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TW200732830A - Defect repairing method for a gray tone mask and gray tone mask - Google Patents

Defect repairing method for a gray tone mask and gray tone mask

Info

Publication number
TW200732830A
TW200732830A TW096102278A TW96102278A TW200732830A TW 200732830 A TW200732830 A TW 200732830A TW 096102278 A TW096102278 A TW 096102278A TW 96102278 A TW96102278 A TW 96102278A TW 200732830 A TW200732830 A TW 200732830A
Authority
TW
Taiwan
Prior art keywords
gray tone
tone mask
repairing method
defect repairing
light
Prior art date
Application number
TW096102278A
Other languages
Chinese (zh)
Other versions
TWI388923B (en
Inventor
Michiaki Sano
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200732830A publication Critical patent/TW200732830A/en
Application granted granted Critical
Publication of TWI388923B publication Critical patent/TWI388923B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/76—Patterning of masks by imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

A defect repairing method according to this invention is applicable to a gray tone mask which has a light shielding portion for shielding exposure light, a light transmitting portion for transmitting the exposure light, and a gray tone portion for reducing a transmission amount of the exposure light and which is for forming on an object a resist pattern having a thickness stepwise or continuously varied. In the defect repairing method, the gray tone portion is formed by a semitransmitting film. The defect repairing method includes steps of specifying a to-be-repaired region where a loss defect occurs in the gray tone portion, and forming in the to-be-repaired region a repairing light shielding film having a fine pattern such that a gray tone effect equivalent to that of a normal gray tone portion in the gray tone portion is obtained.
TW096102278A 2006-02-02 2007-01-22 Defect repairing method for a gray tone mask and gray tone mask TWI388923B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006026126 2006-02-02

Publications (2)

Publication Number Publication Date
TW200732830A true TW200732830A (en) 2007-09-01
TWI388923B TWI388923B (en) 2013-03-11

Family

ID=38600147

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096102278A TWI388923B (en) 2006-02-02 2007-01-22 Defect repairing method for a gray tone mask and gray tone mask

Country Status (3)

Country Link
KR (1) KR101052747B1 (en)
CN (1) CN101025565B (en)
TW (1) TWI388923B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103969945B (en) * 2013-01-25 2018-08-24 上海微电子装备（集团）股份有限公司 Scratch mask repair apparatus and method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3556591B2 (en) * 2000-09-29 2004-08-18 Ｈｏｙａ株式会社 Defect repair method of gray tone part in gray tone mask
CN1258118C (en) * 2002-03-28 2006-05-31 Hoya株式会社 Method for correcting defect of grey part in grey mask
JP4001834B2 (en) * 2003-04-01 2007-10-31 Ｈｏｙａ株式会社 Gray-tone mask defect inspection method and gray-tone mask manufacturing method
JP3993125B2 (en) * 2003-04-01 2007-10-17 Ｈｏｙａ株式会社 Gray tone mask defect correction method
JP4294359B2 (en) * 2003-04-08 2009-07-08 Ｈｏｙａ株式会社 Gray tone mask defect correction method

Also Published As

Publication number Publication date
CN101025565B (en) 2012-08-22
CN101025565A (en) 2007-08-29
KR101052747B1 (en) 2011-08-01
KR20070079559A (en) 2007-08-07
TWI388923B (en) 2013-03-11

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