200532255 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於一種製造液晶等之顯示面板、或顯示面 板用之彩色濾波器、或是印刷電路板時所使用的曝光裝置 的光照射裝置。 【先前技術】 在進行液晶等之顯示面板或印刷電路板之電路圖案之 形成、或是顯示面板用之彩色濾波器的R G B像素圖案之 形成的步驟當中會有曝光步驟。製造上述顯示面板、印刷 電路板、彩色濾波器時所使用的基板材料正逐年大型化。 隨著基板的大型化，曝光步驟中所使用的曝光裝置的 光照射區域（照射區域）在例如製造彩色濾波器時必須要 有1 100mm X Μ 〇mm的大小。目前一般大多是使用經由形 成有圖案的光罩，使如上所述的光照射區域一次曝光的裝 置。 這些曝光裝置具有用來照射曝光光線的光照射裝置。 爲了以更高的照度照射如上所述的廣大光照射區域，提案 在光照射置虽中’由兩個燈構成過去由一個燈所構成的 光源。該種例子有專利文獻1、專利文獻2所記載者。 另一方面，爲了也能對應曝光圖案的多樣化，也需要 一種能以一台曝光裝置使不同大小之光照射區域有效曝光 的裝置。 因此，提案一種在一台曝光裝置的光照射裝置當中， -4- 200532255 (2) 準備出射角Θ 2各不相同的複數個積光鏡，並藉由更換此 積光鏡而切換區域的技術（例如，參照專利文獻3、專利 文獻4、專利文獻5、專利文獻6、專利文獻7 )。 在此，針對上述積光鏡的作用加以說明。 爲了使光照射區域，亦即光照射面的照度分布均一， 在光照射裝置可使用積光鏡（亦稱爲複眼透鏡）。 積光鏡是將複數個透鏡朝縱橫方向並列配置有複數個 。構成積光鏡的各個透鏡是分別由入射側透鏡群及出射側 透鏡群所構成。 使用第1 3圖來簡單說明積光鏡的作用。 (a )來自光源1的光會經由積光鏡4投影在光照射 面8。 (b )以構成積光鏡4的透鏡群之光入射側透鏡群爲 4a，以光出射側透鏡群爲4b。光入射側透鏡群4a與光出 射側透鏡群4 b是朝光軸方向分開而設置。 (c )在光入射側透鏡群4 a上是藉由聚光鏡的作用使 從光源1放射的光聚光。然後，在光出射側透鏡群4b上 是藉由光入射側透鏡群4a的作用使光源像1 ’投影。 (d )在光入射側透鏡4 a上聚光的光的照度分布是錯 由光出射側透鏡群4b的作用而投影在光照射面8上。 (e )在積光鏡4是以平面方式配置有複數個這種透 鏡，因此複數個透鏡的上述照度分布會重疊而投影在光照 射面8，使光照射面8上的照度分布均一。 因此·在假設積光鏡4到光照射面8間的距離固疋的 -5- 200532255 (3) 情況下，若出射角Θ 2大，光照射面上的光照射區域就會 變大，若出射角Θ 2小，光照射區域就會變小。在使用出 射角Θ 2大的積光鏡4，卻只需要狹小的光照射區域的情 況下，照射在不使用之區域以前的光將會浪費掉’但藉由 更換出射角Θ2小的積光鏡，便可對於必要的區域進行有 效的照射。 接下來，針對光入射側透鏡群4 a與光出射側透鏡群 4 b之距離d、積光鏡4之聚光角θ 1 (亦稱爲入射角θ 1 ) 、出射角Θ 2的關係加以說明。 (a )如前所述，積光鏡4是例如由光入射側透鏡群 4a及光出射側透鏡群4b所構成，並且將光源1的像（光 源像），也就是聚光鏡的開口部投影在光出射側透鏡4b ，但投影在光出射側透鏡群4b的光源像的大小會因爲光 入射側透鏡群4a與光出射側透鏡群4b的距離d而改變。 (b )如第1 4圖（a )所示’若上述d短’則以入射 角（聚光角）θ 1射入光入射側透鏡群4 a的光會維持該角 度而射出，因此投影在光出射側透鏡群4b的光源像的大 小會變小，另一方面會使積光鏡4之後的出射角Θ 2變大 。因此是形成入射角θ 1 S出射角Θ2的關係。 (c )另外，如第1 4圖（b )所示’若上述d長’則 投影在光出射側透鏡群4b的光源像的大小會變大’使積 光鏡4之後的出射角Θ 2變小。因此是形成入射角θ 1 >出 射角Θ2的關係。在此，入射角Θ〗是由聚光鏡之反射面的 大小、以及到光入射側透鏡群4 a的距離所決定’出射角 -6- 200532255 (4) Θ2是由光入射側透鏡群4a之一片透鏡元件的大小、以及 從光入射側透鏡群4 a到光出射側透鏡群4b的距離d所決 定。 亦即，如第1 3圖（a )所示’當光入射側透鏡4 a與 光出射側透鏡4 b的距離d爲某長度時將會是θ 1 = θ 2 ’投 影在光出射側透鏡的光源像將會與光出射側透鏡4 b爲大 致相同的大小’在光入射側透鏡4 a與光出射側透“ 4 b的 距離d較之更短的情況下’如第1 3圖（b )所示’投影在 光出射側透鏡4 b的光源像會變小’而在光入射側透鏡4 a 與光出射側透鏡4 b的距離d較之更長的情況下’如第1 3 圖（c )所示，投影在光出射側透鏡4b的光源像會變得比 光出射側透鏡4b還大。 距離d固定的情況下，並且使光入射側透鏡群4 a之 一片透鏡元件的大小變大時’出射角Θ 2的大小會變大。 如以上所述，如前述專利文獻3、專利文獻4、專利 文獻5、專利文獻6、專利文獻7所記載，在一台曝光裝 置的光照射裝置當中’準備出射角Θ 2各不相同的複數個 積光鏡，並且更換此積光鏡而切換光照射區域的情況下’ 各積光鏡只要使用可改變光入射側透鏡群4 a之一片透鏡 元件的大小或光入射側透鏡群4a與光出射側透鏡群4b的 距離d的積光鏡即可。 〔專利文獻]〕日本特開平7 - 1 3 5 1 4 9號公報 〔專利文獻2〕日本特開平1 1· 2 6 0 7 0 5號公報 〔專利文獻3〕曰本特開平3- 1 6 5 0 2 3號公報 200532255 (5) 〔專利文獻4〕日本特開平】】_ 3 3 8丨6 2號公報 〔專利文獻5〕日本特開2 〇 〇 〇 _】9 7 4 2號公報 〔專利文獻6〕日本特開2 〇 〇 3 _ 7 6 〇 3 〇號公報 〔專利文獻7〕日本特開2 〇 〇 3 _丨8 8 〇 9丨號公報 【發明內容】 〔發明所欲解決之課題〕 如前所述，提案有一種在一台曝光裝置的光照射裝賡 當中，準備出射角Θ2各不相同的複數個積光鏡，並藉由 更換此積光鏡而切換光照射區域的技術。 爲了以更高的照度照射廣大的光照射區域，在前述由 複數個燈構成光源的曝光裝置（光照射裝置）當中也期望 能藉由更換積光鏡也照射狹小的光照射區域，以便亦可對 應曝光圖案的多樣化。 爲了滿足該需求，只要與過去一樣準備出射角Θ2小 的積光鏡4即可，但如果使用該積光鏡’會發生如下的問 題。 (a )如上所述，要照射狹小光照射區域時是縮小積 光鏡4的出射角Θ 2，但也因此積光鏡4之光入射側透鏡 群4 a與光出射側透鏡群4 b的距離d會變長、或是使光入 射側透鏡群4a之透鏡元件的大小變小。 (b)若距離d變長，如第13圖的（c)或第14圖（ b )所示，從光入射側透鏡群4 a投影的光源像就會超出對 應的光出射側透鏡群4 b ’光就會射入相鄰的透鏡。另外 -8- 200532255 (6) ，若縮小光入射側透鏡群4 a之透鏡元件的大小，則光出 射側透鏡群4 b之透鏡元件的大小會跟著變小’同樣光源 像會超出。 (c )射入相鄰透鏡的光並無法使用在曝光’因此光 的利用效率會變差。而且，此光會成爲迷光，有時會有僅 少量照射光照射面內之一部分的情況，因此照度均一性會 變差，而成爲使曝光精度惡化的原因。 因此，實際在進行光照射裝置之光學設計時是以θ 1 S Θ2來進行設計。 但是，如前述專利文獻1、專利文獻2由兩個燈構成 光源的情況下，比起一個燈的情況，聚光鏡之反射面的面 積會變大，而且至積光鏡4的入射角θ 1較大。因此，大 多是以θ 1 = Θ 2這樣剛剛好的値來設計積分器等。 在此情況下，光源像（來自光入射側透鏡群4 a的光 )將會剛好收容在光出射側透鏡群4b。 在這種光學設計當中，若爲了對應狹小的光照射區域 而更換成出射角Θ 2較小之θ 1 > Θ 2的積光鏡’則光源像會 超出光出射側透鏡群4b，光會射入相鄰的透鏡。因此， 如上所述會使光的利用效率變差，還會產生迷光使光照射 面上的曝光精度惡化。 如以上所述，在由複數個燈構成光源的曝光裝置當中 ，如果使用至積光鏡的入射角θ 1變大而形成θ 1 > Θ2的積 光鏡，則光的利用效率會變差，而且會因爲迷光而產生使 光照射面上的曝光精度惡化的問題。 -9 - 200532255 (7) 本發明是爲了解決上述習知問題點而硏創者，其目的 在於提供一種即使在使用入射角θ 1 >出射角Θ 2之照射區 域狹小的積光鏡的情況下，光源像也不會超越到相鄰的透 鏡，而不會使光照射面上的曝光精度惡化的光照射裝置。 〔用以解決課題之手段〕 本發明是以如下方式解決上述課題。 (1 ) 一種將從光源射出的光，經由使光入射側透鏡 群及光出射側透鏡群在光軸分開而配置的積光鏡照射在被 照射物的光照射裝置，其特徵爲設置可插入光源與積光鏡 間的光路內，並遮住來自光源的光，使射入積光鏡之光入 射側透鏡群的光的聚光角縮小的遮光手段。 而且是使光入射側透鏡群朝光軸方向移動，要加長積 光鏡之光入射側透鏡群與光出射側透鏡群間的距離，使上 述照射區域變小時是將上述遮光手段插入上述光源與積光 鏡間的光路內。另外，要縮短上述積光鏡之光入射側透鏡 群與光出射側透鏡群間的距離，使上述照射區域變大時是 使上述遮光手段從上述光源與積光鏡間的光路內退開。 (2 )在上述光照射裝置當中，準備不同大小之照射 區域的複數個積光鏡，並選擇性插入上述光照射裝置的光 路中。並且，與上述同樣設置可插入光源與積光鏡間的光 路內，並遮住來自光源的光，使射入積光鏡之光入射側透 鏡群的光的聚光角縮小的遮光手段。 而且，要將照射區域狹小的積光鏡插入上述光路中時 - 10- 200532255 (8) 是將上述遮光手段插入上述光源與積光鏡間的光路內，要 將照射區域廣大的積光鏡插入上述光路中時是使上述遮光 手段從上述光源與積光鏡間的光路內退開。 (3 )在上述光照射裝置當中，準備不同大小之照射 區域的兩個積光鏡，並選擇性插入上述光照射裝置的光路 中。並且在上述兩個積光鏡當中照射區域狹小的積光鏡之 光入射側透鏡群與光出射側透鏡群之間，設置沿著光出射 側透鏡之交界面的遮光構件。 〔發明之效果〕 本發明可獲得以下的效果。 (1 )由於在光源與積分透鏡間的光路內設有用來遮 住來自光源的光，使射入積光鏡之光入射側透鏡群的光的 聚光角縮小的遮光手段，因此即使在爲了縮小照射區域而 使用至積光鏡的光的入射角會變得比來自積光鏡的光的出 射角大的積光鏡的情況下，也會因爲遮光手段而使入射角 變小，而不會變得比出射角大，因此在出射側透鏡當中， 可防止光源像超越到相鄰的透鏡。因此’可防止迷光的產 生，且可防止光照射面上的曝光精度的惡化。 (2 )藉由在照射區域狹小的積光鏡之光入射側透鏡 群與光出射側透鏡群之間設置沿著光出射側透鏡之交界面 的遮光構件，可在光出射側透鏡當中將超出而投影在相鄰 透鏡的部分遮住。因此，可與上述同樣防止在光照射面的 迷光，且可防止光照射面上的曝光精度的惡化。 -11 - 200532255 (9) 【實施方式】 以下，針對本發明之實施例加以說明。 (1 )第1實施例 第1圖是第1實施例之光照射裝置的槪略構成圖，本 實施例是設置使積光鏡之光入射側透鏡移動的透鏡移動機 構，而可同時對應廣大光照射區域及狹小光照射區域的實 施例。 在該圖面當中，符號1是光源，本實施例中的光源1 是使用兩個燈1 a、1 b及聚光鏡1 c、1 d。兩個聚光鏡1 c、 1 d是配置成可使各個的第2焦點一致。 在該光源1的聚光鏡1 c、1 d附近設有遮光板2。遮 光板2是如第2圖所示，可藉由遮光板驅動機構2a而插 入聚光鏡1 c、1 d的開口周邊部，並遮住從光源1之周邊 部射出的光。此外，第2圖當中，光源1的形狀是朝單方 向形成長形，因此是將遮光板2僅設在相對向的兩個方向 ，以便遮住長邊方向的光，但亦可設在四個方向。 另外，如第1圖所示，在積光鏡4的光入射側透鏡群 4a設有透鏡移動機構4d，光入射側透鏡群4a是由導件 4 c引導並且朝光軸方向移動。藉由透鏡移動機構4 d使光 入射側透鏡群4a與光出射側透鏡群4b的間隔變大時，出 射角Θ 2會變小，而可對應於狹小照射區域來照射。 上述透鏡移動機構4d及上述遮光板驅動機構2a是由 -12- 200532255 (10) 控制部1 〇來控制其動作，當透鏡移動機構4d驅動光入射 側透鏡群4 a ’使積光鏡4的光入射側透鏡群4 a與光出射 側透鏡群4b的距離變大時，遮光板驅動機構2a會與此連 動，使遮光板2移動而插入聚光鏡1 c、1 d的開口部。另 外，當積光鏡4的光入射側透鏡群4a與光出射側透鏡群 4 b的距離變小時，遮光板2會從聚光鏡1 c、1 d的開口部 退開。 此外，藉由上述透鏡移動機構4 d而移動的透鏡是光 入射側的透鏡4a ’光出射側透鏡群4b並不會移動。該理 由是爲了使積光鏡4的光出射側透鏡群4b到使光成爲平 行之光學構件的準直透鏡7爲止的距離成爲基準，而進行 光照射面8上的光之平行度等的光學設計。此外，亦可取 代準直透鏡7而使用準直鏡。藉由使光入射側的透鏡4a 移動，光入射側透鏡群4 a的位置多少會從光源的焦點位 置偏移，但實際上其移動量爲數mm至20mm左右，從光 入射側透鏡群4 a到聚光鏡的距離由於是該移動量之1 〇 〇 倍以上的長度，因此實際上幾乎沒有什麼問題。 第1圖當中，來自光源1的光是在第1平面鏡3折返 ，並且射入放置在第2焦點位置的積光鏡4。 藉由積光鏡4使光照射面8的照度分布被調整成均一 狀態的光是經由光柵5在第2平面鏡6折返，並且射入準 直透鏡7。然後，藉由準直透鏡7使中心光線（亦即從光 出射側透鏡群4b的中心出來的光線）變成平行而照射在 光照射面8。 -13- 200532255 (11) 此外，第]圖是顯示準直透鏡7，但亦可爲準直鏡。 接下來，利用第3圖（a )及（b )來說明本實施例的 動作。此外，第3圖省略了前述第1平面鏡3、第2平面 鏡6、準直透鏡7等。而且，第3圖（b )是相對於（a ) 使透鏡的位置關係爲光入射側透鏡群4 a不會移動，而是 光出射側透鏡4 b移動的圖面，但實際上並非使光出射側 透鏡群4b移動，而是光入射側透鏡群4a在移動。 第3圖（a )是要照射廣大照射區域的情況，在此情 況下，如該圖所示是使積光鏡4之光入射側透鏡4 a與光 出射側透鏡4b的距離d縮小。 來自光源的光是以聚光角θ 1射入積光鏡4，並以聚 光角Θ2射出。在此情況下，設在聚光鏡1 c、1 d附近的遮 光板2是如第3圖（a )所示退開。 第3圖（b )是要照射狹小照射區域的情況，在此情 況下，如該圖所示是使積光鏡4之光入射側透鏡4 a與光 出射側透鏡4b的間隔d擴大。 在此情況下，設在聚光鏡1 c、1 d附近的遮光板2可 藉由遮光板驅動機構2 a而插入聚光鏡1 c、1 d的開口周邊 部。藉由遮光板2的插入，從光源1之周邊部射出的光就 會被遮住，因此射入積光鏡4的光的聚光角（入射角） θ 1 ’就會變得比第3圖（a )時的聚光角θ 1小。 因此，從積光鏡4之光入射側透鏡群4a射出的光在 光出射側透鏡群4b當中並不會射入相鄰的透鏡。因此可 防止迷光的產生。 -14 - 200532255 (12) 第3圖（c)是從光軸方向觀看投影在積光鏡4之光 出射側透鏡群4 b的光源像的圖。如該圖所示，遮光板2 會在投影在出射側透鏡4 b的光源像當中，將超出而投影 在相鄰透鏡的部分遮住。 此外，要將遮光板2在光源部1，也就是聚光鏡1 c、 1 d的開口插入至何處，是依光入射側透鏡群4a及光出射 側透鏡群4b之各透鏡元件的大小及間隔d而適當設計。 遮光板2的材質例如爲鋁板。 (2 )第1實施例之變形例 第4圖是上述第1實施例之變形例的圖。本實施例是 在上述第1圖所示的第1實施例當中，在積光鏡4的光出 射側透鏡群4b也設置遮光板9 ’其他構成則與第1圖所 說明的第1實施例相同。 遮光板9是如第5圖所示’設置成與透鏡的交界面一 致，並且遮住光出射側透鏡群4b當中射入相鄰透鏡的光 。在此，本實施例中的光照射區域爲矩形狀’因此積光鏡 4的各透鏡是使用矩形狀者。 此外，第5圖是在各透鏡的兩方向（四邊）設有遮光 板，但在光的超出方向僅爲單方向的情況下’亦可僅設在 任一方向（相對向的兩邊）。而且’由於照射在遮光板9 的光如果正反射就會變成迷光’因此是使用將鋁板鍍黑的 板材。 其他構成則與第]圖所說明的第】實施例相同’如前 -15- 200532255 (13) 所述，在光源1的聚光鏡1 C、1 d附近設有遮光板2。遮 光板2是如第2圖所示，可藉由遮光板驅動機構2 a而插 入聚光鏡1 c、1 d的開口周邊部，並且遮住從光源1之周 邊部射出的光。另外，在積光鏡4的光入射側透鏡群4 a 義 設有透鏡移動機構4d，光入設側透鏡群4a是由導件4c 引導並且朝光軸方向移動。 接下來，利用第6圖（a )、第6圖（b )來說明本實 施例的動作。 擊 第6圖（a )是要照射廣大照射區域的情況’在此情 況下，如該圖所示是使積光鏡4之光入射側透鏡4 a與光 出射側透鏡4b的距離縮小。 來自光源的光是以聚光角Θ 1射入第1積光鏡4 1 ’並 以聚光角Θ2射出。 在此情況下，設在聚光鏡1 c、1 d附近的遮光板2是 如第6圖（a )所示退開，而且設在光出射側透鏡群4b之 光入射側的遮光板9並不會發揮作用。但是’藉由設置遮： ^ 光板9，可將射入光出射側透鏡群4b之各透鏡之周邊部 的光的一部分因爲反射等而射入相鄰透鏡的光遮彳主° 第6圖（b )是要照射狹小照射區域的情況’在此情 況下，如該圖所示是使積光鏡4之光入射側透鏡4a與光 ^ 出射側透鏡4 b的間隔d擴大。 而且，設在聚光鏡I c、1 d附近的遮光板2可藉由遮 光板驅動機構2 a而插入聚光鏡1 c、I d的開口周邊部。錯 由遮光板2的插入，從光源1之周邊部射出的光就會被巡 -16- 200532255 (14) 住，因此射入積光鏡4的光的聚光角（入射角）θ 1會變 得比第6圖（a )時的聚光角Θ ]小。 因此，從積光鏡4之光入射側透鏡群4 a射出的光並 不會射入光出射側透鏡群4 b當中相鄰的透鏡。因此可防 止迷光的產生。而且，如前所述，藉由遮光板9，可將射 入光出射側透鏡群4b之各透鏡之周邊部的光的一部分因 爲反射而射入相鄰透鏡的光遮住。200532255 (1) IX. Description of the invention [Technical field to which the invention belongs] The present invention relates to light irradiation of an exposure device used for manufacturing a display panel such as a liquid crystal, a color filter for a display panel, or a printed circuit board. Device. [Prior art] An exposure step may be performed in the steps of forming a circuit pattern of a display panel such as a liquid crystal or a printed circuit board, or forming an RGB pixel pattern of a color filter for a display panel. The substrate materials used in the manufacture of the above-mentioned display panels, printed circuit boards, and color filters are increasing in size each year. As the substrate becomes larger, the light irradiation area (irradiation area) of the exposure device used in the exposure step needs to have a size of 1 100 mm × M 0 mm when manufacturing a color filter, for example. At present, in many cases, a device for exposing the light-irradiated area at a time through a patterned photomask is generally used. These exposure devices include a light irradiation device for irradiating exposure light. In order to illuminate the large light irradiation area as described above at a higher illuminance, it has been proposed that the light source is composed of two lamps, which were conventionally composed of one lamp. Such examples include those described in Patent Literature 1 and Patent Literature 2. On the other hand, in order to cope with the diversification of exposure patterns, a device capable of effectively exposing areas of light of different sizes to light by one exposure device is also required. Therefore, in a light irradiation device of an exposure device, a technique of preparing a plurality of condensers with different emission angles Θ 2 is proposed, and the area is switched by replacing the condensers (For example, refer to Patent Document 3, Patent Document 4, Patent Document 5, Patent Document 6, Patent Document 7). Here, the function of the above-mentioned condenser lens will be described. In order to make the light irradiation area, that is, the illumination distribution of the light irradiation surface uniform, a light condenser (also called a fly-eye lens) can be used in the light irradiation device. A condenser is a plurality of lenses in which a plurality of lenses are arranged side by side in the vertical and horizontal directions. Each lens constituting the condenser lens is composed of an incident-side lens group and an outgoing-side lens group, respectively. Use Figure 13 to briefly explain the function of the condenser. (a) The light from the light source 1 is projected onto the light irradiation surface 8 through the condenser lens 4. (b) The light incident lens group is 4a, and the light outgoing lens group is 4b. The light-incident-side lens group 4a and the light-exit-side lens group 4b are separated from each other in the direction of the optical axis. (c) In the light incident side lens group 4a, the light emitted from the light source 1 is condensed by the action of a condenser lens. Then, on the light-exiting-side lens group 4b, the light source image 1 'is projected by the action of the light-incident-side lens group 4a. (d) The illuminance distribution of the light condensed on the light incident side lens 4a is incorrectly projected onto the light irradiation surface 8 by the action of the light exit side lens group 4b. (e) A plurality of such lenses are arranged in a planar manner on the condenser lens 4, so that the above-mentioned illuminance distributions of the plurality of lenses are superimposed and projected onto the light-emitting surface 8, so that the light-illuminated surface 8 has a uniform illuminance distribution. Therefore, in the case of -5- 200532255 (3) assuming that the distance between the condenser 4 and the light irradiation surface 8 is fixed, if the exit angle Θ 2 is large, the light irradiation area on the light irradiation surface will become larger. The smaller the exit angle Θ 2 is, the smaller the light irradiation area becomes. In the case of using the condenser lens 4 with a large exit angle Θ 2 but only a small light irradiation area, the light irradiated before the unused area will be wasted. But by replacing the accumulated light with a small exit angle Θ 2 Mirror, you can effectively irradiate the necessary area. Next, the relationship between the distance d of the light-incident-side lens group 4 a and the light-exit-side lens group 4 b, the condensing angle θ 1 (also referred to as the incident angle θ 1), and the exit angle θ 2 of the condenser lens 4 are added. Instructions. (a) As described above, the condenser lens 4 is composed of, for example, a light incident lens group 4a and a light outgoing lens group 4b, and projects an image of the light source 1 (light source image), that is, an opening portion of the condenser lens. The light-exiting-side lens group 4b, but the size of the light source image projected on the light-exiting-side lens group 4b changes due to the distance d between the light-entering-side lens group 4a and the light-exiting-side lens group 4b. (b) As shown in FIG. 14 (a), 'if the d is short', the light incident on the light incident side lens group 4 a at an incident angle (condensing angle) θ 1 is emitted while maintaining this angle, so projection is performed. The size of the light source image in the light-exiting-side lens group 4b becomes smaller, and on the other hand, the exit angle Θ 2 behind the condenser lens 4 becomes larger. Therefore, the relationship between the incident angle θ 1 S and the exit angle θ2 is formed. (c) In addition, as shown in FIG. 14 (b), 'if the d is long', the size of the light source image projected on the light-exiting-side lens group 4b becomes larger ', so that the exit angle θ 2 behind the condenser lens 4 Get smaller. Therefore, the relationship between the incident angle θ 1 > and the exit angle θ 2 is formed. Here, the incident angle Θ is determined by the size of the reflecting surface of the condenser lens and the distance to the light incident lens group 4a. The exit angle-6- 200532255 (4) Θ2 is one of the light incident lens group 4a. The size of the lens element and the distance d from the light incident lens group 4 a to the light outgoing lens group 4 b are determined. That is, as shown in FIG. 13 (a), 'When the distance d between the light incident side lens 4 a and the light exit side lens 4 b is a certain length, it will be θ 1 = θ 2' projected on the light exit side lens The light source image will be approximately the same size as the light-exiting-side lens 4 b 'in the case where the light-incident-side lens 4 a is transparent to the light-exiting side' 4 b is shorter, as shown in FIG. 13 ( b) The light source image projected on the light-exiting-side lens 4 b becomes smaller as shown in the figure, and in the case where the distance d between the light-entering-side lens 4 a and the light-exiting-side lens 4 b is longer, as in the first 3 As shown in Figure (c), the light source image projected on the light-exiting-side lens 4b becomes larger than the light-exiting-side lens 4b. When the distance d is fixed, the lens element of the light-incident-side lens group 4a is When the size becomes larger, the size of the 'exit angle Θ 2 becomes larger. As described above, as described in Patent Literature 3, Patent Literature 4, Patent Literature 5, Patent Literature 6, and Patent Literature 7, In the light irradiating device, 'a plurality of condensers having different exit angles Θ 2 are prepared, and the condensers are replaced to switch light. In the case of the radiation area ', each of the condenser lenses may be a condenser lens that can change the size of one lens element of the light incident side lens group 4a or the distance d between the light incident side lens group 4a and the light exit side lens group 4b. [Patent Document] Japanese Patent Laid-Open No. 7-1 3 5 1 4 9 [Patent Document 2] Japanese Patent Laid-Open No. 1 1 · 2 6 0 7 0 5 [Patent Document 3] Japanese Patent Laid-Open No. 3- 1 6 5 0 2 3 200532255 (5) [Patent Document 4] Japanese Patent Laid-Open] _ 3 3 8 丨 6 2 [Patent Document 5] Japanese Patent Laid-Open No. 2000-00-9] 9 7 4 [Patent Document 6] Japanese Patent Laid-Open No. 2 003_7 6 〇3〇 [Patent Document 7] Japanese Patent Laid-Open No. 2 003_8-8 〇9 丨 [Summary of Invention] [Inventive Solution [Problem] As mentioned above, in the light irradiation device of an exposure device, a plurality of condensing mirrors having different emission angles θ2 are prepared, and the light irradiation area is switched by replacing the condensing mirrors. In order to illuminate a large light-irradiated area at a higher illuminance, the light is composed of a plurality of lamps. The source exposure device (light irradiation device) is also expected to be able to illuminate a narrow light irradiation area by replacing the condenser, so that it can respond to the diversification of the exposure pattern. To meet this demand, as long as the exit angle Θ2 is prepared as in the past A small condenser lens 4 is sufficient, but if the condenser lens 4 is used, the following problems occur. (A) As described above, when the narrow light irradiation area is to be illuminated, the exit angle Θ 2 of the condenser lens 4 is reduced, but Therefore, the distance d between the light-incident-side lens group 4 a and the light-exit-side lens group 4 b of the condenser lens 4 becomes longer, or the size of the lens element of the light-incident-side lens group 4 a becomes smaller. (b) If the distance d becomes longer, as shown in FIG. 13 (c) or FIG. 14 (b), the light source image projected from the light incident side lens group 4a will exceed the corresponding light exit side lens group 4 b 'light will enter the adjacent lens. In addition, -8- 200532255 (6), if the size of the lens element of the light incident side lens group 4 a is reduced, the size of the lens element of the light exit side lens group 4 b will decrease accordingly. The same light source image will be exceeded. (c) The light incident on the adjacent lens cannot be used for exposure ', so the utilization efficiency of the light will be deteriorated. In addition, this light may become a stray light, and there may be a case where only a small amount of the irradiated light is irradiated to a part of the surface. Therefore, the uniformity of the illuminance may be deteriorated, and the exposure accuracy may be deteriorated. Therefore, when actually designing the optical design of the light irradiation device, θ 1 S Θ2 is used for design. However, as in the aforementioned Patent Documents 1 and 2, when the light source is composed of two lamps, the area of the reflecting surface of the condenser lens becomes larger than that in the case of one lamp, and the incident angle θ 1 to the condenser lens 4 is larger. Big. Therefore, many integrators and the like are designed with 値 1 = Θ 2 which is just right. In this case, the light source image (light from the light-incident-side lens group 4 a) will be just housed in the light-exit-side lens group 4 b. In this optical design, if a light beam with a small exit angle θ 1 & θ 1 > θ 2 is replaced to correspond to a narrow light irradiation area, the light source image will exceed the light exit side lens group 4b. Shot into an adjacent lens. Therefore, as described above, the utilization efficiency of light is deteriorated, and stray light is also generated to deteriorate the exposure accuracy on the light irradiation surface. As described above, in an exposure device including a plurality of lamps as a light source, if the incident angle θ 1 to the condenser lens is increased to form a θ 1 > Θ 2 condenser lens, the light utilization efficiency will be deteriorated. In addition, there is a problem that the exposure accuracy of the light irradiation surface is deteriorated due to the stray light. -9-200532255 (7) The present invention was created in order to solve the above-mentioned conventional problems, and its object is to provide a condensing mirror with a narrow irradiation area even when the incident angle θ 1 > the exit angle θ 2 is used. In addition, the light source device does not exceed the adjacent lens, and does not deteriorate the exposure accuracy of the light irradiation surface. [Means for Solving the Problems] The present invention solves the problems described above as follows. (1) A light irradiation device that irradiates light to be irradiated with light emitted from a light source through a condensing mirror that is configured by separating a light incident side lens group and a light exit side lens group on an optical axis. A light-shielding means that blocks the light from the light source in the optical path between the light source and the condenser lens, and reduces the condensing angle of the light incident on the light incident lens group of the condenser lens. In addition, the light incident lens group is moved toward the optical axis direction, and the distance between the light incident lens group and the light exit lens group of the condenser lens should be lengthened to reduce the irradiation area. The light shielding means is inserted into the light source and the light source. In the light path between the condensers. In addition, to reduce the distance between the light incident lens group and the light exit lens group of the condenser lens, and to increase the irradiation area, the light shielding means is retracted from the optical path between the light source and the condenser lens. (2) In the above-mentioned light irradiation device, a plurality of light-condensing mirrors of differently irradiated areas are prepared and selectively inserted into the optical path of the above-mentioned light irradiation device. In addition, a light shielding means is provided in the same way as described above, which can be inserted into the optical path between the light source and the condenser lens, and shields the light from the light source, so as to reduce the condensing angle of the light incident on the light incident side lens group of the condenser lens. In addition, when the light-condensing mirror with a narrow irradiation area is to be inserted into the above-mentioned optical path-10- 200532255 (8) The light-shielding means is inserted into the optical path between the light source and the light-condensing mirror. In the optical path, the light shielding means is retracted from the optical path between the light source and the condenser lens. (3) In the above-mentioned light irradiation device, two light-condensing mirrors of differently irradiated areas are prepared and selectively inserted into the optical path of the above-mentioned light irradiation device. A light-shielding member is provided between the light-incident-side lens group and the light-exit-side lens group of the light-collecting lens with a narrow irradiation area among the two light-collecting lenses. [Effects of the Invention] The present invention can achieve the following effects. (1) Since the light path between the light source and the integrator lens is provided with a light shielding means for shielding the light from the light source and reducing the condensing angle of the light incident on the light incident side lens group of the condenser lens, Increasing the incident angle of the light used to the condenser lens by reducing the irradiation area becomes larger than that of the light from the condenser lens, and the incident angle is also reduced due to the light shielding means. Since it becomes larger than the exit angle, the light source image can be prevented from advancing to the adjacent lens among the exit-side lenses. Therefore, the occurrence of stray light can be prevented, and the deterioration of the exposure accuracy on the light irradiation surface can be prevented. (2) By providing a light-shielding member along the interface of the light-exiting-side lens between the light-incident-side lens group and the light-exiting-side lens group of the light-collecting mirror with a narrow irradiation area, it can exceed And the part projected on the adjacent lens is blocked. Therefore, similar to the above, stray light on the light-irradiated surface can be prevented, and deterioration in exposure accuracy on the light-irradiated surface can be prevented. -11-200532255 (9) [Embodiment] Hereinafter, an embodiment of the present invention will be described. (1) First Embodiment FIG. 1 is a schematic configuration diagram of the light irradiation device of the first embodiment. This embodiment is provided with a lens moving mechanism that moves a light incident side lens of a condenser lens, and can simultaneously support a large number of Examples of light irradiation areas and narrow light irradiation areas. In the figure, the symbol 1 is a light source, and the light source 1 in this embodiment uses two lamps 1 a and 1 b and condenser lenses 1 c and 1 d. The two condenser lenses 1 c and 1 d are arranged so that the respective second focal points are aligned. A light shielding plate 2 is provided near the condenser lenses 1 c and 1 d of the light source 1. As shown in Fig. 2, the light shielding plate 2 can be inserted into the opening peripheral portions of the condenser lenses 1c and 1d by the light shielding plate driving mechanism 2a, and can block light emitted from the peripheral portion of the light source 1. In addition, in FIG. 2, the shape of the light source 1 is elongated in one direction. Therefore, the light shielding plate 2 is only provided in two opposite directions so as to shield the light in the long side direction, but it can also be set in four directions. Directions. In addition, as shown in Fig. 1, a lens moving mechanism 4d is provided on the light incident side lens group 4a of the condenser lens 4, and the light incident side lens group 4a is guided by the guide 4c and moves in the optical axis direction. When the distance between the light-incident-side lens group 4a and the light-exit-side lens group 4b is increased by the lens moving mechanism 4d, the emission angle θ 2 becomes smaller, and the light can be irradiated corresponding to a narrow irradiation area. The lens moving mechanism 4d and the light-shielding plate driving mechanism 2a are controlled by -12-200532255 (10) the control unit 10, and when the lens moving mechanism 4d drives the light incident side lens group 4a ', the condenser lens 4 When the distance between the light-incident-side lens group 4a and the light-exit-side lens group 4b increases, the light-shielding plate driving mechanism 2a moves in conjunction with this to move the light-shielding plate 2 into the openings of the condenser lenses 1c, 1d. In addition, when the distance between the light-incident-side lens group 4a and the light-exit-side lens group 4b of the condenser lens 4 becomes smaller, the light shielding plate 2 retracts from the openings of the condenser lenses 1c and 1d. The lens moved by the lens moving mechanism 4d is that the lens 4a 'on the light incident side does not move the lens group 4b on the light exit side. The reason for this is to make the distance from the light-exiting side lens group 4b of the condenser lens 4 to the collimator lens 7 of the optical member making the light parallel as a reference, and perform optical such as the parallelism of the light on the light irradiation surface 8 design. Alternatively, a collimator lens may be used instead of the collimator lens 7. By moving the lens 4a on the light incident side, the position of the light incident side lens group 4a may be shifted from the focal position of the light source to some extent, but in fact, the amount of movement is about several mm to 20mm. Since the distance from a to the condenser is a length that is more than 1,000 times the amount of movement, there is practically no problem. In FIG. 1, the light from the light source 1 is folded back at the first plane mirror 3 and is incident on the condenser lens 4 placed at the second focal position. The light having the illuminance distribution of the light irradiation surface 8 adjusted to a uniform state by the condenser lens 4 is returned to the second plane mirror 6 through the grating 5 and enters the collimator lens 7. Then, the central light rays (that is, the light rays coming out of the center of the light-exiting-side lens group 4b) are made parallel by the collimating lens 7 and irradiated on the light irradiation surface 8. -13- 200532255 (11) In addition, the figure shows the collimator lens 7, but it can also be a collimator lens. Next, the operations of this embodiment will be described using Figs. 3 (a) and (b). In Fig. 3, the first plane mirror 3, the second plane mirror 6, the collimator lens 7 and the like are omitted. In addition, Fig. 3 (b) is a diagram in which the positional relationship of the lens with respect to (a) is such that the light incident side lens group 4a does not move, but the light exit side lens 4b moves, but it does not actually make light The output-side lens group 4b moves, but the light-incident-side lens group 4a moves. Fig. 3 (a) shows a case where a large irradiation area is to be irradiated. In this case, as shown in the figure, the distance d between the light incident side lens 4a and the light exit side lens 4b of the condenser lens 4 is reduced. The light from the light source enters the condenser lens 4 at a condenser angle θ 1 and exits at a condenser angle θ 2. In this case, the light shielding plate 2 provided near the condenser lenses 1 c and 1 d is retracted as shown in Fig. 3 (a). Fig. 3 (b) shows a case where a narrow irradiation area is to be irradiated. In this case, as shown in the figure, the distance d between the light incident side lens 4a and the light exit side lens 4b of the condenser lens 4 is enlarged. In this case, the light shielding plate 2 provided in the vicinity of the condenser lenses 1 c and 1 d can be inserted into the opening peripheral portions of the condenser lenses 1 c and 1 d by the light shielding plate driving mechanism 2 a. With the insertion of the light shielding plate 2, the light emitted from the peripheral portion of the light source 1 is blocked, so the condensing angle (incident angle) θ 1 ′ of the light entering the condenser lens 4 becomes smaller than the third angle. The focusing angle θ 1 in the figure (a) is small. Therefore, the light emitted from the light-incident-side lens group 4a of the condenser lens 4 does not enter the adjacent lens among the light-exit-side lens group 4b. Therefore, the occurrence of stray light can be prevented. -14-200532255 (12) Figure 3 (c) is a view of the light source image of the light exiting side lens group 4 b projected on the condenser lens 4 from the optical axis direction. As shown in the figure, the light shielding plate 2 will be out of the light source image projected on the exit-side lens 4b, and will be blocked by the part projected on the adjacent lens. In addition, where to insert the light shielding plate 2 in the light source section 1, that is, the condenser lenses 1c, 1d, depends on the size and interval of each lens element of the light incident side lens group 4a and the light exit side lens group 4b. d and properly designed. The material of the light shielding plate 2 is, for example, an aluminum plate. (2) Modification of the first embodiment Fig. 4 is a diagram showing a modification of the first embodiment. This embodiment is the first embodiment shown in FIG. 1 described above. A light-shielding plate 9 is also provided on the light-exiting-side lens group 4b of the condenser lens 4. The other structure is the same as the first embodiment described in FIG. the same. The light-shielding plate 9 is provided so as to coincide with the interface of the lens as shown in Fig. 5 and shields light entering the adjacent lens from the light-exiting-side lens group 4b. Here, the light irradiation area in this embodiment is rectangular. Therefore, each lens of the condenser lens 4 is rectangular. In addition, in Fig. 5, the light shielding plates are provided in two directions (four sides) of each lens. However, when the light out-going direction is only one direction, it may be provided only in either direction (opposite sides). In addition, "the light irradiated on the light shielding plate 9 becomes stray light if it is regularly reflected", so a black plated aluminum plate is used. The other structures are the same as those of the first embodiment described with reference to FIG. 1 '. As described in the foregoing -15-200532255 (13), a light shielding plate 2 is provided near the condenser lenses 1 C and 1 d of the light source 1. As shown in FIG. 2, the light shielding plate 2 can be inserted into the opening peripheral portions of the condenser lenses 1c and 1d by the light shielding plate driving mechanism 2a, and shields light emitted from the periphery of the light source 1. In addition, a lens moving mechanism 4d is provided on the light-incident-side lens group 4a of the condenser lens 4, and the light-incoming-side lens group 4a is guided by the guide 4c and moves in the direction of the optical axis. Next, the operation of this embodiment will be described using Figs. 6 (a) and 6 (b). FIG. 6 (a) shows a case where a large irradiation area is to be irradiated. In this case, as shown in the figure, the distance between the light incident side lens 4a and the light exit side lens 4b of the condenser lens 4 is reduced. The light from the light source enters the first condenser 4 1 'at a condensing angle θ 1 and exits at a condensing angle θ 2. In this case, the light shielding plate 2 provided near the condenser lenses 1 c and 1 d is retracted as shown in FIG. 6 (a), and the light shielding plate 9 provided on the light incident side of the light emitting side lens group 4 b is not Will work. However, by providing a shield: ^ The light plate 9 can partially shield the light entering the peripheral portion of each lens of the light-exiting-side lens group 4b from entering the adjacent lens due to reflection or the like. Figure 6 ( b) A case where a narrow irradiation area is to be illuminated. 'In this case, as shown in the figure, the distance d between the light incident side lens 4a and the light exit side lens 4b of the condenser lens 4 is enlarged. Further, the light shielding plate 2 provided in the vicinity of the condenser lenses I c and 1 d can be inserted into the opening peripheral portions of the condenser lenses 1 c and I d by the light shielding plate driving mechanism 2 a. If the light shielding plate 2 is inserted incorrectly, the light emitted from the periphery of the light source 1 will be held by Xun-16-200532255 (14). Therefore, the condensing angle (incident angle) θ 1 of the light incident on the condenser 4 will be It becomes smaller than the condensing angle θ] in FIG. 6 (a). Therefore, the light emitted from the light-incident-side lens group 4a of the condenser lens 4 does not enter the adjacent lenses of the light-exit-side lens group 4b. Therefore, the occurrence of stray light can be prevented. Further, as described above, with the light shielding plate 9, a part of the light that has entered the peripheral portion of each lens of the light-exiting-side lens group 4b can be reflected by the light and entered into the adjacent lens.
(3 )第2實施例 第7圖是第2實施例之光照射裝置的槪略構成圖，本 實施例是準備積光鏡的光入射側透鏡與光出射側透鏡之間 隔各不相同的兩組積光鏡，並且依照射區域的大小更換積 光鏡，藉此便可同時對應廣大光照射區域及狹小光照射區 域的實施例，其他構成則與前述第1實施例相同。 該圖面當中，符號4 I是縮小光入射側透鏡群與光出 射側透鏡群之間隔，使出射角Θ2變大的第1積光鏡，符 號4 2是加大光入射側透鏡群與光出射側透鏡群之間隔， 使出射角Θ2變小的第2積光鏡。 第1、第2積光鏡4】、42可藉由積光鏡更換機構4e 而進行更換，藉由該透鏡更換機構4e，將第1積光鏡4 1 揷入第1平面鏡3與光柵5之間的光路中時，光入射側透 鏡群4 a與光出射側透鏡群4 b的間隔會變小，使積光鏡 4 1的出射角Θ2變大，而可對應於廣大照射區域而照射。 另一方面，將第2積光鏡4 2插入第]平面鏡3與光柵5 -17- 200532255 (15) 之間日寺’光入射側透鏡群4a與光出射側透鏡群4b的間隔 會變大’積光鏡42的出射角Θ2會變小，而可對應於狹小 照射區域而照射。 而且’與第]實施例同樣的，在聚光鏡1 C、] d的開 口部設有遮光板2，上述透鏡更換機構4e及上述遮光板 驅動機構2 a是由控制部1 〇控制其動作，透鏡更換機構 4e在將桌2積光鏡42插入上述光路中時會與此連動，遮 光板驅動機構2 a會使遮光板2移動而插入聚光鏡1 c、1 d 的開口部。另外，將第1積光鏡4 1插入上述光路中時， 遮光板2會從聚光鏡】c、1 d的開口部退開。 接下來，利用第8圖（a ) 、 （ b )來說明本實施例的 動作。 第8圖（a )是使用第〗積光鏡4 1照射廣大照射區域 的情況。來自光源的光是以聚光角θ 1射入第1積光鏡41 ，以聚光角Θ2射出。 第8圖（b )是更換成第2積光鏡4 2，並且照射狹小 照射區域的情況。第2積光鏡4 2之入射側透鏡4 a與出射 側透鏡4 b的間隔d比第1積光鏡4 1的間隔還大。 在此情況下，設在聚光鏡】c、1 d附近的遮光板2可 藉由遮光板驅動機構2 a而插入聚光鏡1 c、1 d的開口周邊 部。藉由遮光板2的插入，從光源1之周邊部射出的光就 會被遮住’因此射入第2積光鏡4 2的光的聚光角θ 1，會變 得比θ 1小。因此，從積光鏡42之光入射側透鏡群4a射 出的光並不會射入光出射側透鏡群4 b當中相鄰的透鏡。 -18- 200532255 (16) 因此可防止迷光的產生。 在第8圖（b )的情況當中也是如前述第3圖（c )所 示，藉由遮光板2，可將投影在積分器42之光出射側透 鏡群4 b的光源像當中超出而投影在相鄰透鏡的部分遮住 〇 此外，本實施例當中，用來照射不同大小之區域的出 射角Θ2各不相同的積光鏡是使光入射側透鏡群4a與光出 射側透鏡群4b的距離d改變者，但亦可如前所述，使用 藉由改變構成積光鏡之各透鏡的大小，使出射角Θ 2的角 度各不相同者。 在此情況下，由於透鏡的大小變小時，出射角Θ2的 角度就會變小，因此使用較小透鏡的積光鏡時，可將遮光 板插入光路中。 (4 )第3實施例 第9圖是第3實施例之光照射裝置的槪略構成圖。前 述第2實施例是在聚光鏡1 c、1 d的開口部設有遮光板2 ，但本實施例是取代遮光板2而在積光鏡42的光出射側 透鏡4b設有則述第5圖所示的遮光板9。此外，如前所 述在光的超出方向僅爲單方向的情況下，亦可將遮光板9 僅設在任一方向。 其他構成則與前述第7圖所示的第2實施例相同，並 且設有第]、第2積光鏡4 ]、42，且可藉由積光鏡更換機 構4e進行更換。 -19- 200532255 (17) 藉由積光鏡更換機構4 e ’將第1積光鏡4】插入第1 平面鏡3與光柵5間的光路中時，光入射側透鏡群4 a與 光出射側透鏡群4 b的間隔會變小’使積光鏡4】的出射角 Θ2變大，而可對應於廣大照射區域而照射。另一方面’ 將第2積光鏡42插入第1平面鏡3與光柵5之間時’光 入射側透鏡群4 a與光出射側透鏡群4 b的間隔會變大’積 光鏡42的出射角Θ2會變小。 接下來，利用第1 0圖（a ) 、 （ b )來說明本實施例 的動作。 第1 0圖（a )與第2實施例同樣是使用第1積光鏡 4 1照射廣大照射區域的情況。來自光源的光是以聚光角 θ 1射入第1積光鏡4 1，並以聚光角Θ 2射出。 第1 0圖（b )是更換成第2積光鏡42的情況。在第 2積光鏡42是與第1積光鏡4 1的情況同樣’光會以聚光 角θ 1射入光入射側透鏡群4 a。但是在光出射側透1¾群4 b 當中，射入相鄰透鏡的光的成分會由設置成與透鏡之交界 面一致的遮光板9遮住，並不會射入相鄰的透鏡。因此可 防止迷光的產生。 此外，本實施例也與第2實施例相同，用來照射不同 大小之區域的出射角Θ2各不相同的積光鏡是使光入射側 透鏡群4a與光出射側透鏡群4b的距離d改變者，但亦可 使用藉由改變構成積光鏡之各透鏡的大小，使出射角Θ2 的角度各不相同者。 在此情況下，由於是縮小透鏡，因此是在使出射角 -20- 200532255 (18) Θ2縮小的積光鏡的光出射側透鏡群4b設置遮光板9。 此外，上述第2實施例當中，亦可如前述第1實施例 的變形例將第3實施例所示的遮光板9設在光出射側透鏡 群4b。藉此，便可如前述第1實施例之變形例所說明， 將射入光出射側透鏡群4b之各透鏡之周邊部的光的一部 分因爲反射等而射入相鄰透鏡的光遮住。 而且，在前述第1實施例當中，亦可不在聚光鏡1 c 、1 d附近設置遮光板2，而是如第1 1圖所示將遮光板9 設在光出射側透鏡群4b。 第1 2圖顯示如上述所構成之情況的動作。 第1 2圖（a )是要照射廣大照射區域的情況，在此情 況下，如該圖所示是使積光鏡4之光入射側透鏡4a與光 出射側透鏡4b的距離縮小。來自光源的光是以聚光角θ 1 射入第1積光鏡41，並以聚光角Θ2射出。 第1 2圖（b )是要照射狹小照射區域的情況’在此情 況下，如該圖所示是使積光鏡4之光入射側透鏡4 a與光 出射側透鏡4b的間隔擴大。 在此情況下，光是以聚光角Θ 1射入光入射側透鏡群 4 a，但在光出射側透鏡群4 b當中，射入相鄰透鏡的光的 成分會由遮光板9遮住，並不會射入相鄰的透鏡。因此可 防止迷光的產生。 【圖式簡單說明】 第】圖是本發明第1實施例之光照射裝置的槪略構成 -21 - 200532255 (19) 圖。 第2圖是設在光源附近的遮光板的說明圖。 第3圖是本發明第〗實施例之動作的說明圖。 第4圖是本發明第1實施例之變形例的圖。 第5圖是設在積光鏡之光出射側透鏡群的遮光板的說 明圖。 第6圖是本發明第1實施例之變形例的動作的說明圖 〇 第7圖是本發明第2實施例之光照射裝置的槪略構成 圖。 第8圖是本發明第2實施例之動作的說明圖。 第9圖是本發明第3實施例之光照射裝置的槪略構成 圖。 第1 0圖是本發明第3實施例之動作的說明圖。 第1 1圖是在第1圖之實施例當中，將遮光板設在光 出射側透鏡時的構成例的圖。 第1 2圖是弟Η圖β動作的說明圖。 第1 3圖是積光鏡之作用的說明圖。 第1 4圖是積光鏡之光入射側透鏡與光出射側透鏡的 距離與入射角θ 1、出射角Θ2的關係的說明圖。 【主要元件符號說明】 200532255 (20) 1 c , 1 d 2 2 a 3 4 4 a 4b 4 c 4d 4e 5 6 7 8 9 10 聚光鏡 遮光板 遮光板驅動機構 第1平面鏡 積光鏡 光入射側透鏡（群 光出射側透鏡（群 導件 透鏡移動機構 積光鏡更換機構 光柵 第2平面鏡 準直透鏡 光照射面 遮光板 控制部(3) Second Embodiment FIG. 7 is a schematic configuration diagram of a light irradiation device according to the second embodiment. This embodiment is to prepare two light-incident-side lenses and light-exit-side lenses with a different distance from each other. By combining the condensing mirrors and replacing the condensing mirrors according to the size of the radiation area, the embodiment of the large light irradiation area and the narrow light irradiation area can be simultaneously supported, and other structures are the same as those of the first embodiment. In the figure, the symbol 4 I is the first condenser that reduces the distance between the light incident lens group and the light exit lens group to increase the exit angle θ2, and the symbol 42 is a light incident lens group and light. The second condenser lens with an interval between the exit-side lens groups to reduce the exit angle θ2. The first and second condenser lenses 4], 42 can be replaced by the condenser lens replacement mechanism 4e, and the first condenser lens 4 1 is inserted into the first plane mirror 3 and the grating 5 by the lens replacement mechanism 4e. When the light path is between the light incident side lens group 4 a and the light exit side lens group 4 b, the distance between the light incident lens group 4 a and the light emitting lens group 4 b becomes smaller, and the exit angle θ2 of the condenser lens 41 becomes larger. . On the other hand, inserting the second condensing mirror 4 2 between the third plane mirror 3 and the grating 5 -17- 200532255 (15) The distance between the Nichita 'light incident side lens group 4a and the light exit side lens group 4b becomes larger. The exit angle θ2 of the condenser lens 42 becomes smaller, and can be irradiated in accordance with a narrow irradiation area. Furthermore, as in the first embodiment, a light-shielding plate 2 is provided in the opening of the condenser lens 1C,] d, and the lens replacement mechanism 4e and the light-shielding plate driving mechanism 2a are controlled by the control unit 10, and the lens The replacement mechanism 4e is linked to this when the table 2 condensing mirror 42 is inserted into the above-mentioned optical path, and the light-shielding plate driving mechanism 2a moves the light-shielding plate 2 to be inserted into the openings of the condenser lenses 1c, 1d. In addition, when the first condensing mirror 41 is inserted into the above-mentioned optical path, the light shielding plate 2 is retracted from the openings of the condenser lenses c and 1 d. Next, the operations of this embodiment will be described using Figs. 8 (a) and (b). Fig. 8 (a) shows the case where the illuminator 41 is used to illuminate a large irradiation area. The light from the light source is incident on the first condenser lens 41 at a condenser angle θ 1 and is emitted at a condenser angle θ 2. Fig. 8 (b) shows a case where the second dichroic mirror 42 is replaced with a small irradiation area. The distance d between the entrance-side lens 4a and the exit-side lens 4b of the second dichroic mirror 42 is larger than that of the first dichroic mirror 41. In this case, the light shielding plate 2 provided in the vicinity of the condenser lenses [c, 1 d] can be inserted into the opening peripheral portions of the condenser lenses 1 c, 1 d by the light shielding plate driving mechanism 2 a. By inserting the light-shielding plate 2, the light emitted from the peripheral portion of the light source 1 will be blocked '. Therefore, the condensing angle θ1 of the light incident on the second condenser lens 4 2 becomes smaller than θ1. Therefore, the light emitted from the light-incident-side lens group 4a of the condenser lens 42 does not enter the adjacent lenses of the light-exit-side lens group 4b. -18- 200532255 (16) This prevents the occurrence of stray light. In the case of FIG. 8 (b), as shown in the aforementioned FIG. 3 (c), the light-shielding plate 2 can be projected onto the light source image of the light-exiting-side lens group 4b of the integrator 42 and projected beyond it. The adjacent lenses are partially hidden. In addition, in this embodiment, the light-collecting mirrors used to illuminate regions of different sizes with different exit angles θ2 are formed by the light-incident-side lens group 4a and the light-exit-side lens group 4b. The distance d is changed, but as described above, the angle of the exit angle θ 2 may be different by changing the size of each lens constituting the condenser lens. In this case, as the size of the lens becomes smaller, the angle of the exit angle θ2 becomes smaller. Therefore, when using a condensing lens with a smaller lens, a light-shielding plate can be inserted into the optical path. (4) Third Embodiment Fig. 9 is a schematic configuration diagram of a light irradiation device according to a third embodiment. In the second embodiment described above, the light shielding plate 2 is provided in the openings of the condenser lenses 1 c and 1 d. However, in this embodiment, instead of the light shielding plate 2, the light emitting side lens 4 b of the light collecting mirror 42 is provided. Shown visor 9. In addition, as described above, in a case where the out-of-light direction is only one direction, the light shielding plate 9 may be provided in only one direction. The other structures are the same as those of the second embodiment shown in FIG. 7 above, and are provided with second and second light-condensing mirrors 4 and 42, and can be replaced by the light-condensing mirror replacement mechanism 4e. -19- 200532255 (17) When the first condenser lens 4 is inserted into the optical path between the first plane mirror 3 and the grating 5 by the condenser lens replacement mechanism 4 e ', the light incident side lens group 4 a and the light exit side The interval between the lens groups 4 b becomes smaller, which makes the exit angle θ2 of the condenser lens 4] larger, and can be irradiated corresponding to a large irradiation area. On the other hand, when the second condenser lens 42 is inserted between the first plane mirror 3 and the grating 5, the distance between the light incident lens group 4 a and the light exit lens group 4 b becomes larger. The angle Θ2 becomes smaller. Next, the operation of this embodiment will be described using Figs. 10 (a) and (b). Fig. 10 (a) is the same as in the second embodiment when the first illuminator 41 is used to irradiate a large irradiation area. The light from the light source enters the first condenser lens 41 at a condensing angle θ 1 and exits at a condensing angle θ 2. Fig. 10 (b) shows a case where the second condenser lens 42 is replaced. When the second condenser lens 42 is the same as in the case of the first condenser lens 41, the light is incident on the light incident side lens group 4a at a condenser angle θ1. However, in the light exit side through the 1¾ group 4b, the components of the light entering the adjacent lens will be blocked by the light shielding plate 9 arranged to be consistent with the interface of the lens, and will not enter the adjacent lens. Therefore, the occurrence of stray light can be prevented. In addition, this embodiment is also the same as the second embodiment. The condenser lens used to illuminate regions with different exit angles θ2 is to change the distance d between the light incident side lens group 4a and the light exit side lens group 4b. However, it is also possible to use one in which the angles of the exit angles θ2 are different by changing the sizes of the lenses constituting the condenser lens. In this case, since the lens is a reduction lens, the light-shielding plate 9 is provided on the light-exiting-side lens group 4b of the condenser lens that reduces the emission angle -20-200532255 (18) Θ2. In addition, in the above-mentioned second embodiment, the light-shielding plate 9 shown in the third embodiment may be provided in the light-exiting-side lens group 4b as in the modification of the first embodiment. As a result, as described in the modification of the first embodiment, a part of the light that has entered the peripheral portion of each lens of the light-exiting-side lens group 4b can be blocked by the light that has entered the adjacent lens due to reflection or the like. Moreover, in the aforementioned first embodiment, the light shielding plate 2 may not be provided near the condenser lenses 1 c and 1 d, but the light shielding plate 9 may be provided on the light-exiting-side lens group 4 b as shown in FIG. 11. Fig. 12 shows the operation in the case constituted as described above. Fig. 12 (a) shows a case where a large irradiation area is to be irradiated. In this case, as shown in the figure, the distance between the light incident side lens 4a and the light exit side lens 4b of the condenser lens 4 is reduced. The light from the light source enters the first condenser lens 41 at a condensing angle θ 1 and exits at a condensing angle θ2. Fig. 12 (b) shows a case where a narrow irradiation area is to be irradiated. 'In this case, as shown in the figure, the distance between the light incident side lens 4a and the light exit side lens 4b of the condenser lens 4 is enlarged. In this case, light enters the light incident side lens group 4 a at a condensing angle θ 1, but in the light exit side lens group 4 b, the components of the light incident on the adjacent lens are blocked by the light shielding plate 9. , And will not shoot into adjacent lenses. Therefore, the occurrence of stray light can be prevented. [Brief description of the drawings] Fig. 21 is a schematic configuration of a light irradiation device according to the first embodiment of the present invention.-21-200532255 (19). Fig. 2 is an explanatory diagram of a light shielding plate provided near a light source. Fig. 3 is an explanatory diagram of the operation of the first embodiment of the present invention. Fig. 4 is a diagram showing a modification of the first embodiment of the present invention. Fig. 5 is an explanatory diagram of a light-shielding plate provided on the light-exiting side lens group of the condenser lens. Fig. 6 is a diagram for explaining the operation of a modification of the first embodiment of the present invention. Fig. 7 is a schematic configuration diagram of a light irradiation device according to the second embodiment of the present invention. Fig. 8 is an explanatory diagram of the operation of the second embodiment of the present invention. Fig. 9 is a schematic configuration diagram of a light irradiation device according to a third embodiment of the present invention. Fig. 10 is an explanatory diagram of the operation of the third embodiment of the present invention. Fig. 11 is a diagram showing a configuration example when the light shielding plate is provided on the light-exiting side lens in the embodiment shown in Fig. 1; Fig. 12 is an explanatory diagram of the operation of the brother figure β. Fig. 13 is an explanatory diagram of the action of the condenser lens. Fig. 14 is an explanatory diagram of the relationship between the distance between the light-incident-side lens and the light-exiting-side lens of the condenser lens and the incidence angle θ1 and the emission angle θ2. [Description of Symbols of Main Components] 200532255 (20) 1 c, 1 d 2 2 a 3 4 4 a 4b 4 c 4d 4e 5 6 7 8 9 10 (Group light exit-side lens (group guide lens moving mechanism, dichroic mirror replacement mechanism, grating, second plane mirror, collimating lens, light irradiation surface, light-shielding plate control unit
-23--twenty three-