TW200633284A - Self-aligned process to manufacture organic transistors - Google Patents
Self-aligned process to manufacture organic transistorsInfo
- Publication number
- TW200633284A TW200633284A TW094139289A TW94139289A TW200633284A TW 200633284 A TW200633284 A TW 200633284A TW 094139289 A TW094139289 A TW 094139289A TW 94139289 A TW94139289 A TW 94139289A TW 200633284 A TW200633284 A TW 200633284A
- Authority
- TW
- Taiwan
- Prior art keywords
- self
- substrate
- organic transistors
- aligned process
- manufacture organic
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 2
- 230000004888 barrier function Effects 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US62639904P | 2004-11-09 | 2004-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200633284A true TW200633284A (en) | 2006-09-16 |
Family
ID=35500534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094139289A TW200633284A (en) | 2004-11-09 | 2005-11-09 | Self-aligned process to manufacture organic transistors |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20080135836A1 (zh) |
| EP (1) | EP1815541B1 (zh) |
| JP (1) | JP2008520086A (zh) |
| KR (1) | KR101186966B1 (zh) |
| CN (1) | CN101057347B (zh) |
| AT (1) | ATE518259T1 (zh) |
| TW (1) | TW200633284A (zh) |
| WO (1) | WO2006051457A1 (zh) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5181586B2 (ja) * | 2006-09-26 | 2013-04-10 | 大日本印刷株式会社 | 有機半導体素子、有機半導体素子の製造方法、有機トランジスタアレイ、およびディスプレイ |
| US7923718B2 (en) * | 2006-11-29 | 2011-04-12 | Xerox Corporation | Organic thin film transistor with dual layer electrodes |
| JP5521270B2 (ja) * | 2007-02-21 | 2014-06-11 | 凸版印刷株式会社 | 薄膜トランジスタアレイ、薄膜トランジスタアレイの製造方法、および薄膜トランジスタアレイを用いたアクティブマトリクス型ディスプレイ |
| GB2448174B (en) * | 2007-04-04 | 2009-12-09 | Cambridge Display Tech Ltd | Organic thin film transistors |
| US8017940B2 (en) * | 2007-05-25 | 2011-09-13 | Panasonic Corporation | Organic transistor, method of forming organic transistor and organic EL display with organic transistor |
| JP5200443B2 (ja) * | 2007-07-30 | 2013-06-05 | セイコーエプソン株式会社 | 有機トランジスタ及びアクティブマトリックス基板 |
| JP5205894B2 (ja) * | 2007-09-21 | 2013-06-05 | 大日本印刷株式会社 | 有機半導体素子、有機半導体素子の製造方法、有機トランジスタアレイ、およびディスプレイ |
| GB0724774D0 (en) * | 2007-12-19 | 2008-01-30 | Cambridge Display Tech Ltd | Organic thin film transistors, active matrix organic optical devices and methods of making the same |
| WO2009097150A2 (en) * | 2008-01-31 | 2009-08-06 | Northwestern University | Solution-processed high mobility inorganic thin-film transistors |
| JP5325465B2 (ja) * | 2008-06-03 | 2013-10-23 | 株式会社日立製作所 | 薄膜トランジスタおよびそれを用いた装置 |
| KR101004734B1 (ko) * | 2008-07-29 | 2011-01-04 | 한국전자통신연구원 | 표면 에너지 제어를 이용한 유기 박막 트랜지스터 제조방법 |
| US8603922B2 (en) * | 2010-01-27 | 2013-12-10 | Creator Technology B.V. | Semiconductor device, display, electronic apparatus and method of manufacturing a semiconductor device |
| KR101309263B1 (ko) * | 2010-02-19 | 2013-09-17 | 한국전자통신연구원 | 유기 박막 트랜지스터 및 그 형성방법 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3743630B2 (ja) | 1998-03-17 | 2006-02-08 | セイコーエプソン株式会社 | 薄膜発光素子の製造方法 |
| JP4948726B2 (ja) * | 1999-07-21 | 2012-06-06 | イー インク コーポレイション | 電子ディスプレイを制御するための電子回路素子を作製する好適な方法 |
| EP1243033B1 (en) * | 1999-12-21 | 2019-12-04 | Flexenable Limited | Solution processing |
| JP4269134B2 (ja) * | 2001-11-06 | 2009-05-27 | セイコーエプソン株式会社 | 有機半導体装置 |
| GB0207134D0 (en) * | 2002-03-27 | 2002-05-08 | Cambridge Display Tech Ltd | Method of preparation of organic optoelectronic and electronic devices and devices thereby obtained |
| US6667215B2 (en) * | 2002-05-02 | 2003-12-23 | 3M Innovative Properties | Method of making transistors |
| US6946677B2 (en) * | 2002-06-14 | 2005-09-20 | Nokia Corporation | Pre-patterned substrate for organic thin film transistor structures and circuits and related method for making same |
| JP4618990B2 (ja) * | 2002-08-02 | 2011-01-26 | 株式会社半導体エネルギー研究所 | 有機薄膜トランジスタ及びその作製方法、並びに有機薄膜トランジスタを有する半導体装置 |
| JP4356309B2 (ja) * | 2002-12-03 | 2009-11-04 | セイコーエプソン株式会社 | トランジスタ、集積回路、電気光学装置、電子機器 |
| JP4713818B2 (ja) * | 2003-03-28 | 2011-06-29 | パナソニック株式会社 | 有機トランジスタの製造方法、及び有機el表示装置の製造方法 |
| US20050151129A1 (en) * | 2004-01-14 | 2005-07-14 | Rahul Gupta | Deposition of conducting polymers |
| KR101090250B1 (ko) * | 2004-10-15 | 2011-12-06 | 삼성전자주식회사 | 유기 반도체를 이용한 박막 트랜지스터 표시판 및 그 제조방법 |
-
2005
- 2005-11-04 WO PCT/IB2005/053606 patent/WO2006051457A1/en not_active Ceased
- 2005-11-04 KR KR1020077010229A patent/KR101186966B1/ko not_active Expired - Fee Related
- 2005-11-04 JP JP2007539693A patent/JP2008520086A/ja active Pending
- 2005-11-04 AT AT05799476T patent/ATE518259T1/de not_active IP Right Cessation
- 2005-11-04 US US11/718,615 patent/US20080135836A1/en not_active Abandoned
- 2005-11-04 EP EP05799476A patent/EP1815541B1/en not_active Expired - Lifetime
- 2005-11-04 CN CN2005800383629A patent/CN101057347B/zh not_active Expired - Fee Related
- 2005-11-09 TW TW094139289A patent/TW200633284A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US20080135836A1 (en) | 2008-06-12 |
| CN101057347A (zh) | 2007-10-17 |
| KR101186966B1 (ko) | 2012-10-02 |
| CN101057347B (zh) | 2013-02-20 |
| EP1815541A1 (en) | 2007-08-08 |
| EP1815541B1 (en) | 2011-07-27 |
| ATE518259T1 (de) | 2011-08-15 |
| KR20070083992A (ko) | 2007-08-24 |
| JP2008520086A (ja) | 2008-06-12 |
| WO2006051457A9 (en) | 2011-03-03 |
| WO2006051457A1 (en) | 2006-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW200633284A (en) | Self-aligned process to manufacture organic transistors | |
| US6946332B2 (en) | Forming nanoscale patterned thin film metal layers | |
| TWI266970B (en) | Scatterometry alignment for imprint lithography | |
| GB0211424D0 (en) | Circuit fabrication method | |
| JP2008523618A5 (zh) | ||
| TW200834245A (en) | Method for manufacturing semiconductor device with four-layered laminate | |
| EP2006929A2 (en) | Thin-film transistor device and manufacturing method | |
| TW200707083A (en) | Method for forming a lithograohy pattern | |
| TW200623425A (en) | Method of forming at least one thin film device | |
| TW200618308A (en) | In-line process for making thin film electronic devices | |
| DE60314610D1 (de) | Verfahren zur herstellung von organischen optoelektronischen und elektronischen bauteilen sowie dadurch erhaltene bauteile | |
| EP1785770A3 (en) | Stamp for micro/nano imprint lithography using diamond-like carbon and method of fabricating the same | |
| WO2005019503A3 (en) | Sub-micron-scale patterning method and system | |
| WO2006029414A3 (en) | Method of making a microelectronic and/or optoelectronic circuitry sheet | |
| ATE433134T1 (de) | Imprint-lithographieverfahren, gerät hierfür, sowie verfahren zur herstellung eines halbleiterchips | |
| TW200607753A (en) | Nanostructures and method of making the same | |
| WO2004006291A3 (en) | Patterning method | |
| ATE463845T1 (de) | Dünnfilmtranistor-bauelement und diesbezügliches verfahren | |
| TW200700932A (en) | Lithography process with an enhanced depth-of-depth | |
| WO2005004210A3 (en) | Imprint lithography process and sensor | |
| TW200630760A (en) | Method of forming film pattern, device, method of manufacturing device, electro-optical device, and electronic apparatus | |
| TW200512545A (en) | Method for forming a photoresist pattern using an anti-optical proximity effect | |
| EP2214056A3 (en) | Method of making a lithographic printing plate | |
| WO2006111766A3 (en) | Methods and apparatus for the manufacture of microstructures | |
| WO2005106597A3 (en) | Photopolymer plate and method for imaging the surface of a photopolymer plate |