200817101 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種用以塗佈液體於基板上之塗佈機，特 別疋，本發明係關於一種能夠在塗佈頭單元滑行移動過程中 表小化振動及微粒產生之用以塗佈液體於基板上之塗佈機。 【先前技術】 平板顯示器包含許多比傳統使用陰極射線管的電視及視 頻顯示器更輕且更薄的視頻顯示器技術，且厚度一般小於1〇 公分(4射)。平板齡H需要持續更新，其包含液晶顯示器 (LCDs)、電漿顯示器、場發射顯示,(FEDs)、有機發光二極 體顯示器(OLEDs)、表面傳導電子發射顯示器(SEDs)、奈米 發射顯示器(NEDs)、及電發光顯示器(ELDs)。 液晶顯示态(LCD)為薄、平坦的顯示器，由排列於光源 或反，器前任意數量的顏色或單色像素所組成。因為消耗非 常少量的電性功率，所以液晶顯示器被廣泛地使用。 使用為液晶顯示器之液晶顯示面板製作方法如下。 形成衫色濾光器及共同電極的圖案於上玻璃基板上。形 成薄膜電晶體(TFT)及像素電極的圖案於與上玻璃基板對面 的下玻璃基板上。沉積對準層於上及下玻璃基板上。摩擦對 6 200817101 準層使得在兩對準層間的結晶分子具有一預傾角及一方向。 點膠機係用以形成膠圖案於上及下玻璃基板的任何一 者，以將上及下玻璃基板密封，而液晶層將存在於其間。之 後，液晶塗佈機係用以塗佈液晶於膠圖案所形成處的玻璃基 板上。最後，封裝上及下玻璃基板以形成液晶面板。 〇 膠/液晶塗佈機包含一工作台、配置有一喷嘴並透過喷嘴 塗佈如膠或液晶液體的塗佈頭單元、用以支撐塗佈頭單元之 一塗佈頭單元支架。 膠/液晶塗佈機在塗佈勝或液晶於基板上時，於嗜嘴盘其 板之間維持-固定距離，其係藉由在Y轴方向時移3= 於其上之工作台、或藉由在X軸方向移動塗佈頭單元、或藉 由在X-Y軸方向移動兩者。 、在此情況中，X軸致動器在X軸方向移動塗佈頭單元， 而塗佈頭單元姆塗俩單元支架為可受支撐射滑動。線 性運，(Linear Motion，LM)導執通常提供於塗佈頭單元與塗 布3單元支木之間，以使支撐塗佈頭單元相對塗佈頭單元支 架為可受支撐與可滑動。 以油做為潤滑劑，使得塗佈頭單元在LM導轨上平滑地 200817101 避免油洩漏。因此， 移動。然而，ΙΜ導轨並不具有覆蓋物以 油逸漏可能會汙染基板。 噼可賴，且鱗與塗佈 導軌上祕早70支架的接觸。然而，塗佈頭單元在LM =2=1能產生微粒跟振動。微粒可能污染基板。當 景=氣到塗佈頭單树，對塗健作的準確性會有嚴重的 【發明内容】 工氣抽承(air bearing彡 而非使用線性運動導 因此，本發明的一目的在於使用一 於塗佈頭單元與塗佈頭單元支架之間， 執，使得塗佈頭單元受支撐且可滑動。 之塗:方面，提供一種用以塗佈液體於基板上 j佈機，其包a:—主體；由主體支撐的—工作台， -基板設置於其上；-塗麵單元核，其㈣由主體支^， ^在X軸方向延伸超過工作台；至少—塗佈頭衫，提供牙於 早70支架之—面上，且具有—噴嘴，液體係透過噴嘴 f力塗佈頭單元相對於塗佈頭單元支架而滑動於χ =匕 托力ί，提供於塗佈頭單元上，支撐塗佈頭單元且相對=佈 頭早元支縣可以及至少—空錄承，自外部接= 200817101 ==架自塗佈頭單元支架漂浮’以允許塗佈頭單 空氣轴承係提供於托架上，以設置於托架及塗佈頭單元 支架之間’為了致能空氣轴承朝向塗佈頭單元支架注入空氣。 本發明之上述及其他目的、特徵、方面、及優點將可藉 由以下對本發明的詳細描述並結合所伴隨圖式而變得更加^ 楚0 【實施方式】 現在詳細地參考本判—實施例，其巾—範例係緣示於 所附隨之圖式中1在將描述肋塗佈㈣於基板上的一塗 佈機’其包含肋塗於基板上的職圖針之點膠機， 以及用以塗佈液晶於基板上的液晶塗佈機。 圖1為根據本發明一實施例而描述用以塗佈液體於基板 上之塗佈機的透視圖。 、土 參考圖1，用以塗佈液體於基板上的塗佈機丨⑻包含一 主體110 ’其使塗佈機100相對地面保持平穩。 基板设置於其上的工作台(stage) 12〇係提供於主體 200817101 之上 工作台120支撐從外部引入主體110 θ部的基板 工作台120由主體110支撐，藉由配備有線性馬達的丫 轴致動器(圖未示)而可在工作台γ轴方向滑動。 Ο 線性運動(圖未示)可提供於工作台12〇與主體⑽ 工作台120可滑動。工作台⑽可由主體ιι〇支撐， :、方式為=作台120藉由工作台χ軸致動器而可在乂轴方 滑動、或藉由J1作台0軸致動H而可㈣ ° 可由主體110固定地支撐 作σ 12() 方向延伸超過工=I』·*由主體110支撐，且在Χ轴 動頭取 端部軌131可提供於塗佈頭單元支架130的每一 向提供於主體間。線性魏導軌13卜於Υ軸方向上縱 部。因、為絲…的側邊，其面對塗佈頭單元支架130的端 軌131 解凡支架130的兩端分別固定在線性運動導 可由』5部份(可在Υ轴方向移動)，塗佈頭單元支架請 一 支撐，並可相對主體110而滑動。 10 200817101 ^塗佈頭單元支架130(將描述於後)的形式為具有六面之 面體。因此，托架16〇環繞塗佈頭單元支架丨3〇的至少三 個面其方式為連接塗佈頭單元140至塗佈頭單元支架13〇 以提供對塗佈頭單元刚的支撐，如圖3所示。-個或多個 3=單元支_可提供於主體⑽之上，以降低塗佈液 體於基板上所需的時間。 Ο 、塗佈頭單元14G係提供於塗佈頭單元支架13G的-個面 ^塗佈解元14〇(如圖2所示)包含喷嘴i4i(經由喷嘴而塗 基板上）’以及供應液體至喷嘴141的注射器142。 、 及注射器丨42由支撐塊143所支樓。 喷嘴141藉由喷嘴之z軸致魅144而在z軸方向上下 ΐΐ较ί是可能的，因為喷嘴之2軸致動器144在Z軸方向 嗜Ζ ^動部份，其係可固定_合至支撐塊M3。 二 車由致動1 144包含旋轉馬達或線性馬達。喷嘴141 軸方向㈣噴嘴之ζ軸致動器144的喷嘴γ轴致 動為(圖未示）’喊向移動。 嘴14^1 地提供^1小喷嘴Ζ轴致動器⑽未示以微調喷 130，以 nr置。可提供—個❹讎佈頭單元 牛低主佈液體於基板上所S的時間。200817101 IX. Description of the Invention: [Technical Field] The present invention relates to a coating machine for coating a liquid on a substrate, and in particular, the present invention relates to a table capable of sliding during movement of a coating head unit A coating machine for applying a liquid to a substrate by reducing vibration and particles. [Prior Art] Flat panel displays contain many lighter and thinner video display technologies than conventional TV and video displays using cathode ray tubes, and are typically less than 1 inch (4 shots) thick. Tablet age H requires continuous updates, including liquid crystal displays (LCDs), plasma displays, field emission displays, (FEDs), organic light emitting diode displays (OLEDs), surface conduction electron emission displays (SEDs), and nano-emissive displays. (NEDs), and electroluminescent displays (ELDs). The liquid crystal display (LCD) is a thin, flat display consisting of any number of colors or monochrome pixels arranged in front of the light source or counter. Liquid crystal displays are widely used because they consume a very small amount of electrical power. The method of manufacturing the liquid crystal display panel using the liquid crystal display is as follows. A pattern of the shirt color filter and the common electrode is formed on the upper glass substrate. A pattern of a thin film transistor (TFT) and a pixel electrode is formed on the lower glass substrate opposite to the upper glass substrate. The alignment layer is deposited on the upper and lower glass substrates. Friction pair 6 200817101 The quasi-layer has a pretilt angle and a direction between the crystal molecules in the two alignment layers. The dispenser is used to form a glue pattern on either of the upper and lower glass substrates to seal the upper and lower glass substrates with the liquid crystal layer present therebetween. Thereafter, the liquid crystal coater is used to coat the liquid crystal on the glass substrate where the paste pattern is formed. Finally, the upper and lower glass substrates are packaged to form a liquid crystal panel. The silicone/liquid crystal coater comprises a worktop, a coating head unit provided with a nozzle and coated with a nozzle such as glue or liquid crystal liquid, and a coating head unit holder for supporting the coating head unit. The glue/liquid crystal coater maintains a fixed distance between the plates of the peep-mouth plate when coating the liquid or the liquid crystal on the substrate, by shifting 3 in the Y-axis direction to the work table thereon, or The coating head unit is moved in the X-axis direction or both are moved in the XY-axis direction. In this case, the X-axis actuator moves the coating head unit in the X-axis direction, and the coating head unit is coated by the support. A Linear Motion (LM) guide is typically provided between the coating head unit and the coated 3-unit branch to support the coating head unit to be supported and slidable relative to the coating head unit support. Using oil as a lubricant, the coating head unit is smoothly smoothed on the LM guide. 200817101 Avoid oil leakage. So move. However, the ram rail does not have a cover to allow oil to escape and may contaminate the substrate.噼可赖, and the scales are coated with the 70 brackets on the coated rails. However, the coating head unit can generate particles and vibration at LM = 2 = 1. The particles may contaminate the substrate. When the scene = gas to the coating head single tree, the accuracy of the coating will be serious [invention] air bearing (air bearing instead of using linear motion guide, therefore, one purpose of the present invention is to use one Between the coating head unit and the coating head unit holder, the coating head unit is supported and slidable. In terms of coating, a coating machine for coating liquid on the substrate is provided, and the package a:- a main body; a workbench supported by the main body, a substrate disposed thereon; a coated surface unit core, wherein (4) is supported by the main body, ^ extends in the X-axis direction beyond the table; at least - the coated headgear provides teeth On the surface of the early 70 bracket, and having a nozzle, the liquid system is slid over the coating head unit by the nozzle f force coating head unit, and is provided on the coating head unit, and the support coating is provided on the coating head unit. The cloth head unit and the relative = cloth head early Yuan County can and at least - empty recording, from external connection = 200817101 == from the coating head unit bracket floating 'to allow the coating head single air bearing system to be provided on the bracket, To be placed between the bracket and the coating head unit bracket 'in order to The above-described and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the invention. MODE FOR CARRYING OUT THE INVENTION Reference is now made in detail to the present invention, in which the accompanying drawings are shown in the accompanying drawings, in which a coating machine for coating a rib (four) on a substrate is provided a needle dispenser on a substrate, and a liquid crystal coater for coating liquid crystal on the substrate. Fig. 1 is a view of a coater for coating a liquid on a substrate according to an embodiment of the present invention. Referring to Figure 1, the coating machine (8) for coating liquid on a substrate comprises a body 110' which keeps the coater 100 stationary relative to the ground. The stage on which the substrate is placed 12 is provided on the main body 200817101. The table 120 supports the substrate table 120 that is externally introduced into the main body 110 θ. The substrate table 120 is supported by the main body 110, and is provided by a cymbal actuator (not shown) equipped with a linear motor. Table sliding in the γ axis线性 Linear motion (not shown) can be provided on the table 12 〇 and the main body (10) table 120 is slidable. The table (10) can be supported by the main body ιι :, in the manner of = table 120 by the table χ axis actuator It can be slid on the yaw axis or actuated by the J1 axis 0. (4) ° can be fixedly supported by the main body 110 as the σ 12 () direction extending beyond the work = I 』 * * supported by the main body 110, and The boring head moving end rail 131 may be provided between the main bodies in each direction of the coating head unit bracket 130. The linear Wei rail 13 is in the longitudinal direction of the y-axis direction. The end rails 131 of the coating head unit bracket 130 are respectively fixed at the two ends of the bracket 130 in a linear motion guide, which can be moved in the direction of the x-axis, and the coating head unit bracket is supported and can be opposite to the main body. Slide 110. 10 200817101 ^The coating head unit holder 130 (described later) is in the form of a six-sided face. Therefore, the bracket 16 surrounds at least three faces of the coating head unit holder 其3〇 in such a manner as to connect the coating head unit 140 to the coating head unit holder 13〇 to provide just support to the coating head unit, as shown in the figure. 3 is shown. One or more 3 = unit branches may be provided on the body (10) to reduce the time required to coat the liquid on the substrate.涂布, the coating head unit 14G is provided on the surface of the coating head unit holder 13G, and the coating unit 14〇 (shown in FIG. 2) includes the nozzle i4i (on the substrate through the nozzle) 'and supplies liquid to The syringe 142 of the nozzle 141. And the syringe 丨 42 is supported by the support block 143. It is possible that the nozzle 141 is slid up and down in the z-axis direction by the z-axis enchantment 144 of the nozzle, because the 2-axis actuator 144 of the nozzle is in the Z-axis direction, and the system can be fixed-closed. To the support block M3. The second vehicle consists of a rotary motor or a linear motor by actuation 1 144. The nozzle 141 axial direction (four) nozzle y-axis actuator 144 is activated by a nozzle γ-axis (not shown). The mouth 14^1 provides a small nozzle Ζ axis actuator (10) not shown to fine tune the spray 130, and is placed at nr. It is possible to provide a time for the head unit of the cow to be low on the substrate.
塗佈頭單元140藉由頭單元X軸致動器！5〇而滑動於X 200817101 軸方向。因此，藉由調整喷嘴141在又軸方向的位置，可維 持噴嘴141及基板間的固定距離，而不需在χ轴方向机 置在工作台的基板。 JO又 頭單元X軸致動器150包含線性馬達151，其可以微調 的方式控制喷嘴141的位置’並用以減少微粒的產生。線性 151主要為多相位交流電子馬達，其產生推進功率於固 〇 ^态(stator) 152及移動器(mover)153之間，且因此相對固定 器152而直線地來回移動移動器M3。 固定器152及移動器153係安排於塗佈頭單元支架13〇 與塗，頭單元140之間，且彼此相對。固定器152固定於塗 貝單元支架130 ’而移動器153固定於塗佈頭單元14〇。固 疋态152由移動器153所環繞，且延伸於χ方向，使得 器153移動於X軸方向。 托架160係提供支撐，並以滑動方式相對於塗佈頭單元 ^架130❿移動塗佈頭單％ 14〇。形成以覆蓋塗佈頭單元支 架130之至少一面的托架16〇係固定至塗佈頭單it 140。如 圖3所示，塗佈頭單元域m具有矩形外型，類似一桿 (bar)。托* 16〇可形成以覆蓋塗佈頭單元支帛削的三個面。 托架160的結構使塗佈頭單元14〇 穩定地沿塗佈頭單元支 架130滑動。托架160的三個内面與塗佈頭單元支架13〇的 二個面平行。 12 200817101 提供一空氣軸承170，以使托架160自塗佈頭單元支架 130漂浮，並使塗佈頭單元14〇可更平滑地滑動。亦即，空 氣軸承170接收來自外部的空氣，並注入空氣於托架16〇及 塗佈頭單元支架13之間。空氣壓使托架MO自塗佈頭單元支 木130漂浮。空氣軸承17〇(如圖3及4所示)係提供於托架 160上，以设置於托架16〇及塗佈頭單元支架13〇之間。 可七供一個或多個空氣轴承，以更牢固地相對塗佈頭單 元支架130而支撐托架160，其中至少對面對塗佈頭單元支 采130之托架160之每一面皆提供一個。每一個空氣軸承可 個別地接收來自外部的空氣。一個或多個空氣通路175(如圖 3所不)可提供至托架160。在此情況下，空氣係供應至一空 氣軸承，並透過空氣通路175供應至其他空氣轴承。 、空氣軸承17〇(如圖5所示)係以能夠使空氣軸承no朝向 塗=頭單元支架130注入空氣的方式安排。所注入的空氣壓 使=托架160自塗佈頭單元支架13〇漂浮。空氣軸承17〇可 包含覆蓋部分172，其部分地覆蓋空氣注入單元171及空氣 注入單元171之外表面。 空氣注入單元171由多孔材料組成，其具有由複數個注 所組成的結構，透過注入孔而注入自外部引入的空氣。 空if入單元171並不限制為此種結構，而是可包含能夠注 入I氣的各種結構。空氣注入單元171的外型類似圓盤，但 200817101 不限於任何特定形狀 、覆蓋部分Π2覆蓋空氣注入單元m的表面，其並不面 對塗佈頭單元絲13〇。這麼做係用贿自空氣注人單元i7i 注入的空氣只朝向塗佈頭單元支架請的表面。因此，有效 地使托架160相對塗佈頭單元支架13〇漂浮。 覆蓋部分172具有開口。空氣注入單元1γΗ系嵌入覆蓋 部ί、172Ϊ開口。覆蓋部分172可藉由以下形成：覆蓋除了 :氣庄^單元171面對塗佈頭單元支架13〇的表面之外的空 氣注入單元171外表面。覆蓋部分Π2係藉由黏著劑而依附 至托架160。 空轴承170係提供為自托架16〇突出。然而空氣軸承 170口可喪入至托《16〇。亦即，空氣軸承17〇可嵌入至形成於 托木160上的凹槽，其係採取不會阻礙空氣自空 πι向塗佈頭單元支架130注入的方式。 早兀 工氣軸承170提供於托架16〇及塗佈單 的結構使得以下成為可能··當空㈣人至空氣 牯’致此空氣軸承170將所引入的空氣朝向塗佈頭單元支架 130庄入。所注入的空氣麗致能托架刷自塗 =動單元x軸致動器150移動塗体頭單: 托木160)日守，固定於塗佈頭單元〗4〇的托架 14 200817101 係相對於塗佈頭單元支架130而平滑地在χ轴方向滑動，其 中托条160沒有接觸塗佈頭單元支架。 空氣軸承170在塗佈頭單元14〇滑行移動過程中注入至 托架160及塗佈頭單元支架13〇之間的空氣可使存在於托 =160及塗怖頭單元支架13〇之間的微粒飛起。此微粒可能 會污染甚柘。 連接至-抽氣機的排出口 176係提供於托架16〇之上， 以避免微織吹起。注人於托架16G及_解元支架13〇 之間的空氣係透過排出口 176而排出至托架16()外部。此時， 微粒及所，主入空氣可排出至托架16〇外部。排出口 Μ係提 供於托架160沒有空氣軸承的區域上。 f者’排出口 176(如圖6所示)可提供於托架160上，以 ”工氣軸承170的空氣注入單元171接觸。因此，注入於托 木160及塗佈碩單元支架13〇之間的空氣係透過空氣注入單 兀171及排出口 176而排出至托架160外部。排出口 Π6可 挺t、、、e所有的工氣軸* 17()，—個搭配—個，然並不限於此 排，口 176可為穿透空氣注入單元171的-孔。穿透 空氣注入單元m之孔_表面可被覆蓋，以避免^氣逃脫 進入内部表面。 圖7為杬述托架丨60之一變型之圖式。托架260(如圖7 15 200817101 所示)具有覆蓋塗佈頭單元支架13〇之四表面的結構，以辦強 滑打移動過程中相對塗佈頭單元支架13〇之托架 托架綱的結構中，可提供至少-空氣軸承谓於 壤繞塗佈頭早元支架13G之托架的四個面之每—個上 260JT具有各種結構來增強在滑行移動過程中 單 疋支架130之托架160的支撐。 孟伸貝早 於塗Ξϊΐ發Γί實施例’塗佈鮮元140由空氣軸承相對 於塗佈頭料絲支撐，Mf與塗麵單元支竿⑽ 接觸。如此避免使祕性運料軌可能發生的鱗漏及微粒。 此外，可最小化因移動造成的塗佈頭單元之振動，因此 造成喷嘴的最小化振動。這將改善塗佈的正確性。 主要多=式來具體化，而不會偏離其精神或 述的任何細却’而應該在後附中請專利範圍所界定 ϊ 1 i=廣義解釋’因此落於申請專利範圍的界限 【圖式簡單說明】 ，包含所伴隨圖式以提供對本發明進—步的了解， 亚組成此說明書的-部份，圖式係描述本發明實施例，且與 16 200817101 詳細說明—起用來解釋本發明的原理，在圖式中： 發明—實施例而描述用以塗佈液體於基板 上之塗佈機的透視圖； ^描述提供於圖1中之塗佈頭單元支架上的塗佈頭 單元的爆炸圖； 圖3為圖2的侧視圖； 圖4為描述提供於圖3托紅之空氣轴承圖；The coating head unit 140 is activated by the head unit X-axis! 5〇 and slide in the X 200817101 axis direction. Therefore, by adjusting the position of the nozzle 141 in the axial direction, the fixed distance between the nozzle 141 and the substrate can be maintained without the need to operate the substrate of the table in the x-axis direction. The JO again head unit X-axis actuator 150 includes a linear motor 151 that can control the position ' of the nozzle 141 in a fine-tuned manner and is used to reduce the generation of particles. The linearity 151 is primarily a multi-phase alternating current electronic motor that produces propulsive power between a solid state 152 and a mover 153 and thus linearly moves the mover M3 back and forth relative to the fixture 152. The holder 152 and the mover 153 are disposed between the coating head unit holder 13 and the coating head unit 140 and opposed to each other. The holder 152 is fixed to the coating unit holder 130' and the mover 153 is fixed to the coating head unit 14''. The solid state 152 is surrounded by the mover 153 and extends in the x-direction such that the 153 moves in the X-axis direction. The bracket 160 provides support and slides the coating head unit by 14% in a sliding manner relative to the coating head unit 130. A bracket 16 formed to cover at least one side of the coating head unit holder 130 is affixed to the coating head unit 140. As shown in Fig. 3, the coating head unit field m has a rectangular outer shape, similar to a bar. The support can be formed to cover the three faces of the coating head unit. The structure of the bracket 160 causes the coating head unit 14 to stably slide along the coating head unit holder 130. The three inner faces of the bracket 160 are parallel to the two faces of the coating head unit holder 13''. 12 200817101 An air bearing 170 is provided to float the bracket 160 from the coating head unit holder 130 and allow the coating head unit 14 to slide more smoothly. That is, the air bearing 170 receives air from the outside and injects air between the bracket 16 and the coating head unit holder 13. The air pressure causes the carrier MO to float from the coating head unit branch 130. An air bearing 17 (shown in Figures 3 and 4) is provided on the bracket 160 to be disposed between the bracket 16 and the coating head unit holder 13A. One or more air bearings may be provided for more secure support of the bracket 160 relative to the coating head unit holder 130, wherein at least one of each side of the bracket 160 facing the coating head unit 130 is provided. Each air bearing can individually receive air from the outside. One or more air passages 175 (not shown in Figure 3) may be provided to the bracket 160. In this case, the air is supplied to an air bearing and supplied to the other air bearing through the air passage 175. The air bearing 17A (shown in Fig. 5) is arranged in such a manner that the air bearing no can be injected into the coating head unit bracket 130. The injected air pressure causes the = bracket 160 to float from the coating head unit holder 13A. The air bearing 17A may include a covering portion 172 that partially covers the outer surfaces of the air injection unit 171 and the air injection unit 171. The air injection unit 171 is composed of a porous material having a structure composed of a plurality of injections, and air introduced from the outside is injected through the injection holes. The empty if-in unit 171 is not limited to such a structure, but may include various structures capable of injecting I gas. The outer shape of the air injection unit 171 is similar to a circular disk, but 200817101 is not limited to any particular shape, and the covering portion Π2 covers the surface of the air injection unit m, which does not face the coating head unit wire 13〇. In doing so, the air injected from the air injection unit i7i is only directed toward the surface of the coating head unit bracket. Therefore, the bracket 160 is effectively floated relative to the coating head unit holder 13 . The cover portion 172 has an opening. The air injection unit 1γ is embedded in the cover ί, 172 Ϊ opening. The covering portion 172 can be formed by covering the outer surface of the air injection unit 171 except the surface of the coating head unit holder 13A. The covering portion 2 is attached to the bracket 160 by an adhesive. The empty bearing 170 is provided to protrude from the bracket 16〇. However, the air bearing 170 can be lost to the "16". That is, the air bearing 17A can be embedded in a groove formed in the pallet 160 in such a manner as not to impede the injection of air from the air to the coating head unit holder 130. The structure of the early air bearing 170 provided on the bracket 16〇 and the coating sheet makes it possible to make the air bearing 170 direct the introduced air toward the coating head unit bracket 130 when the air bearing 170 is aired. . The injected air can be driven by the self-coating of the movable unit, the x-axis actuator 150, and the moving body head: the tow 160), the bracket, which is fixed to the coating head unit, 4〇, 200817101 The coating head unit holder 130 is smoothly slid in the z-axis direction, wherein the bracket 160 does not contact the coating head unit holder. The air injected between the air bearing 170 and the coating head unit bracket 13 during the sliding movement of the coating head unit 14 can cause particles existing between the bracket 160 and the coating unit bracket 13〇. Fly up. This particle can be very polluted. A discharge port 176 connected to the air extractor is provided above the bracket 16〇 to prevent micro-woven blowing. The air between the bracket 16G and the eliminator bracket 13 is discharged through the discharge port 176 to the outside of the bracket 16 (). At this time, the particles and the main air can be discharged to the outside of the bracket 16 . The discharge port is provided on the area where the bracket 160 has no air bearing. The outlet 176 (shown in FIG. 6) can be provided on the bracket 160 to be in contact with the air injection unit 171 of the process bearing 170. Therefore, it is injected into the tray 160 and the coated unit bracket 13 The air is discharged to the outside of the bracket 160 through the air injection unit 171 and the discharge port 176. The discharge port Π6 can be used to t, , and e all of the work axes * 17 (), a matching one, and Not limited to this row, the port 176 may be a hole that penetrates the air injection unit 171. The hole-surface of the penetrating air injection unit m may be covered to prevent the gas from escaping into the inner surface. A pattern of one of the variants of 60. The bracket 260 (shown in Figures 7 15 200817101) has a structure covering the four surfaces of the coating head unit bracket 13 for the purpose of performing a strong sliding movement relative to the coating head unit bracket 13 In the structure of the bracket bracket, at least the air bearing can be provided on each of the four faces of the bracket around the coating head early bracket 13G. The 260JT has various structures to enhance the sliding movement process. The support of the bracket 160 of the single-single bracket 130. Meng Shenbei was implemented earlier than the coating The coated fresh element 140 is supported by the air bearing relative to the coating head filament, and the Mf is in contact with the coating unit support (10). This avoids the occurrence of scale leakage and particles which may occur in the secret carrier rail. The vibration of the coating head unit caused by the movement, thus causing the nozzle to minimize the vibration. This will improve the correctness of the coating. The main multi-form will be embodied without deviating from its spirit or any fineness of the description. In the attached text, please define the scope of the patent ϊ 1 i = broad interpretation 'and therefore fall within the scope of the patent application scope [simplified description of the schema], including the accompanying schema to provide an understanding of the invention, sub-constituting this specification The drawings are a description of the embodiments of the invention and are explained in detail in connection with the teachings of the embodiments of the invention, in which: Perspective view of the machine; ^ Exploding view of the coating head unit provided on the coating head unit bracket of Fig. 1; Fig. 3 is a side view of Fig. 2; Fig. 4 is a view showing the air bearing of Fig. 3 Figure
圖5為有祕描棚4 $氣|棘哺似結麵； 圖6為描述® 4排出口之—變型賴視圖；以及 圖7為描述圖3托架之一變型的侧視圖。 【主要元件符號說明】 100 110 120 130 131 140 141 142 143 144 150 塗佈機 主體 工作台 塗佈頭單元支架 線性運動導執 塗佈頭單元 喷嘴 注射器 支撐塊 喷嘴之Z軸致動器 頭單元X軸致動器 17 200817101 151 線性馬達 152 固定器 153 移動器 160 托架 170 空氣軸承 171 空氣注入單元 172 覆蓋部分 175 空氣通路 176 排出口 260 托架Fig. 5 is a view showing a variant of the bracket of Fig. 3; and Fig. 7 is a side view showing a modification of the bracket of Fig. 3. [Main component symbol description] 100 110 120 130 131 140 141 142 143 144 150 Coater main body table coating head unit holder linear motion guide coating head unit nozzle syringe support block nozzle Z-axis actuator head unit X Axis Actuator 17 200817101 151 Linear Motor 152 Holder 153 Migrator 160 Bracket 170 Air Bearing 171 Air Injection Unit 172 Covering Port 175 Air Path 176 Drain Port 260 Bracket