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TW200639930A - Inner tube for furnace and furnace apparatus using the same - Google Patents

Inner tube for furnace and furnace apparatus using the same

Info

Publication number
TW200639930A
TW200639930A TW094115370A TW94115370A TW200639930A TW 200639930 A TW200639930 A TW 200639930A TW 094115370 A TW094115370 A TW 094115370A TW 94115370 A TW94115370 A TW 94115370A TW 200639930 A TW200639930 A TW 200639930A
Authority
TW
Taiwan
Prior art keywords
inner tube
furnace
same
boat
exhaust
Prior art date
Application number
TW094115370A
Other languages
Chinese (zh)
Other versions
TWI260679B (en
Inventor
Chao-Wen Wang
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW94115370A priority Critical patent/TWI260679B/en
Application granted granted Critical
Publication of TWI260679B publication Critical patent/TWI260679B/en
Publication of TW200639930A publication Critical patent/TW200639930A/en

Links

Abstract

A furnace apparatus is disclosed, comprising: a boat for carrying at least one semiconductor wafer; a inner tube for encapsulating the boat and defining a reacting region; a gas injector for injecting gas reactants disposed in the inner tube; and a outer tube with a exhaust at one side thereof, wherein the inner tube is a hollow cylinder with a bottom opening and at least one slit opening on one side thereon, allowing the reactant gases flow through the slit opening to the exhaust.
TW94115370A 2005-05-12 2005-05-12 Inner tube for furnace and furnace apparatus using the same TWI260679B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94115370A TWI260679B (en) 2005-05-12 2005-05-12 Inner tube for furnace and furnace apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94115370A TWI260679B (en) 2005-05-12 2005-05-12 Inner tube for furnace and furnace apparatus using the same

Publications (2)

Publication Number Publication Date
TWI260679B TWI260679B (en) 2006-08-21
TW200639930A true TW200639930A (en) 2006-11-16

Family

ID=37874826

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94115370A TWI260679B (en) 2005-05-12 2005-05-12 Inner tube for furnace and furnace apparatus using the same

Country Status (1)

Country Link
TW (1) TWI260679B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112030140A (en) * 2020-06-05 2020-12-04 中国科学院微电子研究所 A vertical chemical vapor deposition furnace and its application
CN113373522A (en) * 2021-05-31 2021-09-10 北海惠科半导体科技有限公司 Diffusion device and diffusion system
WO2023138210A1 (en) * 2022-01-24 2023-07-27 盛美半导体设备(上海)股份有限公司 Furnace tube for thin film deposition, thin film deposition method and processing apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101760316B1 (en) 2015-09-11 2017-07-21 주식회사 유진테크 Substrate Processing Apparatus
CN112575312B (en) * 2019-09-30 2023-08-29 长鑫存储技术有限公司 Film preparation equipment and film preparation method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112030140A (en) * 2020-06-05 2020-12-04 中国科学院微电子研究所 A vertical chemical vapor deposition furnace and its application
CN113373522A (en) * 2021-05-31 2021-09-10 北海惠科半导体科技有限公司 Diffusion device and diffusion system
WO2023138210A1 (en) * 2022-01-24 2023-07-27 盛美半导体设备(上海)股份有限公司 Furnace tube for thin film deposition, thin film deposition method and processing apparatus

Also Published As

Publication number Publication date
TWI260679B (en) 2006-08-21

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Legal Events

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