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TW200632302A - Particle detecting method and storage medium storing program for implementing the method - Google Patents

Particle detecting method and storage medium storing program for implementing the method

Info

Publication number
TW200632302A
TW200632302A TW094142123A TW94142123A TW200632302A TW 200632302 A TW200632302 A TW 200632302A TW 094142123 A TW094142123 A TW 094142123A TW 94142123 A TW94142123 A TW 94142123A TW 200632302 A TW200632302 A TW 200632302A
Authority
TW
Taiwan
Prior art keywords
measured
implementing
storage medium
medium storing
storing program
Prior art date
Application number
TW094142123A
Other languages
Chinese (zh)
Other versions
TWI291020B (en
Inventor
Susumu Saito
Hisashi Isozaki
Takashi Kakinuma
Noritaka Nishioka
Akira Noda
Original Assignee
Tokyo Electron Ltd
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Topcon Corp filed Critical Tokyo Electron Ltd
Publication of TW200632302A publication Critical patent/TW200632302A/en
Application granted granted Critical
Publication of TWI291020B publication Critical patent/TWI291020B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486—Counting the particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.
TW094142123A 2004-11-30 2005-11-30 Particle detecting method and storage medium storing program for implementing the method TWI291020B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004347000A JP4544459B2 (en) 2004-11-30 2004-11-30 Particle detection method and particle detection program

Publications (2)

Publication Number Publication Date
TW200632302A true TW200632302A (en) 2006-09-16
TWI291020B TWI291020B (en) 2007-12-11

Family

ID=36632223

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094142123A TWI291020B (en) 2004-11-30 2005-11-30 Particle detecting method and storage medium storing program for implementing the method

Country Status (4)

Country Link
JP (1) JP4544459B2 (en)
KR (1) KR100737219B1 (en)
CN (1) CN1789971B (en)
TW (1) TWI291020B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392041B (en) * 2007-03-09 2013-04-01 東京威力科創股份有限公司 Method and system for monitoring pollutants on a substrate
TWI482959B (en) * 2008-09-05 2015-05-01 Xtralis Technologies Ltd Particle detection method and system

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5474609B2 (en) * 2010-03-02 2014-04-16 東京エレクトロン株式会社 Particle count measurement method
FI20105645A0 (en) * 2010-06-07 2010-06-07 Environics Oy APPARATUS AND METHOD FOR DETECTING BIOLOGICAL MATERIAL
JP5876248B2 (en) * 2011-08-09 2016-03-02 東京エレクトロン株式会社 Particle monitoring method and particle monitoring apparatus
WO2017016888A1 (en) * 2015-07-30 2017-02-02 Koninklijke Philips N.V. Laser sensor for particle density detection
WO2018105462A1 (en) * 2016-12-08 2018-06-14 東京エレクトロン株式会社 Signal processing method and program
TWI769514B (en) * 2020-09-01 2022-07-01 家登精密工業股份有限公司 Mask box cleaning equipment
CN118883506B (en) * 2024-09-27 2025-01-24 陕西东旺农华生物科技有限公司 A sampling device for detecting the content of biological pesticides
CN120577183B (en) * 2025-08-04 2025-12-02 成都派斯光科技有限公司 Oil smoke sensor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654288B2 (en) * 1985-06-17 1994-07-20 富士電機株式会社 Particle detector
JPH03200049A (en) * 1989-12-28 1991-09-02 Hitachi Electron Eng Co Ltd Scanning type fine particle detector
US5451787A (en) * 1993-05-04 1995-09-19 Westinghouse Electric Corporation Hazardous air pollutants monitor
US5561515A (en) * 1994-10-07 1996-10-01 Tsi Incorporated Apparatus for measuring particle sizes and velocities
US5701172A (en) * 1995-06-07 1997-12-23 Gas Research Institute Optical flowmeter
DE19628156A1 (en) * 1996-07-12 1998-01-15 Palas Gmbh Device and method for measuring a particle flow in a fluid
US5943130A (en) * 1996-10-21 1999-08-24 Insitec, Inc. In situ sensor for near wafer particle monitoring in semiconductor device manufacturing equipment
JP3454173B2 (en) * 1998-11-09 2003-10-06 三菱電機株式会社 Optical dust sensor optical system
JP4320924B2 (en) * 1999-06-15 2009-08-26 東京エレクトロン株式会社 Particle measuring device and processing device
US6794671B2 (en) * 2002-07-17 2004-09-21 Particle Sizing Systems, Inc. Sensors and methods for high-sensitivity optical particle counting and sizing
CN2570775Y (en) * 2002-08-08 2003-09-03 上海市激光技术研究所 Liquid corpuscular counter
CN1216283C (en) * 2003-01-10 2005-08-24 东南大学 Laser light scattering dust concentration on line measuring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392041B (en) * 2007-03-09 2013-04-01 東京威力科創股份有限公司 Method and system for monitoring pollutants on a substrate
TWI482959B (en) * 2008-09-05 2015-05-01 Xtralis Technologies Ltd Particle detection method and system

Also Published As

Publication number Publication date
KR100737219B1 (en) 2007-07-09
JP2006153745A (en) 2006-06-15
CN1789971B (en) 2010-05-12
JP4544459B2 (en) 2010-09-15
CN1789971A (en) 2006-06-21
TWI291020B (en) 2007-12-11
KR20060060627A (en) 2006-06-05

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees