200807609 九、發明說明： 【發明所屬之技術領域】 本發明概言之可應用於擴充基座領域。更具體而言，本發明係 係針對與具有機載微處理器或感測器之微環境進行介接之領域。 【先前技術】 用於運輸及儲存半導體晶圓及基板之各種可攜式微環境已演進 成包含一系統以連續或定期地監控微環境内部或緊靠微環境外側 • 之情況（例如溫度、壓力、濕度及/或靜電荷）。其一實例揭示於頒 予Martin之美國第6,591，162號專利中。某些機载系統可包含：一 微處理器，用於監控及將儀錶信號數位化；用於記錄資料之儲存 月匕力，以及一射頻（radi〇 frequency，RF)發射器，用於將資訊中 、、墟至中央處理站。通常係由一電池供電，該電池往往是可充電 、 專彳放環丨兄包含但不限於前開式晶圓盒（front-opening unified P ’ UP )、則開式運輸盒（fr〇n卜〇pening shipping boxes，FOSB ) 或標準機;公200807609 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention is generally applicable to the field of docking stations. More specifically, the present invention is directed to the field of interfacing with a microenvironment having an onboard microprocessor or sensor. [Prior Art] Various portable micro-environments for transporting and storing semiconductor wafers and substrates have evolved to include a system to continuously or periodically monitor the interior of the microenvironment or close to the outside of the microenvironment (eg, temperature, pressure, Humidity and / or static charge). An example of this is disclosed in U.S. Patent No. 6,591,162 issued to Martin. Some onboard systems may include: a microprocessor for monitoring and digitizing the meter signal; a memory for storing data, and a radio frequency (RF) transmitter for information China, the market to the central processing station. Usually powered by a battery, the battery is often rechargeable, dedicated to the ring, including but not limited to front-opening unified P (UP), open transport box (fr〇n divination) Pening shipping boxes, FOSB ) or standard machine;
⑩ 卸日日圓 ι ( standard mechanical interface pods，SMIF 曰曰Hi)。在半導體行業之說法中，可將包含此等機載系統之容器 稱作「智彗^ w式」谷器（例如「智慧式F〇UP」）。 合°。可在庫存中存放幾個月之時間，以待進行工程及測試。在 ΛΙ又長日夺間裡，為保持對微環境資料之監控及傳輸，可能需要使 電池之電量侔姓^ /、馬於一臨界充電值。另一方面，對智慧式容器之 短期儲存（例 4如’大約幾個小時或幾天左右）則為吾人提供對電 池充電之機會。 在儲存系統 /'、、、<環境中，製造工廠常常使用一「儲存櫃」，此種「儲 6 200807609 存植」包 ^ S —儲存單元陣列或矩陣，微環境即置於該 内。儲存櫃 邊寺儲存早元 ^ 了為相對複雜及昂貴之結構，適可在潔淨含卢决^ 納操作機械手劈 ’、至展*兄中容 之事物，故^智慧式容器對料導體行業而言仍為相當新 使用盘智見有儲存櫃尚未配備成保養或容納智慧式容器。 能成i較ΓΓ相容之新儲存櫃來更換現麵存樞此一主張可 ^此阻礙了智慧式容器技術之採用。10 Unloading Japanese yen y (standard mechanical interface pods, SMIF 曰曰 Hi). In the semiconductor industry, containers containing such onboard systems can be referred to as "smart" type "valves" (eg, "smart F〇UP"). ° °. It can be stored in stock for several months for engineering and testing. In order to maintain the monitoring and transmission of micro-environmental data, it may be necessary to make the battery's power surname ^ /, Ma a critical charge value. On the other hand, short-term storage of smart containers (such as 'about a few hours or a few days or so) gives us the opportunity to charge the battery. In the storage system / ', , , < environment, manufacturing plants often use a "storage cabinet", this "storage 6 200807609 planting" package ^ S - storage unit array or matrix, the micro-environment is placed inside. The storage cabinet is stored in the temple. It is a relatively complicated and expensive structure. It can be used in the clean and sturdy control of the manipulators, and the products of the exhibition. In terms of still quite new use, Panzhi has not yet been equipped with storage cabinets that are not equipped to maintain or accommodate smart containers. The idea of being able to replace the existing storage cabinet with a new storage cabinet is a hindrance to the adoption of smart container technology.
且ΓΓΓ係在T式容11與儲存櫃上—充電心間達成一精確 料之物電I面，其應不使在晶圓製造過程中搬運及傳送材 机作業稷雜化。諸多儲存櫃线係利用容器上之傳送軌道 凸緣來將微環境定位於儲存櫃内。藉由傳送軌道進行放置缺乏為 在智慧式容器與充電器間進行可靠柄合所需之可重覆性。 另—挑戰係為微環境資料之可靠傳輸。緣於構成材料之原因， =些現有儲存櫃不與RF傳輸相容。儲存櫃距離中央處理站較遠亦 常會加劇該可靠傳輸之問題。 因此，提供一種較佳在無需更換現有儲存櫃之情況下便能與充 電為或資料擷取/儲存裝置隨時達成可靠連接並克服RF資料傳輸 不可靠問題之系統，將使半導體製造工廠從中獲益。 【發明内容】 在本發明之某些貫施例中，智慧式容器上之一可充電電池介面 係經由端子接點而非經由電路與一擴充基座相配合，以使可攜式 衣置可隨時安裝至该擴充基座上/自該擴充基座上卸下，並消除可 月匕會妨礙可攜式裝置之使用或效能之懸垂軟電線。亦可達成接點 端子之對齊以及對充電源接點端子之選擇性通電。 7 200807609 本發明之某些實施例包含一種擴充基座，其具有一基座，用以 支撐及接納一配備有運動耦合件之智慧式容器（例如一智慧式 FOUP)。該等運動搞合件可與智慧式容器上之電源端子對齊，以 便可靠且可重覆地耦合充電站上之一充電介面。 ' 本發明之各實施例可包含一種介面，用於經其傳送來自監控儀 錶之資料。傳送模式可係經由電接點、藉由經電感耦合進行傳送、 藉由光纖耦合、或藉由熟習此項技術者可利用之其他介接技術。 ^ 可將儲存櫃配備成包含適合於該介面類型之電纜佈線，以用於將 資料傳送至一中央處理站。藉由此種方式傳送資料便可無需在將 智慧式載具儲存於儲存櫃中時藉由RF傳輸來監控信號。 在結構上，在一實施例中，藉由一基座達成該等功能，該基座 包含· 一底板，具有一頂面及至少一邊緣，複數個運動耦合銷自 該頂面延伸出；以及-介面模組，其靠近該邊緣安裝至該底板上。 該介面模組可具有可自該底板之頂面觸及之—外露表面。在電池 充電應用中，該介面模組可包含—變壓器，以將—交流電源轉換 φ 成一直流電源，至少一端子接點自該外露表面向上延伸出並可操 作地耦合至該直流電源。另一選擇為，一單一遠端變壓器可為複 數個擴充基座誕供直机電源。一接觸開關可操作地耗合於該等端 子接點至少之一與該直流電源間，以在該接觸開關閉合時對該端 子通電。 在另一實施例中，一種用於對一晶圓載具上之至少一可充電電 池進行充電之擴充基座包含：一底板，包含運動耦合銷，該等運 動耦合銷係没置成嚙合該晶圓載具上之複數個運動耦合件；一介 8 200807609 面模組，可操作地柄合該底板，並包含一電力轉換器，該電力轉 換為可操作地耦合一對充電器端子接點，該對充電器端子接點係Moreover, the T-type capacitor 11 and the storage cabinet - the center of charge to achieve a precise material I surface, should not make the handling and transport equipment in the wafer manufacturing process noisy. Many storage cabinet lines utilize the transfer track flanges on the containers to position the microenvironment within the storage cabinet. The lack of placement by the transport track is reproducible for reliable handling between the smart container and the charger. Another—challenge is the reliable transmission of microenvironmental data. Due to the constituent materials, some existing storage cabinets are not compatible with RF transmission. The fact that the storage cabinet is far from the central processing station often exacerbates the problem of reliable transmission. Therefore, it would be advantageous to provide a system that is better able to reliably connect to a charging or data capture/storage device and overcome the problem of unreliable RF data transmission without replacing the existing storage cabinet, thereby benefiting the semiconductor manufacturing plant. . SUMMARY OF THE INVENTION In some embodiments of the present invention, a rechargeable battery interface on a smart container is coupled to a docking station via a terminal contact rather than via a circuit to enable the portable device to be Mounted to/from the docking station at any time, and eliminates overhanging flexible cords that can interfere with the use or performance of the portable device. Alignment of the contacts and selective energization of the terminals of the charge source can also be achieved. 7 200807609 Some embodiments of the present invention include a docking station having a base for supporting and receiving a smart container (e.g., a smart FOUP) equipped with a kinematic coupling. These motion fits can be aligned with the power terminals on the smart container to reliably and reproducibly couple one of the charging interfaces on the charging station. Embodiments of the invention may include an interface for transmitting data from a monitor meter therethrough. The transmission mode can be via electrical contacts, by inductive coupling, by fiber coupling, or by other interfacing techniques that are available to those skilled in the art. ^ The storage cabinet can be equipped to include cable routing suitable for the interface type for transferring data to a central processing station. By transmitting data in this way, it is not necessary to monitor the signal by RF transmission when storing the smart carrier in the storage cabinet. Structurally, in an embodiment, the function is achieved by a pedestal comprising: a bottom plate having a top surface and at least one edge, a plurality of motion coupling pins extending from the top surface; An interface module mounted to the bottom plate adjacent the edge. The interface module can have an exposed surface that can be accessed from a top surface of the bottom plate. In a battery charging application, the interface module can include a transformer to convert the -AC power to a DC power source, at least one of the terminal contacts extending upwardly from the exposed surface and operatively coupled to the DC power source. Alternatively, a single remote transformer can provide a direct power source for a plurality of docking stations. A contact switch is operatively coupled between at least one of the terminal contacts and the DC power source to energize the terminal when the contact switch is closed. In another embodiment, an expansion base for charging at least one rechargeable battery on a wafer carrier includes: a bottom plate including a motion coupling pin, the motion coupling pin is not placed to engage the crystal a plurality of motion coupling members on the round carrier; a panel of 200807609, operatively slidably engaging the base plate and including a power converter, the power being converted to operatively couple a pair of charger terminal contacts, the pair Charger terminal contact system
用以可操作地該至少一可充電電池，以提供用於充電之該電流。 其中§该晶圓載具之該等運動耦合件嚙合該底板之該等運動耦合 銷打，该對充電器端子接點係可操作地耦合至該可充電電池。該 等接點可係經彈簧偏置的。-接觸開關亦可用以#該晶圓载具之 该等運動耦合件嚙合該底板之該等運動耦合銷時，使該電流流至 該可充電電池。亦可自該介面模組之—外露表面看到複數個發光 二極體，其可操作地用以指示該擴充基座之一狀態。 另一實施例包括：一晶圓載具，包含可操作地與其柄合之至少 可充電電池，該晶圓載具具有複數個運動耦合件，該至少一可 充電電池包含至少-受_合件，該受電柄合件適以接收電流來 2該至少-可充電電池進行充電；—包含運_合銷之底板，可 设置成嚙合該晶圓載具上之該等運動耦合件；一介面模組，可操 U底板，並包含—電力轉換器，該電力轉換器可操作地 輕合至少-電_合件，該至少_電_合件係設置成可操作地 輕合該至少—受電耦合件，以提供該電流來對該至少-可充電電 池進行充電。當該晶圓載具之該等運_合件口齒合該底板之該等 =動柄口銷時’錢少—電源搞合件與該至少―受㈣合件係可 =作地對齊。该至少_電源輕合件可包含―第—對充電器端子接 j一且忒至少一党電耦合件可包含-第二對充電器端子接點。該 :一對充u端子接點與該第二對充電器端子接財至少其中之 可係仏彈η偏置的。該晶圓載具系統亦可安裝於—儲存檀内。 9 200807609 本發明之某些實施例包含：一晶圓載具，包含一儀錶模組，以 用於監測該晶圓載具内或附近之條件，該晶圓載具具有運動耦合 件；一擴充基座，具有一介面模組，該介面模組適以將資料傳輸 至該儀錶模組或自該儀錶模組接收資料，該介面模組可具有複數 個運動耦合銷，該等運動耦合銷設置成嚙合該晶圓載具之該等運 動耦合件。其中當該晶圓載具之該等運動耦合件嚙合該擴充基座 之該等運動耦合銷時，該介面模組與該儀錶模組係可操作地耦 合。該介面模組係可操作地耦合一資料匯流排，以將資料傳輸至 ’ 該介面模組或自該介面模組接收資料。該資料匯流排係可操作地 耦合一遠端電腦。該儀錶模組可包含一微處理器，該微處理器適 以將資料傳輸至該介面模組或自該介面模組接收資料。此外，該 系統可包含可操作地耦合該微處理器之至少一可充電電池，該至 少一可充電電池包含至少一受電耦合件，該至少一受電耦合件適 以接收電流來對該至少一可充電電池進行充電。該介面模組可用 以感應耦合可操作地耦合至該儀錶模組之一載具側線圈以及可操 Φ 作地耦合至該介面模組之一靜止侧線圈，當該晶圓載具之該等運 動耦合件嚙合該底板之該等運動耦合銷時，該感應耦合起作用。 該擴充基座可係獨立的，或者可安裝至一儲存櫃上。 本發明各實施例之一優點係能夠在智慧式載具處於庫存中時對 智慧式載具之電池進行充電。 本發明某些實施例之另一優點係能夠將現有儲存櫃設施改進成 具有擴充基座，以用於容納智慧式載具，藉以無需更換整個儲存 櫃結構。 200807609 本發明各實施例之另一優點係無需借助射頻鏈路便能夠監測智 慧式載具。 【實施方式】 〜a 1穴匀一見度i 6、一總 一組三個運動耦合銷24、 參見圖式，其繪示一智慧式容器10以及一充電或擴充基座12 之一實施例。一智慧式容器之一實例（具體而言，係為一智慧式 FOUP)揭示於美國專利第6,9〇1，971號中，該美國專利係頒與 Speasl等人並讓與本申請案之受讓人安堤格里斯公司，且除其中所 # 定義用語之明確定義外，其全部揭示内容皆以引用方式倂入本文 中。擴充基座12可包含一底板η，底板14具有一寬度16、一細 長度18、一頂面20以及一周緣部22。 26及28自上表面20向上延伸出。 一充電或介面模組30具有一外露表面31，並安裝至底板14上 底板14之形狀可大致對應於智慧式容器1()之平面視圖 印」。底板14可包含一凸起部32， 10之腳印； 其實質上延伸超出智慧式容器The at least one rechargeable battery is operative to provide the current for charging. Wherein the motion coupling members of the wafer carrier engage the motion coupling pins of the base plate, the pair of charger terminal contacts being operatively coupled to the rechargeable battery. These contacts can be spring biased. The contact switch can also be used to cause the current to flow to the rechargeable battery when the motion coupling members of the wafer carrier engage the motion coupling pins of the bottom plate. A plurality of light emitting diodes can also be seen from the exposed surface of the interface module, operative to indicate a state of the docking station. Another embodiment includes a wafer carrier including at least a rechargeable battery operatively coupled to the handle, the wafer carrier having a plurality of motion couplings, the at least one rechargeable battery including at least a receiving component, The power receiving handle is adapted to receive current 2 to charge the at least rechargeable battery; the bottom plate comprising the transporting pin can be arranged to engage the motion coupling members on the wafer carrier; and an interface module Manipulating a U-bottom plate and including a power converter operatively operatively splicing at least an electric-coupled member, the at least-electrical-engaged member being configured to operatively couple the at least-electrically-coupled member to This current is provided to charge the at least rechargeable battery. When the splicing of the wafer carrier is the same as the shank pin of the bottom plate, the money is less than the power supply component and the at least the (four) component is aligned. The at least _ power light fitting may include a first-to-charger terminal terminal and the at least one-party electrical coupling may include a second pair of charger terminal contacts. The pair of charging terminal contacts and the second pair of charger terminals are at least one of which can be biased by the armature η. The wafer carrier system can also be mounted in a storage bin. 9 200807609 Some embodiments of the present invention comprise: a wafer carrier comprising a meter module for monitoring conditions in or near the wafer carrier, the wafer carrier having a motion coupling; and an expansion base, Having an interface module, the interface module is adapted to transmit data to or receive data from the meter module, the interface module can have a plurality of motion coupling pins, the motion coupling pins are configured to engage the The motion couplings of the wafer carrier. The interface module is operatively coupled to the meter module when the motion coupling members of the wafer carrier engage the motion coupling pins of the docking station. The interface module is operatively coupled to a data bus to transmit data to or receive data from the interface module. The data bus is operatively coupled to a remote computer. The meter module can include a microprocessor adapted to transmit data to or receive data from the interface module. Additionally, the system can include at least one rechargeable battery operatively coupled to the microprocessor, the at least one rechargeable battery including at least one electrically powered coupling, the at least one electrically coupled coupling adapted to receive current to the at least one Recharge the battery for charging. The interface module can be operatively coupled to one of the meter side coils of the meter module and inductively coupled to one of the stationary side coils of the interface module for inductive coupling, when the wafer carrier moves The inductive coupling acts when the coupling member engages the motion coupling pins of the bottom plate. The docking station can be stand-alone or can be mounted to a storage cabinet. One of the advantages of various embodiments of the present invention is the ability to charge the battery of the smart carrier while the smart carrier is in stock. Another advantage of certain embodiments of the present invention is the ability to retrofit existing storage cabinet facilities to have a docking station for receiving smart carriers without the need to replace the entire storage cabinet structure. Another advantage of embodiments of the present invention is the ability to monitor smart vehicles without the need for a radio frequency link. [Embodiment] ~ a 1 hole uniformity i 6, a total set of three motion coupling pins 24, see the drawing, which shows an embodiment of a smart container 10 and a charging or docking base 12. An example of a smart container (specifically, a smart FOUP) is disclosed in U.S. Patent No. 6,9,1,971, issued toSpeasl et al. The assignee of the company, and the disclosure of all of the definitions of the terminology, are hereby incorporated by reference. The docking station 12 can include a bottom plate η having a width 16, a thin length 18, a top surface 20, and a peripheral edge portion 22. 26 and 28 extend upward from the upper surface 20. A charging or interface module 30 has an exposed surface 31 and is mounted to the bottom plate 14. The shape of the bottom plate 14 generally corresponds to the plan view of the smart container 1 (). The bottom plate 14 can include a footprint of the raised portion 32, 10; it extends substantially beyond the smart container
第1圖 圖所示實施例亦將介面模組30之外露表面 齊平於底板14之上表面2〇。 、巴含一接觸開關38。端 例如在第IA圖中所示。 露表面31繪示成實質上 11 200807609 介面模組30亦可包含一或多個光源，例如第1圖中所示之該對 發光二極體（LED) 40及42。介面模組30可操作地耦合底板14， 以使光源40、42定位於底板14之凸起部32中。 LED 40及42可配置成以各種方式指示擴充基座12之狀態。一 個燈可配置成僅當有電流流經端子接點34及36時發出紅色光。 第二個燈則可配置成當接觸開關38閉合、但無電流流經端子接點 34、36時發出綠色光。可藉由受控於一微處理器（未顯示）之繼 電器電路對LED 40及42實施控制。 底板可係由例如鋼、铭或鎂等金屬或導電複合物製成。當基座 材料使用氧化性金屬時，可將底板塗覆以一保護塗層（例如聚合 物粉末塗層、陽極氧化塗層、鍍層或漆層），以防止氧化。 智慧式容器10包含一儀錶模組44,該儀錶模組44由一可充電電 池46供電。儀錶模組44包含有若干個感測器（未顯示），以監 .測智慧式容器10内之微環境條件。所監測之參數可包含，但不限 於，溫度、壓力、濕度及靜電荷。該等感測器可經由射頻（RF) φ 傳輸（未顯示）向一晶圓製造控制中心傳送資訊。 智慧式容器10在底側上配備有與運動耦合銷24、26及28對齊 之複數個運動耦合件（未顯示）。智慧式容器10藉此懸置於底板 14之頂面20上方。 擴充基座12可係為一獨立單元，其插入一牆壁插座（未顯示） 内來為AC轉DC變壓器供電。擴充基座12亦可包含複數個支腳 45，以抬高底板14。另一選擇為，可在一用於儲存多個智慧式容 器10中之存貨之儲料結構中對複數個擴充基座12進行硬佈線。 12 200807609 可使擴錄紅尺切^魏有之财讀。絲丨 厚度為〇·5英吋，且運動 ）·5央吋， 高度為0.512英心L26及28在底板14上之延伸 使其閉合，藉以接通用^式容^之底㈣合接觸開關38而 對電池46充電。當知”點34及36進行通電之電路來 哪4。及42可二，，器1G在㈣基座12上放置就位時， 防止端子接點34 一外=而二:::被通電。此種方案會 /、w外短接而可旎抽壞介面模組3〇。 智慧式容器10可配備有標準運動耦合件，用於嚙合運動耦合銷 24、26及28，並使智慧式容器10定向使得端子接點34及36盘 可充電電池46之接點對齊。該等運_合件可使得無需使用單獨 之對齊結構。 底板14較佳係由電導體製成，以使靜電耗散電位能夠對地放 電。底板14之寬度16之尺寸可設計成與目前在現有製造環境中 盛裝F〇PU之標準或傳統儲料架相配合。藉由如此使擴充基座12 適口於k田之見度，便可由現有基礎結構來利用及支撐擴充基座 I2所用之運動1¾合件彡統，而無需修改該基礎結構。 智慧式容II U)實質上覆蓋擴充基座12。凸起部32則保持不被 覆蓋’進而使光源40 & 42外露並可見。此使人員能夠檢查智慧 式容器10之充電狀態。 13 200807609 外露表面31可實質上齊平於底板14之頂面20，或者標示於頂 面20上方或下方。運動耦合銷24、26及28將智慧式容器10懸 置於頂面20上方。因此，為使接觸開關38運作，外露表面31相 對於頂面20之位置係為運動耦合銷24、26及28之高度、運動耦 合件之深度以及智慧式容器10之嚙合部相對於運動耦合銷24、26 及28與運動耦合件間之介面之垂直位置之函數。 經彈簣偏置之端子接點34及36可依順智慧式容器10之佈置， 並緩解智慧式容器10係由接點而非由運動耦合銷24、26支撐之 關切問題。偏置彈簧39可更在端子接點34、36處提供可靠之接 觸壓力。對端子接點34及36之彈簧偏置亦可提供一定程度之橫 向運動，以容納一定程度之錯位。 參見第4圖，其繪示本發明一實施例中之一感應充電器耦合 50，其包含容納於介面模組30内之一電源或靜止侧線圈52感應 耦合至一受電或載具侧線圈54。頒與Rohde之美國專利第 5,959,433號即提供感應柄合方案之一實例，除其中具體所定義用 語之明確定義外，其揭示内容皆以引用方式倂入本文中。載具側 線圈54可包含於可充電電池46之外殼内，可充電電池46亦可包 含一整流器56及其他調節電路58，以用於對可充電電池46之電 池單元60直流充電。 在功能上，某些感應充電器（例如第4圖中所示者）係配置成 跨平面介面進行充電。因此，感應充電器耦合50可無需實質上修 改擴充基座12之輪廓便能夠對可充電電池46進行充電。應瞭解， 在本發明之範圍内亦可包含其他感應耦合配置，例如將靜止側線 !4 200807609 圈52定位於一與一凹槽相配合之支柱中，以與載具側線圈54(未 顯示）同軸對齊。第4圖中所示之實施例亦消除了用於達成接觸 之運動部件，並達成各組件之氣密性密封，以防止出現污染而可 能導致各種組件失效。 參見第5圖，其繪示本發明一實施例中之一組合式電力/資料傳 輸系統70。頒與Venemso之美國專利第4,806,928號揭示一種既 對電源亦對資料信號進行電磁耦合之設備，除其中所具體定義用 語之明確定義外，其揭示内容皆以引用方式倂入本文中。Veneruso 提供了關於如何構建此一系統的一非限定性實例。 儀錶模組44可包含一微處理器72，微處理器72可操作地耦合 至類比數位（analog-to-digital，A/D)轉換器74，該等類比數位 (A/D)轉換器74將自監控一微環境77内各種參數之複數個儀錶 76所接收之信號數位化。微處理器72亦可操作地耦合成自一接收 器解調器78接收資料（例如指令）及經由一發射器驅動器80發 射資料。接收器調變器78及發射器驅動器80可藉助傳輸線82耦 合至載具侧線圈54，該等傳輸線82亦用於對可充電電池46之電 池單元60充電。 在所示實施例中，靜止側線圈52可操作地耦合一 AC電源84 及一雙向調變器/解調器86。雙向調變器/解調器86可經由一資料 匯流排90自一遠端電腦88接收資料並對資料進行調變，以在載 具側線圈54與靜止侧線圈52間並藉由傳輸線82傳輸，以供接收 器解調器78接收並隨後與微處理器72進行通信。為將資料自儀 錶76傳輸至遠端電腦88，微處理器72可操作發射器驅動器80 15 200807609 將一經調變信號經由傳輸線82、穿過靜止側線圈52與載具側線圈 54介面發送回雙向調變器/解調器86,由雙向調變器/解調器86解 調該信號，以供穿過資料匯流排90傳輸至遠端電腦88。 第5圖之實施例繪示正在監測單一微環境77。亦可配置複數個 微環境（未顯示）來傳送電力及資料，例如在儲存櫃設施中所將 遇到之情形。資料匯流排90可配置成藉由利用一 IEEE-488通用 介面匯流排或其他適用於輪詢多個裝置之介面匯流排來輪詢多個 微環境。 本發明之其他實施例可包含用於穿過智慧式容器/擴充基座介面 來傳輸資料之替代組態。舉例而言，可利用多個單獨之傳輸線取 代與電力傳輸共用之方案。該等單獨之傳輸線可仍利用該介面兩 端之感應耦合，或者可使用其他連接，例如類比接點、數位接點 (例如串列傳輸線）、紅外線耦合或光纖耦合。可使用用於各種 儀錶信號之具導體之類比電纜來取代資料匯流排50。 在功能上，電力/資料傳輸系統70能使可充電電池46隨時耦合 至一充電源，且亦可無需使用RF鏈路便能達成資料自微環境至一 中央處理資料庫之傳輸。 上述各實施例不應視為限定本發明，熟習此項技術者將得知其 他配置及實施例，該等其他配置及實施例仍歸屬於本發明之精神 範圍内。舉例而言，本文之各圖式及論述係關於FOUP晶圓容器， 但亦可容易地適用於標準機械介面傳送盒（SMIF)或其他晶圓或 光罩容器，且此仍歸屬於本發明之範圍内。 所引用之相對性用語，例如上下、前後、左右等等，皆係為了 16 200807609 便於說明，而非打算將本發明或其組件限定為任何特定取向。圖 式中所示之所有尺寸皆可隨本發明具體實施例之潛在設計及擬定 用途而異，此並不背離本發明之範圍。 本文所揭示之各附圖及方法皆可單獨用於、或與其他特徵及方 法結合用於提供改良之裝置、系統及其製造和使用方法。因此， 本文所揭示各特徵及方法之組合可能未必係為實施最廣意義之本 發明所必需的，而是僅為具體說明本發明之代表性實施例而揭示。 • 【圖式簡單說明】 第1圖係為本發明一實施例中一擴充基座之立體圖； 第1A圖係為第1圖之擴充基座之局部剖視圖； 第2圖係為本發明一實施例中第1圖之擴充基座在上面放置有 一智慧式FOUP時之立體圖； 第3圖係為本發明一實施例中一晶圓載具系統之電路示意圖； 第4圖係為本發明一實施例中一可充電電池電感耗合至一擴充 基座之示意圖；以及 | ® 第5圖係為本發明一實施例中具有一電感耦合式充電及資料傳 送介面之一擴充基座之示意圖。 【主要元件符號說明】 10 :智慧式容器 14 :底板 12 :充電‘或擴充基座 16 :寬度 20 :頂面 18 :總長度 22 :周緣部 24 :運動耦合銷 17 200807609The embodiment shown in Fig. 1 also flushes the exposed surface of the interface module 30 to the upper surface 2 of the bottom plate 14. The bar includes a contact switch 38. The end is shown, for example, in Figure IA. The exposed surface 31 is shown as substantially 11 200807609. The interface module 30 can also include one or more light sources, such as the pair of light emitting diodes (LEDs) 40 and 42 shown in FIG. The interface module 30 is operatively coupled to the bottom plate 14 to position the light sources 40, 42 in the raised portions 32 of the bottom plate 14. LEDs 40 and 42 can be configured to indicate the status of docking station 12 in a variety of manners. A lamp can be configured to emit red light only when current is flowing through terminal contacts 34 and 36. The second lamp can then be configured to emit green light when the contact switch 38 is closed but no current flows through the terminal contacts 34,36. The LEDs 40 and 42 can be controlled by a relay circuit controlled by a microprocessor (not shown). The bottom plate may be made of a metal such as steel, ingot or magnesium or a conductive composite. When the susceptor material uses an oxidizing metal, the substrate can be coated with a protective coating (e.g., a polymer powder coating, an anodized coating, a coating or a lacquer layer) to prevent oxidation. The smart container 10 includes a meter module 44 that is powered by a rechargeable battery 46. The meter module 44 includes a plurality of sensors (not shown) for monitoring microenvironment conditions within the smart container 10. The parameters monitored may include, but are not limited to, temperature, pressure, humidity, and static charge. The sensors can transmit information to a wafer fabrication control center via radio frequency (RF) φ transmission (not shown). The smart container 10 is provided on the bottom side with a plurality of kinematic couplings (not shown) aligned with the kinematic coupling pins 24, 26 and 28. The smart container 10 is thereby suspended above the top surface 20 of the bottom plate 14. The docking station 12 can be a self-contained unit that is inserted into a wall outlet (not shown) to power the AC to DC transformer. The docking station 12 can also include a plurality of legs 45 to raise the bottom plate 14. Alternatively, a plurality of docking stations 12 can be hardwired in a stock structure for storing inventory in a plurality of smart containers 10. 12 200807609 It is possible to cut the red ruler and read it. The thickness of the silk enamel is 〇·5 inches, and the movement is 5 吋, the height is 0.512 inches. The extension of L26 and 28 on the bottom plate 14 is closed, so that the bottom (4) contact switch 38 is connected. The battery 46 is charged. When it is known that the circuits that are energized at points 34 and 36 are 4 and 42 can be used, when the device 1G is placed in position on the (four) susceptor 12, the terminal contacts 34 are prevented from being external = and the second:: is energized. Such a solution would short-circuit the external interface module 3. The smart container 10 can be equipped with standard motion couplings for engaging the motion coupling pins 24, 26 and 28 and for intelligent containers. 10 orientation aligns the contacts of the terminal contacts 34 and 36 of the rechargeable battery 46. The splicing means eliminates the need for a separate alignment structure. The bottom plate 14 is preferably made of an electrical conductor to dissipate static electricity. The potential can be discharged to the ground. The width 16 of the bottom plate 14 can be sized to fit a standard or conventional storage rack that currently houses the F〇PU in an existing manufacturing environment. By doing so, the docking station 12 is adapted to the k-field. The visibility can be utilized by the existing infrastructure to support and support the motion splicing system used by the docking station I2 without modifying the infrastructure. The smart volume II U) substantially covers the docking station 12. The boss 32 Then keep not covered 'and thus expose the light source 40 & 42. This The person can check the state of charge of the smart container 10. 13 200807609 The exposed surface 31 can be substantially flush with the top surface 20 of the bottom plate 14, or be marked above or below the top surface 20. The kinematic coupling pins 24, 26 and 28 will be intelligent The container 10 is suspended above the top surface 20. Thus, to operate the contact switch 38, the position of the exposed surface 31 relative to the top surface 20 is the height of the kinematic coupling pins 24, 26 and 28, the depth of the kinematic coupling, and the smart The orientation of the engagement portion of the container 10 relative to the interface between the kinematic coupling pins 24, 26 and 28 and the kinematic coupling member. The spring-biased terminal contacts 34 and 36 can be arranged in accordance with the smart container 10. And to alleviate the concern that the smart container 10 is supported by the contacts rather than by the motion coupling pins 24, 26. The biasing spring 39 provides a more reliable contact pressure at the terminal contacts 34, 36. The spring bias of 36 can also provide a degree of lateral movement to accommodate a certain degree of misalignment. Referring to Figure 4, an inductive charger coupling 50 is included in an embodiment of the present invention, which is included in the interface module. Within 30 A power or stationary side coil 52 is inductively coupled to a power receiving or carrier side coil 54. An example of an inductive shank scheme is provided in U.S. Patent No. 5,959,433 to Rohde, except as specifically defined by the specific terms. The disclosure is incorporated herein by reference. The carrier side coil 54 can be included in the housing of the rechargeable battery 46. The rechargeable battery 46 can also include a rectifier 56 and other conditioning circuitry 58 for use with the rechargeable battery. The battery unit 60 of 46 is DC charged. Functionally, some inductive chargers (such as those shown in Figure 4) are configured to charge across a planar interface. Thus, the inductive charger coupling 50 can charge the rechargeable battery 46 without substantially modifying the contour of the docking station 12. It should be understood that other inductive coupling configurations may also be included within the scope of the present invention, such as positioning the stationary side wire! 4 200807609 circle 52 in a post that mates with a recess to be associated with the carrier side coil 54 (not shown). Coaxial alignment. The embodiment shown in Figure 4 also eliminates the moving parts used to make contact and achieves a hermetic seal of the components to prevent contamination and may result in failure of various components. Referring to Figure 5, a combined power/data transmission system 70 in accordance with one embodiment of the present invention is illustrated. U.S. Patent No. 4,806,928, the disclosure of which is incorporated herein by reference in its entirety in its entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire disclosure Veneruso provides a non-limiting example of how to build this system. Meter module 44 can include a microprocessor 72 operatively coupled to an analog-to-digital (A/D) converter 74, such analog-to-digital (A/D) converters 74. The signals received by a plurality of meters 76 that monitor various parameters within a microenvironment 77 are digitized. Microprocessor 72 is also operatively coupled to receive data (e.g., instructions) from a receiver demodulator 78 and to transmit data via a transmitter driver 80. Receiver modulator 78 and transmitter driver 80 can be coupled to carrier side coils 54 via transmission line 82, which are also used to charge battery unit 60 of rechargeable battery 46. In the illustrated embodiment, the stationary side coil 52 is operatively coupled to an AC power source 84 and a bidirectional modulator/demodulator 86. The bidirectional modulator/demodulator 86 can receive data from a remote computer 88 via a data bus 90 and modulate the data for transmission between the carrier side coil 54 and the stationary side coil 52 via the transmission line 82. Received by receiver demodulator 78 and then in communication with microprocessor 72. To transfer data from the meter 76 to the remote computer 88, the microprocessor 72 can operate the transmitter driver 80 15 200807609 to send a modulated signal back through the transmission line 82 through the stationary side coil 52 and the carrier side coil 54 interface. The modulator/demodulator 86 is demodulated by the bidirectional modulator/demodulator 86 for transmission to the remote computer 88 through the data bus 90. The embodiment of Figure 5 illustrates that a single microenvironment 77 is being monitored. Multiple micro-environments (not shown) can also be configured to carry power and data, such as those encountered in storage cabinet facilities. The data bus 90 can be configured to poll multiple micro-environments by utilizing an IEEE-488 universal interface bus or other interface bus suitable for polling multiple devices. Other embodiments of the invention may include an alternate configuration for transferring data through the smart container/dock base interface. For example, multiple separate transmission lines can be utilized to replace the scheme shared with power transmission. The separate transmission lines may still utilize inductive coupling between the two ends of the interface, or other connections may be utilized, such as analog contacts, digital contacts (e.g., serial transmission lines), infrared coupling, or fiber coupling. Instead of the data bus 50, an analog cable with conductors for various meter signals can be used. Functionally, the power/data transfer system 70 enables the rechargeable battery 46 to be coupled to a charging source at any time, and the transfer of data from the micro-environment to a central processing library can be achieved without the use of an RF link. The above embodiments are not to be considered as limiting the invention, and other configurations and embodiments will be apparent to those skilled in the art. For example, the various figures and discussion herein relate to FOUP wafer containers, but can be readily adapted to standard mechanical interface transfer boxes (SMIF) or other wafer or reticle containers, and still belong to the present invention. Within the scope. The relative terms cited, such as up and down, front and back, left and right, etc., are for convenience of description and are not intended to limit the invention or its components to any particular orientation. All of the dimensions shown in the drawings may vary depending on the potential design and intended use of the specific embodiments of the invention, without departing from the scope of the invention. The various figures and methods disclosed herein may be used alone or in combination with other features and methods for providing improved apparatus, systems, and methods of making and using the same. Therefore, the combinations of the features and methods disclosed herein are not necessarily required to implement the invention in the broadest scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a docking station according to an embodiment of the present invention; FIG. 1A is a partial cross-sectional view of the docking station of FIG. 1; FIG. 2 is an embodiment of the present invention FIG. 3 is a perspective view of a wafer carrier system according to an embodiment of the present invention; FIG. 4 is a schematic diagram of a wafer carrier system according to an embodiment of the present invention; FIG. 5 is a schematic diagram of an expansion base having an inductively coupled charging and data transfer interface in accordance with an embodiment of the present invention. [Main component symbol description] 10 : Smart container 14 : Base plate 12 : Charging ‘ or docking station 16 : Width 20 : Top surface 18 : Total length 22 : Peripheral part 24 : Motion coupling pin 17 200807609
26 :運動搞合銷 30 :介面模組 32 :凸起部 34 :充電器端子接點 38 :接觸開關 40 :發光二極體 44 :儀錶模組 46 :可充電電池 52 :電源或靜止側線圈 5 6 ·整流為 60 :電池單元 72 :微處理器 76 :儀錶 78 :接收器解調器 82 :傳輸線 86 :雙向調變器/解調器 90 :資料匯流排 28 :運動搞合銷 31 :外露表面 33 :直流電源 36 :充電器端子接點 39 :偏置彈簧 42 :發光二極體 45 :支腳 50 :可充電電池 54 :載具侧線圈 58 :調節電路 70 :組合式電力/資料傳輸系統 74 :類比數位轉換器 77 :微環境 80 :發射器驅動器 84 :交流電源 8 8 :遠端電腦 1826: Movement and sales 30: Interface module 32: Raised portion 34: Charger terminal contact 38: Contact switch 40: Light-emitting diode 44: Instrument module 46: Rechargeable battery 52: Power supply or stationary side coil 5 6 · Rectifier 60: Battery unit 72: Microprocessor 76: Meter 78: Receiver demodulator 82: Transmission line 86: Bidirectional modulator/demodulator 90: Data bus 28: Motion pin 31: Exposed surface 33: DC power supply 36: Charger terminal contact 39: Offset spring 42: Light-emitting diode 45: Foot 50: Rechargeable battery 54: Carrier side coil 58: Adjustment circuit 70: Combined power/data Transmission System 74: Analog Digital Converter 77: Microenvironment 80: Transmitter Driver 84: AC Power 8 8: Remote Computer 18