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TW200732872A - System and method for correcting for pressure variations using a motor - Google Patents

System and method for correcting for pressure variations using a motor

Info

Publication number
TW200732872A
TW200732872A TW095142930A TW95142930A TW200732872A TW 200732872 A TW200732872 A TW 200732872A TW 095142930 A TW095142930 A TW 095142930A TW 95142930 A TW95142930 A TW 95142930A TW 200732872 A TW200732872 A TW 200732872A
Authority
TW
Taiwan
Prior art keywords
chamber
compensate
motor
correcting
pressure increase
Prior art date
Application number
TW095142930A
Other languages
Chinese (zh)
Other versions
TWI443482B (en
Inventor
George Gonnella
James Cedrone
Raymond A Zagers
Robert F Mcloughlin
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200732872A publication Critical patent/TW200732872A/en
Application granted granted Critical
Publication of TWI443482B publication Critical patent/TWI443482B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.
TW095142930A 2005-12-02 2006-11-21 System and method for correcting for pressure variations using a motor, computer readable medium TWI443482B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02

Publications (2)

Publication Number Publication Date
TW200732872A true TW200732872A (en) 2007-09-01
TWI443482B TWI443482B (en) 2014-07-01

Family

ID=38123375

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142930A TWI443482B (en) 2005-12-02 2006-11-21 System and method for correcting for pressure variations using a motor, computer readable medium

Country Status (5)

Country Link
JP (2) JP5355091B2 (en)
KR (1) KR101243524B1 (en)
CN (2) CN102705213A (en)
TW (1) TWI443482B (en)
WO (1) WO2007067359A2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
KR101212824B1 (en) 2004-11-23 2012-12-14 엔테그리스, 아이엔씨. System and method for a variable home position dispense system
JP4845969B2 (en) 2005-12-02 2011-12-28 エンテグリース，インコーポレイテッド I/O SYSTEM, METHOD, AND APPARATUS FOR COUPLING A PUMP CONTROL DEVICE - Patent application
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
CN101356715B (en) 2005-12-02 2012-07-18 恩特格里公司 System and method for valve sequencing in a pump
JP5366555B2 (en) 2005-12-02 2013-12-11 インテグリス・インコーポレーテッド System and method for pressure compensation in a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
WO2007067360A2 (en) 2005-12-05 2007-06-14 Entegris, Inc. Error volume system and method for a pump
TWI402423B (en) 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
CA2604623C (en) 2006-09-28 2018-10-30 Tyco Healthcare Group Lp Portable wound therapy system
GB0723855D0 (en) 2007-12-06 2008-01-16 Smith & Nephew Apparatus and method for wound volume measurement
US8684705B2 (en) 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
TWI545669B (en) * 2010-06-28 2016-08-11 恩特葛瑞斯公司 Customized distribution system with intelligent controller
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
TWI563351B (en) * 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
SG10201810172QA (en) * 2014-05-28 2018-12-28 Entegris Inc Anti-backlash mechanism for motor-driven components in precision systems and applications
WO2016103033A2 (en) 2014-12-22 2016-06-30 Smith & Nephew Plc Negative pressure wound therapy apparatus and methods
WO2017184651A1 (en) 2016-04-19 2017-10-26 ClearMotion, Inc. Active hydraulec ripple cancellation methods and systems
WO2023084687A1 (en) 2021-11-11 2023-05-19 旭サナック株式会社 Liquid ejection device

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US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (en) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk Pump device
JPH04167916A (en) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd Device for controlling pressure of feeding water for spraying
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US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
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US6478547B1 (en) * 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids
JP4531328B2 (en) * 2002-05-31 2010-08-25 株式会社タクミナ Fixed quantity transfer device
JP3792624B2 (en) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 Method for producing ferritic oxide dispersion strengthened steel with coarse grain structure and excellent high temperature creep strength
JP3861060B2 (en) * 2003-01-31 2006-12-20 日機装株式会社 Non-pulsating pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (en) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 Optical disk device

Also Published As

Publication number Publication date
JP5524269B2 (en) 2014-06-18
CN102705213A (en) 2012-10-03
WO2007067359A3 (en) 2009-04-23
WO2007067359A2 (en) 2007-06-14
CN101495756A (en) 2009-07-29
JP2009527674A (en) 2009-07-30
KR20080071582A (en) 2008-08-04
KR101243524B1 (en) 2013-03-20
JP2012154337A (en) 2012-08-16
TWI443482B (en) 2014-07-01
JP5355091B2 (en) 2013-11-27
CN101495756B (en) 2012-07-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees