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TW200605129A - Vacuum gauge - Google Patents

Vacuum gauge

Info

Publication number
TW200605129A
TW200605129A TW093122896A TW93122896A TW200605129A TW 200605129 A TW200605129 A TW 200605129A TW 093122896 A TW093122896 A TW 093122896A TW 93122896 A TW93122896 A TW 93122896A TW 200605129 A TW200605129 A TW 200605129A
Authority
TW
Taiwan
Prior art keywords
educed
ion
electrode
shield electrode
reflector
Prior art date
Application number
TW093122896A
Other languages
Chinese (zh)
Other versions
TWI328243B (en
Inventor
Peng Liu
Yang Wei
Lei-Mei Sheng
Liang Liu
Zhao-Fu Hu
Cai-Lin Guo
Pi-Jin Chen
Shou-Shan Fan
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW93122896A priority Critical patent/TWI328243B/en
Publication of TW200605129A publication Critical patent/TW200605129A/en
Application granted granted Critical
Publication of TWI328243B publication Critical patent/TWI328243B/en

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Abstract

A vacuum gauge includes: a cathode unit, an anode, a shield electrode, an ion educed electrode, a reflector and a collector. The cathode unit is positioned corresponding to one end of the shield electrode, and the ion educed electrode is positioned corresponding to an opposite end of the shield electrode. An ion educed hole is defined in the middle of the ion educed electrode. The reflector has a curving surface which surrounds a side of the shield electrode closed to the ion educed electrode. The collector is positioned on the bottom of the reflector, and pointed to the ion educed hole. The anode is fixed into the middle of shield electrode.
TW93122896A 2004-07-30 2004-07-30 Vacuum gauge TWI328243B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93122896A TWI328243B (en) 2004-07-30 2004-07-30 Vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93122896A TWI328243B (en) 2004-07-30 2004-07-30 Vacuum gauge

Publications (2)

Publication Number Publication Date
TW200605129A true TW200605129A (en) 2006-02-01
TWI328243B TWI328243B (en) 2010-08-01

Family

ID=46551319

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93122896A TWI328243B (en) 2004-07-30 2004-07-30 Vacuum gauge

Country Status (1)

Country Link
TW (1) TWI328243B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI415158B (en) * 2011-01-10 2013-11-11 Hon Hai Prec Ind Co Ltd Vacuum gauge
US8614581B2 (en) 2010-12-31 2013-12-24 Tsinghua University Vacuum ionization gauge
CN114354058A (en) * 2021-12-06 2022-04-15 兰州空间技术物理研究所 Gauge tube of wide-range ionization vacuum gauge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8614581B2 (en) 2010-12-31 2013-12-24 Tsinghua University Vacuum ionization gauge
TWI415158B (en) * 2011-01-10 2013-11-11 Hon Hai Prec Ind Co Ltd Vacuum gauge
CN114354058A (en) * 2021-12-06 2022-04-15 兰州空间技术物理研究所 Gauge tube of wide-range ionization vacuum gauge

Also Published As

Publication number Publication date
TWI328243B (en) 2010-08-01

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Legal Events

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MK4A Expiration of patent term of an invention patent