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TW200619831A - Method for housing large-size pellicle - Google Patents

Method for housing large-size pellicle

Info

Publication number
TW200619831A
TW200619831A TW093137548A TW93137548A TW200619831A TW 200619831 A TW200619831 A TW 200619831A TW 093137548 A TW093137548 A TW 093137548A TW 93137548 A TW93137548 A TW 93137548A TW 200619831 A TW200619831 A TW 200619831A
Authority
TW
Taiwan
Prior art keywords
pellicle
frame
size
tray
sensitive adhesive
Prior art date
Application number
TW093137548A
Other languages
Chinese (zh)
Other versions
TWI270745B (en
Inventor
Hozuma Kuriyama
Ichiro Wakimoto
Original Assignee
Asahi Kasei Denshi Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kasei Denshi Kk filed Critical Asahi Kasei Denshi Kk
Publication of TW200619831A publication Critical patent/TW200619831A/en
Application granted granted Critical
Publication of TWI270745B publication Critical patent/TWI270745B/en

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Disclosed is a method for housing a large-size pellicle. The comprising elements include a frame, a pellicle adhered to the upper edge of the frame, an pressure-sensitive adhesive tape coated on the lower edge of the frame, and a protective film adhered to the bottom of the frame for protecting the pressure-sensitive adhesive tape. A pellicle with size larger than 1000 cm2 is housed in a case formed by a tray and a cover. The outside of the outer edge of a protective film for the large size pellicle is provided with a protruding press margin having a specified dimension. When the large size pellicle is mounted on the tray of the pellicle housing case, the press margin is adhered and fixed with the pressure-sensitive adhesive tape to the surface of the tray.
TW93137548A 2003-06-04 2004-12-03 Method of installing a large pellicle TWI270745B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003159737A JP4497845B2 (en) 2003-06-04 2003-06-04 Large pellicle storage method

Publications (2)

Publication Number Publication Date
TW200619831A true TW200619831A (en) 2006-06-16
TWI270745B TWI270745B (en) 2007-01-11

Family

ID=34052721

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93137548A TWI270745B (en) 2003-06-04 2004-12-03 Method of installing a large pellicle

Country Status (2)

Country Link
JP (1) JP4497845B2 (en)
TW (1) TWI270745B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006059388A1 (en) * 2004-12-02 2008-08-07 旭化成エレクトロニクス株式会社 Storage method for large pellicle
JP4677632B2 (en) * 2005-07-08 2011-04-27 レーザーテック株式会社 Pellicle liner or pellicle peeling apparatus, peeling method, and pattern substrate manufacturing method
JP5269438B2 (en) * 2007-03-13 2013-08-21 旭化成イーマテリアルズ株式会社 Protective film for large pellicle and storage method for large pellicle
KR101191055B1 (en) * 2007-07-06 2012-10-15 아사히 가세이 이-매터리얼즈 가부시키가이샤 Frame of large pellicle and grasping method of frame
JP5586560B2 (en) 2011-10-28 2014-09-10 信越化学工業株式会社 Pellicle container
JP5586559B2 (en) * 2011-10-28 2014-09-10 信越化学工業株式会社 Pellicle container
JP5767730B2 (en) * 2014-03-20 2015-08-19 旭化成イーマテリアルズ株式会社 How to remove a large pellicle from a storage container
JP6351178B2 (en) 2015-07-13 2018-07-04 信越化学工業株式会社 Pellicle storage container and pellicle removal method
JP7017900B2 (en) * 2016-11-11 2022-02-09 旭化成株式会社 Pellicle structure, pellicle storage and fixing method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0542073Y2 (en) * 1985-06-05 1993-10-22
JPS62143948U (en) * 1986-03-07 1987-09-10
JP3797753B2 (en) * 1997-06-30 2006-07-19 旭化成エレクトロニクス株式会社 Pellicle storage structure and storage method
JPH1138598A (en) * 1997-07-23 1999-02-12 Mitsui Chem Inc Pellicle and its housing case
JP3938224B2 (en) * 1997-08-04 2007-06-27 旭化成エレクトロニクス株式会社 Pellicle storage structure
JPH11202477A (en) * 1998-01-14 1999-07-30 Oki Electric Ind Co Ltd Fitting structure for pellicle
JP2002287332A (en) * 2001-03-26 2002-10-03 Mitsubishi Electric Corp Mask case

Also Published As

Publication number Publication date
TWI270745B (en) 2007-01-11
JP2004361647A (en) 2004-12-24
JP4497845B2 (en) 2010-07-07

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Legal Events

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