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TW200511640A - Miniature RF and microwave components and methods for fabricating such components - Google Patents

Miniature RF and microwave components and methods for fabricating such components

Info

Publication number
TW200511640A
TW200511640A TW093116127A TW93116127A TW200511640A TW 200511640 A TW200511640 A TW 200511640A TW 093116127 A TW093116127 A TW 093116127A TW 93116127 A TW93116127 A TW 93116127A TW 200511640 A TW200511640 A TW 200511640A
Authority
TW
Taiwan
Prior art keywords
components
operations
radiation
depositions
miniature
Prior art date
Application number
TW093116127A
Other languages
Chinese (zh)
Other versions
TWI244799B (en
Inventor
Elliott R Brown
John D Evans
Christopher A Bang
Adam L Cohen
Michael S Lockard
Dennis R Smalley
Morton Grosser
Original Assignee
Microfabrica Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/607,931 external-priority patent/US7239219B2/en
Application filed by Microfabrica Inc filed Critical Microfabrica Inc
Publication of TW200511640A publication Critical patent/TW200511640A/en
Application granted granted Critical
Publication of TWI244799B publication Critical patent/TWI244799B/en

Links

Landscapes

  • Control Of Motors That Do Not Use Commutators (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, antennae, transmission lines, filters, hybrid couplers, antenna arrays and/or other active or passive components. Components may include non-radiation-entry and non-radiation-exit channels that are useful in separating sacrificial materials from structural materials. Preferred formation processes use electrochemical fabrication techniques (e.g. including selective depositions, bulk depositions, etching operations and planarization operations) and post-deposition processes (e.g. selective etching operations and/or back filling operations).
TW93116127A 2003-06-06 2004-06-04 Miniature RF and microwave components and methods for fabricating such components TWI244799B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47655403P 2003-06-06 2003-06-06
US10/607,931 US7239219B2 (en) 2001-12-03 2003-06-27 Miniature RF and microwave components and methods for fabricating such components

Publications (2)

Publication Number Publication Date
TW200511640A true TW200511640A (en) 2005-03-16
TWI244799B TWI244799B (en) 2005-12-01

Family

ID=37154900

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93116127A TWI244799B (en) 2003-06-06 2004-06-04 Miniature RF and microwave components and methods for fabricating such components

Country Status (1)

Country Link
TW (1) TWI244799B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113131111A (en) * 2021-04-17 2021-07-16 中国人民解放军国防科技大学 W-band-pass filter
TWI893846B (en) * 2024-01-31 2025-08-11 台揚科技股份有限公司 Microwave device

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI238513B (en) 2003-03-04 2005-08-21 Rohm & Haas Elect Mat Coaxial waveguide microstructures and methods of formation thereof
KR101476438B1 (en) 2006-12-30 2014-12-24 누보트로닉스, 엘.엘.씨 Three Dimensional Microstructure and Formation Method
US7898356B2 (en) 2007-03-20 2011-03-01 Nuvotronics, Llc Coaxial transmission line microstructures and methods of formation thereof
EP3104450A3 (en) 2007-03-20 2016-12-28 Nuvotronics, LLC Integrated electronic components and methods of formation thereof
US20110123783A1 (en) 2009-11-23 2011-05-26 David Sherrer Multilayer build processses and devices thereof
US8917150B2 (en) 2010-01-22 2014-12-23 Nuvotronics, Llc Waveguide balun having waveguide structures disposed over a ground plane and having probes located in channels
US8866300B1 (en) 2011-06-05 2014-10-21 Nuvotronics, Llc Devices and methods for solder flow control in three-dimensional microstructures
US8814601B1 (en) 2011-06-06 2014-08-26 Nuvotronics, Llc Batch fabricated microconnectors
US9993982B2 (en) 2011-07-13 2018-06-12 Nuvotronics, Inc. Methods of fabricating electronic and mechanical structures
US9325044B2 (en) 2013-01-26 2016-04-26 Nuvotronics, Inc. Multi-layer digital elliptic filter and method
US9306254B1 (en) 2013-03-15 2016-04-05 Nuvotronics, Inc. Substrate-free mechanical interconnection of electronic sub-systems using a spring configuration
US9306255B1 (en) 2013-03-15 2016-04-05 Nuvotronics, Inc. Microstructure including microstructural waveguide elements and/or IC chips that are mechanically interconnected to each other
EP3095159A4 (en) 2014-01-17 2017-09-27 Nuvotronics, Inc. Wafer scale test interface unit: low loss and high isolation devices and methods for high speed and high density mixed signal interconnects and contactors
TWI573316B (en) * 2014-07-22 2017-03-01 絡達科技股份有限公司 Wide band directional coupler
US10847469B2 (en) 2016-04-26 2020-11-24 Cubic Corporation CTE compensation for wafer-level and chip-scale packages and assemblies
US10511073B2 (en) 2014-12-03 2019-12-17 Cubic Corporation Systems and methods for manufacturing stacked circuits and transmission lines
TWI633712B (en) * 2017-05-16 2018-08-21 財團法人工業技術研究院 Three-dimension butler matrix
US10319654B1 (en) 2017-12-01 2019-06-11 Cubic Corporation Integrated chip scale packages

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113131111A (en) * 2021-04-17 2021-07-16 中国人民解放军国防科技大学 W-band-pass filter
TWI893846B (en) * 2024-01-31 2025-08-11 台揚科技股份有限公司 Microwave device

Also Published As

Publication number Publication date
TWI244799B (en) 2005-12-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees