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TW200712437A - Displacement measuring device and shape inspecting device using the same - Google Patents

Displacement measuring device and shape inspecting device using the same

Info

Publication number
TW200712437A
TW200712437A TW095135532A TW95135532A TW200712437A TW 200712437 A TW200712437 A TW 200712437A TW 095135532 A TW095135532 A TW 095135532A TW 95135532 A TW95135532 A TW 95135532A TW 200712437 A TW200712437 A TW 200712437A
Authority
TW
Taiwan
Prior art keywords
light
receiving
measuring
measuring point
detected
Prior art date
Application number
TW095135532A
Other languages
Chinese (zh)
Other versions
TWI288226B (en
Inventor
Atsuro Tanuma
Masayuki Nakajima
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Publication of TW200712437A publication Critical patent/TW200712437A/en
Application granted granted Critical
Publication of TWI288226B publication Critical patent/TWI288226B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

A measuring technology is provided for measuring not only a displacement of a top point and a flat plane but also a displacement of an inclined plane by a light sensor with fly-eye function. The light sensor detects regular reflection from different angles according to the shape of a measuring point on an object to be detected. The measuring device includes light-receiving parts (200), (210) and (220). The measuring device uses light-projecting part (100) to focus the light on the measuring point on the object to be detected and receives the reflection light of a regular reflection from the measuring point. The light-receiving part is installed in a direction including the projected light and intersecting a plan perpendicular to the object to be detected. The light-receiving parts are arranged in a fan-shaped with respect to the measuring point serving as an axis. The light-receiving ranges capable of receiving light from the measuring point and occupied by the light-receiving surfaces of the light-receiving parts are arranged in a manner that the light-receiving surfaces of adjacent light-receiving parts are connected with each other.
TW095135532A 2005-09-28 2006-09-26 Displacement measuring device and shape inspecting device using the same TWI288226B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005282629A JP4275661B2 (en) 2005-09-28 2005-09-28 Displacement measuring device

Publications (2)

Publication Number Publication Date
TW200712437A true TW200712437A (en) 2007-04-01
TWI288226B TWI288226B (en) 2007-10-11

Family

ID=37958860

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095135532A TWI288226B (en) 2005-09-28 2006-09-26 Displacement measuring device and shape inspecting device using the same

Country Status (4)

Country Link
JP (1) JP4275661B2 (en)
KR (1) KR100855849B1 (en)
CN (1) CN100498217C (en)
TW (1) TWI288226B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4995041B2 (en) * 2007-11-01 2012-08-08 アンリツ株式会社 Printed solder inspection method and printed solder inspection apparatus
JP5033587B2 (en) * 2007-11-05 2012-09-26 アンリツ株式会社 Printed solder inspection apparatus and printed solder inspection method
JP2012007942A (en) * 2010-06-23 2012-01-12 Fuji Xerox Co Ltd Position measurement device
CN103363951B (en) * 2012-04-10 2015-11-25 通用电气公司 Trigonometry distance measurement system and method
KR20150107450A (en) * 2014-03-14 2015-09-23 주식회사 엔젤 Dual acting cylinder integrated with tapeless encoder

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763538A (en) * 1993-08-31 1995-03-10 Matsushita Electric Works Ltd Visual inspecting device for surface
US5859924A (en) * 1996-07-12 1999-01-12 Robotic Vision Systems, Inc. Method and system for measuring object features
US5812269A (en) * 1996-07-29 1998-09-22 General Scanning, Inc. Triangulation-based 3-D imaging and processing method and system
JP2885765B2 (en) * 1997-06-20 1999-04-26 富山日本電気株式会社 How to measure the amount of solder
US6618155B2 (en) * 2000-08-23 2003-09-09 Lmi Technologies Inc. Method and apparatus for scanning lumber and other objects
JP2002246302A (en) * 2001-02-21 2002-08-30 Nikon Corp Position detecting device and exposure device

Also Published As

Publication number Publication date
JP2007093369A (en) 2007-04-12
CN1940469A (en) 2007-04-04
JP4275661B2 (en) 2009-06-10
CN100498217C (en) 2009-06-10
KR20070035964A (en) 2007-04-02
KR100855849B1 (en) 2008-09-01
TWI288226B (en) 2007-10-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees