TW200428050A - Free space grating wavelength division multiplexer - Google Patents
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Description
200428050 五、發明說明(1) . 發明所屬之技術領域 - 本發明是有關於一種波長多工器(Wavelel^gth200428050 V. Description of the invention (1). The technical field to which the invention belongs-The present invention relates to a wavelength multiplexer (Wavelel ^ gth
Division Mul tipi ex er,簡稱WDM),且特別疋5關於一種 、:古長多工器。 自由空間光栅(FreeSpaceGrating)/ 反 先前技系舒 、 早期的光纖通訊應用中,一條光纖只有一個通訊頻 道,要提高頻寬而又不用大費周章会铺設新的光纖網路的 方法有兩大類,一是提高電路系統的操作頻率、’然1此1員, 方法將受限於高頻電路的高昂價格。另一辦法為同日f傳运 許多由不同波長所攜帶的訊息,以此一辦法只要同時傳~送‘ 4個或1 6個不同波長的2 · 5 G Η ζ頻寬的訊息,全部的總頻寬^ 就可達到10 GHz或40 GHz,此辦法成本較低,技術障礙也較 低,但系統穩定度較佳,且系統具有可擴充性,這種將不 同波長的光分開及合起來的技術即是波長多工(W D Μ )技 術。 目如尚密度波長多工技術有四大類,分別是薄膜濾光 片(Thin Film Filter,簡稱 TFF)、光纖波導(ArraY WaveDivision Mul tipi ex er (referred to as WDM), and especially 疋 5 on a kind of :: ancient long multiplexer. FreeSpace Grating / In contrast to the previous technology, in the early optical fiber communication applications, there is only one communication channel for an optical fiber. There are two main ways to increase the bandwidth without consuming a new optical fiber network. The first is to increase the operating frequency of the circuit system, which is limited to the high price of high-frequency circuits. The other method is to transmit many messages carried by different wavelengths on the same day f. In this method, as long as it transmits ~ 4 or 16 2 × 5 G Η ζ bandwidth messages of different wavelengths at the same time, all the total Bandwidth ^ can reach 10 GHz or 40 GHz. This method has lower cost and lower technical obstacles, but the system has better stability and the system has expandability. This method separates and combines light with different wavelengths. The technology is the wavelength multiplexing (WD M) technology. There are four major categories of density and wavelength multiplexing technologies: thin film filters (TFF), and fiber waveguides (ArraY Wave).
Gyide,簡稱AWG)、光纖光栅(Fiber Bragg Gratting,簡 稱FBG)、以及自由空間光柵。 薄膜濾、光片的原理是採鍍膜的方式,以氣相沈積的原 理將所需膜層一層層鍍在薄平板玻璃上,當光線通過不同 種的濾波片^,不同的波長便被分別濾出,達到分波的效和 果。f而:薄膜濾光片在通道數目的^昇下,會因為膜層 數的等比增加而不易製作,故而薄膜濾光片常用於丨6通道Gyide (AWG for short), Fiber Bragg Gratting (FBG), and free space grating. The principle of thin film filters and optical plates is to use a coating method. The required film layer is plated on thin flat glass layer by layer based on the principle of vapor deposition. When light passes through different types of filters ^, different wavelengths are filtered separately. Out, to achieve the effect and effect of partial wave. f: Thin film filters are difficult to make due to the increase in the number of film layers when the number of channels is increased. Therefore, thin film filters are often used for 6 channels.
200428050 五、發明說明(2) 以下的高密度波長多工技術。 . 光纖波導的原理是利用波導中,各波長光程差之不 同,進而達到分波的效果,這種技術的缺點在於波導易受 溫度等環境影響,故在大量商業化前需較好的絕熱封裝, . 這也是光纖波導最困難的技術障礙。 . 光纖光柵則是以紫外線照射光纖,使光纖絲中的部分 材質變化成近似布拉格繞射光柵,利用光學繞射的特性將 -不同波長的波分出,但是因為光纖光柵本身結構為光纖, 所以不利於製作多通道的波長多工技術。 以上三者在技術上均面臨不同的困難,而自由空間光 柵則是利用傳統光譜儀分波長的原理,以光柵將不同波長Φ 繞射到不同的位置,進而達到分波長的效果,如第3圖或 第4圖所示。 第3圖係習知一種自由空間光柵波長多工技術結構示 意圖,包括光源光纖3 2、透鏡3 4、反射式光柵3 6以及複數 個接收光纖3 8。當具有不同波長的入射光束從光源光纖3 2 射出後,經過透鏡34到達反射式光柵3 6,而反射並分出不 同波長之光束,再由透鏡34聚焦耦合至這些接收光纖38。 第4圖係習知另一種自由空間光柵波長多工技術結構示意 圖,包括光源光纖3 2、凹面鏡光柵4 6以及複數個接收光纖 3 8。當具有不同波長的入射光束從光源光纖3 2射出後,到 達凹面鏡光栅4 6 ,而反射分出不同波長之光束,並聚焦耦 合至接收光纖3 8。上述兩種光路結構,其經反射分光後之 不同波長光束的聚焦點多成弧面狀,但是接收光纖3 8卻排200428050 V. Description of the invention (2) High-density wavelength multiplexing technology below. The principle of the fiber waveguide is to use the difference in the optical path length of each wavelength in the waveguide to achieve the effect of demultiplexing. The disadvantage of this technology is that the waveguide is susceptible to environmental effects such as temperature, so it needs good insulation before a large number of commercialization Packaging. This is also the most difficult technical obstacle to fiber waveguides. Fiber Bragg Grating irradiates the fiber with ultraviolet rays, so that part of the material in the fiber filament is changed into an approximate Bragg diffraction grating. The characteristics of optical diffraction are used to separate out waves of different wavelengths, but because the fiber grating itself is an optical fiber, so It is not conducive to making multi-channel wavelength multiplexing technology. The above three technically face different difficulties, while the free space grating uses the principle of wavelength division of the traditional spectrometer, and uses the grating to diffract different wavelengths Φ to different positions to achieve the effect of wavelength division, as shown in Figure 3. Or as shown in Figure 4. Figure 3 is a schematic diagram of a conventional free-space grating wavelength multiplexing technology structure, including a light source fiber 3 2, a lens 3 4, a reflective grating 36, and a plurality of receiving fibers 38. After the incident light beams having different wavelengths are emitted from the light source fiber 3 2, they pass through the lens 34 to the reflective grating 36, and reflect and split the light beams of different wavelengths, and are then focused and coupled to the receiving fibers 38 by the lens 34. Figure 4 is a schematic diagram of another free-space grating wavelength multiplexing technology, which includes a light source fiber 3 2, a concave mirror grating 4 6, and a plurality of receiving fibers 3 8. When the incident light beams with different wavelengths are emitted from the light source fiber 32, they reach the concave mirror grating 46, and the light beams with different wavelengths are reflected and split, and are focused and coupled to the receiving fiber 38. In the above two optical path structures, the focal points of different wavelength beams after reflection and splitting are mostly curved, but the receiving fibers 38
10732twf.ptd 第11頁 200428050 五、發明說明(3) 成平面狀,致無法同時將所有不同波長的光束有效搞合至 . 光纖,使得光學效率降低。 發明内容 因此本發明提供一種自由空間光柵波長多工器,可使 , 不同波長光束的聚焦點排列在同一平面上,以增加光學效 . 率,另外並可分別各自地針對不同波長的光束做處理,例 如調整強度或是增加通道頻寬,甚至關閉個別通道等等。. 本發明提出一種自由空間光柵波長多工器,其至少包 括:光柵、聚焦透鏡以及微光學元件陣列。上述光柵將第 一光束予以繞射,以獲得不同波長之複數個第二光束,而 聚焦透鏡將這些第二光束聚焦,以獲得複數個第三光束。Φ 微光學元件陣列包括複數個微光學元件,這些微光學元件 各自分別地處理這些第三光束,以獲得複數個第四光束。 依照本發明的較佳實施例所述,此自由空間光柵波長 多工器中的這些第四光束耦合至複數個光接收裝置,例如 是光纖。而此微光學元件陣列可使得這些第四光束之聚焦 點排列在同一平面上,或是此微光學元件陣列可各自調整 這些光接收裝置所分別接收之第四光束的強度,甚或是此 微光學元件陣列可各自調整這些光接收裝置所分別接收之 第四光束的通道頻寬等等。而上述這些微光學元件可為具 有不同焦距之複數個微聚焦透鏡、或是複數個佛瑞耐微透 鏡(Fresnel lens)、甚或是複數個繞射式光學元件。 依照本發明的較佳實施例所述之自由空間光柵波長多 工器,其中這些微光學元件之主要材料可以為電致性變色10732twf.ptd Page 11 200428050 V. Description of the invention (3) It is flat, so that it is not possible to effectively combine all the different wavelength beams to the. Fiber at the same time, which reduces the optical efficiency. SUMMARY OF THE INVENTION Accordingly, the present invention provides a free-space grating wavelength multiplexer, which can focus the focal points of beams of different wavelengths on the same plane to increase the optical efficiency. In addition, the beams of different wavelengths can be processed separately. , Such as adjusting the intensity or increasing the channel bandwidth, or even closing individual channels. The present invention proposes a free-space grating wavelength multiplexer, which at least includes: a grating, a focusing lens, and a micro-optical element array. The above grating diffracts the first beam to obtain a plurality of second beams of different wavelengths, and the focusing lens focuses these second beams to obtain a plurality of third beams. Φ The micro-optical element array includes a plurality of micro-optical elements, and each of these micro-optical elements processes the third light beams separately to obtain a plurality of fourth light beams. According to a preferred embodiment of the present invention, the fourth light beams in the free-space grating wavelength multiplexer are coupled to a plurality of light receiving devices, such as optical fibers. And the micro-optical element array can make the focal points of the fourth light beams align on the same plane, or the micro-optical element array can individually adjust the intensity of the fourth light beams received by the light receiving devices, or even the micro-optics The element array can adjust the channel bandwidth and the like of the fourth light beam respectively received by the light receiving devices. The above micro-optical elements can be multiple micro-focusing lenses with different focal lengths, or multiple Fresnel lenses, or even multiple diffractive optical elements. According to the free space grating wavelength multiplexer according to the preferred embodiment of the present invention, the main material of these micro-optical elements can be electrochromic
10732t.wf. ptd 第12頁 200428050 五、發明說明(4) (e 1 e c t r 〇 c h r 〇 m i c )材料,例如是:氧化鶬、氧化猛、以及 ^ 氧化鎳等等。而這些微光學元件也可以是複數個光強調制 器,可各自控制第四光束與所對應之第三光束之強度比 例,或是可各自控制是否使這些第三光束之一通過或關 閉。 . 依照本發明的較佳實施例所述之自由空間光栅波長多 工器,其中此微光學元件陣列更包括矽晶片夾置具,其至 -少具有一個開口 ,以作為光束之通道,而這些微光學元件 . 配置於此矽晶片夾置具的開口中。 本發明另提出一種自由空間光栅波長多工器,其與前 面所述者不同處主要在於微光學元件陣列係以單一之微光# 學元件製成,重點在於可各自分別地處理這些第三光束, 以獲得複數個第四光束。例如:此微光學元件可以是主動 式佛瑞耐微透鏡(F r e s n e 1 1 e n s )陣列,主要為具有不同焦 距之單一繞射式光學元件所構成。 實施例中此微光學元件包括:矽晶片夾置具、液晶 層、基板以及導電層。其中矽晶片夾置具至少具有一個開 口 ,作為光束之通道。而以透光薄膜材料製成之基板,用 來夾置液晶層。上述導電層包括定義有圖樣之電極,此圖 樣配置於矽晶片夾置具的開口中,可藉由控制加至電極之 電壓大小,來控制光透過液晶層的特性。例如:此圖樣形 狀為佛瑞财區板(F r e s n e 1 ζ ο n e ρ 1 a t e ),可藉由控制加至❿ 電極之電壓大小,來控制此主動式佛瑞耐微透鏡陣列的聚 焦或是失焦。10.732t.wf. These micro-optical elements can also be a plurality of light-emphasis devices, which can individually control the intensity ratio of the fourth light beam to the corresponding third light beam, or can individually control whether one of these third light beams is passed or turned off. The free-space grating wavelength multiplexer according to a preferred embodiment of the present invention, wherein the micro-optical element array further includes a silicon wafer holder, which has at least one opening as a light beam channel, and these The micro-optical element is disposed in the opening of the silicon wafer holder. The present invention further proposes a free-space grating wavelength multiplexer, which is different from the foregoing in that the micro-optical element array is made of a single micro-optical element, and the main point is that these third beams can be processed separately. To obtain a plurality of fourth beams. For example, the micro-optical element may be an active Frean micro lens (F r e s n e 1 1 e n s) array, which is mainly composed of a single diffractive optical element with different focal lengths. In the embodiment, the micro-optical element includes a silicon wafer holder, a liquid crystal layer, a substrate, and a conductive layer. The silicon wafer holder has at least one opening as a channel for the light beam. A substrate made of a light-transmissive film material is used to sandwich the liquid crystal layer. The conductive layer includes an electrode having a pattern defined therein. The pattern is disposed in an opening of a silicon wafer holder. The characteristics of light transmission through the liquid crystal layer can be controlled by controlling the voltage applied to the electrode. For example, the shape of this pattern is a Fresnel board (F resne 1 ζ ο ne ρ 1 ate), which can control the focus or Out of Focus.
10732twf.ptd 第13頁 200428050 五、發明說明(5) 本發明因採用了微光學元件陣列或其等效者,所以可… 分別各自地針對不同波長的光束做處理,進而可使不同波 長光束的聚焦點排列在同一平面上,以增加光學效率,另 外也可各自調整光束強度,增加了等化器(Equal izer)的 功能,或是各自增加通道頻寬,甚至關閉個別通道等等。 . 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳 -細說明如下: 實施方式 ♦ 請參照第1圖,其繪示依照本發明一較佳實施例的一 種自由空間光栅波長多工器的結構示意圖。本較佳實施例Φ 所提出之自由空間光插波長多工器包括:光源光纖1 2、第 一微光學元件陣列1 0、第二微光學元件陣列1 5、聚焦透鏡 1 4、反射式光柵1 6、以及2個接收光纖1 8。如熟悉此藝者 可輕易知曉,其中2個接收光纖1 8僅是舉例,其實可以是 任意複數個光接收裝置即可。同理,光源光纖1 2亦非限定 一定要光纖,其他可傳導光的裝置皆可。 本實施例中光源光纖1 2射出混合有許多不同波長(混 合的波長以又ί表示)的光或雷射光,亦即射出載有不同通 道之訊號的光束,當此光束當達反射式光柵1 6時之前,稱 之為第一光束,則反射式光柵1 6將第一光束予以繞射,並 反射獲得不同波長之複數個第二光束,在此舉例為2個不 同波長的光束(波長分別以λ 1及λ 2表示)。如熟悉此藝者 可輕易知曉,本實施例使用反射式光栅1 6,但是並非限定10732twf.ptd Page 13 200428050 V. Description of the invention (5) Because the present invention uses a micro-optical element array or its equivalent, it can ... process the light beams of different wavelengths separately, so that the light beams of different wavelengths can be processed. Focus points are arranged on the same plane to increase optical efficiency. In addition, the beam intensity can be adjusted individually, the function of the equalizer (Equalizer) can be increased, or the channel bandwidth can be increased, or even individual channels can be closed. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below in conjunction with the accompanying drawings for detailed and detailed descriptions as follows: Implementation ♦ Please refer to Section FIG. 1 is a schematic structural diagram of a free-space grating wavelength multiplexer according to a preferred embodiment of the present invention. This preferred embodiment Φ The proposed free-space optical interpolation wavelength multiplexer includes: a light source fiber 1 2, a first micro-optical element array 10, a second micro-optical element array 1 5, a focusing lens 14, and a reflective grating 1 6 and 2 receiving fibers 1 8. If you are familiar with this art, you can easily know that the two receiving optical fibers 18 are just examples, but in fact, they can be any number of optical receiving devices. In the same way, the optical fiber 12 is not limited. It must be an optical fiber, and other devices that can transmit light can be used. In this embodiment, the light source optical fiber 12 emits light or laser light that is mixed with many different wavelengths (the mixed wavelength is represented by ί), that is, emits light beams carrying signals of different channels. When this light beam reaches the reflective grating 1 Before 6 o’clock, it is called the first light beam, and the reflective grating 16 diffracts the first light beam and reflects to obtain a plurality of second light beams of different wavelengths. Here are two light beams of different wavelengths (respectively Expressed as λ 1 and λ 2). As those skilled in the art can easily know, this embodiment uses the reflective grating 16 but it is not limited.
10732t.wf.ptd 第14頁 200428050 五、發明說明(6) 一定要反射式,只要可以將第一光束予以繞射,而獲得不 同波長之複數個第二光束即可,當然相對地結構上會有相 應調整。而聚焦透鏡1 4將這兩個具有不同波長的第二光束 聚焦,以同樣獲得2個聚焦後各自趨向其焦點的第三光 束。 本實施例中包括兩個微光學元件陣列1 0,1 5,每一微 光學元件陣列中皆包括複數個微光學元件,本發明之發明 重點之一即為這些微光學元件各自分別地處理這些第三光 束,以獲得複數個第四光束。例如:第一微光學元件陣列 1 0由具有不同焦距之複數個微聚焦透鏡陣列組成,可使得 這些第四光束之聚焦點排列在同一平面上,克服傳統之不Φ 同波長光束的聚焦點多成弧面狀的缺點。又例如:第二微 光學元件陣列1 5可以由複數個光強調制器組成,其甚至可 以各自控制是否關閉某些波長的光束,亦即關掉某一通道 的訊號。如熟悉此藝者可輕易知曉,本實施例中同時有兩 個微光學元件陣列,其實本發明並沒有限制微光學元件陣 列的數量,最少可以僅有一個。 請繼續參照第1圖,上述這些第四光束最後耦合至複 數個光接收裝置,在此為接收光纖1 8,由這些接收光纖1 8 送至適當的處理裝置,續行各通道資料訊號的處理。本發 明之微光學元件陣列不僅可使得這些第四光束之聚焦點排 列在同一平面上,同時也可以利用控制聚焦點等各種方 法,各自調整這些光接收裝置所分別接收之第四光束的強 度。一般來說位於中間頻率的光束其接收到的光強度較10732t.wf.ptd Page 14 200428050 V. Description of the invention (6) It must be reflective, as long as the first beam can be diffracted to obtain a plurality of second beams of different wavelengths, of course, relatively structurally Adjust accordingly. The focusing lens 14 focuses the two second light beams having different wavelengths, so as to obtain two third light beams that each move toward their focus after focusing. This embodiment includes two micro-optical element arrays 10, 15 and each micro-optical element array includes a plurality of micro-optical elements. One of the important points of the present invention is that these micro-optical elements process these separately. A third light beam to obtain a plurality of fourth light beams. For example, the first micro-optical element array 10 is composed of a plurality of micro-focusing lens arrays having different focal lengths, so that the focal points of these fourth beams can be aligned on the same plane, which overcomes the traditional focus of multiple beams with different wavelengths. Disadvantages of arc surface. For another example: the second micro-optical element array 15 may be composed of a plurality of light-emphasis controllers, which can even control whether to turn off the light beams of certain wavelengths, that is, turn off the signal of a certain channel. As those skilled in the art can easily know, there are two micro-optical element arrays in this embodiment. In fact, the present invention does not limit the number of micro-optical element arrays. Please continue to refer to FIG. 1. These fourth light beams are finally coupled to a plurality of light receiving devices, here are the receiving optical fibers 18, and these receiving optical fibers 18 are sent to an appropriate processing device, and the processing of the data signals of each channel is continued. . The micro-optical element array of the present invention can not only make the focus points of the fourth light beams align on the same plane, but also can adjust the intensity of the fourth light beams respectively received by the light receiving devices by using various methods such as controlling the focus point. Generally, light beams located at intermediate frequencies receive a light intensity
10732twf.ptd 第15頁 200428050 五、發明說明(7) 強,因此本發明之微光學元件陣列亦可以做到等化器的功 能。 另外,如果傳輸光束的波長因為某些原因而有所偏移 而使分光後再聚焦的光束之焦點沒有正確落在光接收裝置 的接收範圍,致無法正確接收到訊號時,此微光學元件陣 列各自調整每一光束的焦距,例如稍微失焦,使這些光接 收裝置可再度接收到對應的光束,也就是調整了這些光接 收裝置所分別接收之第四光束的通道頻寬,因此本發明之 、 微光學元件陣列亦可以達到控制頻譜效應的功能。 . 如熟悉此藝者可輕易知曉,要做到上述或其他的許多 功能,這些微光學元件可為具有不同焦距之複數個微聚焦 透鏡、或是複數個佛瑞耐微透鏡(F r e s n e 1 1 e n s )、甚或是 複數個繞射式光學元件、例如以液晶所做的繞射式光學元 件等等。 又或是,本發明之微光學元件陣列中的這些微光學元 件之主要材料可以為電致性變色(e 1 e c t r 〇 c h r 〇 m i c )材料, 例如是:氧化鎢、氧化錳、以及氧化鎳等等,就可利用控 制電壓來改變通過的光束特性。再不然,這些微光學元件 也可以是複數個光強調制器,可各自控制第四光束與所對 應之第三光束之強度比例,或是可各自控制是否使這些第 三光束之一通過或關閉。 _ 如圖所示,依照本發明的較佳實施例所述之自由空間 > 光柵波長多工器,其中微光學元件陣列1 〇,1 5皆包括矽晶 片夾置具,其至少具有一個開口 ,以作為光束之通道,而10732twf.ptd Page 15 200428050 V. Description of the invention (7) The micro-optical element array of the present invention can also perform the function of an equalizer. In addition, if the wavelength of the transmitted light beam is shifted due to some reasons, the focus of the light beam that is refocused after splitting does not fall correctly in the receiving range of the light receiving device, so that the micro-optical element array cannot be received correctly. The focal length of each light beam is adjusted individually, for example, slightly out of focus, so that these light receiving devices can receive the corresponding light beam again, that is, the channel bandwidth of the fourth light beam respectively received by these light receiving devices is adjusted. Micro-optical element arrays can also achieve the function of controlling spectral effects. If you are familiar with this art, you can easily know that to achieve the above or many other functions, these micro-optical components can be multiple micro-focusing lenses with different focal lengths, or multiple Fresnel micro-lenses (F resne 1 1 ens), or even a plurality of diffractive optical elements, such as a diffractive optical element made of liquid crystal, and so on. Alternatively, the main materials of these micro-optical elements in the micro-optical element array of the present invention may be electrochromic (e 1 ectr 〇chr omic) materials, such as tungsten oxide, manganese oxide, and nickel oxide. And so on, you can use the control voltage to change the characteristics of the beam passed. Otherwise, these micro-optical elements can also be a plurality of light-emphasis controllers, which can individually control the intensity ratio of the fourth beam to the corresponding third beam, or can individually control whether one of these third beams is passed or turned off . _ As shown in the figure, the free space according to the preferred embodiment of the present invention > grating wavelength multiplexer, in which the micro-optical element arrays 10 and 15 each include a silicon wafer holder with at least one opening As the channel of the beam, and
10732twf.ptd 第16頁 200428050 五、發明說明(8) 這些微光學元件配置於此矽晶片夾置具的開口中。詳細可 再參閱第2圖。另外,如熟悉此藝者可輕易知曉,自由空 間光柵波長多工器可以更包括有準直透鏡(未繪出),適於 將光纖射出之入射光束予以準直,以獲得此第一光束入射 至反射式光柵1 6。 本發明所提出之一種自由空間光柵波長多工器,其中 的微光學元件陣列可以用單一之微光學元件製成,重點在 於其可各自分別地處理這些第三光束,以獲得複數個第四 光束。例如:此微光學元件可以是主動式佛瑞耐微透鏡陣 列,主要為具有不同焦距之單一繞射式光學元件所構成。 請參照第2圖,其繪示依照本發明一較佳實施例的一 種主動式佛瑞耐微透鏡陣列之光學元件的結構示意圖。此 微光學元件包括:矽晶片夾置具2 2、液晶層2 6、基板2 7以 及導電層28。其中矽晶片夾置具22至少具有一個開口24 , 作為光束之通道。基板27 —般包括上下兩層,而以透光薄 膜材料製成之,主要就是用來夾置液晶層2 6。上述導電層 28上定義有圖樣(pattern)之電極,此圖樣配置於石夕晶片 夾置具的開口 2 4中,可藉由控制加至電極之電壓大小,來 控制光透過液晶層的特性。例如:此圖樣形狀為佛瑞财區 板(Fresnel zone plate),可藉由控制加至電極之電壓大 小,來控制此主動式佛瑞财微透鏡陣列的聚焦特性,例 如:聚焦或是失焦等等。 〇 縱上所述,本發明因採用了微光學元件陣列或其等效 者,所以可分別各自地針對不同波長的光束做處理,進而10732twf.ptd Page 16 200428050 V. Description of the invention (8) These micro-optical components are arranged in the opening of the silicon wafer holder. Refer to Figure 2 for details. In addition, if the artist is familiar with this, the free-space grating wavelength multiplexer may further include a collimating lens (not shown), which is suitable for collimating the incident light beam emitted by the optical fiber to obtain the first light beam To reflective grating 1 6. A free-space grating wavelength multiplexer provided by the present invention, wherein the micro-optical element array can be made of a single micro-optical element, the main point is that it can process these third beams separately to obtain a plurality of fourth beams . For example, this micro-optical element can be an active Frean micro-lens array, which is mainly composed of a single diffractive optical element with different focal lengths. Please refer to FIG. 2, which is a schematic structural diagram of an optical element of an active Frean microlens array according to a preferred embodiment of the present invention. The micro-optical element includes a silicon wafer holder 2 2, a liquid crystal layer 2 6, a substrate 27, and a conductive layer 28. The silicon wafer holder 22 has at least one opening 24 as a light beam channel. The substrate 27 generally includes two upper and lower layers, and is made of a light-transmitting thin film material, and is mainly used to sandwich the liquid crystal layer 26. The above-mentioned conductive layer 28 has a patterned electrode defined therein, and this pattern is arranged in the opening 24 of the Shixi wafer holder. The characteristics of light transmission through the liquid crystal layer can be controlled by controlling the voltage applied to the electrode. For example, the shape of the pattern is a Fresnel zone plate. The focus characteristics of the active Fremont micro-lens array can be controlled by controlling the voltage applied to the electrode, such as focus or defocus. and many more. 〇 As mentioned above, since the present invention adopts a micro-optical element array or its equivalent, it can separately process light beams of different wavelengths, and further
10732t.wf.ptd 第17頁 200428050 五、發明說明(9) 可使不同波長光束的聚焦點排列在同一平面上,以增加光 學效率,另外也可各自調整不同波長光束的強度,增加了 等化器(E q u a 1 i z e r )的功能,或是各自增加或調整通道頻 寬,甚至關閉個別通道等等。 雖然本發明已以一較佳實施例揭露如上,然其並非用 以限定本發明,任何熟習此技藝者,在不脫離本發明之精 神和範圍内,當可作些許之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。10732t.wf.ptd Page 17 200428050 V. Description of the invention (9) The focal points of beams with different wavelengths can be arranged on the same plane to increase optical efficiency. In addition, the intensity of beams with different wavelengths can be adjusted individually, which increases the equalization. The function of the E qua 1 izer, or increase or adjust the channel bandwidth, and even close individual channels. Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes and retouch without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.
10732twf.ptd 第18頁 200428050 圖式簡單說明 第1圖繪示依照本發明一較佳實施例的一種自由空間 · 光栅波長多工器的結構示意圖。 . 第2圖繪示依照本發明一較佳實施例的一種主動式佛 瑞耐微透鏡陣列之光學元件的結構示意圖。 第3圖係習知一種自由空間光栅波長多工技術結構示 意圖。 第4圖係習知另一種自由空間光栅波長多工技術結構 示意圖。 圖式標記說明: 1 0 第一微光學元件陣列 1 2,3 2光源光纖 0 1 4,3 4 聚焦透鏡 1 5 第二微光學元件陣列 1 6,3 6 反射式光柵 1 8,3 8 接收光纖 2 2 矽晶片夾置具 24 開口 2 6 液晶層 27 基板 28 導電層 46 凹面鏡光柵 i10732twf.ptd Page 18 200428050 Brief Description of Drawings Figure 1 shows a schematic diagram of a free space · grating wavelength multiplexer according to a preferred embodiment of the present invention. FIG. 2 is a schematic structural diagram of an optical element of an active Frean microlens array according to a preferred embodiment of the present invention. Figure 3 is a schematic diagram showing the structure of a conventional free-space grating wavelength multiplexing technique. Figure 4 is a schematic diagram of another free-space grating wavelength multiplexing technology. Description of graphical symbols: 1 0 first micro-optical element array 1 2, 3 2 light source fiber 0 1 4, 3 4 focusing lens 1 5 second micro-optical element array 1 6, 3 6 reflective grating 1 8, 3 8 receiving Optical fiber 2 2 Silicon wafer clamp 24 Opening 2 6 Liquid crystal layer 27 Substrate 28 Conductive layer 46 Concave mirror grating i
10732twf.ptd 第19頁10732twf.ptd Page 19
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