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TW200706870A - Acceleration sensor - Google Patents

Acceleration sensor

Info

Publication number
TW200706870A
TW200706870A TW095110831A TW95110831A TW200706870A TW 200706870 A TW200706870 A TW 200706870A TW 095110831 A TW095110831 A TW 095110831A TW 95110831 A TW95110831 A TW 95110831A TW 200706870 A TW200706870 A TW 200706870A
Authority
TW
Taiwan
Prior art keywords
section
axis direction
acceleration
weight
base
Prior art date
Application number
TW095110831A
Other languages
Chinese (zh)
Other versions
TWI291027B (en
Inventor
Yoichi Mochida
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2005/006783 external-priority patent/WO2006114832A1/en
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of TW200706870A publication Critical patent/TW200706870A/en
Application granted granted Critical
Publication of TWI291027B publication Critical patent/TWI291027B/en

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  • Pressure Sensors (AREA)

Abstract

An acceleration sensor (1) has a base (2) having an XY substrate surface in parallel to an XY plane; a frame-like beam section (4) provided so as to be lifted above the XY substrate surface of the base (2); a beam section support and fixation section for supporting, in the form of a double-end supported beam, the beam (4) at the base (2) through a support section (5a, 5b); a weight section (7, (7a, 7b)) provided so as to be lifted above the XY substrate surface of the base (2); and a connection section (8) for supporting, in a cantilever form, the weight section (7, (7a, 7b)) at the beam section (4). The weight section (7) is displaceable, by deflecting deformation of the frame-like beam (4), in the directions of the three axes that are an X-axis direction, a Y-axis direction, and a Z-axis direction. On the beam section (4) are arranged a section for detecting acceleration in the X-axis direction based on deflecting deformation caused by displacement of the weight section (7) produced by acceleration in the X-axis direction; a section for detecting acceleration in the Y-axis direction based on deflecting deformation caused by displacement of the weight section (7) produced by acceleration in the Y-axis direction; and a section for detecting acceleration in the Z-axis direction based on deflecting deformation caused by displacement of the weight section (7) produced by acceleration in the Z-axis direction.
TW095110831A 2005-04-06 2006-03-29 Acceleration sensor TWI291027B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2005/006783 WO2006114832A1 (en) 2005-04-06 2005-04-06 Acceleration sensor
PCT/JP2005/016542 WO2006112051A1 (en) 2005-04-06 2005-09-08 Acceleration sensor

Publications (2)

Publication Number Publication Date
TW200706870A true TW200706870A (en) 2007-02-16
TWI291027B TWI291027B (en) 2007-12-11

Family

ID=39460423

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095110831A TWI291027B (en) 2005-04-06 2006-03-29 Acceleration sensor

Country Status (1)

Country Link
TW (1) TWI291027B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI391663B (en) * 2009-02-25 2013-04-01 Nat Univ Tsing Hua Accelerometer

Also Published As

Publication number Publication date
TWI291027B (en) 2007-12-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees