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TW200601540A - Electrostatic discharge (ESD) protection MOS device and ESD circuitry thereof - Google Patents

Electrostatic discharge (ESD) protection MOS device and ESD circuitry thereof

Info

Publication number
TW200601540A
TW200601540A TW093117816A TW93117816A TW200601540A TW 200601540 A TW200601540 A TW 200601540A TW 093117816 A TW093117816 A TW 093117816A TW 93117816 A TW93117816 A TW 93117816A TW 200601540 A TW200601540 A TW 200601540A
Authority
TW
Taiwan
Prior art keywords
well
esd
nmos device
isolation structure
epitaxial layer
Prior art date
Application number
TW093117816A
Other languages
Chinese (zh)
Other versions
TWI244195B (en
Inventor
Chih-Nan Cheng
Yii-Chian Lu
Fang-Mei Chao
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW93117816A priority Critical patent/TWI244195B/en
Application granted granted Critical
Publication of TWI244195B publication Critical patent/TWI244195B/en
Publication of TW200601540A publication Critical patent/TW200601540A/en

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  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

An NMOS device having protection against electrostatic discharge. The NMOS device includes a P-substrate, a P-epitaxial layer overlying the P-substrate, a P-well in the P-epitaxial layer, an N-well in the P-epitaxial layer and encompassing the P-well, an N-Buried Layer (NBL) underneath the P-well and bordering the N-well. The P-well is fully isolated by the N-well and the NBL. The NMOS device further includes a first isolation structure consisting of a gate-insulating layer connected with a field oxide layer, which is formed on the P-epitaxial layer. A gate overlies the first isolation structure. A second isolation structure laterally spaced apart from the first isolation structure is approximately situated on the N-well. An N+ source doping region, which functions as a source of the NMOS device, is disposed in the P-well. An N+ drain doping region, which functions as a drain of the NMOS device, is disposed in the N-well.
TW93117816A 2004-06-18 2004-06-18 Electrostatic discharge (ESD) protection MOS device and ESD circuitry thereof TWI244195B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93117816A TWI244195B (en) 2004-06-18 2004-06-18 Electrostatic discharge (ESD) protection MOS device and ESD circuitry thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93117816A TWI244195B (en) 2004-06-18 2004-06-18 Electrostatic discharge (ESD) protection MOS device and ESD circuitry thereof

Publications (2)

Publication Number Publication Date
TWI244195B TWI244195B (en) 2005-11-21
TW200601540A true TW200601540A (en) 2006-01-01

Family

ID=37154730

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93117816A TWI244195B (en) 2004-06-18 2004-06-18 Electrostatic discharge (ESD) protection MOS device and ESD circuitry thereof

Country Status (1)

Country Link
TW (1) TWI244195B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395315B (en) * 2010-04-26 2013-05-01 立錡科技股份有限公司 Structure that provides ESD protection on the high voltage path of the ultra high voltage component
TWI467728B (en) * 2011-08-24 2015-01-01 Himax Tech Ltd Electrostatic discharge (esd) protection element and esd circuit thereof
TWI775688B (en) * 2021-11-29 2022-08-21 世界先進積體電路股份有限公司 Electrostatic discharge protection structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395315B (en) * 2010-04-26 2013-05-01 立錡科技股份有限公司 Structure that provides ESD protection on the high voltage path of the ultra high voltage component
TWI467728B (en) * 2011-08-24 2015-01-01 Himax Tech Ltd Electrostatic discharge (esd) protection element and esd circuit thereof
TWI775688B (en) * 2021-11-29 2022-08-21 世界先進積體電路股份有限公司 Electrostatic discharge protection structure

Also Published As

Publication number Publication date
TWI244195B (en) 2005-11-21

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