TW200729401A - Chip structure and method for fabricating the same - Google Patents
Chip structure and method for fabricating the sameInfo
- Publication number
- TW200729401A TW200729401A TW095135704A TW95135704A TW200729401A TW 200729401 A TW200729401 A TW 200729401A TW 095135704 A TW095135704 A TW 095135704A TW 95135704 A TW95135704 A TW 95135704A TW 200729401 A TW200729401 A TW 200729401A
- Authority
- TW
- Taiwan
- Prior art keywords
- metal structure
- top layer
- protecting layer
- thin film
- thin
- Prior art date
Links
- 239000002184 metal Substances 0.000 abstract 16
- 239000010409 thin film Substances 0.000 abstract 5
- 239000004065 semiconductor Substances 0.000 abstract 4
- 238000002161 passivation Methods 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
The invention provides a post-passivation of top layer metal structure for high performance integrated circuit. The integrated circuit comprises semiconductor base, a thin film metal structure, a protecting layer, and a top layer metal structure. The semiconductor component is formed in the semiconductor base. The thin film metal structure comprises thin metal inner connecting wire to connect with the semiconductor component. The protecting layer is formed on the thin film metal structure. The opening hole of the protecting layer can expose the connecting pad of thin metal inner connecting wire. The top layer metal structure is formed on the protecting layer and connects with the thin metal inner connecting wire. The top layer metal structure comprises top layer metal circuit with thickness and width far larger than the thin metal inner connecting wire under the protecting layer. It can connect many portions of thin film metal structure under the protecting layer through the top layer metal structure. The product of electric resistance and capacitance for the top layer metal structure on the protecting layer is far less than the product of electric resistance and capacitance of thin film metal structure under the protecting layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95135704A TWI331788B (en) | 2005-09-23 | 2005-09-23 | Chip structure and method for fabricating the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95135704A TWI331788B (en) | 2005-09-23 | 2005-09-23 | Chip structure and method for fabricating the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200729401A true TW200729401A (en) | 2007-08-01 |
| TWI331788B TWI331788B (en) | 2010-10-11 |
Family
ID=45074661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95135704A TWI331788B (en) | 2005-09-23 | 2005-09-23 | Chip structure and method for fabricating the same |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI331788B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI396004B (en) * | 2009-08-26 | 2013-05-11 | Au Optronics Corp | Electronic apparatus |
| TWI451493B (en) * | 2007-09-29 | 2014-09-01 | 蘭姆研究公司 | Low dielectric constant material and metal process integration method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI446531B (en) | 2011-05-17 | 2014-07-21 | Au Optronics Corp | Pixel structure and electrical bridging structure |
| US20250218940A1 (en) * | 2023-12-27 | 2025-07-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and method of fabricating a semiconductor structure |
-
2005
- 2005-09-23 TW TW95135704A patent/TWI331788B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI451493B (en) * | 2007-09-29 | 2014-09-01 | 蘭姆研究公司 | Low dielectric constant material and metal process integration method |
| TWI396004B (en) * | 2009-08-26 | 2013-05-11 | Au Optronics Corp | Electronic apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI331788B (en) | 2010-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |