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TW200740576A - Transferring device - Google Patents

Transferring device

Info

Publication number
TW200740576A
TW200740576A TW095133666A TW95133666A TW200740576A TW 200740576 A TW200740576 A TW 200740576A TW 095133666 A TW095133666 A TW 095133666A TW 95133666 A TW95133666 A TW 95133666A TW 200740576 A TW200740576 A TW 200740576A
Authority
TW
Taiwan
Prior art keywords
base
fixed base
turning
turning base
link arm
Prior art date
Application number
TW095133666A
Other languages
Chinese (zh)
Other versions
TWI310724B (en
Inventor
Takafumi Uratani
Hironori Ogawa
Akira Miyamoto
Yoshiyuki Matsuzaki
Sayako Takarabe
Okamoto Akira
Uno Sakiko
Sado Daisuke
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Publication of TW200740576A publication Critical patent/TW200740576A/en
Application granted granted Critical
Publication of TWI310724B publication Critical patent/TWI310724B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H10P72/30—

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

To provide a plate-like work transferring device capable of withstanding an influence of the heat under the vacuum atmosphere in a clean process. This transferring device A1 is provided with a fixed base 1, a turning base 2 turnably held in relation to the fixed base 1, a link arm mechanism 3 supported freely to swing in relation to the turning base 2, and hands 4 supported by the link arm mechanism 3, and transfers the work with the hands 4, while holding it horizontally, with action of the turning base 2 and the link arm mechanism 3. An air-tight seal 23A is provided between the turning base 2 and the fixed base 1, and a refrigerant circulation passage is provided in the fixed base 1 and the turning base 2, and one part of the refrigerant circulation passage is arranged near the air-tight seal 23A, and the refrigerant circulation passage is structured by including annular spaces 110A and 210A formed in the boundary between the fixed base 1 and the turning base 2.
TW095133666A 2005-09-30 2006-09-12 Transferring device TW200740576A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005285942 2005-09-30
JP2006227300A JP4699312B2 (en) 2005-09-30 2006-08-24 Transport device

Publications (2)

Publication Number Publication Date
TW200740576A true TW200740576A (en) 2007-11-01
TWI310724B TWI310724B (en) 2009-06-11

Family

ID=38142556

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095133666A TW200740576A (en) 2005-09-30 2006-09-12 Transferring device

Country Status (3)

Country Link
JP (1) JP4699312B2 (en)
KR (1) KR100797537B1 (en)
TW (1) TW200740576A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI561353B (en) * 2012-10-11 2016-12-11 Tes Co Ltd Apparatus for transferring substrate
TWI623397B (en) * 2016-06-30 2018-05-11 Kawasaki Heavy Ind Ltd Horizontal articulated robot

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4879833B2 (en) * 2007-07-30 2012-02-22 株式会社ダイヘン Transport device
JP2010158759A (en) * 2008-12-08 2010-07-22 Daihen Corp Work conveying device
JP5324211B2 (en) 2008-12-26 2013-10-23 株式会社ダイヘン Work transfer device
JP5463367B2 (en) * 2009-12-28 2014-04-09 株式会社アルバック Driving device and conveying device
KR101230467B1 (en) 2010-07-29 2013-02-25 주식회사 티이에스 Substrate transfer unit and substrate transfer apparatus including the same
KR101291811B1 (en) * 2011-06-08 2013-07-31 주식회사 나온테크 Hybrid vacuum robot transport apparatus
JP5841382B2 (en) 2011-09-06 2016-01-13 株式会社ダイヘン Work transfer device
CN103084909B (en) * 2011-10-31 2015-11-25 鸿富锦精密工业（深圳）有限公司 Handling device
KR101358004B1 (en) * 2012-06-29 2014-02-04 나승옥 Work conveying table device
JP6783459B2 (en) * 2016-10-11 2020-11-11 株式会社レクザム Work transfer robot
KR102571863B1 (en) * 2022-12-27 2023-08-29 (주)네오스테크놀로지스 auto leveling device for a tilting type having multi axis

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539854B2 (en) * 1987-09-30 1996-10-02 三田工業株式会社 Robot fluid transfer mechanism
JPH01118882U (en) * 1988-02-08 1989-08-11
JPH02129314A (en) * 1988-11-08 1990-05-17 Sumitomo Metal Ind Ltd Method for cooling connecting part in vacuum refining vessel
JPH03208334A (en) * 1990-01-10 1991-09-11 Fujitsu Ltd Manufacturing device for semiconductor
JPH0796490A (en) * 1993-09-24 1995-04-11 Yaskawa Electric Corp Swivel structure of industrial robot
JPH1133949A (en) * 1997-07-14 1999-02-09 Fanuc Ltd Industrial robot
JPH11333778A (en) * 1998-05-29 1999-12-07 Daihen Corp Carrying robot device
JP3028129B2 (en) * 1998-09-11 2000-04-04 科学技術振興事業団 Coaxial vacuum heating device
JP2000306849A (en) * 1999-04-23 2000-11-02 Kokusai Electric Co Ltd Substrate processing equipment
JP3263684B2 (en) * 1999-07-26 2002-03-04 株式会社ジェーイーエル Substrate transfer robot
JP4208169B2 (en) * 2000-03-15 2009-01-14 ナブテスコ株式会社 Reducer and robot joint device
JP4187138B2 (en) * 2001-12-18 2008-11-26 東京エレクトロン株式会社 Sealing structure
JP2003251144A (en) * 2002-03-04 2003-09-09 Sumitomo Metal Ind Ltd Gas decomposition apparatus and gas decomposition system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI561353B (en) * 2012-10-11 2016-12-11 Tes Co Ltd Apparatus for transferring substrate
TWI623397B (en) * 2016-06-30 2018-05-11 Kawasaki Heavy Ind Ltd Horizontal articulated robot

Also Published As

Publication number Publication date
TWI310724B (en) 2009-06-11
JP2007118171A (en) 2007-05-17
KR20070037362A (en) 2007-04-04
KR100797537B1 (en) 2008-01-24
JP4699312B2 (en) 2011-06-08

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