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TW200603238A - Suction unit assembly for panel treatment system - Google Patents

Suction unit assembly for panel treatment system

Info

Publication number
TW200603238A
TW200603238A TW094121411A TW94121411A TW200603238A TW 200603238 A TW200603238 A TW 200603238A TW 094121411 A TW094121411 A TW 094121411A TW 94121411 A TW94121411 A TW 94121411A TW 200603238 A TW200603238 A TW 200603238A
Authority
TW
Taiwan
Prior art keywords
treatment system
unit
suction unit
pressure fluid
unit assembly
Prior art date
Application number
TW094121411A
Other languages
English (en)
Other versions
TWI270923B (en
Inventor
Yong-Seok Park
Original Assignee
Dms Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dms Co Ltd filed Critical Dms Co Ltd
Publication of TW200603238A publication Critical patent/TW200603238A/zh
Application granted granted Critical
Publication of TWI270923B publication Critical patent/TWI270923B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/52—Recovery of material from discharge tubes or lamps
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Liquid Crystal (AREA)
  • Manipulator (AREA)
TW094121411A 2004-07-13 2005-06-27 Suction unit assembly for panel treatment system TWI270923B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040054421A KR100568837B1 (ko) 2004-07-13 2004-07-13 흡입유니트 어셈블리

Publications (2)

Publication Number Publication Date
TW200603238A true TW200603238A (en) 2006-01-16
TWI270923B TWI270923B (en) 2007-01-11

Family

ID=35893590

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094121411A TWI270923B (en) 2004-07-13 2005-06-27 Suction unit assembly for panel treatment system

Country Status (4)

Country Link
JP (1) JP4354434B2 (zh)
KR (1) KR100568837B1 (zh)
CN (1) CN100551554C (zh)
TW (1) TWI270923B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100853387B1 (ko) * 2007-05-17 2008-08-21 두손산업 (주) 기판 제조 공정상의 공정액 흡입장치
JP2012026736A (ja) * 2010-07-20 2012-02-09 Mitsutoyo Corp 表面粗さ試験機のスキッド洗浄方法
KR102232691B1 (ko) * 2013-06-26 2021-03-29 삼성디스플레이 주식회사 기판 처리장치, 이를 구비하는 증착장치, 기판 처리방법 및 증착방법
CN106353902B (zh) * 2016-11-08 2019-03-22 武汉华星光电技术有限公司 一种液晶面板移载装置及液晶面板切割系统
KR102018271B1 (ko) * 2018-08-09 2019-09-05 (주)한빛테크놀로지 균일한 에칭 환경 조성을 위한 에칭 장치
KR102833192B1 (ko) * 2023-11-21 2025-07-10 이한주 흡입 방식을 이용한 기판 건조장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2567191Y2 (ja) * 1992-04-13 1998-03-30 株式会社伸興 パネル体の除塵装置
JP2003145064A (ja) * 2001-11-12 2003-05-20 Tokyo Electron Ltd ２流体ジェットノズル及び基板洗浄装置

Also Published As

Publication number Publication date
JP4354434B2 (ja) 2009-10-28
JP2006026634A (ja) 2006-02-02
CN1721092A (zh) 2006-01-18
KR100568837B1 (ko) 2006-04-10
TWI270923B (en) 2007-01-11
KR20060005577A (ko) 2006-01-18
CN100551554C (zh) 2009-10-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees