[go: up one dir, main page]

TW200637932A - Apparatus for manufacturing a carbon nanotube array - Google Patents

Apparatus for manufacturing a carbon nanotube array

Info

Publication number
TW200637932A
TW200637932A TW094113907A TW94113907A TW200637932A TW 200637932 A TW200637932 A TW 200637932A TW 094113907 A TW094113907 A TW 094113907A TW 94113907 A TW94113907 A TW 94113907A TW 200637932 A TW200637932 A TW 200637932A
Authority
TW
Taiwan
Prior art keywords
carbon nanotube
nanotube array
manufacturing
gas
gas inlet
Prior art date
Application number
TW094113907A
Other languages
Chinese (zh)
Other versions
TWI262958B (en
Inventor
Kai-Li Jiang
Kai Liu
Shou-Shan Fan
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW94113907A priority Critical patent/TWI262958B/en
Application granted granted Critical
Publication of TWI262958B publication Critical patent/TWI262958B/en
Publication of TW200637932A publication Critical patent/TW200637932A/en

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)

Abstract

The invention relates to an apparatus for manufacturing a carbon nanotube array. The apparatus includes a reaction chamber which includes a first gas inlet, a second gas inlet, a gas outlet, a gas conduit and a support component for supporting a substrate with a carbon nanotube array formed thereon. One end of the gas conduit is jointed with the second gas inlet and the other end is adjacent to the support component.
TW94113907A 2005-04-29 2005-04-29 Apparatus for manufacturing a carbon nanotube array TWI262958B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94113907A TWI262958B (en) 2005-04-29 2005-04-29 Apparatus for manufacturing a carbon nanotube array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94113907A TWI262958B (en) 2005-04-29 2005-04-29 Apparatus for manufacturing a carbon nanotube array

Publications (2)

Publication Number Publication Date
TWI262958B TWI262958B (en) 2006-10-01
TW200637932A true TW200637932A (en) 2006-11-01

Family

ID=37966185

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94113907A TWI262958B (en) 2005-04-29 2005-04-29 Apparatus for manufacturing a carbon nanotube array

Country Status (1)

Country Link
TW (1) TWI262958B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI413148B (en) * 2009-12-25 2013-10-21 Tatung Co Electron field emission source and manufacturing method thereof
TWI636009B (en) * 2017-06-07 2018-09-21 鴻海精密工業股份有限公司 An apparatus for fabrication of carbon nanotube array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI413148B (en) * 2009-12-25 2013-10-21 Tatung Co Electron field emission source and manufacturing method thereof
TWI636009B (en) * 2017-06-07 2018-09-21 鴻海精密工業股份有限公司 An apparatus for fabrication of carbon nanotube array

Also Published As

Publication number Publication date
TWI262958B (en) 2006-10-01

Similar Documents

Publication Publication Date Title
WO2006113680A3 (en) Compact device for generating pure hydrogen
WO2008089168A3 (en) Plasma immersion chamber
TW200728495A (en) Method of deposite thin film with CVD reactor and the gas inlet element for a CVD reactor
WO2008096699A1 (en) Apparatus and process for production of oriented carbon nanotube
WO2010118051A3 (en) Semiconductor processing reactor and components thereof
TW200504800A (en) Showerhead assembly and apparatus for manufacturing semiconductor device having the same
WO2007084176A8 (en) Synthesis of small diameter single-walled carbon nanotubes
GB2516372A (en) High quality large scale single and multilayer graphene production by chemical vapor deposition
WO2007098071A3 (en) Process tuning gas injection from the substrate edge
TW200943455A (en) Apparatus and method for processing substrate
WO2009031829A3 (en) Substrate processing apparatus
WO2008131890A3 (en) Sheet resistor in an exhaust pipe
WO2008005754A3 (en) Modular chemical vapor deposition (cvd) reactor
WO2006083357A3 (en) Methods and devices for making carbon nanotubes and compositions thereof
WO2008117781A1 (en) Cvd film-forming apparatus
TW200739018A (en) Sealing device for a gas inlet to an oven or the like
GB2476916A (en) A process for producing carbon nanotubes (CNTs)
ZA200800455B (en) Catalyst for hydrogen production from water gas shift reaction
NL1034604A1 (en) Removal of hydrogen cyanide from synthesis gas.
TWI262958B (en) Apparatus for manufacturing a carbon nanotube array
WO2009016477A3 (en) A process for producing small molecular weight organic compounds from carbonaceous material
WO2009020958A3 (en) Production process for single-walled carbon nanotubes
WO2010105891A3 (en) Burner assembly
ATE476538T1 (en) EPITAXIAL REACTOR WITH DEVICE FOR INTRODUCING REACTION GASES
EP1878968A4 (en) Fuel activation apparatus for methane gas

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees