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TW200501259A - Chemical liquid supply apparatus - Google Patents

Chemical liquid supply apparatus

Info

Publication number
TW200501259A
TW200501259A TW092116805A TW92116805A TW200501259A TW 200501259 A TW200501259 A TW 200501259A TW 092116805 A TW092116805 A TW 092116805A TW 92116805 A TW92116805 A TW 92116805A TW 200501259 A TW200501259 A TW 200501259A
Authority
TW
Taiwan
Prior art keywords
route
supply
liquid supply
supply apparatus
chemical liquid
Prior art date
Application number
TW092116805A
Other languages
Chinese (zh)
Other versions
TWI252533B (en
Inventor
Masataka Fukuizumi
Naoki Hiraoka
Hotaka Yamamoto
Takeshi Nakamura
Hiroshi Osuda
Matoba Tooru
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to TW92116805A priority Critical patent/TWI252533B/en
Publication of TW200501259A publication Critical patent/TW200501259A/en
Application granted granted Critical
Publication of TWI252533B publication Critical patent/TWI252533B/en

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

A chemical-solution supplying apparatus (100) for supplying slurry to an exterior device (7) includes a supply route (A) and a return route (C) in which the supply route (A) provides an abrasive suspension to flow at a predetermined flow rate therein and the return route (C) is connected with the supply route and a storage tank (1). When the supply of the slurry to the exterior device is stopped, the abrasive suspension is returned from the supply route to the storage tank through the return route. This is done in order to maintain the flow of the abrasive suspension in the supply route so that abrasive is prevented from coagulating and settling.
TW92116805A 2003-06-20 2003-06-20 Chemical liquid supply apparatus TWI252533B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92116805A TWI252533B (en) 2003-06-20 2003-06-20 Chemical liquid supply apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92116805A TWI252533B (en) 2003-06-20 2003-06-20 Chemical liquid supply apparatus

Publications (2)

Publication Number Publication Date
TW200501259A true TW200501259A (en) 2005-01-01
TWI252533B TWI252533B (en) 2006-04-01

Family

ID=37565445

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92116805A TWI252533B (en) 2003-06-20 2003-06-20 Chemical liquid supply apparatus

Country Status (1)

Country Link
TW (1) TWI252533B (en)

Also Published As

Publication number Publication date
TWI252533B (en) 2006-04-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees