將磨石粒子的平均 粒徑變更成5 // m之外，以與上述實施例1相同的材料和 方法，製造比較例1的探針清潔器。 <比較例2 > 製造比較例2的探針清潔器。 將上述實施例3的塗料（此塗料是以將由碳化矽所組 -17- 200819756 成之平均粒徑3 # m的磨石粒子（1 Kg )予以加熱定加以 乾燥後，與將飽和聚酯樹脂（3 1 0g )溶解在甲苯、二甲 苯、乙酸乙酯和MEK的混合溶媒中之樹脂溶液相混合， 經過攪拌來將磨石粒子散播在樹脂溶液中之後，加以過 濾，在塗佈在清潔用薄片上之前，添加異氰酸酯系的硬化 劑（60g )來予以調整的方式製造，塗料的黏度爲 50 cp )，利用# 50凹版滾筒（形成夾角45度之等間隔的直 線狀的溝槽），塗佈在PET薄膜的表面予以乾燥，以製造 比較例2的探針清潔器。 <比較例3 > 製造比較例3的探針清潔器^ 將上述實施例3的塗料，利用# 5 0凹版滾筒（形成夾 角4 5度之等間隔的直線狀的溝槽），塗佈在發泡體薄膜 的表面予以乾燥，以製造比較例3的探針清潔器。 <探針清潔器的構成材料〉 將實施例1〜8和比較例的探針清潔器之構成材料顯示 在下述的表2中。 200819756 〈表2 > 探針清潔器的構成材料 薄片 磨石粒子 種類 纖維直徑(μπι) 材料 平均粒徑(μπι) 實施例1 植毛薄片 10 碳化矽 0.05 實施例2 植毛薄片 10 碳化矽 0.3 實施例3 植毛薄片 10 碳化矽 3 實施例4 植毛薄片 0.1 碳化矽 0.05 實施例5 植毛薄片 3 碳化矽 0.05 實施例6 植毛薄片 20 碳化矽 0,05 實施例7 植毛薄片 10 氧化銘 0.3 實施例8 植毛薄片 10 鑽石 0.3 比較例1 植毛薄片 10 碳化矽 5 比較例2 PET薄膜 — 碳化矽 3 比較例3 發泡體薄膜 — 碳化矽 3 <測試結果> 將測試結果顯示在下述的表3中。200819756 IX. EMBODIMENT OF THE INVENTION [Technical Fields of the Invention] The present invention relates to the precision of the tip end portion in the process of needles (probes) for electrical property inspection, needles for medical use, needles for sewing, and the like. A probe cleaner and a cleaning method for cleaning the tip portion before and after the processing or the use of the needle, in particular, a tip portion of a probe for use in an electrical inspection or the like for inspecting a semiconductor device A probe cleaner and a cleaning method for removing foreign matter attached. [Prior Art] In the process of a semiconductor device, in order to improve the manufacturing efficiency, the probe is brought into contact with the electrode sheets of a plurality of wafers mounted on the semiconductor wafer, and the test signal is applied or detected through the probe. To check the electrical characteristics of each wafer. Generally, the probe is formed of a hard material such as tungsten or tantalum. On the one hand, the electrode sheet is formed of a relatively soft material such as aluminum, and when the probe contacts the electrode sheet, foreign matter such as aluminum of the electrode sheet is attached to the tip end portion (the side near the tip end and the tip end) of the probe. Reduce inspection accuracy. In addition, the attachment of large foreign matter to the probe causes the adjacent probes to be short-circuited with each other, causing damage to the wafer. Thus, the tip end portion of the probe is cleaned to remove the foreign matter. The tip end portion of the cleaning probe 'in the past was a probe cleaner composed of a cleaning sheet which was mixed with grindstone particles (hard particles composed of oxidized bromine, carbonized chemical, diamond, etc.) The ketone ketone-4-200819756 is composed of an elastic material such as rubber or polyurethane rubber (for example, refer to Patent Documents 1 and 2), and the tip end portion of the probe is inserted into the inside from the surface of the elastic material of the probe cleaner. The grindstone particles fixed to the elastic material act on the tip end portion of the probe to remove the foreign matter. ^ In addition, a probe cleaner composed of a cleaning sheet having an adhesive layer formed of a surface having a minute unevenness on the surface is used, and the probe cleaner is a tip of the probe In part, the probe is moved from the surface of the gel layer to the inside, and the tip of the probe is brought into contact with the unevenness of the surface of the plate, and the probe is moved to remove foreign matter from the tip end of the probe (for example, refer to Patent Document 3). . In recent years, as the size of the wafer has been miniaturized, the electrode sheets formed on the wafer have also become smaller, so that the electrode sheets are also disposed close to each other. Therefore, it is necessary to make the size of the probe fine, and in order to improve or at least maintain the inspection accuracy, the probe is formed of a soft material having a high electrical property such as an alloy of bismuth-copper. # However, such a probe, using a conventional probe cleaner as described above, may cause wear and tear when cleaning, and the life of the probe becomes short, and the wafer may be inspected for the wear due to the wear. The problem of electrical characteristics causing errors. Further, in order to make sure contact with the electrode sheets of the wafer, as shown in Figs. 5 and 5, the probes used are the probe tips 30, 33 formed with the recesses 32, 35 or the projections 31, 34 (for example, Refer to Patent Document 4). However, cleaning the tip end portion of such a probe, even if a probe like the above-described one is used, there is a possibility that the foreign matter adhering to the concave portion of the tip--5-200719756 cannot be completely removed, and the probe is worn when cleaning. The problem of the pointed convex part. Patent Document 1: Japanese Patent Laid-Open No. Hei 7-2 4 4 7 4 Patent Document 2: Japanese Patent Laid-Open No. Hei 2 0 0 4 - 1 0 0 0 1 3 Patent Document 3: Japanese Patent Special Table 2005 - 515645 [Patent Document 4: Japanese Patent Laid-Open Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. 8-3 6 7 9 9 [Invention] [The object of the invention is to solve the problem] Therefore, the object of the present invention is to provide that the probe is not easily worn during cleaning. Further, the probe cleaner which can clean the tip end portion of the probe, in particular, the object of the present invention also provides a probe cleaner which can clean the tip end portion of the probe whose tip is formed with a concave portion or a convex portion. <Means for Solving the Problem> The present invention is a probe cleaner and a cleaning method for removing foreign matter attached to a tip end portion of a probe, and particularly, to a probe having a tip or a convex portion formed at a tip end thereof. A probe cleaner and a cleaning method for removing foreign matter attached to the tip end portion. <Probe Cleaner> In order to achieve the above object, the probe cleaner of the present invention is composed of a cleaning sheet having a surface portion formed of fine fibers, and is located at at least a surface portion of the cleaning sheet. On the surface of the microfibers, the grindstone particles are fixed. -6- 200819756 In the cleaning, the grindstone particles fixed on the surface of the fine fibers on the surface portion of the cleaning sheet act on the tip end portion of the probe, and the foreign matter adhered to the tip end portion of the probe is removed. The fiber diameter of the fine fibers is in the range of 0.1 A m or more and 20 0 Π 1 or less. It is best to be above and below. ^ The average particle size of the grindstone particles fixed on the surface of the microfiber is in the range of 0.05 # m or more and 3 · 0 // m or less, and contains alumina, carbonized φ 矽, yttria, zirconia, and oxidized hydroxide. A particle composed of aluminum or diamond is used as the above-mentioned grinding stone particle. The above-mentioned cleaning sheet is a flocked sheet composed of the above-mentioned fine fibers which are planted on the surface of the base sheet, and the above-mentioned grinding stone particles are fixed on the surface of the fine fibers of the planted sheet. Then, the fine fibers in which the grindstone particles have been fixed on the surface are in an unfixed state. In other words, each of the fine fibers of the fixed grinding stone particles is in a state of being freely movable independently of each other from the other fine fibers. The deformed cleaning sheet is a woven fabric or a non-woven sheet composed of fine fibers, and the above-mentioned grinding stone particles are fixed on the surface of the fine fibers of the cleaning sheet. <Probe cleaning method> Foreign matter attached to the tip end portion of the probe, the tip end portion of the probe is inserted into the surface portion of the cleaning sheet by attaching the above-described probe cleaner of the present invention to the surface of the table The inside of the cleaning sheet is reciprocally moved in the thickness direction of the surface portion of the cleaning sheet to be removed. -7·200819756 The tip end portion of the probe can also be pulled out from the surface portion after being pierced into the inside of the surface portion of the cleaning sheet, and can also be maintained while being stuck inside the surface portion of the cleaning sheet. The probe is reciprocated in the thickness direction of the surface portion of the cleaning sheet. [Effect of the Invention] Since the present invention is constituted by the above aspect, even if a probe having a concave portion or a convex portion formed at the tip end, the probe is not easily worn when cleaning, and the tip end portion of the probe can be given. The effect of cleaning. [Embodiment] <Probe Cleaner> The present invention for removing foreign matter attached to the tip end portion of the probe (Fig. 12 in Fig. 2) as shown in Figs. 1A and 1B The probe cleaner 20 is composed of a cleaning sheet 21 having a surface portion 24 composed of fine fibers 25 on the surface of the fine fibers 25 located on at least the surface portion 24 of the cleaning sheet 21. , fixed grindstone particles 26. As shown in Fig. 1B, the grindstone particles 26 are fixed to the surface of the fine fibers 25 by an adhesive 27. The surface portion 24 refers to a portion that acts with the tip end portion of the probe 12 (refer to Figs. 2A and 2B). The thickness (or height) of the surface portion 24 is not particularly limited, and at least the length of the tip end portion of the probe 12 to be cleaned may be, in the range of 100 #m or more, 1〇〇〇200819756 /zm. The range, as shown in Figs. 2A and 2B, the tip end portion of the probe 12 (the tip and the side near the tip end) is thorned with respect to the tip end portion of the probe 12 for the surface portion 24 of the cleaning sheet 21. In (moving the table 1 1 in the direction of the arrow T2 or moving the probe 12 in the direction of the arrow T1), pulling out (moving the table 1 1 in the direction of the arrow T 1 or making the probe 1 2 Move in the direction of arrow T2) to clean. In the cleaning, the grindstone particles 26 fixed on the fine fibers 25 of the surface portion 24 of the cleaning sheet 21 act on the tip end portion of the probe 12 to remove the foreign matter attached to the tip end portion of the probe 12. . The fiber diameter of the fine fibers 25 is in the range of 0.1 // m or more and 20 // m or less, and preferably in the range of 0.1/m or more and 10/zm or less. The fine fibers 25 are made of synthetic fibers composed of nylon, polypropylene, polyethylene, polyethylene terephthalate, polyurethane, acrylic, polyvinyl chloride, vinylon or ray on. The size of the grindstone particles 26 fixed to the surface of the fine fibers 25 is preferably smaller than the fiber diameter of the fine fibers 25 and is not more than one-half of the fiber diameter. This is because the grindstone particles 26 are too large, and the fixing force of the grindstone particles on the fiber surface (curved surface) is lowered, and in the cleaning, the grindstone particles 26 acting on the tip end portion of the probe 12 are from the fine fibers 25 When it is detached, the detached stone particles become foreign matter attached to the tip end portion of the probe 12. It is preferable that the grindstone particles 26 used have a mean particle diameter of 〇.5 or more and 3.0/zm or less. The material of the grindstone particles 26 is not particularly limited, and the grindstone particles used in general honing can be used, and it is preferable to use alumina, oxidized -9-200819756 矽, chrome oxide, aluminum hydroxide or diamond. The composed particles. The cleaning sheet 21 is a sheet-like sheet composed of the aforementioned fine fibers 25 which are planted on the surface of the base sheet 28, as shown in Figs. 3 and 4, on the surface of the fine fibers 25 of the sheet-fed sheet. The above-described grindstone particles 26 are fixed thereon. Then, the fine fibers 2 5 to which the grindstone particles 26 have been fixed on the surface are in an unfixed state. In other words, each of the fine fibers 25 of the fixed grindstone particles 26 is in a state of being freely movable independently of each other from the other fine fibers 25. The length of the fine fibers 25 of the flocked sheets is in the range of 100 // m or more and 1 000 // m (1·0 mm), and preferably in the range of 400//m or more and 600 /z m or less. This is because the length of the fiber is too short, and the movement of the fiber is lowered. If it is too long, each of the fine fibers 25 cannot be independent and entangled, resulting in the attachment of the grindstone particles 26 to the respective fine fibers 25. There will be difficulties. It is preferable that the base sheet 2, which has a small thermal deformation due to temperature change, be used as a sheet having a heat shrinkage ratio of 2% or less in a range of 25 ° C or more and 150 ° C or less in mechanical properties. The size and material of the base sheet 28 are not particularly limited, and the thickness is in the range of 50 // m or more and 1 8 8 // m or less, and the base sheet is made of PET (polyethylene terephthalate). Ester), PEN (diethyl phthalate), PPS (polyphenylene sulfide), PEI (polyether quinone), PI (polyimine), PC (polycarbonate), PVC (polychlorinated) A sheet composed of ethylene), PP (polypropylene), PVDC (polyvinylidene chloride), nylon, PE (polyethylene) or PES (polyether oxime) is preferably a PET sheet. -10- 200819756 Practically, on the back side of the base sheet 28, an adhesive layer (Fig. 22 in Fig. 1a) is formed, and on the surface of the adhesive layer 22, it can be adhesively adhered to the adhesive sheet. (Figure 23 in Figure 1A). Then, the adhesive sheet 23 is peeled off from the surface of the adhesive layer 22, and the probe cleaner 20 of the present invention is interposed between the adhesive layer 22, as shown in FIG. 2C, and adhered to the work of the probe cleaner device 10. Table 1 1 on. In the deformed sheet 21 of the probe cleaner 20 of the present invention, a woven fabric or a non-woven sheet composed of the above-mentioned fine fibers 25 can be used, at least in the surface portion 24 of the cleaning sheet 21 The surface of the fiber 25 is fixed to the above-mentioned grindstone particles 26 (refer to FIG. 1B). The cleaning sheet 21 may also form an adhesive layer 22 on the back surface, and the adhesive layer 22 is adhered to the probe cleaner device. On the table 1 1 of 10, the cleaning sheet 21 may be fixed to the surface of the base sheet (not shown), and an adhesive layer is formed on the surface of the base sheet (like the figure 22 in Fig. 1A). The adhesive layer shown is interposed between the adhesive layer and adhered to the table 11 of the probe cleaner device 1 . It is preferable that the base sheet having a small thermal deformation due to temperature change is the same as the base sheet of the above-mentioned flocked sheet. For the mechanical properties, a sheet having the above heat shrinkage ratio is used. The size and material of the base sheet are not particularly limited as described above, and the thickness is in the range of 50 // m or more and 188/zm or less. The base sheet is made of polypropylene, polyethylene, or the like. A sheet composed of a synthetic resin. Practically, the surface of the adhesive layer formed on the back surface of the base sheet can be adhesively adhered to the cover paper (protective adhesive 200819756 paper shown in Fig. 23 in Fig. 1A). The adhesive tape is peeled off from the surface of the adhesive layer, and the probe cleaner 20 of the present invention is interposed between the adhesive layer 22 and the adhesive layer 22 as shown in FIG. 2C. 1 〇 workbench n. <Manufacturing Method> The probe cleaner 20 of the present invention is a coating material in which a grindstone particle is dispersed in a resin solution and a hardener is added, and is applied by gravure coating or gravure coating. The coating method is carried out by coating and drying. The resin solution is a solution obtained by dissolving one or more kinds of trees selected from a polyester resin, a polyurethane resin, a copolymerized vinyl resin, an epoxy resin, a phenol resin, or the like. The solvent contains toluene, xylene, MEK (butanone), ethyl acetate, cyclohexanone, acetone, ethanol, and the like. The hardener package contains an isocyanate-based hardener. The 4 degrees of the paint is in the range of 20 cp or more and 3 〇 0 cp or less, and preferably in the range of 50 cp or more and 150 cp or less. When the viscosity of the coating material is too low (less than 20 cp), the coating material falls on the lower layer side of the surface portion of the cleaning sheet, and the surface of the fine fiber 25 located on the surface portion 24 of the cleaning sheet 21 is not Fixing a sufficient amount of the grindstone particles 2, in the cleaning, it is impossible to make the grindstone particles sufficiently interact with the tip end portion of the probe. On the other hand, if the viscosity of the coating material is too high (exceeding the range of 300 cp), the coating material is stagnated in the upper layer of the surface portion 24 of the cleaning sheet 21, and the grindstone particles 26 are fixed to the cleaning sheet 2 with a resin (adhesive 27). The layer of the surface portion 24 is formed by the adjacent microfibers 25 -12 - 200819756 being fixed to each other, and this layer becomes the tip end portion of the wear probe 2). The blending ratio of the grindstone particles 26 in the coating material is in the range of 60% by weight or more, preferably 80% by weight or more and 98% by weight or less. This is because the proportion of the grindstone particles 26 is too small (less than 60% by weight), and the adjacent fine fibers 25 are fixed to each other to form a layer as described above. The composition of the coating is shown in Table 1 below. <Table 1 > Composition of the coating material Grindstone particles 60% by weight to 98% by weight Resin solution 1% by weight to 35% by weight Hardener 1% by weight to 5% by weight Preferably, it is used: will be 60% by weight to 9 8 After heating and drying the grindstone particles composed of % by weight of carbonized sand, the resin is dissolved in a mixed solvent of toluene, xylene, ethyl acetate and MEK in an amount of 1% by weight to 5% by weight of the saturated polyester resin. The solution phase is mixed, and the grinding stone particles are dispersed in the resin solution after being stirred, and then filtered, and 1% by weight to 5% by weight of an isocyanate-based curing agent is added before coating on the cleaning sheet to adjust the viscosity of the coating material. Paint to 3 0 cp~1 5 0 cp. <Probe cleaning method> As shown in Fig. 2C, the probe cleaner 20 of the present invention is adhered to the working face in the adhesive layer (Fig. 13-200819756 22 in the ia diagram) on. As shown in Fig. 2 to Fig. 2, the probe 12 is placed on the surface of the cleaning sheet 21 to move the table Τ2, and the tip end portion of the probe 12 is inserted into the clear 21 The surface portion 24 is then pulled out (moving the direction of the table Τ 1). The tip attached to the probe 12 is removed by the surface portion in the direction of the arrows Τ1, Τ2. <Cleaning Test> The probe cleaners of the examples and the comparative examples were produced, and the tip portion of the probe having the uneven portion at the tip end was tested using this cleaner. The ratio of the depletion in the concave portion and the convex portion of the tip of the probe after cleaning and the presence or absence of the loss of the concave portion and the convex portion are compared. The presence or absence of the loss of the two recesses and the projections is observed using a microscope. In the cleaning experiment, there are two types of probes as shown in Fig. 4 and Fig. 4, respectively. Hereinafter, the two probes are referred to as r A" and "test probe B". The test probe A is a shape probe of the tip shown in Fig. 5A, and the tip has a plurality of concave and convex portions (the size of the bottom surface: about 90#m, the degree: about 70//πι, the concave diameter: about 50) Depth: about 7 0 // m ). (In the "test probe a", the peripheral portion of the shape is a convex portion) 11 of the tip end portion 1 of the arrow cleaning sheet 11 toward the reciprocating portion of the arrow, and the removal rate of the foreign matter is cleaned and To view, use the test probe to correspond to the 90 0 / m x : m, the recess is a concave portion -14 - 200819756 Test probe B is the probe corresponding to the shape of the tip shown in Figure 5 B The tip has a plurality of concave and convex portions (bottom surface: about 30 #m X about 30 # m, height: about 1 0 0 # m ). (In the "test probe B", the valley between the convex portion and the concave portion is a concave portion.) For the cleaning test, the cleaner device shown in Fig. 2C is used. The cleaning conditions were the same as in the respective Examples and Comparative Examples, and the number of times the probes A and B contacted the surface portions of the cleaning sheets of the probe cleaners of the respective Examples and Comparative Examples was 1,000 times, 10,000 times, and 10 times. At a time point of 10,000 times, the presence or absence of abrasion of the uneven portion of the tip of the probe was observed, and when the number of contacts reached 100,000 times, the foreign matter adhering to the uneven portion of the tip end of the probe was observed. λ, <Example 1 > The probe cleaner of Example 1 was produced. The coating was heated and dried with a grindstone particle (1 Kg) having an average particle diameter of 0.05 m composed of niobium carbide, and dissolved with a saturated polyester resin (3 10 g) in toluene, xylene, ethyl acetate, and The resin solution in the mixed solvent of MEK is mixed, and the ground stone particles are dispersed in the resin solution after being stirred, filtered, and adjusted by adding an isocyanate-based curing agent (60 g) before being applied to the cleaning sheet. The way to manufacture. The viscosity of the coating is 50 cp. This coating was applied to the respective surfaces of the fine fibers of the surface portion of the flocked portion and dried to manufacture the probe cleaner of Example 1. Here, the coating was applied by using a #50 gravure cylinder (forming a linear groove having an angular interval of 45 degrees from the -15-200819756). Further use: Microfibers composed of nylon having an average fiber diameter of 10 // m and an average length of 500 # m (500 / z m ± 100 # m ) were planted on a 50//m PET sheet. <Example 2> The probe cleaner of Example 2 was produced. The probe cleaner of Example 2 was produced in the same manner and in the same manner as in the above Example 1, except that the average particle diameter of the grindstone particles was changed to 0 · 3 / m. <Example 3> The probe cleaner of Example 3 was produced. The probe cleaner of Example 3 was produced in the same manner and in the same manner as in the above Example 1, except that the average particle diameter of the grindstone particles was changed to 〇 · 3 / m. <Example 4> The probe cleaner of Example 4 was produced. The probe cleaner of Example 4 was fabricated in the same manner as in the above Example 1 except that fine fibers having an average fiber diameter of 0.1 / m were used as the flocked sheets. <Example 5> The probe cleaner of Example 5 was produced. The probe cleaner of Example 5 was fabricated except that the fine fibers 'having an average fiber diameter of 3 # m were used as the flocked sheets' in the same materials and methods as in the above Example 1. -16-200819756 <Example 6> The probe cleaner of Example 6 was produced. The probe cleaner of Example 6 was produced in the same manner and in the same manner as in the above Example 1, except that the fine fibers 'having an average fiber diameter of 20 / m was used as the flocked sheet. <Example 7> φ The probe cleaner of Example 7 was produced. The probe cleaner of Example 7 was fabricated in the same manner as in the above Example 1 except that alumina was used as the ground stone particles. <Example 8> The probe cleaner of Example 8 was produced. The probe cleaner of Example 8 was fabricated in the same manner as in the above Example 1 except that diamond was used as the stone particles. <Comparative Example 1 > A probe cleaner of Comparative Example 1 was produced. The probe cleaner of Comparative Example 1 was produced in the same manner and in the same manner as in Example 1 except that the average particle diameter of the grindstone particles was changed to 5 // m. <Comparative Example 2 > A probe cleaner of Comparative Example 2 was produced. The coating of the above Example 3 (this coating is dried by heating and grinding the ground stone particles (1 Kg) having an average particle diameter of 3 # m from the group of cesium carbide -17-200819756, and the saturated polyester resin (3 1 0g) The resin solution dissolved in a mixed solvent of toluene, xylene, ethyl acetate and MEK is mixed, and after stirring, the grinding stone particles are dispersed in the resin solution, and then filtered and applied to the cleaning. Before the sheet, an isocyanate-based curing agent (60 g) was added and adjusted, and the viscosity of the coating was 50 cp., and coated with a #50 gravure cylinder (forming a linear groove having an interval of 45 degrees) The cloth was dried on the surface of the PET film to manufacture the probe cleaner of Comparative Example 2. <Comparative Example 3 > The probe cleaner of Comparative Example 3 was produced. The coating material of the above Example 3 was coated with a #50 blank plate (forming a linear groove having an equal interval of 45 degrees). The surface of the foam film was dried to prepare a probe cleaner of Comparative Example 3. <Construction Material of Probe Cleaner> The constituent materials of the probe cleaners of Examples 1 to 8 and Comparative Examples are shown in Table 2 below. 200819756 <Table 2 > constituting material of the probe cleaner, the surface of the ground stone, the type of the fiber, the fiber diameter (μπι), the average particle diameter of the material (μπι), the first embodiment, the hair growth sheet 10, the ruthenium carbide, 0.05, the embodiment 2, the hair growth sheet 10, the ruthenium carbide, 0.3. 3 Flocking Sheet 10 Carbide 3 Example 4 Planting Sheet 0.1 Carbide 矽 0.05 Example 5 Planting Sheet 3 Carbide 矽 0.05 Example 6 Planting Sheet 20 Carbide 矽 0,05 Example 7 Planting Sheet 10 Oxidation Ming 0.3 Example 8 10 Diamond 0.3 Comparative Example 1 Flocked sheet 10 Tantalum carbide 5 Comparative Example 2 PET film - lanthanum carbide 3 Comparative Example 3 Foam film - lanthanum carbide 3 <Test results> The test results are shown in Table 3 below.
-19- 200819756 <表3 > 測試結果-19- 200819756 <Table 3 > Test Results
«55» 卜A 凹部異物除去率 ^凹部磨損量 凹部異物除去率 凹部磨捐景 實施例1 △ ◎ △ ◎ 實施例2 〇 〇 〇 〇 實施例3 ◎ Δ ◎ ~' — △ 實施例4 〇 ◎ 〇 ◎ 實施例5 ◎ ◎ ◎ ◎ 實施例6 〇 ◎ 〇 ◎ 實施例7 Δ ◎ Δ ◎ 實施例8 △ ◎ △ ◎ 實施例9 ◎ Δ ◎ Δ 比較例1 ◎ X ◎ X 比較例2 X ◎ X X 比較例3 X 〇 X X«55» Bu A concave foreign matter removal rate ^ concave portion wear amount concave portion foreign matter removal rate concave portion grinding donation embodiment 1 △ ◎ △ ◎ Example 2 〇〇〇〇 Example 3 ◎ Δ ◎ ~ ' - △ Example 4 〇 ◎ Example 5 ◎ ◎ ◎ ◎ Example 6 〇 ◎ 〇 ◎ Example 7 Δ ◎ Δ ◎ Example 8 △ ◎ △ ◎ Example 9 ◎ Δ ◎ Δ Comparative Example 1 ◎ X ◎ X Comparative Example 2 X ◎ XX Comparative Example 3 X 〇XX
凹部異物除去率： ©95%以上 〇80〜95% △60 〜80% X60%以下 凹部（凸部）磨損量： ◎!0萬次接觸仍無磨損 〇1〇萬次接觸已有磨損 △1萬次接觸已有磨損 xl千次接觸已有磨損 從實施例1〜3及比較例1的結果：凹部異物除去率， 译當磨石粒子變成很小的話會降低，在平均粒徑〇.〇 5 // m (實施例1 )，變成60〜80%。一方面，凹部（及凸部） 磨損量，係當磨石粒子變成很大的話會降低’在平均粒徑 0.05 // m (實施例3 )，經過1萬次接觸己有磨損’在平均 -20- 200819756 粒徑5 // m (比較例1 )經過1千接觸就已有磨損。 從實施例2、7以及8的結果得知：即使變更磨石粒 子的種類，凹部異物除去率及凹部（及凸部）磨損量仍沒 有很大的差異，比比較例中的任一結果都良好。 從實施例1、4〜6的結果，凹部異物除去率，係纖維 直徑變成很小的話會降低，在纖維直徑0. 1 // m (實施例 1)，變成 8 0〜95%，纖維直徑超過 10//m，變成 20/zm 的話’經過1萬次接觸會有磨損。一方面，凹部（及凸 部）磨損量，係不會隨著纖維直徑變大，纖維直徑爲在 〇·1 // m〜20 # m的範圍，即使1〇萬次接觸仍無磨損。 以上’得知：最好是使用植毛薄片予以植毛、纖維直 徑0.1 // m〜2 0 // m的微細纖維，且使用平均粒徑爲〇.〇5 // m〜3 /z m的磨石粒子，作爲固定在該微細纖維上的磨石 粒子。 另外’從上述表3所示的結果得知：實施例i〜9的探 針清潔器比比較例1〜3的探針清潔器，凹部的凹部異物除 去率還要更良好，且凹部和凸部磨損量也還要更低。 〔產業上的可利用性〕 上述實施例中揭示：電特性檢查用的針（探針）的尖 端部分之探針清潔器及清潔方法，不過當不僅是上述探 針’就連醫療用的針、縫紉用的針等之針狀物的製程中進 行尖端部分的精密加工或針狀物使用前後，將附著在該尖 端部分的異物予以除去，也可以利用本發明。 -21 · 200819756 【圖式簡單說明】 第1A圖爲本發明的探針清潔器之剖面圖，第1B圖爲 第1A圖之局部擴大剖面圖。 ’ 第2A和2B圖分別表示探針清潔中的狀況，第2C圖 ^ 爲表示探針清潔器裝置。 第3圖爲本發明的探針清潔器的剖面之顯微鏡照片。 0 第4圖爲本發明的理想探針清潔器之剖面圖。 第5A和5B圖爲分別表示探針的尖端之擴大立體圖。 【主要元件符號說明】 1 〇 :探針清潔器裝置 1 1 :工作台 1 2 :探針 2〇 :探針清潔器 Φ 2 1 :清潔用薄片 22 :黏膠層 ^ 23 :護膠紙 24 :表面部分 25 :微細纖維 26 :磨石粒子 27 :黏接劑 28 :基體薄片 3 〇、3 3 :探針的尖端 -22- 200819756 3 1、3 4 :凸部 3 2、3 5 :凹部 ΤΙ、T2 :移動方向Recessed foreign matter removal rate: ©95% or more 〇80~95% △60 ～80% X60% or less concave (convex) wear amount: ◎! 0 million contact still without wear 〇1 million contact with existing wear △1 Tens of times of contact has been worn xl thousand times contact has been worn out from the results of Examples 1 to 3 and Comparative Example 1: the foreign matter removal rate of the recess is reduced, and the average particle size is reduced when the millstone particles become small. 5 // m (Example 1), becomes 60 to 80%. On the one hand, the amount of wear of the recesses (and the protrusions) is reduced when the grindstone particles become large, at an average particle size of 0.05 // m (Example 3), after 10,000 times of contact wear, on average - 20- 200819756 Particle size 5 // m (Comparative Example 1) Wear has occurred after 1 thousand contacts. From the results of Examples 2, 7, and 8, it was found that even if the type of the grinding stone particles was changed, the foreign matter removal rate in the concave portion and the amount of wear of the concave portion (and the convex portion) were not greatly different, and any of the results in the comparative example was good. From the results of Examples 1, 4 to 6, the foreign matter removal rate of the concave portion, if the diameter of the fiber was small, it was lowered, and the fiber diameter was 0.10 m (Example 1), and it became 80 to 95%, and the fiber diameter was changed. If it is more than 10/m and it becomes 20/zm, it will wear out after 10,000 times of contact. On the one hand, the amount of wear of the concave portion (and the convex portion) does not increase as the fiber diameter increases, and the fiber diameter is in the range of 〇·1 // m to 20 # m, and there is no wear even if it is contacted for 10 million times. The above 'know: it is best to use the hair grafting sheet to plant microfibers with a fiber diameter of 0.1 // m~2 0 // m, and use a grindstone with an average particle size of 〇.〇5 // m~3 /zm The particles serve as grindstone particles fixed to the fine fibers. Further, from the results shown in Table 3 above, the probe cleaners of Examples i to 9 were more excellent in the foreign matter removal rate of the concave portion of the concave portion than the probe cleaners of Comparative Examples 1 to 3, and the concave portion and the convex portion were convex. The amount of wear is also lower. [Industrial Applicability] In the above embodiments, the probe cleaner and the cleaning method of the tip end portion of the needle (probe) for electrical property inspection are disclosed, but the medical probe is not only the probe described above. In the process of needles such as sewing needles, the precise processing of the tip portion or the use of the needles before and after the use of the needles can remove the foreign matter adhering to the tip end portion, and the present invention can also be utilized. -21 · 200819756 [Simplified illustration of the drawings] Fig. 1A is a cross-sectional view of the probe cleaner of the present invention, and Fig. 1B is a partially enlarged cross-sectional view of Fig. 1A. Figures 2A and 2B show the condition of the probe cleaning, respectively, and Fig. 2C shows the probe cleaner device. Figure 3 is a photomicrograph of a cross section of the probe cleaner of the present invention. 0 Figure 4 is a cross-sectional view of an ideal probe cleaner of the present invention. Figures 5A and 5B are enlarged perspective views showing the tips of the probes, respectively. [Main component symbol description] 1 〇: Probe cleaner device 1 1 : Table 1 2 : Probe 2 〇: Probe cleaner Φ 2 1 : Cleaning sheet 22 : Adhesive layer ^ 23 : Adhesive paper 24 : Surface portion 25: Fine fiber 26: Grindstone particle 27: Adhesive agent 28: Base sheet 3 〇, 3 3: Tip end of the probe-22- 200819756 3 1, 3 4: convex portion 3 2, 3 5 : concave portion ΤΙ, T2: moving direction
-23--twenty three-