[go: up one dir, main page]

TW200801248A - Apparatus and method for producing micro-structure mold - Google Patents

Apparatus and method for producing micro-structure mold

Info

Publication number
TW200801248A
TW200801248A TW95122153A TW95122153A TW200801248A TW 200801248 A TW200801248 A TW 200801248A TW 95122153 A TW95122153 A TW 95122153A TW 95122153 A TW95122153 A TW 95122153A TW 200801248 A TW200801248 A TW 200801248A
Authority
TW
Taiwan
Prior art keywords
micro
pattern
substrate
protective layer
forms
Prior art date
Application number
TW95122153A
Other languages
English (en)
Other versions
TWI320807B (en
Inventor
Ching-Yu Tso
Li-Jiuan Chen
Hsiou-Jeng Shy
Shang-Wanq Yeh
Wen-Yung Shu
Original Assignee
Chung Shan Inst Of Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chung Shan Inst Of Science filed Critical Chung Shan Inst Of Science
Priority to TW95122153A priority Critical patent/TWI320807B/zh
Publication of TW200801248A publication Critical patent/TW200801248A/zh
Application granted granted Critical
Publication of TWI320807B publication Critical patent/TWI320807B/zh

Links

Landscapes

  • Moulds For Moulding Plastics Or The Like (AREA)
TW95122153A 2006-06-20 2006-06-20 Apparatus and method for producing micro-structure mold TWI320807B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95122153A TWI320807B (en) 2006-06-20 2006-06-20 Apparatus and method for producing micro-structure mold

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95122153A TWI320807B (en) 2006-06-20 2006-06-20 Apparatus and method for producing micro-structure mold

Publications (2)

Publication Number Publication Date
TW200801248A true TW200801248A (en) 2008-01-01
TWI320807B TWI320807B (en) 2010-02-21

Family

ID=44764990

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95122153A TWI320807B (en) 2006-06-20 2006-06-20 Apparatus and method for producing micro-structure mold

Country Status (1)

Country Link
TW (1) TWI320807B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI694879B (zh) * 2019-10-31 2020-06-01 新加坡商捷普電子(新加坡)公司 模仁的製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI694879B (zh) * 2019-10-31 2020-06-01 新加坡商捷普電子(新加坡)公司 模仁的製造方法

Also Published As

Publication number Publication date
TWI320807B (en) 2010-02-21

Similar Documents

Publication Publication Date Title
TW200629571A (en) Semiconductor device, electronic device, and method of manufacturing semiconductor device
TW200724479A (en) Nano-array and fabrication method thereof
IL182371A0 (en) Patterns of conductive objects on a substrate and method of producing thereof
WO2010023853A3 (ja) 薄膜付きガラス基板の製造方法
TW201129829A (en) Spectroscopy module and manufacturing method therefor
WO2010059441A3 (en) Methods of forming a masking pattern for integrated circuits
TW200621076A (en) Organic electroluminescence device and method of production of same
PL2513720T3 (pl) Sposób i urządzenie do wytwarzania masek do układu laserowego do wytwarzania mikrostruktur
WO2008153094A1 (ja) アルカロイド類の生産方法
WO2009054456A1 (ja) プリント配線板の製造方法
ATE484609T1 (de) Verfahren zur herstellung einer funktionsschicht
GB0709872D0 (en) Method for the production of a substrate having a holographic appearance
TW200603145A (en) Microlens array substrate and production method therefor
SG131872A1 (en) Layer arrangement for the formation of a coating on a surface of a substrate,coating method,and substrate with a layer arrangement
WO2008043352A3 (de) Optoelektronisches modul und verfahren zur herstellung eines optoelektronischen moduls
ATE552105T1 (de) Aufwickelbarer fliesenaufbau, verfahren zur herstellung sowie die verwendung
WO2013015648A3 (en) Method of manufacturing mold for nano imprint
WO2009056744A3 (fr) Procédé de fabrication d'une structure poreuse ordonnée à partir d'un substrat d'aluminium
WO2009008973A3 (en) Method for forming an acoustic mirror with reduced metal layer roughness and related structure
WO2011031047A3 (en) Method for manufacturing stamper for injection molding
SG168513A1 (en) A method of reducing the dimension of an imprint structure on a substrate
WO2010036002A3 (ko) 단결정 기판의 제조방법, 이에 의해 제조된 단결정 기판, 상기 단결정 기판을 포함하는 발광소자, 및 이의 제조방법
TW200801248A (en) Apparatus and method for producing micro-structure mold
WO2009118353A3 (en) Metallic nanocrystal encapsulation
WO2011053087A3 (ko) 태양전지 및 이의 제조방법