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TW200631915A - Apparatus of cleaning glass substrate and method of cleaning glass substrate - Google Patents

Apparatus of cleaning glass substrate and method of cleaning glass substrate

Info

Publication number
TW200631915A
TW200631915A TW095104497A TW95104497A TW200631915A TW 200631915 A TW200631915 A TW 200631915A TW 095104497 A TW095104497 A TW 095104497A TW 95104497 A TW95104497 A TW 95104497A TW 200631915 A TW200631915 A TW 200631915A
Authority
TW
Taiwan
Prior art keywords
glass substrate
cleaning glass
injection device
cleaning
liquid
Prior art date
Application number
TW095104497A
Other languages
Chinese (zh)
Other versions
TWI417264B (en
Inventor
Naoki Nishimura
Hirokazu Okumura
Original Assignee
Nippon Electric Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co filed Critical Nippon Electric Glass Co
Publication of TW200631915A publication Critical patent/TW200631915A/en
Application granted granted Critical
Publication of TWI417264B publication Critical patent/TWI417264B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Surface Treatment Of Glass (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

An apparatus for cleaning glass substrate having a liquid injection device 5 is provided. The liquid injection device 5 jets cleaning liquid 7 at a pressure that can clean up foreign materials inside a small concave at a polished edge surface 3a of glass substrate 3 and that can prevent the glass substrate 3 from being broken at the same time. The liquid injection device 5 is preferably formed by the cleaning liquid 7 contacting the whole area of the polished edge surface 3a of the glass substrate 3; furthermore, the injection pressure is set at 9.8~24.5MPa.
TW095104497A 2005-02-16 2006-02-10 Glass substrate cleaning device and glass substrate cleaning method TWI417264B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005039378A JP4998815B2 (en) 2005-02-16 2005-02-16 Glass substrate cleaning apparatus and glass substrate cleaning method

Publications (2)

Publication Number Publication Date
TW200631915A true TW200631915A (en) 2006-09-16
TWI417264B TWI417264B (en) 2013-12-01

Family

ID=36916320

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095104497A TWI417264B (en) 2005-02-16 2006-02-10 Glass substrate cleaning device and glass substrate cleaning method

Country Status (5)

Country Link
JP (1) JP4998815B2 (en)
KR (2) KR101373644B1 (en)
CN (1) CN101060938B (en)
TW (1) TWI417264B (en)
WO (1) WO2006087910A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9283652B2 (en) 2012-09-05 2016-03-15 Corning Precision Materials Co., Ltd. Edge grinding apparatus and method for grinding glass substrate

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5183811B2 (en) * 2010-06-29 2013-04-17 安瀚視特股▲ふん▼有限公司 Manufacturing method of glass substrate for liquid crystal display device
JP2013043106A (en) * 2011-08-23 2013-03-04 Dainippon Screen Mfg Co Ltd Substrate treatment apparatus
KR101466005B1 (en) * 2013-06-28 2014-11-27 주식회사 위스코하이텍 Apparatus for etching substrate
CN107614129A (en) * 2015-04-29 2018-01-19 康宁股份有限公司 The apparatus and method cleaned to sheet glass
TWI626091B (en) * 2016-10-28 2018-06-11 旭東機械工業股份有限公司 Panel cleaning system
JP6920849B2 (en) * 2017-03-27 2021-08-18 株式会社荏原製作所 Substrate processing method and equipment
EP3636594B1 (en) * 2017-06-08 2023-06-14 Tokuyama Corporation Cleaning device
CN107466165A (en) * 2017-09-18 2017-12-12 瑞华高科技电子工业园(厦门)有限公司 A kind of method of the FR4 plate reinforcement of flexible PCB
JP6709314B2 (en) * 2018-06-13 2020-06-10 シャープ株式会社 Liquid crystal substrate manufacturing method and liquid crystal substrate processing apparatus
JP7519986B2 (en) * 2019-02-28 2024-07-22 日東電工株式会社 Glass Film
CN110756483A (en) * 2019-09-19 2020-02-07 上海提牛机电设备有限公司 A wafer grabbing mechanism cleaning device
CN112903718A (en) * 2021-01-20 2021-06-04 山西光兴光电科技有限公司 Glass substrate fragment detection system and method
CN113383972A (en) * 2021-07-15 2021-09-14 浙江德菲洛智能机械制造有限公司 Air-blowing type multifunctional fruit and vegetable online cleaning device
CN115281556B (en) * 2022-08-04 2024-05-24 河南峰帆安装工程有限公司 Adaptive special-shaped glass curtain wall cleaning device based on image processing
CN115889286A (en) * 2022-10-24 2023-04-04 深圳市易天自动化设备股份有限公司 Terminal Cleaning Equipment
TWI841216B (en) * 2023-02-01 2024-05-01 日商旭燦納克股份有限公司 High pressure cleaning device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180156A (en) * 1984-09-28 1986-04-23 Hoya Corp Cleaning device
JPH09227170A (en) * 1996-02-19 1997-09-02 Fujitsu Ltd Glass substrate cleaning method
JP3527075B2 (en) * 1996-09-30 2004-05-17 Ｈｏｙａ株式会社 Glass substrate for magnetic recording medium, magnetic recording medium, and method for producing them
JP3832923B2 (en) * 1997-03-28 2006-10-11 株式会社ディスコ Cleaning device
DE19941729A1 (en) * 1999-09-01 2001-03-08 Fleissner Maschf Gmbh Co Nozzle body for generating the finest liquid jets z. B. on water needling devices
JP2003002694A (en) * 2001-06-21 2003-01-08 Shimada Phys & Chem Ind Co Ltd Post-sealing single wafer cleaning apparatus and cleaning method
JP2003007668A (en) 2001-06-27 2003-01-10 Sumitomo Mitsubishi Silicon Corp Apparatus and method for cleaning semiconductor wafer
JP4370611B2 (en) * 2002-04-17 2009-11-25 日本電気硝子株式会社 Flat glass for flat panel display
JP2004074021A (en) * 2002-08-19 2004-03-11 Dainippon Screen Mfg Co Ltd Substrate processing apparatus and substrate cleaning unit
JP2004363453A (en) * 2003-06-06 2004-12-24 Tokyo Seimitsu Co Ltd Substrate washing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9283652B2 (en) 2012-09-05 2016-03-15 Corning Precision Materials Co., Ltd. Edge grinding apparatus and method for grinding glass substrate

Also Published As

Publication number Publication date
CN101060938A (en) 2007-10-24
KR20130061775A (en) 2013-06-11
TWI417264B (en) 2013-12-01
WO2006087910A1 (en) 2006-08-24
CN101060938B (en) 2012-10-31
JP4998815B2 (en) 2012-08-15
KR20070114691A (en) 2007-12-04
KR101373644B1 (en) 2014-03-12
JP2006225189A (en) 2006-08-31

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees