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TW200637629A - Apparatus for inhibiting the propagation of a flame front - Google Patents

Apparatus for inhibiting the propagation of a flame front

Info

Publication number
TW200637629A
TW200637629A TW095107680A TW95107680A TW200637629A TW 200637629 A TW200637629 A TW 200637629A TW 095107680 A TW095107680 A TW 095107680A TW 95107680 A TW95107680 A TW 95107680A TW 200637629 A TW200637629 A TW 200637629A
Authority
TW
Taiwan
Prior art keywords
flame
waste stream
pressure
pumping mechanism
combustion chamber
Prior art date
Application number
TW095107680A
Other languages
Chinese (zh)
Inventor
Christopher Mark Bailey
Clive Marcus Lloyd Tunna
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Publication of TW200637629A publication Critical patent/TW200637629A/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62C—FIRE-FIGHTING
    • A62C4/00—Flame traps allowing passage of gas but not of flame or explosion wave
    • A62C4/02—Flame traps allowing passage of gas but not of flame or explosion wave in gas-pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Incineration Of Waste (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Glass Compositions (AREA)
  • Looms (AREA)

Abstract

Apparatus is described for inhibiting the propagation of a flame front ignited by a pumping mechanism drawing a waste stream from a process chamber. A combustion chamber comprises an inlet for receiving the waste stream exhaust from the pumping mechanism and means for generating a flame for burning a flammable component of the waste stream. A pressure detector detects a pressure at a location through which the waste stream is drawn by the pumping mechanism, and a flame detector detects the presence of a flame in the combustion chamber. A controller regulates the delivery of at least one process fluid to the process chamber if the detected pressure is greater than a pressure above which the flame front can be sustained by the waste stream, or if there is no flame present in the combustion chamber.
TW095107680A 2005-03-07 2006-03-07 Apparatus for inhibiting the propagation of a flame front TW200637629A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0504553.9A GB0504553D0 (en) 2005-03-07 2005-03-07 Apparatus for inhibiting the propagation of a flame front

Publications (1)

Publication Number Publication Date
TW200637629A true TW200637629A (en) 2006-11-01

Family

ID=34451843

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095107680A TW200637629A (en) 2005-03-07 2006-03-07 Apparatus for inhibiting the propagation of a flame front

Country Status (8)

Country Link
US (1) US20080273995A1 (en)
EP (1) EP1856416B1 (en)
JP (1) JP5502318B2 (en)
KR (1) KR101244492B1 (en)
AT (1) ATE542053T1 (en)
GB (1) GB0504553D0 (en)
TW (1) TW200637629A (en)
WO (1) WO2006095132A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101678407A (en) * 2007-05-25 2010-03-24 应用材料股份有限公司 Method and apparatus for efficient operation of an abatement system
JP5748523B2 (en) * 2011-03-30 2015-07-15 エドワーズ株式会社 Abatement equipment
GB2500610A (en) * 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
US9411341B2 (en) * 2012-05-24 2016-08-09 Globalfoundries Singapore Pte. Ltd. Vacuum pump controller
EP3112687B1 (en) * 2015-06-29 2020-04-22 Pfeiffer Vacuum Gmbh Detection of the circulation of a flow of auxiliary gas that is supplied to a vacuum pump
KR102748085B1 (en) * 2015-08-17 2024-12-31 아이커 시스템즈, 인크. Fluid Control System
JP6685204B2 (en) * 2016-08-26 2020-04-22 東京エレクトロン株式会社 Safety device, safety system and method for making combustion abatement device safe
US10690057B2 (en) 2017-04-25 2020-06-23 General Electric Company Turbomachine combustor end cover assembly with flame detector sight tube collinear with a tube of a bundled tube fuel nozzle
GB2561899B (en) * 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
US11517831B2 (en) * 2019-06-25 2022-12-06 George Andrew Rabroker Abatement system for pyrophoric chemicals and method of use
GB2594078B (en) * 2020-04-16 2024-10-16 Edwards Ltd Flammable gas dilution
GB2595938A (en) 2020-06-12 2021-12-15 Edwards Ltd Flammable gas dilution

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616884B1 (en) * 1987-06-19 1991-05-10 Air Liquide PROCESS FOR THE TREATMENT OF GASEOUS EFFLUENTS FROM THE MANUFACTURE OF ELECTRONIC COMPONENTS AND AN INCINERATION APPARATUS FOR IMPLEMENTING SAME
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US6022195A (en) * 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
GB9906439D0 (en) * 1999-03-19 1999-05-12 Boc Group Plc Improvements in flame arresters

Also Published As

Publication number Publication date
ATE542053T1 (en) 2012-02-15
KR20070110071A (en) 2007-11-15
KR101244492B1 (en) 2013-03-18
EP1856416B1 (en) 2012-01-18
JP2008531979A (en) 2008-08-14
EP1856416A1 (en) 2007-11-21
WO2006095132A1 (en) 2006-09-14
JP5502318B2 (en) 2014-05-28
GB0504553D0 (en) 2005-04-13
US20080273995A1 (en) 2008-11-06

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