200534916 玫、發明說明： 【發明所屬之技術領域】 本發明係有關於一種微流體混合器，特別是指一種利用 交替電滲透流驅動之主動式微流體混合器。 【先前技術】 混合在生物晶片中之試劑混合、樣品混合、異相萃取、 微量藥品配置、DNA及蛋白質分解等方面扮演著相當重要 的角色。而混合的工作在微尺度的領域裡，面臨了相當大200534916 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a microfluidic mixer, in particular to an active microfluidic mixer driven by alternating electroosmotic flow. [Previous technology] Reagent mixing, sample mixing, heterogeneous extraction, trace drug configuration, DNA and protein decomposition, etc., which are mixed in the biochip, play a very important role. The mixed work is facing a considerable
的考驗’由於在微流道内其雷諾數相當的低，因此想要藉Test of ’, because its Reynolds number is quite low in the microchannel,
由紊流的效應來混合兩種以上的流體是相當困難的事。在 近幾年，關於在微管道中進行混合的方法陸續被提出，其 大致上可分為主動式混合器和被動式混合器兩大類。所謂 主動式混合器，即是在流體中施加額外的能量源以造成局 部紊流進而增加其混合的效率，其中包含以機械力方式造 成混合、利用微電極在局部區域進行介電泳力操作以造成 渾洗流場或是制超音波震動產生混合。而被動式混合 器’則完全沒有任何的可動元件’其輔助混合的方法是藉 由各式各樣的微結構’來增加不同流體間的相互接觸面 其包括多孔式進料法、三維折叠法，其混合的過程全 靠流體本身的擴散作用來達成。 /觀上述之微流體混合方式，除流體驅動力之外，均 、θ額外之作用力以混合流體，因此其系統之控制較 複雜’且很難整合成可靠的微流體系統。 器所需製造的微社槿4日本$灿^ 倣、，口構相當複雜，進而導致其製程非常的It is quite difficult to mix two or more fluids by the effect of turbulence. In recent years, methods for mixing in micropipelines have been proposed one after another, which can be roughly divided into two categories: active mixers and passive mixers. The so-called active mixer is to apply an additional energy source to the fluid to cause local turbulence and increase its mixing efficiency. It includes mechanical mixing to cause mixing, and microelectrodes to perform dielectrophoretic force operations in local areas to cause Mixing flow fields or ultrasonic vibrations. The passive mixer is completely free of any movable elements. Its method of assisting mixing is to increase the contact surface between different fluids through various microstructures. It includes porous feed method and three-dimensional folding method. The mixing process is achieved by the diffusion of the fluid itself. / Viewing the above microfluid mixing method, in addition to the fluid driving force, uniform and θ additional forces are used to mix the fluid, so its system control is more complicated 'and it is difficult to integrate into a reliable microfluidic system. The micro-sheer hibiscus which needs to be manufactured by the device is 4 Japanese $ Can ^ imitation, and the mouth structure is quite complicated, which leads to a very complicated process.
O:\9I\9I65I.DOC -6胃 200534916 貝不適5製作成大量且可拋棄式之晶片。 因此，有必要提供一創新且富進步性的微流體混合器， 以解沬上述問題。 【發明内容】 本毛明之主要目的係提供一種微流體混合器，利用驅動 μ體μ動之電滲透流進行混合，操作時僅需將驅動電壓快 速切換於不同流體入口，便可達到不同流體之驅動及混 a其不僅不需可動元件，亦不需複雜之管路設計，因此 不僅操作簡單，且可降低製造成本。 本發明之另一目的係提供一種微流體混合器，係用以混 合二種以上不同之微流體，該微流體混合器至少包括：一 混合器本體、一電壓切換裝置及一電源供應器。 該混合器本體係具有導通之一主管道、至少一第一入 口、至：一第二入口及一出口，該第一入口及第二入口係 用以分別導入所欲混合之流體，該出口係用以導出混合後 之流體。該電壓切換裝置之一端電氣連接該第一入口，另 一端電氣連接該第二入口，用以交替地切換不同流體之驅 動電壓。該電源供應器係電氣連接該繼電器及該出口，以 提供該等流體之驅動電壓。 【實施方式】 參考圖1 ’顯示本發明第一實施例之微流體混合器之立 體示意圖。該第一實施例之微流體混合器1係用以混合二 種不同之微流體，該微流體混合器1包括··一混合器本體 11、一電壓切換裝置12及一電源供應器13。O: \ 9I \ 9I65I.DOC -6 Stomach 200534916 Beifu 5 Made into a large number of disposable wafers. Therefore, it is necessary to provide an innovative and progressive microfluidic mixer to solve the above problems. [Summary of the invention] The main purpose of this Maoming is to provide a microfluid mixer, which uses the electroosmotic flow that drives μ body μ to move, and only needs to quickly switch the driving voltage to different fluid inlets during operation to achieve different fluids. Driving and mixing do not only require movable components, but also do not require complicated pipeline design, so it is not only simple to operate, but also reduces manufacturing costs. Another object of the present invention is to provide a microfluidic mixer for mixing two or more different microfluids. The microfluidic mixer includes at least: a mixer body, a voltage switching device, and a power supply. The mixer has a main pipeline, at least a first inlet, and a second inlet and an outlet, the first inlet and the second inlet are respectively used to introduce the fluid to be mixed, and the outlet is Used to export the mixed fluid. One end of the voltage switching device is electrically connected to the first inlet, and the other end is electrically connected to the second inlet, for alternately switching driving voltages of different fluids. The power supply is electrically connected to the relay and the outlet to provide a driving voltage for the fluids. [Embodiment] Referring to FIG. 1 ', a schematic perspective view of a microfluidic mixer according to a first embodiment of the present invention is shown. The microfluid mixer 1 of the first embodiment is used to mix two different microfluids. The microfluid mixer 1 includes a mixer body 11, a voltage switching device 12, and a power supply 13.
O:\91\91651O0C 200534916 該混合器本體π(例如一 τ型微流體晶片或其他生物晶 片）具有連通之一主管道ill、τ第一入口 112、一第二入 口 113、及一出口 114。該主管道111係作為該等流體混合之 用，其可以是方形或圓形之凹槽，但不限於上述形式。該 主管道111包括一混合道1111、一第一導引道1112及一第 二導引道1113，使得該主管道丨丨丨之外型由俯視觀之係為τ 型、Y型、f型或T型或其他型式。該第一入口 係與該 第一導引道1112相通，用以導入所欲混合之第一流體流至 該混合道11 π，該第二入口 113係與該第二導引道i丨13相 通’用以導入所欲混合之第二流體流至該混合道1丨丨1。該 出口 114係用以導出混合後之流體。該混合器本體丨丨之材 質可以為玻璃、石夕、高分子材料或其他材料。 該電壓切換裝置12係為一單刀雙閘高壓繼電器，其一端 係電氣連接該第一入口 112,另一端電氣連接該第二入口 113，用以交替地切換不同流體之驅動電壓。該電源供應 器13係電軋連接該電壓切換裝置丨2及該出口丨14，其係為 一南壓之電源供應器以提供該等流體之驅動電壓，利用電 滲透流驅動之方式驅動該等流體。 該第一實施例之微流體混合器丨係進行直接交替電滲透 流驅動，利用循環切換第一流體及第二流體之電場，造成 兩種流體流向該混合道丨丨丨丨之過程中互相折疊並增加其 接觸面積，進而提高流體不穩定性而達成混合之目的。 參考圖2，顯示本發明第二實施例之微流體混合器之立 體不意圖。該第二實施例之微流體混合器2包括··一混合O: \ 91 \ 91651O0C 200534916 The mixer body π (for example, a τ-type microfluidic wafer or other biological wafer) has a main pipe ill, a τ first inlet 112, a second inlet 113, and an outlet 114 communicating with each other. The main pipe 111 is used for mixing the fluids, and may be a square or circular groove, but is not limited to the above-mentioned form. The main pipeline 111 includes a mixed channel 1111, a first guide channel 1112, and a second guide channel 1113, so that the outer shape of the main pipeline is τ-shaped, Y-shaped, and f-shaped from the top view. Or T type or other types. The first inlet is in communication with the first guide channel 1112 for introducing the first fluid to be mixed to the mixing channel 11 π, and the second inlet 113 is in communication with the second guide channel i 丨 13 'Used to introduce the second fluid to be mixed to the mixing channel 1 丨 丨 1. The outlet 114 is used to discharge the mixed fluid. The material of the mixer body can be glass, stone, polymer materials or other materials. The voltage switching device 12 is a single-pole double-gate high-voltage relay, one end of which is electrically connected to the first inlet 112 and the other end is electrically connected to the second inlet 113, for alternately switching driving voltages of different fluids. The power supply 13 is connected to the voltage switching device 丨 2 and the outlet 丨 14 by electric rolling. It is a power supply of South Pressure to provide the driving voltage of these fluids and drive them by means of electroosmotic flow driving. fluid. The microfluid mixer of the first embodiment is driven by direct alternating electroosmotic flow, and the electric field of the first fluid and the second fluid is switched by circulation, causing the two fluids to fold to each other in the process of the mixing channel. And increase its contact area, and then improve fluid instability and achieve the purpose of mixing. Referring to Fig. 2, the perspective of the microfluidic mixer of the second embodiment of the present invention is not intended. The microfluid mixer 2 of the second embodiment includes a mixing
O:\91\9I65I DOC 200534916 器本體21、一電壓切換裝置22、一電源供應器23及一電阻 24。該混合器本體21具有連通之一主管道2U、一第一入 口 212、一第二入口213及一出口214。該第二實施例之微 流體混合器2與第一實施例之不同處僅在於該第二實施例 之微流體混合器2中所使用之電壓切換裝置22係為一雙刀 雙閘南壓繼電器，且增加該電阻24，該電阻24可以是固定 電阻或疋可變電阻，其一端係電氣連接該電壓切換裝置 22 ’另一端係接地，藉此以構成管道内流體阻抗與該電阻 24所構成之分壓電路，以提高混合的效率。 鲁 該第二實施例係進行箝位交替（第一實施例係直接交替） 電渗透流驅動之操作模式。以圖2所示之情況為例，當該 第二入口 213有電滲透流驅動時，該第一入口 212則透過該 電阻24接地，利用該第二入口213至該第一入口 212間管道 中液體之阻抗及該電阻24所構成之分壓電路，以決定該第 一入口 212之電位，而得以更有效的控制電滲透流切換 時，流入第一入口 212之溢流量，而提高混合效率。 參考圖3 ’顯示本發明第三實施例之微流體混合器之立 體示意圖。該第三實施例之微流體混合器3與第一實施例 大致相同’所不同之處僅在於該第三實施例之微流體混合 器3包括二個第一入口 312,312a及二個第一導引道 3 112,3112a，二個第二入口 313,313a及二個第二導引道 3 113,3 11 3a ’因此該微流體混合器3可以混合四種流體（分 別導入該二第一入口 312,312a及該二第二入口 3 13,3 13a)。第三實施例中，該電壓切換裝置32之一端係電 O:\91\9165l.DOC -9- 200534916 氣連接該等第一入σ ^。 入ϋ 3l2,312a(亦即該等第一入口 3 12,3 12a皆位於同一雷/ 電位）’另一端電氣連接該等第二入口 ，3a(亦即該等第二人口 皆位於同—電位）， 其：作方式與第—實施例相同。該第三實施例之微流體混 口器3係用以此合四種不同之流體，然而可以理解的是， 只編曼第一入口或第二入口，該第三實施例之微流體混 口态3即可混合更多種流體。另夕卜，該第三實施例之供電 方式可以有夕種形式，例如左邊一組右邊一組（即該等第 一入口 312,312a—組，該等第二入n313,313a一組），或是 對角線同一組（即第一入口 312與第二入口 313a同一組，第 入口 312a與第二入口 313同一組），或者為各個獨立供電 (即該等第一入口 312,312a，該等第二入口 313,313a皆為獨 立供電）。 參考圖4a至4f，顯示第一實施例之混合器本體加上一上 板之製程示意圖。該混合器本體丨丨係採用顯微鏡所使用之 載玻片作為玻璃底材，經4〇〇〇c退火處理四小時以釋放其 殘餘應力後，利用沸騰之piranha溶液（H2S〇4(%) : H2〇2(〇/〇) ^ 3:1)清洗十分鐘。之後塗布一厚度約為3 μχη之AZ4620正 光阻薄膜20，作為玻璃底材於姓刻缓衝液（buffered oxide etchant，B0E)中蝕刻之蝕刻罩幕，然後利用畫好之光罩22 進行標準之光刻程序（圖4a)。並利用1M之HC1除去蝕刻過 程中所產生之沈澱物，經過40分鐘的蝕刻可得36 μιη深之 該主官道111(包括該混合道1111、該第一導引道1112及该 第二導引道1113)、該第一入口 112、該第二入口 113及該 O:\91\91651.DOC -10- 200534916 出口 114(圖4b)。隨後利用KOH溶液將該光阻薄膜2〇去除 (圖4c)，即可得到該混合器本體11。 然^，為了獲得一完整之微管道，需要加上一上板24， 其係為一空白玻璃，且鑽好一第一通道241、一第二通道 242及一第三通道243(圖4d)。之後將該上板24置於該混合 器本體11上且進行對位’使該第一通道241對準該第一入 口 112 ’該第二通道242對準該第二入口 Η]，該第三通道 243對準該出口 114(圖4e)。之後將該上板24及該混合器本 體11置於580〇C之高溫爐中十分鐘，使該上板24及該混合 器本體11熔融接合（圖4f)。 參考圖5，顯示第一實施例在不同切換頻率下，混合距 離與混合效率之關係圖。此實驗之操作電壓為9〇v/cm， 且混合距離係沿著該混合道llu計算，其起算點為該第一 導引道1112及該第二導引道1113進入該混合道丨丨丨丨之 處。在本圖中，線段係代表電腦模擬數據，符號係代表實 驗結果，其中符號•代表0Hz，〇代表1Hz，△代表2Hz， ㊉代表10Hz。在第一實施例之直接交替操作模式之下，一 入口施加電壓，另一入口則為開放端，因而造成其電位僅 略低於施加電壓端之電位，因此利用此種操作模式所獲得 之流體擺動較小，但仍可在短距離内得到混合的作用。當 操作頻率於0Hz時，流體流動呈現層流，只有因擴散而造 成之局部混合。當操作頻率設定於1 Hz時，則可以見到流 體因擾動而造成明顯之混合作用。當頻率增加為2 Hz時， 則由於擾動之頻率加快，因此其混合作用更為明顯。但當O: \ 91 \ 9I65I DOC 200534916 device body 21, a voltage switching device 22, a power supply 23 and a resistor 24. The mixer body 21 has a main pipe 2U, a first inlet 212, a second inlet 213, and an outlet 214 communicating with it. The microfluid mixer 2 of the second embodiment differs from the first embodiment only in that the voltage switching device 22 used in the microfluid mixer 2 of the second embodiment is a double-pole double-gate southern pressure relay. And increase the resistance 24, which can be a fixed resistance or a variable resistance, one end of which is electrically connected to the voltage switching device 22 'and the other end is grounded, thereby constituting the fluid resistance in the pipeline and the resistance 24. Voltage divider circuit to improve mixing efficiency. Lu This second embodiment is an alternating mode of clamping (the first embodiment is a direct alternation) electroosmotic flow driven operation mode. Taking the situation shown in FIG. 2 as an example, when the second inlet 213 is driven by electroosmotic flow, the first inlet 212 is grounded through the resistor 24, and the second inlet 213 is used to connect the pipeline to the first inlet 212. The impedance of the liquid and the voltage dividing circuit formed by the resistor 24 determine the potential of the first inlet 212, so that the overflow of the first inlet 212 can be more effectively controlled when the electroosmotic flow is switched, thereby improving the mixing efficiency. . Referring to Fig. 3 ', a schematic perspective view of a microfluidic mixer according to a third embodiment of the present invention is shown. The microfluid mixer 3 of the third embodiment is substantially the same as the first embodiment. The only difference is that the microfluid mixer 3 of the third embodiment includes two first inlets 312, 312a and two first guides. Approach 3 112, 3112a, two second inlets 313, 313a, and two second inlets 3 113, 3 11 3a 'so the microfluidic mixer 3 can mix four fluids (introduced into the two first inlets 312, 312, respectively) a and the two second entrances 3 13,3 13a). In the third embodiment, one end of the voltage switching device 32 is electrically connected to the first input σ ^ by a gas connection O: \ 91 \ 9165l.DOC -9- 200534916. Into the 3l2,312a (that is, the first entrances 3 12, 3 12a are all located at the same mine / potential) 'the other end is electrically connected to the second entrances, 3a (that is, the second populations are all located at the same potential) ), Which is the same as the first embodiment. The microfluid mixer 3 of the third embodiment is used to combine four different fluids. However, it can be understood that only the first inlet or the second inlet of the micromanipulator is edited. The microfluid mixer of the third embodiment State 3 can mix more fluids. In addition, the power supply method of the third embodiment may have various forms, such as a group on the left and a group on the right (that is, the first entrances 312, 312a—the group, and the second one on the n313, 313a group), or Is the same group diagonally (that is, the first inlet 312 is the same group as the second inlet 313a, and the second inlet 312a is the same group as the second inlet 313), or powers each independently (that is, the first inlets 312, 312a, the first The two inlets 313 and 313a are independently powered). Referring to Figs. 4a to 4f, there are shown schematic diagrams of a manufacturing process of the mixer body plus an upper plate of the first embodiment. The main body of the mixer is a glass slide used by a microscope as a glass substrate, and annealed at 4,000 ° C for four hours to release its residual stress. Then, the boiling piranha solution (H2S〇4 (%) is used: H20 (0 / 〇) ^ 3: 1) Wash for ten minutes. After that, an AZ4620 positive photoresist film 20 with a thickness of about 3 μχη is applied as an etching mask etched in a buffered oxide etchant (B0E) as a glass substrate, and then the photomask 22 is used for standard light. Engraving procedure (Figure 4a). The 1M HC1 was used to remove the deposits generated during the etching process. After 40 minutes of etching, the main channel 111 (including the mixed channel 1111, the first guide channel 1112, and the second guide channel) was obtained with a depth of 36 μm. Approach 1113), the first entrance 112, the second entrance 113, and the O: \ 91 \ 91651.DOC -10- 200534916 exit 114 (Figure 4b). Subsequently, the photoresist film 20 is removed using a KOH solution (FIG. 4c), and the mixer body 11 is obtained. However, in order to obtain a complete microchannel, an upper plate 24 is required, which is a blank glass, and a first channel 241, a second channel 242, and a third channel 243 are drilled (Figure 4d). . The upper plate 24 is then placed on the mixer body 11 and aligned 'align the first channel 241 with the first inlet 112' align the second channel 242 with the second inlet Η], the third Channel 243 is aligned with this outlet 114 (Fig. 4e). Thereafter, the upper plate 24 and the mixer body 11 were placed in a high-temperature furnace at 580 ° C for ten minutes, and the upper plate 24 and the mixer body 11 were fusion-bonded (Fig. 4f). Referring to FIG. 5, there is shown a relationship diagram between the mixing distance and the mixing efficiency at different switching frequencies in the first embodiment. The operating voltage for this experiment was 90 volts / cm, and the mixing distance was calculated along the mixing channel 11u. The starting points were the first guide track 1112 and the second guide track 1113 entering the mixture track. 丨 丨 丨丨 place. In this figure, the line segments represent computer simulation data, and the symbols represent experimental results, where the symbol • represents 0Hz, 0 represents 1Hz, △ represents 2Hz, and ㊉ represents 10Hz. In the direct alternating operation mode of the first embodiment, one inlet is applied with voltage, and the other inlet is open. As a result, its potential is only slightly lower than that of the applied voltage. Therefore, the fluid obtained by this operation mode The swing is small, but the mixing effect can still be obtained in a short distance. When the operating frequency is 0 Hz, the fluid flow is laminar, with only local mixing due to diffusion. When the operating frequency is set to 1 Hz, it can be seen that the fluid causes significant mixing due to disturbances. When the frequency is increased to 2 Hz, the mixing effect is more obvious because the frequency of the disturbance is accelerated. But when
O:\91\9165l.DOC -11 - 200534916 頻率設定於4 Hz時，其擺動頻率雖然更快，但由於流體本 身慣性力之影響，造成流體振動之擺幅顯著減小，因此其 混合之效果因而下降。而當頻率增加為1〇 1^時，則由於 擾動之頻率加快，因此其混合作用更為明顯。由圖中可看 出，在第-實施例中，混合效率最高者為操作頻率為黯。 參考圖6，顯示第二實施例在不同切換頻率下，混合距 離與混合效率之關係圖。此實驗所使用之電阻之電阻值為 200ΜΩ，其餘操作條件與圖5相同。在本圖中，線段係代 表電腦模擬數據，符號係代表實驗結果，其中符號▲代表 2Hz，◊代表4Hz，#代表7Hz。本實施例之係為箝位交替 之操作模式，其主要是在未施加電場的入口電位設定於較 低於驅動電位，因此施加電場端之流體將往該未施加電場 之入口以及該出口流動，如此則可以增加電場切換時流體 擺動之振幅。由圖中可看出，在第二實施例中，混合效率 最向者為操作頻率為4Hz，且其混合效率較第一實施例高。 參考圖7 ’顯示第二實施例在不同操作電壓下，切換頻 率與混合效率之關係圖。此實驗之操作條件與圖6相同。 在本圖中，線段係代表電腦模擬數據，符號係代表實驗結 果’其中符號〇代表60 V/cm，△代表90 V/cm，◊代表120 V/cm，▼代表180 V/cm。由圖中可看出，在第二實施例中， 不同操作電壓在不同切換頻率具有不同之混合效率。 上述實施例僅為說明本發明之原理及其功效，並非限制 本發明。因此習於此技術之人士對上述實施例進行修改及 變化仍不脫本發明之精神。本發明之權利範圍應如後述之 OA91\91651.DOC -12- 200534916 申請專利範圍所列。 【圖式簡單說明】 圖1顯示本發明第一實施例之微流體混合器之立體示意 圖， 圖2顯示本發明第二實施例之微流體混合器之立體示意 圖； 圖3顯示本發明第三實施例之微流體混合器之立體示意 園， 圖4a至4f顯示本發明第一實施例之混合器本體加上_ 上板之製程示意圖； 圖5顯示本發明第一實施例之微流體混合器在不同切換 頻率下，混合距離與混合效率之關係圖； 圖6顯示本發明第二實施例之微流體混合器在不同切換 頻率下，混合距離與混合效率之關係圖；及 圖7顯示本發明第二實施例之微流體混合器在不同操作 電壓下，切換頻率與混合效率之關係圖。 【圖式元件符號說明】 1 微流體混合益 11 混合器本體 111 主管道 1111 混合道 1112 第一導引道 1113 第二導引道 112 第一入口 O:\9I\9165I.DOC -13- 200534916 113 114 12 13 2 21 211 212 213 214 22 23 24 3 312,312a 3112,3112a 313,313a 3113,3113a 32 20 22 24 241 242 243 第二入口 出口 電壓切換裝置 電源供應器 微流體混合器 混合器本體 主管道 第一入口 第二入口 出Π 電壓切換裝置 電源供應器 電阻 微流體混合器 第一入口 第一導引道 第二入口 第二導引道 該電壓切換裝置 正光阻薄膜 光罩 上板 第一通道 第二通道 第三通道 O:\91\91651.DOC -14-O: \ 91 \ 9165l.DOC -11-200534916 When the frequency is set to 4 Hz, although its swing frequency is faster, the swing of the fluid vibration is significantly reduced due to the effect of the inertial force of the fluid itself, so its mixing effect As a result. When the frequency is increased to 10 ^, the mixing effect is more obvious because the frequency of the disturbance is accelerated. As can be seen from the figure, in the first embodiment, the highest mixing efficiency is the dark operating frequency. Referring to FIG. 6, there is shown a relationship diagram between the mixing distance and the mixing efficiency at different switching frequencies in the second embodiment. The resistance value of the resistor used in this experiment is 200 MΩ, and other operating conditions are the same as those in FIG. 5. In this figure, the line segments represent computer simulation data, and the symbols represent experimental results, where the symbol ▲ represents 2Hz, ◊ represents 4Hz, and # represents 7Hz. This embodiment is an alternate clamping operation mode, which is mainly set at a lower potential than the driving potential at the entrance of the unapplied electric field, so the fluid at the end of the applied electric field will flow to the entrance and the exit of the unapplied electric field. This can increase the amplitude of the fluid swing when the electric field is switched. As can be seen from the figure, in the second embodiment, the mixing efficiency is most oriented to an operating frequency of 4 Hz, and its mixing efficiency is higher than that of the first embodiment. Referring to FIG. 7 ', the relationship between the switching frequency and the mixing efficiency under different operating voltages of the second embodiment is shown. The operating conditions of this experiment are the same as those of FIG. 6. In this figure, the line segments represent computer simulation data, the symbols represent experimental results, where the symbol 0 represents 60 V / cm, △ represents 90 V / cm, ◊ represents 120 V / cm, and ▼ represents 180 V / cm. As can be seen from the figure, in the second embodiment, different operating voltages have different mixing efficiencies at different switching frequencies. The above embodiments are only for explaining the principle of the present invention and its effects, but not for limiting the present invention. Therefore, those skilled in the art can still modify and change the above embodiments without departing from the spirit of the present invention. The scope of the rights of the present invention should be as listed in the following OA91 \ 91651.DOC -12- 200534916 patent application scope. [Brief description of the drawings] FIG. 1 shows a schematic perspective view of the microfluid mixer of the first embodiment of the present invention, FIG. 2 shows a perspective schematic view of the microfluid mixer of the second embodiment of the present invention; FIG. 3 shows a third embodiment of the present invention The schematic diagram of the three-dimensional microfluidic mixer of the example. Figures 4a to 4f show the schematic diagram of the manufacturing process of the mixer body plus the upper plate of the first embodiment of the present invention. Figure 5 shows the microfluidic mixer of the first embodiment of the present invention at Figure 6 shows the relationship between the mixing distance and the mixing efficiency at different switching frequencies; Figure 6 shows the relationship between the mixing distance and the mixing efficiency of the microfluid mixer of the second embodiment of the present invention at different switching frequencies; and Figure 7 shows the first The relationship diagram between the switching frequency and the mixing efficiency of the microfluidic mixer of the second embodiment under different operating voltages. [Illustration of Symbols of Schematic Elements] 1 Microfluidic Mix 11 Mixer Body 111 Main Pipe 1111 Mixing Channel 1112 First Guide Channel 1113 Second Guide Channel 112 First Entrance O: \ 9I \ 9165I.DOC -13- 200534916 113 114 12 13 2 21 211 212 213 214 22 23 24 3 312,312a 3112,3112a 313,313a 3113,3113a 32 20 22 24 241 242 243 Second inlet and outlet voltage switching device Power supply microfluid mixer mixer body main pipe The first inlet, the second inlet, the voltage switching device, the power supply, the resistance microfluidic mixer, the first inlet, the first guide channel, the second inlet, the second guide channel, and the voltage switching device. Second channel third channel O: \ 91 \ 91651.DOC -14-