TW200726818A - Film forming composition, dielectric insulating film using the composition, and electronic device having the dielectric insulating film - Google Patents
Film forming composition, dielectric insulating film using the composition, and electronic device having the dielectric insulating filmInfo
- Publication number
- TW200726818A TW200726818A TW095145351A TW95145351A TW200726818A TW 200726818 A TW200726818 A TW 200726818A TW 095145351 A TW095145351 A TW 095145351A TW 95145351 A TW95145351 A TW 95145351A TW 200726818 A TW200726818 A TW 200726818A
- Authority
- TW
- Taiwan
- Prior art keywords
- composition
- film
- insulating film
- dielectric insulating
- electronic device
- Prior art date
Links
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 150000002367 halogens Chemical class 0.000 abstract 1
Landscapes
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Insulating Bodies (AREA)
- Inorganic Insulating Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
- Paints Or Removers (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
This invention relates to a composition having excellent dielectric constant, machine strength in film and long time storage for film formation in electric device; to an isolated film made of the composition; and to an electric device containing the isolated film. This invention relates to a composition for film formation, wherein the said film contains compound having cage-shape, and the amount of halogen of the film obtained by coating the composition is less than 100x10<SP>10</SP>atom/cm<SP>2</SP>; to an isolated film made of the composition; and to an electric device containing the isolated film.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005356811A JP2007161782A (en) | 2005-12-09 | 2005-12-09 | Film forming composition, insulating film and electronic device using the composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200726818A true TW200726818A (en) | 2007-07-16 |
Family
ID=38245060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095145351A TW200726818A (en) | 2005-12-09 | 2006-12-06 | Film forming composition, dielectric insulating film using the composition, and electronic device having the dielectric insulating film |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2007161782A (en) |
| TW (1) | TW200726818A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI500695B (en) * | 2010-02-03 | 2015-09-21 | Showa Denko Kk | Thermosetting composition |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5012372B2 (en) * | 2007-09-27 | 2012-08-29 | 住友ベークライト株式会社 | Organic insulating film and semiconductor device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004204010A (en) * | 2002-12-25 | 2004-07-22 | Sumitomo Chem Co Ltd | Adamantane resin and coating liquid for forming insulating film using the same |
-
2005
- 2005-12-09 JP JP2005356811A patent/JP2007161782A/en not_active Abandoned
-
2006
- 2006-12-06 TW TW095145351A patent/TW200726818A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI500695B (en) * | 2010-02-03 | 2015-09-21 | Showa Denko Kk | Thermosetting composition |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007161782A (en) | 2007-06-28 |
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