TW200420419A - Vacuum-assisted attachment holding device - Google Patents
Vacuum-assisted attachment holding deviceInfo
- Publication number
- TW200420419A TW200420419A TW092127675A TW92127675A TW200420419A TW 200420419 A TW200420419 A TW 200420419A TW 092127675 A TW092127675 A TW 092127675A TW 92127675 A TW92127675 A TW 92127675A TW 200420419 A TW200420419 A TW 200420419A
- Authority
- TW
- Taiwan
- Prior art keywords
- top face
- support substrate
- extremely thin
- substrate
- vacuum
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- H10P72/50—
Landscapes
- Laminated Bodies (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE20215401U DE20215401U1 (de) | 2002-10-07 | 2002-10-07 | Verbund aus einem Dünnstsubsrat und einem Trägersubstrat mit lösbarem Verbindungsmittel |
| DE10323302A DE10323302A1 (de) | 2002-10-07 | 2003-05-21 | Vakuumunterstützte adhäsive Haltevorrichtung für Dünnstglas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200420419A true TW200420419A (en) | 2004-10-16 |
Family
ID=31896475
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092127674A TW200415679A (en) | 2002-10-07 | 2003-10-06 | Composite composed of thin substrate separably bound to carrier substrate |
| TW092127673A TW200414949A (en) | 2002-10-07 | 2003-10-06 | Detachably connected compound comprising an extremely thin substrate and a support substrate |
| TW092127676A TW200409700A (en) | 2002-10-07 | 2003-10-06 | Detachable compound composed by connection of extremely thin substrate and carrier plate |
| TW092127675A TW200420419A (en) | 2002-10-07 | 2003-10-06 | Vacuum-assisted attachment holding device |
Family Applications Before (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092127674A TW200415679A (en) | 2002-10-07 | 2003-10-06 | Composite composed of thin substrate separably bound to carrier substrate |
| TW092127673A TW200414949A (en) | 2002-10-07 | 2003-10-06 | Detachably connected compound comprising an extremely thin substrate and a support substrate |
| TW092127676A TW200409700A (en) | 2002-10-07 | 2003-10-06 | Detachable compound composed by connection of extremely thin substrate and carrier plate |
Country Status (2)
| Country | Link |
|---|---|
| DE (5) | DE20215401U1 (zh) |
| TW (4) | TW200415679A (zh) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10348946B4 (de) * | 2003-10-18 | 2008-01-31 | Schott Ag | Bearbeitungsverbund für ein Substrat |
| DE102004016627A1 (de) | 2004-03-29 | 2005-11-24 | Gottlieb Binder Gmbh & Co. Kg | Anzeigevorrichtung |
| JP5200538B2 (ja) | 2005-08-09 | 2013-06-05 | 旭硝子株式会社 | 薄板ガラス積層体及び薄板ガラス積層体を用いた表示装置の製造方法 |
| JP5532918B2 (ja) * | 2007-03-12 | 2014-06-25 | 旭硝子株式会社 | 保護ガラス付ガラス基板を用いた表示装置の製造方法 |
| KR100813851B1 (ko) * | 2007-04-05 | 2008-03-17 | 삼성에스디아이 주식회사 | 투명 전도성 산화막인 캐소드를 구비하는 유기전계발광소자및 그의 제조방법 |
| TWI541615B (zh) * | 2007-07-13 | 2016-07-11 | 瑪波微影Ｉｐ公司 | 在微影裝置中交換晶圓的方法 |
| US8705010B2 (en) | 2007-07-13 | 2014-04-22 | Mapper Lithography Ip B.V. | Lithography system, method of clamping and wafer table |
| DE102009012394A1 (de) | 2009-03-10 | 2010-11-18 | Schott Ag | Gehäusebauteil, insbesondere für optoelektronische Anwendungen |
| US9847243B2 (en) * | 2009-08-27 | 2017-12-19 | Corning Incorporated | Debonding a glass substrate from carrier using ultrasonic wave |
| US20120255672A1 (en) * | 2011-04-11 | 2012-10-11 | Marshall Dale C | Methods and apparatuses for applying a handling tab to continuous glass ribbons |
| US20130105089A1 (en) * | 2011-10-28 | 2013-05-02 | Industrial Technology Research Institute | Method for separating substrate assembly |
| JP6152569B2 (ja) | 2011-10-31 | 2017-06-28 | コーニング インコーポレイテッド | 静電的に固定されたガラスロール、その作製方法および装置 |
| US10077207B2 (en) | 2011-11-30 | 2018-09-18 | Corning Incorporated | Optical coating method, apparatus and product |
| US9957609B2 (en) | 2011-11-30 | 2018-05-01 | Corning Incorporated | Process for making of glass articles with optical and easy-to-clean coatings |
| US10543662B2 (en) | 2012-02-08 | 2020-01-28 | Corning Incorporated | Device modified substrate article and methods for making |
| US9902130B2 (en) | 2012-07-02 | 2018-02-27 | Corning Incorporated | Methods of processing a glass substrate and glass apparatus |
| DE102012215149A1 (de) * | 2012-08-27 | 2014-03-20 | Schott Ag | Glassubstratband |
| CN105143500B (zh) * | 2012-10-04 | 2017-10-10 | 康宁股份有限公司 | 光学涂覆方法、设备和产品 |
| TWI591040B (zh) | 2012-10-22 | 2017-07-11 | 康寧公司 | 玻璃纖維網和拼接的方法 |
| US9340443B2 (en) | 2012-12-13 | 2016-05-17 | Corning Incorporated | Bulk annealing of glass sheets |
| US10014177B2 (en) | 2012-12-13 | 2018-07-03 | Corning Incorporated | Methods for processing electronic devices |
| TWI617437B (zh) | 2012-12-13 | 2018-03-11 | 康寧公司 | 促進控制薄片與載體間接合之處理 |
| US10086584B2 (en) | 2012-12-13 | 2018-10-02 | Corning Incorporated | Glass articles and methods for controlled bonding of glass sheets with carriers |
| US20150375492A1 (en) * | 2013-02-07 | 2015-12-31 | Donald Orrin Bigelow | Apparatus and methods of forming flexible glass laminates using electrostatic pinning |
| KR102147509B1 (ko) * | 2013-03-14 | 2020-08-25 | 코닝 인코포레이티드 | 연성 유리 및 고분자 복합 구조의 제조 및 절단을 위한 방법 및 장치 |
| JP6246346B2 (ja) | 2013-06-20 | 2017-12-13 | ショット グラス テクノロジーズ （スゾウ） カンパニー リミテッドＳｃｈｏｔｔ Ｇｌａｓｓ Ｔｅｃｈｎｏｌｏｇｉｅｓ （Ｓｕｚｈｏｕ） Ｃｏ．， Ｌｔｄ． | 支持基板上の薄いガラスの結合物品、その製造方法およびその使用 |
| DE102013106631B4 (de) | 2013-06-25 | 2017-07-27 | Osram Oled Gmbh | Verfahren zum Bearbeiten eines elektronischen Bauelements und elektronische Bauelementeanordnung |
| US10510576B2 (en) | 2013-10-14 | 2019-12-17 | Corning Incorporated | Carrier-bonding methods and articles for semiconductor and interposer processing |
| WO2015112958A1 (en) | 2014-01-27 | 2015-07-30 | Corning Incorporated | Articles and methods for controlled bonding of thin sheets with carriers |
| JP2017518954A (ja) | 2014-04-09 | 2017-07-13 | コーニング インコーポレイテッド | デバイスで改質された基体物品、およびそれを製造する方法 |
| CN106573451A (zh) | 2014-08-15 | 2017-04-19 | 3M创新有限公司 | 玻璃和聚合物膜组件及其制备方法 |
| CN106142761A (zh) * | 2014-10-23 | 2016-11-23 | 凤凰集团有限公司 | 薄玻璃加工方法 |
| DE202016100186U1 (de) | 2015-01-15 | 2016-02-01 | Fhr Anlagenbau Gmbh | Substrathalterung |
| CN107635769B (zh) | 2015-05-19 | 2020-09-15 | 康宁股份有限公司 | 使片材与载体粘结的制品和方法 |
| KR102524620B1 (ko) | 2015-06-26 | 2023-04-21 | 코닝 인코포레이티드 | 시트 및 캐리어를 포함하는 방법들 및 물품들 |
| TW201825623A (zh) | 2016-08-30 | 2018-07-16 | 美商康寧公司 | 用於片材接合的矽氧烷電漿聚合物 |
| TWI821867B (zh) | 2016-08-31 | 2023-11-11 | 美商康寧公司 | 具以可控制式黏結的薄片之製品及製作其之方法 |
| KR102659516B1 (ko) | 2017-08-18 | 2024-04-23 | 코닝 인코포레이티드 | 유리 적층체 |
| CN111615567B (zh) | 2017-12-15 | 2023-04-14 | 康宁股份有限公司 | 用于处理基板的方法和用于制备包括粘合片材的制品的方法 |
| CN110497667A (zh) * | 2019-08-19 | 2019-11-26 | 东旭科技集团有限公司 | 一种复合玻璃板及其制造方法 |
| CN111495643A (zh) * | 2020-06-02 | 2020-08-07 | 拓米(成都)应用技术研究院有限公司 | 一种玻璃边缘封胶装置及方法和应用 |
| CN112158385B (zh) * | 2020-11-16 | 2021-06-15 | 乐清海创智能科技有限公司 | 一种大型显示器分块贴膜装置 |
| CN114436547A (zh) * | 2022-03-09 | 2022-05-06 | 长沙汇意圆科技有限公司 | 一种柔性玻璃制品制作加工方法 |
| DE102022118783A1 (de) * | 2022-07-27 | 2024-02-01 | Audi Aktiengesellschaft | Verfahren zur Herstellung eines Stapels aus einer Mehrzahl von elektrochemischen Zellen |
| CN115974419B (zh) * | 2022-12-15 | 2023-11-24 | 东华大学 | 锌硼硅紫外防护涂层及涂覆该涂层的超薄玻璃 |
| CN116023040B (zh) * | 2022-12-15 | 2024-06-28 | 东华大学 | 紫外防护涂层及涂覆该涂层的超薄玻璃 |
-
2002
- 2002-10-07 DE DE20215401U patent/DE20215401U1/de not_active Expired - Lifetime
-
2003
- 2003-05-21 DE DE10323303A patent/DE10323303A1/de not_active Ceased
- 2003-05-21 DE DE10323304A patent/DE10323304A1/de not_active Ceased
- 2003-05-21 DE DE10323301A patent/DE10323301A1/de not_active Ceased
- 2003-05-21 DE DE10323302A patent/DE10323302A1/de not_active Ceased
- 2003-10-06 TW TW092127674A patent/TW200415679A/zh unknown
- 2003-10-06 TW TW092127673A patent/TW200414949A/zh unknown
- 2003-10-06 TW TW092127676A patent/TW200409700A/zh unknown
- 2003-10-06 TW TW092127675A patent/TW200420419A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW200415679A (en) | 2004-08-16 |
| DE10323302A1 (de) | 2004-04-15 |
| TW200409700A (en) | 2004-06-16 |
| DE20215401U1 (de) | 2004-02-19 |
| TW200414949A (en) | 2004-08-16 |
| DE10323301A1 (de) | 2004-04-15 |
| DE10323303A1 (de) | 2004-04-15 |
| DE10323304A1 (de) | 2004-04-15 |
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