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TW200624579A - Uniform nano-composite filmy element and method of making the same - Google Patents

Uniform nano-composite filmy element and method of making the same

Info

Publication number
TW200624579A
TW200624579A TW093141881A TW93141881A TW200624579A TW 200624579 A TW200624579 A TW 200624579A TW 093141881 A TW093141881 A TW 093141881A TW 93141881 A TW93141881 A TW 93141881A TW 200624579 A TW200624579 A TW 200624579A
Authority
TW
Taiwan
Prior art keywords
filmy
composite
making
same
uniform nano
Prior art date
Application number
TW093141881A
Other languages
Chinese (zh)
Inventor
Wei-Chih Hsu
Song-Yeu Tsai
Mei-Rurng Tseng
Min-Jen Deng
Yung-Ching Wang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW093141881A priority Critical patent/TW200624579A/en
Publication of TW200624579A publication Critical patent/TW200624579A/en

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Abstract

A uniform nano-composite filmy element and method of making the same are disclosed herein. A dielectric target and a metal target are co-sputtered on a substrate to get the nano-composite filmy element, which is formed by the dielectric material and the metal are distributed evenly. The distribution and size of the dielectric material and the metal can be controlled by means of regulating the power of the power of co-sputtering.
TW093141881A 2004-12-31 2004-12-31 Uniform nano-composite filmy element and method of making the same TW200624579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW093141881A TW200624579A (en) 2004-12-31 2004-12-31 Uniform nano-composite filmy element and method of making the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093141881A TW200624579A (en) 2004-12-31 2004-12-31 Uniform nano-composite filmy element and method of making the same

Publications (1)

Publication Number Publication Date
TW200624579A true TW200624579A (en) 2006-07-16

Family

ID=57808643

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093141881A TW200624579A (en) 2004-12-31 2004-12-31 Uniform nano-composite filmy element and method of making the same

Country Status (1)

Country Link
TW (1) TW200624579A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114753150A (en) * 2022-05-12 2022-07-15 广东欣丰科技有限公司 Conductive fabric and manufacturing method and application thereof
TWI873679B (en) * 2023-06-12 2025-02-21 崑山科技大學 Hydrogen sensor with nickel-doped vanadium pentoxide film and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114753150A (en) * 2022-05-12 2022-07-15 广东欣丰科技有限公司 Conductive fabric and manufacturing method and application thereof
CN114753150B (en) * 2022-05-12 2024-05-14 广东欣丰科技有限公司 Conductive fabric and manufacturing method and application thereof
TWI873679B (en) * 2023-06-12 2025-02-21 崑山科技大學 Hydrogen sensor with nickel-doped vanadium pentoxide film and manufacturing method thereof

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