TW200419128A - Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device - Google Patents
Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device Download PDFInfo
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- TW200419128A TW200419128A TW93104503A TW93104503A TW200419128A TW 200419128 A TW200419128 A TW 200419128A TW 93104503 A TW93104503 A TW 93104503A TW 93104503 A TW93104503 A TW 93104503A TW 200419128 A TW200419128 A TW 200419128A
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200419128 五、發明說明(1) 相關申請 本專利申請為美國專利申請序號1 0 / 4 3 9,6 3 5之繼續, 2 0 0 3,5,1 6曰提出,標題為”發熱裝置中冷卻理想熱點之柔 性液體之方法及裝置π,該文以參考方式併入此間,該申 請在共同美國臨時專利申請之3 5 USC 1 1 9 ( e )之下聲請優 先於臨時專利申請序號6 0 / 4 2 3,0 0 9,2 0 0 2,1 1,1提出, 標題為”微通道吸熱器供柔性液體輸送及熱點冷卻方法", 該申請以參考方式併入此間,及美國臨時專利申請序號 6 0 /44 2, 3 8 3,2 0 0 3,1,24提出,標題為”供CPU冷卻最佳 之平板翼片熱交換器π,該申請以參考方式併入此間,共 同美國臨時專利申請序號6 0 / 4 5 5,7 2 9,2 0 0 3,3, 1 7提 出,標題為”具有多孔構型之為微通道熱交換器裝置及其 製造方法π,該申請以參考方式併入此間。本專利申請在 3 5 USC 1 1 9 ( e )之下宣稱優先於美國臨時專利申請序號 6 0 / 4 2 3,0 0 9,2 0 0 2,Π,1提出之標題為π以微通道熱吸 收器冷卻及輸送柔性液體之方法π,該申請以參考方式併 入此間,及美國臨時專利申請序號6 0 / 4 4 2,3 8 3,2 0 0 3, 1,24提出,標題為n CPU冷卻之做佳板翼片熱交換器",該 專利申請以參考方式併入此間,及美國臨時專利申請序號 6 0 / 4 5 5, 7 2 9,2 0 0 3,3,1 7提出,標題為”具有多孔構型之 微通道熱交換器裝置及其製造方法π,該申請以參考方式 併入此間。 發明範圍200419128 V. Description of the invention (1) Related applications This patent application is a continuation of US patent application serial number 1 0/4 3 9, 6 3 5 and is proposed in 2 0 3, 5, 16 and entitled "Cooling in heating devices" The method and device of a flexible liquid for an ideal hot spot π, which is incorporated herein by reference. This application claims priority over the provisional patent application number 6 0 / under common US provisional patent application 3 5 USC 1 1 9 (e) 4 2 3,0 0 9,2 0 0 2,1 1,1, entitled "Microchannel heat sink for flexible liquid delivery and hot spot cooling method", the application is incorporated herein by reference, and US provisional patent Application No. 6 0/44 2, 3 8 3, 2 0 3, 1, 24 is filed, and the title is "Flat-plate fin heat exchanger π optimal for CPU cooling. This application is hereby incorporated by reference, and the United States The provisional patent application number is 60/4 5 5,7 2 9,2 0 3,3,17, and the title is "Microchannel heat exchanger device with porous configuration and its manufacturing method π. The application is based on Reference methods are incorporated here. This patent application under 3 5 USC 1 1 9 (e) claims priority over U.S. provisional patent application serial number 6 0/4 2 3, 0 0 9, 2 0 0 2, Π, 1 titled π with microchannel Method for cooling and transporting a flexible liquid by a heat absorber π, the application is incorporated herein by reference, and US provisional patent application serial number 60/4 4 2,3 8 3,2 0 0 3,1,24, entitled n CPU Cooling Better Plate and Fin Heat Exchanger ", this patent application is incorporated herein by reference, and US provisional patent application serial number 6 0/4 5 5, 7 2 9, 2 0 0 3, 3, 1 7 proposes, entitled "Microchannel heat exchanger device with porous configuration and its manufacturing method π, the application is incorporated herein by reference. Scope of the invention
200419128 五、發明說明(2) 本發明關於冷卻一發熱裝置之方法及裝置,特別關於 有效鉛直液體輸送及熱交換器之最小壓力降以冷卻一電子 裝置。 發明背景200419128 V. Description of the invention (2) The present invention relates to a method and a device for cooling a heating device, in particular to an effective vertical liquid transfer and a minimum pressure drop of a heat exchanger to cool an electronic device. Background of the invention
自1 9 8 0年代早期引入之後,熱交換器已顯示在高熱流 量冷卻應用上之大潛力及工業中之使用。但現有之微通道 包括傳統平行通道安排,其不適於冷卻具有空間變化之熱 負荷之發熱裝置。此一發熱裝置具有較其它產生更多熱之 面積。此較熱面積被稱為π熱點π,不產生多熱之面積稱 為π溫點π。Since its introduction in the early 1980s, heat exchangers have shown great potential for high heat flux cooling applications and industrial use. However, existing microchannels include traditional parallel channel arrangements, which are not suitable for cooling heating devices with spatially varying heat loads. This heating device has an area that generates more heat than others. This hotter area is called π hot spot π, and the area that does not generate much heat is called π temperature point π.
圖1 Α及1 Β說明習知技藝之熱交換器1 0之側面圖及頂視 圖,熱交換器1 0耦合至一電子裝置9 9,如微處理器經由一 熱介面材料9 8耦合。如圖1 A及1 B所示,液體自單入口埠12 流入及沿平行通道1 4間之底表面1 1流動,如箭頭所示,經 出口埠1 6流出。雖然熱交換器1 0冷卻電子裝置9 9,自入口 埠1 2至出口埠1 4之液體係以均勻方式流過。換言之,液體 實際上以均勻方式沿熱交換器1 0之全部底表面1 1流動,而 不供應更多液體於對應裝置99中之熱點之底表面1 1之區 域。此外,自入口流過之液體溫度,當其沿熱交換器底表 面1 1流動時會增加。因此,熱源9 9之區域為下游或接近出 口埠1 6,故未供應冷液體,但實際供應已在上游加熱之較 溫液體或二相液體。事實上,加熱之液體實際上傳輸熱於 跨熱交換器1 1之全底表面及熱源9 9,因此接近出口之液體Figures 1A and 1B illustrate a side view and a top view of the heat exchanger 10 of the conventional art. The heat exchanger 10 is coupled to an electronic device 99, such as a microprocessor via a thermal interface material 98. As shown in FIGS. 1A and 1B, the liquid flows in from the single inlet port 12 and flows along the bottom surface 11 of the parallel channels 14 and flows out through the outlet port 16 as shown by the arrows. Although the heat exchanger 10 cools the electronic device 99, the liquid system from the inlet port 12 to the outlet port 14 flows in a uniform manner. In other words, the liquid actually flows in a uniform manner along the entire bottom surface 11 of the heat exchanger 10 without supplying more liquid to the area of the bottom surface 11 corresponding to the hot spot in the device 99. In addition, the temperature of the liquid flowing from the inlet increases as it flows along the bottom surface 11 of the heat exchanger. Therefore, the area of the heat source 99 is downstream or close to the outlet port 16, so no cold liquid is supplied, but the warmer liquid or two-phase liquid that has been heated upstream is actually supplied. In fact, the heated liquid actually transfers heat to the entire bottom surface of the heat exchanger 11 and the heat source 9 9, so it is close to the outlet liquid
第9頁 200419128 五、發明說明(3) 並非太熱,因而不足以有效冷卻熱源。熱之增加造成二相 流體不穩定,沿底表面11之液體之沸騰迫使液體離開產生 最多熱之面積。此外,僅有一入口璋1 2及一出口琿1 6之熱 交換器1 0,迫使液體沿底表面1 1中之平行通道1 4傳輸於熱 交換器1 0之全長度,因而造成液體必須傳輸之長度引起之 壓力降。熱交換器1 0中之大壓力降使液體被幫浦至熱交換 器十分困難及增加不穩定。 圖1 C說明習知技藝熱交換器2 0之側視圖。液體經埠2 2 進入多位準熱交換器2 0,經中間層2 6中之多喷嘴2 8向下流 動至底表面2 7及至出口璋2 4。此外,沿喷嘴2 8傳輸之液體 並非均勻向下流至底表面2 7。此外,圖1 C中之熱交換器顯 現與以上討論之圖1 A及1 B之熱交換器之同一問題。 故所需者為熱交換器,其構型可達成低壓力降於入口 及出口之間,同時有效冷卻熱源。所需者為一微通道熱交 換器,其構型可熱源之溫度均勻性。所需者為一熱交換 器,其構型可達到熱源中之熱點之適當溫度均勻性。 本發明概論 本發明之一特性中,熱交換器包含一介面層以冷卻熱 源該介面層與熱源接觸,其構型可通過液體。該熱交換器 尚包含支管層耗合至介面層。支管層尚包含第一組個別化 洞以通過液體至介面層,及第二組個別化洞以自介面層傳 輸液體。支管層尚包含第一埠.,其提供液體至第一組個別 化洞,及第二埠將自第二組個別化洞傳輸之液體移除。第Page 9 200419128 V. Description of the invention (3) It is not too hot, so it is not enough to effectively cool the heat source. The increase in heat causes the two-phase fluid to be unstable, and the boiling of the liquid along the bottom surface 11 forces the liquid to leave the area that generates the most heat. In addition, the heat exchanger 10, which has only one inlet 璋 12 and one outlet 珲 16, forces the liquid to be transmitted along the parallel channel 14 in the bottom surface 11 to the full length of the heat exchanger 10, so that the liquid must be transmitted. The pressure drop caused by the length. The large pressure drop in the heat exchanger 10 makes it difficult and unstable to pump the liquid to the heat exchanger. FIG. 1C illustrates a side view of a conventional heat exchanger 20. FIG. The liquid enters the multi-level quasi-heat exchanger 20 through port 2 2 and flows downward through the multiple nozzles 2 8 in the middle layer 26 to the bottom surface 27 and to the outlet 璋 2 4. In addition, the liquid transported along the nozzle 28 does not flow uniformly down to the bottom surface 27. In addition, the heat exchanger in Fig. 1C exhibits the same problem as the heat exchangers in Figs. 1 A and 1 B discussed above. Therefore, what is needed is a heat exchanger, whose configuration can achieve a low pressure drop between the inlet and the outlet, while effectively cooling the heat source. What is needed is a micro-channel heat exchanger whose configuration allows the temperature uniformity of the heat source. What is needed is a heat exchanger whose configuration can achieve the appropriate temperature uniformity of hot spots in the heat source. SUMMARY OF THE INVENTION In one feature of the present invention, the heat exchanger includes an interface layer to cool the heat source. The interface layer is in contact with the heat source and can be configured to pass liquid. The heat exchanger also includes a branch tube layer that is coupled to the interface layer. The branch pipe layer also contains a first group of individualized holes to pass liquid to the interface layer, and a second group of individualized holes to transfer liquid from the interface layer. The branch pipe layer also includes a first port, which provides liquid to the first group of individualized holes, and a second port to remove liquid transported from the second group of individualized holes. First
200419128 五、發明說明(4)200419128 V. Description of Invention (4)
一組洞及第二組洞之安排可提供第一及第二埠間之最小液 體通路距離,以適當冷卻熱源。較佳為第一組中之每一洞 配置在與第二組之相鄰洞最接近之最佳距離。通過熱交換 器之液體為一或多相流動狀態或其組合。該支管層尚包含 一流通位準,其具有第一及第二洞延伸貫穿。流通位準耦 合至介面層,其構型可分別傳輸液體經第一及第二組洞自 及至介面層。第一組及第二組洞每一包括一圓筒形突出彼 此相通,每一圓筒形突出與流通位準成垂直延伸。該支管 層尚包含第一位準’輛合至流通位準及至第一璋。第一位 準之構型可傳輸液體於第一埠與第一組洞之間。第二位準 耦合至第一位準及第二埠。第二位準構型可傳輸液體於第 二埠與第二組洞之間,經第一位準傳輸之液體保持與經第 二位準傳輸之液體分開。第一位準尚包含第一狹長通道, 耦合至第一埠,其中該第一組洞與第一狹長通道為可密封 之安排。第一位準尚包含第二狹長通道耦合至第二埠,其 中該第二組洞與第二狹長通道為可密封安排。第一組及第 二組洞彼此熱絕緣以防止其間之熱轉移。第一組及第二組 洞以均勻方式沿一實施例中之流通位準之至少一維方向安 排。第一組及第二組洞以非均勻方式在另一實施例中沿流 通位準之至少一維方向安排。第一組及第二組洞較佳彼此 成密封分隔。或者,第一組及第二組洞之配置可冷卻熱源 中之至少一介面熱點區。在一實施例中,第一組中之至少 一洞有一第一尺寸實際上等於第二組中至少一洞之第二尺 寸。在另一實施例中至少第一組洞之一洞具有一第一尺寸The arrangement of one group of holes and the second group of holes can provide the minimum liquid path distance between the first and second ports to properly cool the heat source. It is preferable that each hole in the first group is arranged at an optimal distance closest to the adjacent hole in the second group. The liquid passing through the heat exchanger is in one or more phases, or a combination thereof. The branch pipe layer still includes a circulation level, which has first and second holes extending therethrough. The flow level is coupled to the interface layer, and its configuration can transport liquid from the first and second groups of holes to the interface layer, respectively. Each of the first and second sets of holes includes a cylindrical protrusion that communicates with each other, and each cylindrical protrusion extends perpendicular to the circulation level. The branch pipe layer also includes the first level ’vehicles to the circulation level and to the first level. The first level configuration can transmit liquid between the first port and the first group of holes. The second level is coupled to the first level and the second port. The second level configuration can transport liquid between the second port and the second group of holes, and the liquid transmitted through the first level remains separated from the liquid transmitted through the second level. The first place still includes a first narrow channel, which is coupled to the first port, wherein the first set of holes and the first narrow channel are sealable arrangements. The first bit still includes a second narrow channel coupled to the second port, wherein the second set of holes and the second narrow channel are sealable arrangements. The first and second sets of holes are thermally insulated from each other to prevent heat transfer therebetween. The first and second sets of holes are arranged in a uniform manner along at least one-dimensional direction of the circulation level in an embodiment. The first and second sets of holes are arranged in a non-uniform manner along at least one-dimensional direction of the flow level in another embodiment. The first and second sets of holes are preferably hermetically separated from each other. Alternatively, the configuration of the first and second sets of holes can cool at least one interface hot spot in the heat source. In one embodiment, at least one hole in the first group has a first size that is substantially equal to the second size of at least one hole in the second group. In another embodiment, at least one of the holes in the first group has a first size.
第11頁 200419128 五、發明說明(5) 與第二組洞中至少 具有熱傳導率為至 數個柱體,其構型 目之柱體沿介面層 塗層於其上,其中 或者’介面層尚包 層有一粗糙表面。 適當構型中。 本發明另一特 源。該熱交換器包 體通過。因此,液 器尚包含支管層, 入口埠。液體入口 路,其將液體傳輸 出口埠,其耦合至 體。入口及出口液 液體傳輸距離。支 流通位準具有複數 自介面層沿出口液 合至流通位準及入 輸液體至出口埠。 輸之液體分開流動 狹長通道,其自入 準中之液體通路包 一洞之第二尺寸不同 少1OOW/mk。較佳為 為沿介面層之預定圖 之預定區域配置。或 該塗層之適當熱傳導 含配置其上之多孔微 或者,複數個微通道 性中,熱交換器可構 括一介面層搞合至熱 體與熱源產生之熱受 以柄合至介面層,該 槔耦合至一實際上垂 至介面層。熱交換器 垂直出口液體通路以 體通路被安排為彼此 管層尚包含一流通位 個入口孔隙,其垂直 體通路傳輸。支管層 口埠。出口位準之構 經入口液體傳輸之液 。入口位準中之液體 口埠水平傳輸液體至 含一液體狹長通道以 。車父佳為,介面層 介面層尚包含複 案。或者,適當數 者,該柱體包括一 率為至少10W/mk。 結構。或者,介面 構型在介面層中之 型為輕合至一熱 源及構型為可使液 到熱交換。熱交換 層具有至少一液體 直之入口液體通 尚包含至少一液體 自介面層移除液 間分開之最佳最小 準柄合至介面層。 延伸通過以供液體 包括一入口位準耦 型可自出口孔隙傳 體與經出口位準傳 通路尚包含一液體 入口孔隙。出口位 自出口孔隙傳輸液Page 11 200419128 V. Description of the invention (5) and the second group of holes have at least a number of pillars with thermal conductivity, and the pillars of the configuration order are coated thereon along the interface layer. The cladding has a rough surface. In the proper configuration. Another feature of the invention. The heat exchanger package passes. Therefore, the liquid tank still contains a branch pipe layer and an inlet port. A liquid inlet path, which transfers liquid to an outlet port, which is coupled to the body. Inlet and outlet liquid Liquid transmission distance. The branch circulation level has a plurality of liquids from the interface layer to the circulation level along the outlet, and the inlet and outlet liquids to the outlet port. The liquid to be transported flows separately. The narrow channel has a self-entrant liquid path that contains a second hole with a different size of less than 10OW / mk. It is preferably arranged in a predetermined area along a predetermined map of the interface layer. Or the proper heat conduction of the coating includes porous microstructures arranged thereon, or, in the plurality of micro-channels, the heat exchanger may include an interface layer to engage the heat generated by the heating body and the heat source to the interface layer, The chirp is coupled to an interface layer that actually hangs down to the interface layer. The vertical outlet liquid passages of the heat exchanger are arranged as body passages to each other, and the tube layer still contains a plurality of inlet pores for vertical body passage transmission. Branch pipe layer port. Structure of the exit level Liquid that is transmitted through the inlet liquid. The liquid in the inlet level port transfers liquid horizontally to a long and narrow channel containing liquid. Che Fujia, the interface layer The interface layer still contains a copy. Alternatively, as appropriate, the column includes a rate of at least 10 W / mk. structure. Alternatively, the interface is configured in the interface layer to be light to a heat source and configured to allow liquid to heat exchange. The heat exchange layer has at least one liquid, and the straight inlet liquid still contains at least one liquid. The optimal minimum separation between the liquid removed from the interfacial layer and the interfacial layer is interposed to the interfacial layer. Extending through for liquid includes an inlet level coupling type self-exiting pore-capable body and an outlet level-passing channel that still contains a liquid inlet pore. Exit position
第12頁 200419128 五、發明說明(6) ___ 體至出口埠。入口及出口液體 ^ ^^ 位準中至少一維方向以均句# = f係一貫施例中之流通 _ j方式個別安排。兮Α ^ 孔隙在另一貫施例之流通位準 、一〜入口及出口 安排。入口及出口液體通路較佳=/ 、、、方向為非均句 出口孔隙為交互安排以A 佳為彼此岔封分離。入口 區。在一實施例中,至^ 一…、源中之至少一介面熱點冷卻 -出口孔隙之出口尺寸相笙入口孔隙有-入口尺寸與至少 孔隙有-人口尺寸與至另―實施例巾,至少-入口 同。介面層較佳有一至小;孔隙之出口孔隙之尺寸不 含複數個柱體以適當圖$ 之熱/導率。介面層尚 體沿介面層以預定區置適當數目之柱 面。複數個柱體包括其卜^ 、"面層有一粗糙表 適當熱傳導率。介面^二二:二塗層至少具有l〇W/mk之 器較佳包括複數個圓;i::微結構配置其上。熱交換 高度,每-突出物勿,自流通位準延伸-適當 筒形突出為熱絕緣以防其間二轉且;l隙相通。較佳為,圓 本發明之另一特性中 _,^ β ^ 成微通道熱交換器,A g t、於輕合介面層以構 體。支管層亦包括以提供第-溫度液. 體經出口埠排出支管層。^ 口 =路相通。第二溫度液 母一入口通路担上 層之直接入口流體通路,及每一出口仏自第一埠至介 至第二埠之直接流體通路。入口及出D通路提供自介面層 :體流動距離最短。入口及出口通路二J安排可使其間之 寸以均勾方式安排。或者,X 口及出:二二層之至少-尺 通路沿第三層之至Page 12 200419128 V. Description of the invention (6) ___ From body to outlet port. At least one-dimensional direction of the inlet and outlet liquid ^ ^^ levels is arranged individually by means of the uniform sentence # = f in the consistent embodiment. Xi A ^ The pores are arranged at the circulation level of another embodiment, and the entrance and exit arrangements. The inlet and outlet liquid passages are preferably = / ,,, and the directions are non-uniform sentences. The outlet pores are interactively arranged, and A is preferably separated from each other. Entrance area. In an embodiment, at least one interface, at least one interface in the source is cooled by hotspots-the exit size of the exit pores is equal to the entrance pore size-the inlet size is at least the pore size is-the population size is at least-the embodiment towel, at least- Entrance is the same. The interface layer is preferably one to small; the size of the exit pores of the pores does not include a plurality of cylinders with proper heat / conductivity. The interface layer still has a proper number of cylinders along the interface layer in a predetermined area. The plurality of cylinders, including its surface layer, has a rough surface with appropriate thermal conductivity. Interface ^ 22: The device with the second coating layer having at least 10 W / mk preferably includes a plurality of circles; i :: the microstructure is disposed thereon. Heat exchange height, each-no protrusions, extending from the flow level-appropriate The cylindrical protrusions are thermally insulated to prevent two turns in between; Preferably, in another feature of the present invention, _, ^ β ^ forms a micro-channel heat exchanger, and A g t is used as a structure in the light-weight interface layer. The branch pipe layer also includes a first-temperature liquid. The body exits the branch pipe layer through the outlet port. ^ Mouth = Interlinked. The second temperature liquid-inlet channel is a direct inlet fluid channel in the upper layer, and each outlet is a direct fluid channel from the first port to the second port. The entrance and exit D channels provide the interface layer: the shortest body flow distance. The arrangement of the entrance and exit channels can be arranged in a uniform way. Or, mouth X and out: at least -feet of the second and second floor along the third floor
第13頁 200419128 五、發明說明(7) 少一尺寸以非均勻方式安排。入口及出口通路較佳為彼此 為密封分離。入口其出口通路交互配置於第三層中以冷熱 源中之至少一介面熱點區域。至少一入口通道有一入口尺 寸實際上與至少一出口通道之一出口尺寸相等。或者,至 少一入口通道有一入口尺寸與至少一出口通道之出口尺寸 不同。支管層尚包含複數個圓筒形突出物以適當高度自流 通位準延伸,每一突出物與入口及出口通路彼此個別相 通。該圓筒形突出物為熱絕緣以防止其間之熱轉移。該與 入口通路相通之突出物為密封耦合至液體進入狹長通道, 該與出口通路相通之突出物為密封耦合至液體出口狹長通 道 交 熱 玄 =口 法 方 造 製 之 器 換 交 熱 括 包 性 特 1 另 之 明 發 本 貫數 步體複 之液括 層過包 面通並 介層, 成面層 形介管 含該支 包。一 法源成 方熱形 造至含 製合包 。耦尚 源可法 熱型方 卻構該 冷之。 可層源 型面熱 構介卻 之該冷 器,以 換驟穿 體最 液之 口間 出層 之面 直介 垂沿 個供 數以 複排 及安 ,之 路路 通通 體體 液液 DD 入出 之及 直口 垂入 上該 際。 實路 個通 尚 法 方 該 ο 流 體 液 輸尚 傳法 離方 距該 \ ^7 ο 最層 佳面 D 入 1 少 至 合 耜 含 包 介通 至體 層液 管口 支入 合至 耦琿 含體 包液 埠 體 液 入 由 經 體 液 中 器 換 交 包 尚 法 方 經成 體形 液含 該包 中尚 其驟 ,步 路之 熱通層 入體管 進液支 口成 出形 至。 埠器 體換 液交 口熱 出出 | LET 一為 少埠 至體 其合液 ,耦口 路含出 介流 至該 過。 通路 伸通 延體 直液 垂口 ,入 隙過 孔通 口體 入液 個口 數入 複輸 傳 具隙 其孔 ,Π 準入 位該 通, 流層 一 面Page 13 200419128 V. Description of the invention (7) One less dimension is arranged in a non-uniform manner. The inlet and outlet passages are preferably hermetically separated from each other. The entrance and the exit path are alternately arranged in the third layer with at least one interface hot spot in the cold and heat source. At least one of the inlet channels has an inlet dimension that is substantially the same as an outlet dimension of at least one of the outlet channels. Alternatively, at least one of the inlet channels has an inlet dimension different from that of the at least one outlet channel. The branch pipe layer still includes a plurality of cylindrical protrusions extending at an appropriate height of the self-flowing level, and each protrusion communicates with the inlet and outlet passages individually. The cylindrical protrusion is thermally insulated to prevent heat transfer therebetween. The protrusion communicating with the inlet channel is hermetically coupled to the liquid inlet narrow channel, and the protrusion communicating with the outlet channel is hermetically coupled to the liquid outlet narrow channel. Special feature 1 In addition, Mingfa's original solution consists of a series of liquid-filled layers that pass through the surface and pass through the interlayer, forming a surface-layered medium containing the support. One method is to form a square heat into a comprehensive package. Coupling is still a source, but the hot side should be left cold. The cooler can be layer-sourced, and the cooler can be replaced by the surface of the fluid layer that passes through the body, and the vertical surface is vertical to the number of rows for re-arrangement and installation. The way is through the body fluids DD in and out. And straight mouth hangs on the occasion. A practical method should be adopted. The distance from the fluid to the liquid transmission method should be ^ 7 ο The best layer D into 1 is as small as possible, including the package, which is connected to the body fluid tube mouth, and the coupling is included. The body fluid inlet port of the body fluid is changed by the body fluid medium to the package. The method of forming the body fluid contains the package, and the heat transfer layer of the walkway enters the fluid inlet of the body tube to form a shape. The port body exchange fluid is hot out | LET is the liquid from the port to the body, and the coupling port contains the medium flow to the pass. The channel extends through the ductile body with a straight liquid sag, and the gap passes through the hole. The mouth body is filled with liquid. The number of holes is retransmission. The gap has its hole.
第14頁Page 14
200419128200419128
五、發明說明(8) 通位準亦有複數個出口孔隙,其垂直延伸通過介面層及傳 輸出口液體通過出口液體通路。形成支管層之步驟尚包含 形成一入口位準,以自入口埠傳輸液體經入口狹長通道至 入口孔隙。形成支管層之步驟尚包含耦合入口位準至流通 位準,其中該入口孔隙與入口狹長通道為密封耦合。形成 支管層之 出口狹長 含耦合出 通道為密 輸之液體 源中至少 液體入口 最小。介 包括以電 包括沿介 法尚含將 在介面層 尚含在介 導塗層於 方法如濕 名虫刻相關 型技術或 穿孔法形 由機器方 步驟尚包含形成一 通道傳 口位準 封柄合 保持分 一介面 通路及 面層較 鍍法施 面層以 介面層 上構型 面層上 複數個 蝕刻, 之化學 軟微影 成。支 法形成 輸液體至出 至流通位準 。經入口位 開。入口及 熱點區i或。 液體出口通 佳有一 加一熱 預定圖 構型使 一微多 形成複 柱體上 電漿蝕 蝕刻等 圖案技 管層亦 。支管 熱傳 傳導 案形 其有 孔結 數個 。複 刻, 方法 術之 可由 層或 出口位準 口埠。形 ,其中該 準傳輸之 出口液體 該方法尚 路之步驟 導率為至 塗層於介 成複數個 一粗糙表 構配置於 微通道。 數個柱體 光化學餘 交互形成 組合交互 軟微影技 者由射出 以便自出口 成支管層之 出口孔隙與 液體與經出 通路之配置 包含絕緣支 ,以使其間 少 100W/mk 面層之步驟 柱體。或者 面。製造方 介面層上。 方法尚包含 係以電形成 刻,化學I虫 。電形成法 實施。支管 術形成。支 成型法,電 步驟尚έ 出口狹i 口位準# 可冷卻奏 管層中^ 之熱轉矛 >方法尚 。方法Θ ,製造〉 法尚包} 製造方S 施力ϋ熱十 法’钱I 刻及雷| 與熱壓^ 層以雷肩 管層較4V. Description of the invention (8) The pass level also has a plurality of exit apertures, which extend vertically through the interface layer and the outlet liquid through the outlet liquid passage. The step of forming the branch pipe layer further includes forming an inlet level to transfer liquid from the inlet port through the inlet narrow channel to the inlet aperture. The step of forming the branch pipe layer further includes coupling the inlet level to the circulation level, wherein the inlet aperture and the inlet narrow channel are hermetically coupled. The outlet forming the branch pipe layer is narrow and narrow, and at least the liquid inlet of the liquid source with the coupling-out channel is tight. Including electricity, including electricity, along the dielectric method, including the interface layer, the dielectric coating, and other methods such as wet-name engraving-related technology or perforation method. The machine steps also include forming a channel mouthpiece level seal. Compared with the plating method, the surface layer and the surface layer are separated by a plurality of etchings, which are formed by chemical etching on the surface layer. The method of formation is to infuse the liquid to the output level. Via the entry position. Entrance and hotspot i or. The liquid outlet is better to have one plus one heat, and the predetermined pattern configuration enables a small number of layers to form a pattern on the cylinder, such as plasma etching, etc. Branch tube heat transfer case has several holes. Reproduced, the method can be used at the level or the exit level. Shape, in which the quasi-transported exit liquid, the method still has steps, the conductivity is up to the coating layer, and a plurality of rough structures are arranged in the microchannel. Several cylinders of photochemical residual interactions form a combined interactive soft lithography technique. The process of ejecting the exit pores from the exit into a branch layer and the configuration of the liquid and the exit path includes an insulating branch so that there is less 100W / mk surface layer between them. Cylinder. Or noodles. Manufactured on the interface layer. The method still includes the formation of electrical engraved chemical worms. Electroforming method implemented. Branch tube formation. Support molding method, electrical steps still exit the exit narrow mouth level # can cool the thermal transfer spear in the tube layer > method is still. Method Θ, Manufacture> Fa Shangbao} Manufacturer S Force Ten Hot Method ”Qian I Carved and Thunder | Compared with Hot Pressing ^ Layer with Thunder Shoulder Tube Layer 4
第15頁 200419128 五、發明說明(9) (EDM),沖壓,金屬射出成型(MIM),交叉切割及錄法形 成。 本發明之其他優點及特性在以下之較佳及其他實施例 檢討詳細說明後當更為明顯。 本發明之詳細說明 通常,熱交換器以通過液體與介面層之選擇區域以捕 捉熱源產生之熱能量,該層較佳耦合至熱交換器。特別 是,液體被導向介面層之特別區以冷卻熱點及熱點週圍之 區域,以建立跨熱源之溫度均勻性,及維持熱交換器内之 較小壓力降。如在以下不同實施例所討論,熱交換器利用 複數個孔隙,通道及/或指狀物於支管層中及中間層中之 導管以導引及流通液體至及自介面層中選擇熱點區域。或 者,熱交換器包括數個埠,其特別配置在預定位置中以導 引傳輸自熱點之液體及移除液體,以有效冷卻熱源。 對精於此技藝人士甚為明顯,雖然本發明之微通道熱 交換器之說明及討論以冷卻一裝置中之熱點位置有關,該 熱交換器亦可用為加熱一裝置中之冷點位置。應注意,雖 然本發明以微通道熱交換器加以說明,本發明可用於其他 應用中而不限於此處所討論者。 圖2 A說明閉合迴路密封冷卻系統3 0之略圖,該系統包 括本發明一交互軟性液體輸送微通道熱交換器1 0 0。此 外,圖2B說明閉合迴路冷卻系統30之略圖,其包括另一軟 性液體輸送微通道熱交換器1 0 0,該交換器具有本發明之Page 15 200419128 V. Description of the invention (9) (EDM), stamping, metal injection molding (MIM), cross cutting and recording. Other advantages and characteristics of the present invention will become more apparent after reviewing the detailed description of the preferred and other embodiments below. DETAILED DESCRIPTION OF THE INVENTION Generally, a heat exchanger passes through selected areas of a liquid and an interface layer to capture thermal energy generated by a heat source, and this layer is preferably coupled to the heat exchanger. In particular, the liquid is directed to a special area of the interface layer to cool the hot spot and the area around the hot spot to establish temperature uniformity across the heat source and maintain a small pressure drop in the heat exchanger. As discussed in the different embodiments below, the heat exchanger uses a plurality of pores, channels and / or fingers to guide the tubes in the branch and intermediate layers to direct and circulate liquid to and from the interface layer to select hot spots. Alternatively, the heat exchanger includes several ports, which are specially arranged in a predetermined position to guide the liquid transferred from the hot spot and remove the liquid to effectively cool the heat source. It is obvious to those skilled in the art that although the description and discussion of the microchannel heat exchanger of the present invention are related to cooling the hot spot position in a device, the heat exchanger can also be used to heat the cold spot position in a device. It should be noted that although the invention is described in terms of a microchannel heat exchanger, the invention can be used in other applications and is not limited to those discussed herein. Figure 2A illustrates a schematic diagram of a closed-loop sealed cooling system 30, which includes an interactive soft liquid transport microchannel heat exchanger 100 according to the present invention. In addition, FIG. 2B illustrates a schematic diagram of a closed loop cooling system 30, which includes another soft liquid transport microchannel heat exchanger 100, which has the present invention.
200419128 五、發明說明(ίο) 多個埠1 0 8, 1 0 9。應注意,該系統亦可併入其他熱交換器 實施例,並不限於另一熱交換器1 0 0。200419128 V. Description of the invention (ίο) Multiple ports 108, 109. It should be noted that the system can also be incorporated into other heat exchanger embodiments and is not limited to another heat exchanger 100.
如圖2 A所示,液體埠1 0 8,1 0 9耦合至液體線3 8,該線 搞合至一幫浦3 2及一熱凝聚器3 0。幫浦3 2在閉合迴路3 0中 幫浦液體及流通液體。在另一實施例中,一液體埠1 0 8用 來供應液體至熱交換器1 0 0。此外,一液體琿1 0 9用來自熱 交換器1 0 0將液體移除。在一實施例中,一均勻恆定量之 液體流量經各液體埠1 0 8,1 0 9進入及排出熱交換器1 0 0。 或者,不同量之液體流動經入口及出口璋1 0 8,1 0 9在定時 進入及流出。或者,如圖2 B所示,一幫浦提供液體至數個 指定之入口埠1 0 8。或者,多個幫浦(未示出)提供液體至 其個別入口及出口埠1 0 8,1 0 9。此外,動態偵感及控制模 組3 4可用於系統中以改變及動態控制進入及排出較佳或另 一熱交換器之流體量及流速,以響應熱點之變化或熱點位 置中熱量之變化及熱點之位置變化。As shown in FIG. 2A, the liquid ports 108 and 10 are coupled to a liquid line 38, which is connected to a pump 32 and a thermal condenser 30. Pump 3 2 pumps and circulates liquid in the closed circuit 30. In another embodiment, a liquid port 108 is used to supply liquid to the heat exchanger 100. In addition, a liquid 9109 was used to remove the liquid from the heat exchanger 100. In one embodiment, a uniform and constant amount of liquid flow enters and exits the heat exchanger 100 through the liquid ports 108,109. Alternatively, different amounts of liquid flow in and out through the inlets and outlets 璋 108, 109 at regular times. Alternatively, as shown in Figure 2B, a pump supplies liquid to several designated inlet ports 108. Alternatively, multiple pumps (not shown) provide liquid to their individual inlet and outlet ports 108,109. In addition, the dynamic detection and control module 34 can be used in the system to change and dynamically control the amount and flow rate of fluid entering and discharging a better or another heat exchanger, in response to changes in hot spots or changes in heat in hot spot locations and The location of the hot spot changes.
圖3 B說明本發明之具有交互支管層之三層熱交換器 1 0 0之立體圖。3 B所示之另一實施例為三位準熱交換器 100,其包括介面層102,至少一中間層10 4及至少一支管 層1 0 6。或者,如以之下討論,熱交換器1 0 0為二位準裝 置,其包括介面層10 2及之管層106。如圖2 A及2 B所示,熱 交換器1 0 0耦合至熱源9 9,如一電子裝置,包括但不限於 微晶片及積體電路,一熱介面材料9 8較佳配置在熱源9 9與 熱交換器1 0 0之間。或者,熱交換器1 0 0直接耦合至熱源9 9 之表面。對精於此技藝人士甚為明顯,熱交換器1 0 0亦可FIG. 3B illustrates a perspective view of a three-layer heat exchanger 100 having an alternate branch tube layer according to the present invention. Another embodiment shown in 3B is a three-position quasi-heat exchanger 100, which includes an interface layer 102, at least one intermediate layer 104, and at least one tube layer 106. Alternatively, as discussed below, the heat exchanger 100 is a two-level quasi-device that includes an interface layer 102 and a tube layer 106. As shown in FIGS. 2A and 2B, the heat exchanger 100 is coupled to a heat source 9 9. For an electronic device, including but not limited to a microchip and an integrated circuit, a thermal interface material 9 8 is preferably disposed at the heat source 9 9. And heat exchanger 100. Alternatively, the heat exchanger 100 is directly coupled to the surface of the heat source 99. It is very obvious to those skilled in this art, the heat exchanger 1 0 0 can also be
第17頁 200419128 五、發明說明(li) — 統合形成在熱源9 9之,熱交換器1 〇 〇及熱源9 9形成一元 件。因此,介面層1 0 2可與熱源9 9統合配置並與熱源形成 一個元件。 較佳為,本發明之微通道熱交換器之構型可直接咬产 接與熱源9 9接觸,該熱交換器為長方形如圖所示。彳旦對於 於此技藝人士甚為明顯,該熱交換器1 0 0可為任何形狀與:月 熱源9 9之形狀配合。例如,本發明熱交換器可構型為具' 半圓形,其可使熱交換器(未示出)與對應半圓形熱源 >('未 示出)直接或間接接觸。此外,熱交換器較佳為具有較熱 源為大之尺寸,其範圍在及包括0.5 - 5.0 mm。 又 圖3A說明本發明另一支管層1 06之頂視圖。如圖⑽所 示’支管層1 〇 6包括四側邊及一頂表面1 3 〇及一底表面 1 3 2。但頂表面1 3 0在圖3 A中被移除以適當說明支管層j 〇 6 之工作。如圖3 A所示,支管層1 0 6有一係列通道或通路 I16’ 118,120, 122及埠108,109形成於其間。手指部 108 ’ 120以z方向如圖3B所示,延伸完全過支管層1〇6之本 體。或者,手指部11 8及1 2 0以Z方向部分延伸通過支管層 10 6及具有孔隙如圖3 A所示。此外,通道1 1 6及1 2 2部分 延伸通過支管層1〇β。入口及出口通道116,12〇間之其餘 區域以1 0 7代表,自頂表面1 3 〇延伸至底表面1 3 2及構成支 管層1 0 6之本體。 如圖3 Α所示,液體經由入口埠1 0 8進入支管層1 0 6,並 沿^ 口通道i丨6流至數個手指部n 8,其將自通道π 6之液 體刀布至X及/或Υ方向,以施加液體至介面層1〇2中之選擇Page 17 200419128 V. Description of the invention (li)-The integration is formed in the heat source 99, and the heat exchanger 100 and the heat source 99 form a unit. Therefore, the interface layer 102 can be integrated with the heat source 99 to form an element with the heat source. Preferably, the configuration of the micro-channel heat exchanger of the present invention can be directly brought into contact with the heat source 9 9. The heat exchanger is rectangular as shown in the figure. It is obvious to those skilled in the art that the heat exchanger 100 can be of any shape to match the shape of the moon heat source 9 9. For example, the heat exchanger of the present invention can be configured to have a 'semi-circular shape' which can directly or indirectly contact a heat exchanger (not shown) with a corresponding semi-circular heat source > ('not shown). In addition, the heat exchanger is preferably larger in size than the heat source, and ranges from and including 0.5-5.0 mm. Fig. 3A illustrates a top view of another pipe layer 106 of the present invention. As shown in Fig. ’', The branch pipe layer 106 includes four sides, a top surface 130 and a bottom surface 132. However, the top surface 130 is removed in FIG. 3A to properly illustrate the work of the branch pipe layer j 06. As shown in FIG. 3A, the branch pipe layer 106 has a series of channels or passages I16 '118, 120, 122 and ports 108, 109 formed therebetween. The finger 108 '120 extends in the z direction as shown in Fig. 3B, and completely extends through the body of the branch tube layer 106. Alternatively, the finger portions 118 and 120 are partially extended through the branch tube layer 106 in the Z direction and have pores as shown in FIG. 3A. In addition, the channels 1 16 and 12 2 partially extend through the branch tube layer 10β. The remaining area between the inlet and outlet channels 116, 120 is represented by 107, extending from the top surface 130 to the bottom surface 132, and the body constituting the branch pipe layer 106. As shown in FIG. 3A, the liquid enters the branch pipe layer 106 through the inlet port 108, and flows along the mouth channel i6 to several fingers n8, which spreads the liquid knife from the channel π6 to X And / or Υ direction to apply liquid to the interface layer 102
200419128 五、發明說明(12) 一'〜 -~ 區域。手心部1 1 8女排在不同之預定方向以輸送液體至介 面層1 0 2中之各位置,該介面層1 〇 2對應熱源中之在或接近 熱點之區域。介面層1 〇2中之此等位置以後稱為介面熱點 區。該手指部之構型能冷卻靜態及時間改變之介面熱、、點 區。如圖3 A所示,通道11 6,丄! 2及手指部j i 8 二‘; 方向配置在支管層106中。因此,通道116, ιΐ2及/ :118, 120之不同方向可傳輸液體以冷卻熱源99中之孰曰 及/或使熱交換器100中之壓力降為最小。或诵 122J手指部118, 12。定期配置於支管層… 、 展現〜圖案如圖4及5之例所示。 τ 卫 之轨點::轨點: $尺寸由有待冷卻之熱源99中 ^ , 10 e,/ΛTn " * 面層1 02中之介面熱點區之上方。支f ;或接近介 系統3〇中(圖2Α)發生壓力降。傳輸至八 ^ 1 :态100及 介面熱點區及接近介面熱點區建立均;點區之液體在 一%|1160^118之尺寸及數目=因數 ::施例中,入口及出口手指部118, 12〇具有相同之寬产 ί :。或者’入口及一出口手指部⑴,120具有不同之; =寸。手指心8, 12。之寬度尺寸在及包括〇25_5。: =。在另-貫施:中’手指部118 ’ 12〇具有相同長度及 =。或者入:及出:手指部118, 12。具有不同之寬度盘 長度。在另一貫施例中,入口及出口手指部"S’ m;”200419128 V. Description of the invention (12) A '~-~ area. The women's volleyball team 1 1 8 is in different predetermined directions to transport liquid to each position in the interface layer 102, which corresponds to the area of the heat source at or near the hot spot. These positions in the interface layer 102 are hereinafter referred to as interface hot spots. The configuration of the finger can cool the static and time-changing interface heat and spot area. As shown in Figure 3 A, channel 11 6, eh! 2 and the fingers j i 8 2 ′; directions are arranged in the branch pipe layer 106. Therefore, the channels 116, ι2, and /: 118, 120 can transmit liquid in different directions to cool the heat source 99 and / or minimize the pressure drop in the heat exchanger 100. Or recite 122J fingers 118, 12. Regularly arranged on the branch pipe layer ..., and the pattern is shown in the examples of Figures 4 and 5. τ Wei's orbital point:: Orbital point: $ Dimensions are from the heat source 99 to be cooled ^, 10 e, / ΛTn " * Above the interface hotspot in surface layer 02. Branch f; or close to the pressure in medium system 30 (Figure 2A). Transmission to eight ^ 1: State 100 and interface hotspots and near interface hotspots are established uniformly; the liquid in the spot area is at a size of 1% | 1160 ^ 118 = number and factor =: In the example, the entrance and exit fingers 118, 12〇 has the same wide yield ί :. Or, the entrance and exit fingers ⑴, 120 are different; = inch. Finger Heart 8, 12. The width dimension includes and includes 〇25_5. : =. In another-continuous application: the middle finger portion 118 '12 has the same length and =. Or in: and out: fingers 118, 12. With different width disc lengths. In another embodiment, the entrance and exit fingers " S ’m;"
200419128 五、發明說明(13) 指之長度有變化之寬度。此外,入口及出口手指部1 1 8, 1 2 0之長度尺寸在及包括0 . 5 mm至熱源長度之三倍。此外, 手指部1 1 8,1 2 0有一高度或深度為.2 5 5 . 0mm。此外,每公 分少於1 0或多餘3 0之手指部可交互配置在介面層1 0 6中。 但,對精於此技藝人士甚為明顯,每公分1 0及3 0個手指部 之間於支管層亦屬可行。 _ 本發明擬配合手指部1 1 8,1 2 0及通道1 1 6,1 2 2之幾何 形狀為非週期性安排,以增加熱源之最佳熱點冷卻。為達 到跨熱源9 9之均勻溫度,熱轉移至液體之空間分布以熱產 生之空間分布加以匹配。當液體沿介面層流過微通道1 1 0 時,溫度增加及開始在二相位條件下轉換為蒸氣。因此, 液體受到大幅膨脹,而引起速度之大量增加。通常,自介 面層至液體熱轉移效率因高速流量而改進。因此,可調整 液體輸送之剖面尺寸及移除熱交換器1 0 0中之手指部1 1 8, 1 2 0及通道1 1 8,1 2 2,以配合熱轉移至液體之效率。 例如,可為熱源設計一特殊手指部,接近入口處產生 較高之熱。此外,設計一較大之手指部1 1 8,1 2 0及通道 1 1 6,1 2 2之較大剖面積亦為一優點,該處可能產生液體及 蒸氣之混合物。200419128 V. Description of the invention (13) refers to the width with varying length. In addition, the length dimensions of the inlet and outlet finger portions 118, 120 are three times longer than and including 0.5 mm to the length of the heat source. In addition, the finger portions 1 1 8 and 1 2 0 have a height or a depth of .25 55.0 mm. In addition, fingers less than 10 or more than 30 centimeters per cm may be alternately disposed in the interface layer 106. However, it is obvious to those skilled in this art that between 10 and 30 fingers per cm at the branch level is also feasible. _ The present invention is intended to fit the geometric shapes of the fingers 1 18, 120 and the channels 1 16 and 12 to aperiodic arrangements to increase the optimal hot spot cooling of the heat source. In order to achieve a uniform temperature across the heat source 99, the spatial distribution of heat transfer to the liquid is matched by the spatial distribution of heat generation. As the liquid flows through the microchannel 1 1 0 along the interface layer, the temperature increases and begins to change to vapor under two-phase conditions. As a result, the liquid is greatly expanded, causing a substantial increase in speed. Generally, the heat transfer efficiency from the interface layer to the liquid is improved due to the high flow rate. Therefore, the cross-sectional dimensions of the liquid transfer and the removal of the fingers 1 18, 1 2 0 and the channels 1 18, 1 2 in the heat exchanger 100 can be adjusted to match the efficiency of heat transfer to the liquid. For example, a special finger can be designed for the heat source to generate higher heat near the entrance. In addition, it is an advantage to design a larger cross-sectional area of the finger portions 118, 120 and the channels 116, 12 2 where a mixture of liquid and vapor may be generated.
雖未示出,手指部可設計為以入口處較小之剖面積開 始,以造成液體之高速流動。該特殊手指部或通道可構型 為在下游出口處之大剖面面積,以造成較低之流速。手指 部及通道之設計可使熱交換器之壓力降最小,及由於二相 流體中液體轉換為蒸氣引起之液體量,速度及加速增加之Although not shown, the finger portion may be designed to start with a small cross-sectional area at the entrance to cause high-speed flow of liquid. The special finger or channel can be configured with a large cross-sectional area at the downstream outlet to cause a lower flow velocity. The fingers and channels are designed to minimize the pressure drop of the heat exchanger and increase the amount, speed and acceleration of liquid caused by the conversion of liquid in the two-phase fluid to vapor.
第20頁 200419128 五、發明說明(14) 處熱點冷卻之最佳化。 此外,手指部1 1 8,1 0及通道1 1 6,1 2 2可設計為沿其 長度先寬而後窄,以增加微通道熱交換器1 0 0中不同處之 液體速度。或者,亦可設計改變手指部及通道由大至小再 由小至大數次,以配合熱轉移效率達到跨括熱源9 9所望之 熱消耗分布。應注意,上述改變手指部及通道之討論亦可 適用於其他實施例,不限於本實施例。 馨 或者,如圖3 A所示,支管層1 0 6包括一或個孔隙1 1 9於 手指部1 1 8中。在三層熱交換器1 0 0中,液體沿手指部1 1 8 經孔隙1 1 9向下流至中間層1 0 4。或者,在三層熱交換器 1 0 0中,液體沿手指部1 1 8向下流至孔隙1 1 9直接進入介面 層102。此外,如圖3A所示,支管層106包括出口手指部 12 0中之孔隙121。在三層熱交換器100中,液體自中間層 1 0 4向上流過孔隙1 2 1進入出口手指部1 2 0。或者,在二層 熱交換器1 0 0中,液體自中間層1 0 2流向上至孔隙1 2 1進入 出口手指部1 2 0。 在另一實施例中,入口及出口手指部1 1 8, 1 2 0為開路 通道而無孔隙。支管層1 0 6之底表面1 0 3在三層熱交換器 1 0 0中鄰接中間層1 0 4之表面,或在二層熱交換器中鄰接介 面層102。因此,三層熱交換器100中,液體自由至中間層 1 0 4及支管層1 0 6流動。液體由中間層1 0 4中之導管1 0 5導自 及至適當介面熱點區。精於此技藝人士可知,導管10 5直 接與手指部對齊於三層系統之下方或各處。 圖3B雖僅顯示具有支管層之三層熱交換器,該熱交換Page 20 200419128 V. Description of the invention (14) Optimization of hot spot cooling. In addition, the finger portions 1 18, 10 and the channels 1 16, 1 2 2 may be designed to be widen and then narrower along their length to increase the liquid velocity in different places of the microchannel heat exchanger 100. Alternatively, it is also possible to design to change the finger and the channel from large to small and then from small to large several times to match the heat transfer efficiency to achieve the desired heat consumption distribution across the heat source 99. It should be noted that the above discussion of changing the finger and channel can also be applied to other embodiments, and is not limited to this embodiment. Xin Alternatively, as shown in FIG. 3A, the branch tube layer 106 includes one or more pores 1 1 9 in the fingers 1 1 8. In the three-layer heat exchanger 100, the liquid flows down the finger 1 1 8 through the pores 1 1 9 to the middle layer 104. Alternatively, in the three-layer heat exchanger 100, the liquid flows down the finger 1 1 8 to the pore 1 1 9 and directly enters the interface layer 102. Further, as shown in FIG. 3A, the branch pipe layer 106 includes an aperture 121 in the exit finger 120. In the three-layer heat exchanger 100, the liquid flows upward from the intermediate layer 104 through the pores 1 2 1 and enters the outlet finger 1 2 0. Alternatively, in the two-layer heat exchanger 100, the liquid flows upward from the intermediate layer 102 to the pore 12 1 and enters the outlet finger 1 2 0. In another embodiment, the inlet and outlet finger portions 18, 120 are open channels without pores. The bottom surface 10 of the branch pipe layer 106 is adjacent to the surface of the intermediate layer 104 in the three-layer heat exchanger 100 or the interface layer 102 in the two-layer heat exchanger. Therefore, in the three-layer heat exchanger 100, the liquid flows freely to the intermediate layer 104 and the branch pipe layer 106. The liquid is guided by the catheter 105 in the middle layer 104 to the appropriate interface hot spot. Those skilled in the art will know that the catheter 105 is directly aligned with the fingers under or around the three-layer system. Although FIG. 3B only shows a three-layer heat exchanger with branch pipe layers, the heat exchange
第21頁 200419128 五、發明說明(15) 器亦可有二層結構包括支管層1 0 6及介面層1 0 2,液體經各 層直接通過支管層10 6之介面層1 0 2之間而不通過介面層 1 0 4。對精於此技藝人士甚為明顯,支管,中間層及介面 層之構型之顯示僅供範例目的,而不限於所示之構型。 如圖3 B所示,中間層1 0 4括複數個導管1 0 5延伸通過。 流入導管1 0 5導引液體自支管層1 0 6進入,流至介面層1 0 2 中之指定介面熱點區。同理,孔隙1 0 5亦傳輸液體自介面 層1 0 2至出口液體埠1 0 9。因此,中間層1 0 4亦提供自介面 層1 0 2之液體傳輸至出口液體埠1 0 9,出口液體埠1 0 8與支 管層1 0 6相通。 導管1 0 5以根據數因數之予定圖案配置在介面層1 0 4 中,該因數包括但不限於介面熱點區之位置,介面熱點區 所需之液體量以冷卻熱源9 9及液體溫度。該導管之寬度尺 寸為1 0 0微米,其它尺寸至數毫米亦屬可行。此外,導管 1 0 5尚可為其他尺寸,視至少上述之因數而定。對精於此 技藝人士而言,中間層1 0 4中之每一導管1 0 5具有相同形狀 及尺寸但非必需。例如,如上述之手指部,導管亦可有可 變之長度及/或寬度尺寸。此外,導管1 0 5有一恆定深度或 高度尺寸通過中間層104。或者,導管10 5有一可變深度尺 寸,如梯形或喷嘴形,通過中間層1 0 4。雖然圖2 C所示之 導管1 0 5之水平形狀為矩形,導管1 0 5可有其他形狀,包括 圓形(圖3 A ),曲線形,橢圓形。或者,一或多個導管1 0 5 可與部分或全部手指部形狀及等值。 中間層1 0 4水平配置在熱交換器1 0 0中,導管則垂直配Page 21 200419128 V. Description of the invention (15) The device can also have a two-layer structure including a branch pipe layer 106 and an interface layer 102, and the liquid directly passes through each of the layers between the branch layer 106 and the interface layer 102. Through the interface layer 104. It is obvious to those skilled in this art that the configuration of the branch, middle layer and interface layer is shown for example purposes only and is not limited to the configuration shown. As shown in FIG. 3B, the middle layer 104 includes a plurality of catheters 105 extending through it. The inflow conduit 105 guides the liquid from the branch tube layer 106 into the designated interface hotspot area in the interface layer 102. In the same way, the pore 105 also transmits liquid from the interface layer 102 to the outlet liquid port 109. Therefore, the middle layer 104 also provides the liquid from the interface layer 102 to the outlet liquid port 109, and the outlet liquid port 108 is in communication with the branch layer 106. The duct 105 is arranged in the interface layer 104 in a predetermined pattern according to a factor, which includes but is not limited to the position of the interface hot spot, and the amount of liquid required by the interface hot spot is to cool the heat source 99 and the temperature of the liquid. The catheter has a width of 100 microns and other sizes up to a few millimeters are possible. In addition, the catheter 105 can be of other sizes, depending on at least the factors mentioned above. For those skilled in the art, each of the catheters 105 in the intermediate layer 104 has the same shape and size but is not required. For example, as with the fingers described above, the catheter may also have variable length and / or width dimensions. In addition, the catheter 105 has a constant depth or height dimension through the intermediate layer 104. Alternatively, the catheter 105 has a variable depth dimension, such as a trapezoidal or nozzle shape, and passes through the intermediate layer 104. Although the horizontal shape of the catheter 105 shown in FIG. 2C is rectangular, the catheter 105 may have other shapes, including a circular shape (FIG. 3A), a curved shape, and an oval shape. Alternatively, one or more of the catheters 105 can be equivalent to the shape or shape of some or all fingers. The middle layer 104 is arranged horizontally in the heat exchanger 100, and the ducts are arranged vertically
200419128 五、發明說明(16) 置。此外,中間層1 0 4可配置在熱交換器1 0 0之任何方向, 包括但不限於對角線及曲線形。或者,導管1 0 5可以水 平,對角線,曲線或任何方向配在中間層1 0 4中。或者, 中間層1 0 4沿熱交換器之全長水平延伸,因此中間層1 0 4將 介面層1 0 2與支管層1 0 6完全分開,以迫使液體通過導管 1 0 5傳輸。或者,熱交換器1 0 0之一部分不包括支管層1 0 6 及介面層1 0 2間之中間層1 0 4,因此液體可自由流動於其 間。此外,中間層1 0 4可垂直延伸於支管層1 0 6與介面層 1 0 2之間以構成單獨,區別之中間層區域。或者,中間層 1 0 4不完全自支管層10 6延伸至介面層102。 圖1 0 A說明本發明之介面層之較佳實施例之透視圖。 如圖1 0A所示,介面層302包括一系列柱體303自介面層302 之底表面向上延伸。此外,圖10 A說明配置在介面層30 2之 底表面上之微多孔結構3 0 1。甚為明顯,介面層3 0 2可僅包 括微多孔結構3 0 1及與任何其他介面層特性(即,微通道, 柱體等)之多孔結構組合。 較佳介面層3 0 2包括柱體3 0 3而非微通道,此係因為自 入口孔隙之液體流動至較佳之支管層3 0 2 (圖12A)之四週出 口孔隙之故。如下所詳細討論,液體經一系列入口孔隙向 下傳輸至介面層3 0 2,於是液體經一系列出口孔隙自介面 層3 0 2流出,該孔隙以至入口孔隙之最佳之距離空間分 隔。換言之,液體自每一入口孔隙傳輸向最近之出口孔 隙。較佳為,每一入口孔隙由數個出口孔隙所包圍。因 此,進入介面層3 0 2之液體將以圍繞出口孔隙之方向流200419128 V. Description of Invention (16). In addition, the intermediate layer 104 can be arranged in any direction of the heat exchanger 100, including but not limited to diagonal lines and curved shapes. Alternatively, the catheter 105 can be arranged horizontally, diagonally, curved or in any direction in the intermediate layer 104. Alternatively, the intermediate layer 104 extends horizontally along the entire length of the heat exchanger, so the intermediate layer 104 completely separates the interface layer 102 from the branch pipe layer 106 to force the liquid to pass through the duct 105. Alternatively, a part of the heat exchanger 100 does not include the intermediate layer 104 between the branch pipe layer 106 and the interface layer 102, so the liquid can flow freely therebetween. In addition, the intermediate layer 104 may extend vertically between the branch pipe layer 106 and the interface layer 102 to form a separate and distinct intermediate layer region. Alternatively, the intermediate layer 104 does not completely extend from the branch pipe layer 106 to the interface layer 102. FIG. 10A illustrates a perspective view of a preferred embodiment of the interface layer of the present invention. As shown in FIG. 10A, the interface layer 302 includes a series of pillars 303 extending upward from a bottom surface of the interface layer 302. In addition, Fig. 10A illustrates a microporous structure 3 01 disposed on the bottom surface of the interface layer 302. It is clear that the interface layer 302 may include only the microporous structure 301 and a porous structure combination with any other interface layer characteristics (ie, microchannels, pillars, etc.). The preferred interface layer 3 0 2 includes pillars 3 0 3 instead of microchannels, because the liquid flowing from the inlet pores flows to the outlet pores around the preferred branch layer 3 2 (Figure 12A). As discussed in detail below, the liquid is transported downward to the interface layer 3 0 through a series of inlet pores, and the liquid flows out of the interface layer 3 2 through a series of outlet pores. The pores are spatially separated by the optimal distance from the inlet pores. In other words, liquid is transported from each inlet pore to the nearest outlet pore. Preferably, each inlet aperture is surrounded by several outlet apertures. Therefore, the liquid entering the interface layer 3 2 will flow in a direction around the exit aperture
200419128200419128
五、發明說明(17) 柱體3〇3較佳在介面層3〇2中以容納足夠之孰轉 f ”及使液體在自入口孔隙流向出口孔隙時,受、 取少$之液體壓力降。 又則 302較佳包括-濃密之高,窄柱體陣列3〇3,盆 自底表面301垂直延伸,與支管; ’、 柱體303與介面層3 0 2之底表面底t:接觸。或者, 亦較佳為沿介面層3。2等距彼此:1二一=延伸。柱體邮 移能力可均句跨底表面3。心; 介面層3 02之熱轉 八叫 丄门 3者,柱體3 0 3亦可以非等距V. Description of the invention (17) The pillar 3003 is preferably in the interface layer 3202 to accommodate sufficient rotation f "and the liquid pressure drop is reduced by $ when the liquid flows from the inlet pore to the outlet pore. Then 302 preferably includes-a dense high, narrow array of pillars 303, the basin extends vertically from the bottom surface 301, and the branch pipe; ', the pillar 303 is in contact with the bottom surface of the interface layer 300. Alternatively, it is also preferable to be equidistant from each other along the interface layer 3.2: 1 21 = extension. The postal transfer ability of the cylinder can evenly cross the bottom surface 3. Heart; the heat transfer of the interface layer 3 02 is called the gate 3 , Cylinder 3 0 3 can also be non-equidistant
=二:所其中在介面層3°2中間之柱體_ 邊緣以更运之距離分開。柱體3〇3之空間分開與 署Γΐ ί寸有關’液體之流體阻抗及熱點之大小及位 置触Α自熱源99之熱通量密度之大小及位置有關。例如, 柱體3 0 3之較低密度對$ _ >卩日γ & 辟mm π t 抗較小,但亦提供自介面 !—飞他'之熱轉移之較少表面面積。應瞭解,圖1 〇 B所 不之貫施例之柱體3 0 3之非間歇分隔構型並非受到限制, 可構型為任何安排,視熱源及冷卻系統3〇(圖2 理雄操 作之條件而定。 〜 ^ 此外柱體3 〇 3較佳為如圖1 〇 a所示之圓筒形,以使液 在最少之抵抗下’自入口孔隙流至出口孔隙。但,柱體 3 0 3之形狀可包括但不限於方形3〇3B (圖ι〇Β),菱形,橢圓 形3 0 3C(圖l〇C),六角形3〇3D(圖1〇D)或其他形狀。此外, 介面層3 0 2可有一沿底表面3 〇丨之不同形狀柱體之組合。 例如,如圖1 〇 E所示,介面層3 〇 2包括一組距形翼片 3 0 3 E ’其在各組中彼此成徑向配置。此外,介面層3 〇 2包= Two: The edges of the pillars in the middle of the interface layer 3 ° 2 are separated by a greater distance. The spatial separation of the cylinder 3 is related to the size and position of the fluid resistance of the liquid, the size and position of the hot spot, and the contact with the heat flux density of the heat source 99. For example, the lower density of the cylinder 3 0 3 is less resistant to $ _ > the next day γ & mm mm π t, but also provides less surface area for thermal transfer from the interface! It should be understood that the non-intermittent partition configuration of the cylinder 303, which is not a consistent example of FIG. 10B, is not limited, and can be configured in any arrangement, depending on the heat source and cooling system 3 (Figure 2 Lixiong operation conditions ^ In addition, the cylinder 3 03 is preferably cylindrical as shown in FIG. 10a, so that the liquid flows from the inlet pore to the outlet pore with minimal resistance. However, the cylinder 3 03 The shape may include, but is not limited to, a square 303B (Figure 〇B), a diamond, an oval 303C (Figure 10C), a hexagonal 303D (Figure 10D), or other shapes. In addition, the interface The layer 3 02 may have a combination of pillars of different shapes along the bottom surface 3 0. For example, as shown in FIG. 10E, the interface layer 3 2 includes a set of distance-shaped fins 3 0 3 E The groups are arranged in a radial direction with each other. In addition, the interface layer 3 〇2 package
第24頁 200419128 五、發明說明(18) 括數個柱體3 〇 3 B配 例中’在徑向安排 每一入口孔隙之下 隙,因此,徑向分 使具有接近均勻分 及出口孔隙之大小 或翼片之構型,介 到單相或雙相流動 不同之銷3 〇 3構型乃 圖3 B說明本發 圖3 B所示,介面層 110’微通道壁11( 路徑傳輸。底表面 熱源9 9有足夠之熱 自一特殊位置收集 行構型如圖3 B所示 道壁之間。 對精於此技藝 其他構型,視上述 通道壁部分之間具 1 1 0具有尺寸,可$ 除微通道壁之外, 表面,及多孔結構 顯。但為例目的 置在該組距形翼片3 0 3E之間。在一實施 之距形翼片3 〇 3 E中之開路圓形區被置於 ’翼片3 0 3 E可協助導引流體至出口孔 布之翼片3 0 3E可協助使壓力降最小,及 布之冷卻液體於介面層30 2中。視入口 及相對配置,其可有許多可能柱體及/ 面層3 0 2最佳安排之選擇視液體是否受 狀態而定。精於此技藝人士甚為明顯, F可併入任何實施例中及變化中。 明介面層1 〇 2另一實施例之透視圖。如 1 0 2包括底表面1 0 3及複數個微通道壁 丨間之區域可導引或傳輸液體沿一液體流 1 0 3為平坦及有一高熱傳導率,以使自 轉移。或者,底表面1 0 3包括設計用以 或驅逐之槽或脊部。微通道壁11 〇以平 ,因而使液體可沿液體路徑流動於微通 人士甚為明顯,微通道壁1 1 0可構型為 之因數而定。例如,介面層1 0 2可在微 有槽溝,如圖8 C所示。此外,微通道壁 L介面層10 2中之壓力降或壓力差最小。 其他構型亦可考慮,包括但不限於粗糙 如燒結之金屬或矽泡沫,此點甚為明 ,圖3 B中之微通道壁1 1 0係用以說明本Page 24 200419128 V. Description of the invention (18) Include several cylinders 3 〇3 B in the configuration 'the gap is arranged radially under each inlet pore, so the radial division has a near uniform distribution and an outlet pore. The size or the configuration of the fins is different from the pin 3 that flows to the single-phase or bi-phase. The configuration of Figure 3B is shown in Figure 3B. Figure 3B shows the interface layer 110 'microchannel wall 11 (path transmission. Bottom The surface heat source 9 9 has enough heat to collect from a special location. The configuration is shown in Figure 3B between the walls. For other configurations that are good at this technique, depending on the size of the channel wall between 1 and 10, Except for the micro-channel wall, the surface and the porous structure are obvious. However, for the purpose of example, it is placed between the set of winged fins 3 0 3E. An open circle in the implementation of the winged fins 3 0 3 E The shaped area is placed on the 'fins 3 0 3E to help guide the fluid to the outlet orifice. The flaps 3 0 3E can help to minimize the pressure drop, and the cooling liquid of the cloth is in the interface layer 30 2. There are many possible configurations of cylinders and / or surface layers. The choice of the best arrangement depends on the state of the liquid. It is obvious to those skilled in this art that F can be incorporated into any embodiment and variations. Perspective view of another embodiment of the clear interface layer 102. For example, 102 includes a bottom surface 103 and a plurality of microchannel walls. The area between them can guide or transport the liquid along a liquid stream 103 which is flat and has a high thermal conductivity for self-transfer. Alternatively, the bottom surface 103 includes grooves or ridges designed for or expelled. Micro The channel wall 11 〇 is flat, so that the liquid can flow along the liquid path to the micro-passers is very obvious, the micro channel wall 1 10 can be configured as a factor. For example, the interface layer 10 2 can be in the micro groove The groove is shown in Fig. 8C. In addition, the pressure drop or pressure difference in the microchannel wall L interface layer 102 is the smallest. Other configurations can also be considered, including but not limited to rough such as sintered metal or silicon foam. It is clear that the microchannel wall 1 1 0 in FIG.
第25頁 200419128 五、發明說明(19) 發明之介面層102。 微通道壁1 1 〇可使液體沿介面熱點區之選擇熱點位 受到熱交換,以便在該位置冷卻熱源9 9。微通道壁i丨^置 度為2 0 - 3 0 0微米及高度1 〇 〇微米至1毫米範圍,視熱< 之功率而定。微通道壁11 〇之長度為i 〇 〇微米至數個公分9 9 間’視熱源之大小,熱點之大小及至熱源之熱通量密声之 定。或者,任何其他微通道壁尺寸均可考慮。微通^二而 1 1 0彼此分隔’分隔範圍為5 0 - 5 0 0微米,視熱源9 9功率^ 定,雖然其他分隔距離亦可考慮。 、而 參考圖3 Β中之總成,支管層1 〇 6之頂表面被切開以# 明支管層1 0 6本體内之通道11 6,11 2及手指部11 8,1 2 〇兄 熱源99中之位置產生更多熱,因此被稱為熱點,熱源⑽ 之該產生少量熱之位置稱為溫點。如圖3 Β所示,熱源9 熱點區於位置A,及溫點區於位置β。介面層1 〇 2接近執有 點及溫點之區域稱為介面熱點區。如圖3 b所示,介面屉、、、 1 02包括介面熱點區a,其配置在位置A及介面熱點區 上,該熱點區B配置在位置B之上。 如圖3 A及3 B所示,液體經由入口埠丨〇 8最初進入埶丄 換器1 0 0。液體於是流至一入口通道丨i 6。或者,熱交換^ 1 0 0包括一或多個入口通道i丨6。圖3級3B所示,液=沪态 口通道116自入口埠1〇8流入在分支流至手指部U8D。2 Λ 外,繼續沿入口通道1 1 6之其他部分流動之液體流動 手指部118Β及118C,餘類推。 各 在圖Β中,液體至手指部丨丨8 Α而供應至介面熱點Page 25 200419128 V. Description of the invention (19) The interface layer 102 of the invention. The microchannel wall 1 10 allows the liquid to undergo heat exchange along a selected hot spot of the interface hot spot to cool the heat source 9 9 at that location. The microchannel wall is placed in a range of 20-300 microns and a height of 100 microns to 1 mm, depending on the power of the heat <. The length of the microchannel wall 110 is from 100 micrometers to several centimeters 99, depending on the size of the heat source, the size of the hot spot, and the heat flux to the heat source. Alternatively, any other microchannel wall size can be considered. Micro-pass ^ 2 and 1 1 0 separated from each other 'separation range is 50-500 microns, depending on the power of the heat source 9 9 ^, although other separation distances can also be considered. With reference to the assembly in FIG. 3B, the top surface of the branch tube layer 〇6 is cut with # 明 支 管 层 1 0 6 The channels in the body 11 6, 11 2 and the fingers 11 8, 1 2 〇 brother heat source 99 The middle place generates more heat, so it is called a hot spot, and the place where the heat source should generate a small amount of heat is called the warm spot. As shown in FIG. 3B, the hot spot area of the heat source 9 is at position A, and the warm spot area is at position β. The area where the interface layer 102 is close to the holding point and the temperature point is called the interface hotspot. As shown in FIG. 3b, the interface drawers, 102, and 102 include an interface hotspot area a, which is disposed at the location A and the interface hotspot area, and the hotspot area B is disposed above the location B. As shown in FIGS. 3A and 3B, the liquid initially enters the converter 100 through the inlet port 08. The liquid then flows to an inlet channel i 6. Alternatively, the heat exchange ^ 100 includes one or more inlet channels i. As shown in FIG. 3 level 3B, the liquid = Shanghai state. The inlet channel 116 flows from the inlet port 108 into the branch flow to the finger U8D. Outside 2 Λ, the liquid flowing along the other part of the inlet channel 1 16 continues to flow. Fingers 118B and 118C, and so on. In Figure B, the liquid reaches the finger 丨 丨 8 Α and is supplied to the interface hotspot.
这E A JThis E A J
200419128 五、發明說明(20) 液體向下流過手指部1 1 8 A至中間層1 0 4。液體於是流過入 口導官5 A,其位於手指部1 1 8 A之下,再流入介面層1 〇 2, 該處液體受到與熱源9 9之熱交換。如上所述,介面層1 〇 2 中之彳政通道可構型在任何分向。因此,介面區A中之微通 道111配置成與介面層1〇 2中之其餘微通道成垂直。因此, 自導管1 05A之液體沿微通道i丨丨傳輸,如圖3所示,雖然液 體亦沿介面層102之其餘區域之其他方向傳輸。被加熱之 液體於疋經導管1 q 5 b向上傳輸至出口手指部1 2 〇 A。200419128 V. Description of the invention (20) The liquid flows down through the fingers 1 1 A to the middle layer 104. The liquid then flows through the entrance guide 5 A, which is located below the finger 118 A, and then flows into the interface layer 102, where the liquid is subjected to heat exchange with a heat source 99. As mentioned above, the political channels in the interface layer 102 can be configured in any direction. Therefore, the micro-channels 111 in the interface area A are arranged perpendicular to the remaining micro-channels in the interface layer 102. Therefore, the liquid from the catheter 105A is transmitted along the micro-channel i, as shown in FIG. 3, although the liquid is also transmitted in other directions along the remaining area of the interface layer 102. The heated liquid is transported upward through the catheter 1 q 5 b to the exit finger 12 A.
同理’液體以Z方向向下流動過手指部1丨8E及丨丨8F至 ^間層104。液體於是向下流過z方向之入口導管1〇5C進入 層102。液體於是以方向向上流,自介面層ι〇2過出口 導=j〇5D至出口手指部120及120F。熱交換器1〇〇經由出口 手才曰4 1 2 0移除支管層1 〇 6中之加熱液體, 口 1 2 0盥屮口視、菸 J 1 ” ^道1 2 2相通。出口通道1 2 2使液體經一出口蟑 1 〇 9流出熱交換哭 ^佳為’進入流體及流出流體導管1 〇5直接配置 二 P 百 gtpf jo » 、,八 山 在適當之介面熱點區之上,以直接供應液體: 熱源9 9中之敎μ , “、、點。此外,母一出口手指部1 2 0之構型可配 置在最接近粒说Similarly, the liquid flows downward in the Z direction through the fingers 1 8E and 8F to the interlayer 104. The liquid then flows down through the inlet conduit 105C in the z direction and enters the layer 102. The liquid then flows upward in the direction from the interface layer ι02 through the outlet guide = j〇5D to the outlet fingers 120 and 120F. The heat exchanger 100 removes the heated liquid in the branch pipe layer 106 from the outlet pipe 4 1 2 0, and the mouth 1 2 0 is connected to the mouth, and the smoke 1 2 is connected. The outlet channel 1 2 2 Make the liquid flow through an outlet cock 10 out of the heat exchange c. It is better to 'enter the fluid and out of the fluid duct 1 0 5 Directly configure the two P 100 gtpf jo », and the eight mountains are on the appropriate interface hotspot area to Direct supply of liquid: 敎 μ, ",, point in heat source 9 9. In addition, the configuration of the female-outlet finger 1 2 0 can be configured closest to the grain
之壓力降田寻殊介面熱點區各入口手指部1 1 8 ’以使其間 ^ ! ΛΟ 、取小。因此,液體經由入口手指部1 1 8Α進入介ί 5 ,丨、人 ”排出介面層1 0 2至出口手指部1 2 0 A之前傳肩 本;1 2之底表面103一距離。甚為明顯,液體沿) 衣面1 0 3傳輪^> 史距離之量可適當將自熱源9 9產生之熱移 f/于、’而不產峰t 王不必要之壓力降。此外,如圖3級3 B所示The pressure drops 1 1 8 ′ at each entrance of the hot spot area of the interface, so that it is smaller ^! ΛΟ, whichever is smaller. Therefore, the liquid passes through the inlet finger 1 1 8Α into the interface 5, and the person “exits the interface layer 1 2 to the outlet finger 1 2 0 A before passing the shoulder book; the distance from the bottom surface 103 of 12 is very obvious. (Liquid along the line) The surface of the 1-3 transfer wheel ^ > The amount of historical distance can appropriately shift the heat generated by the heat source 9 9 f / ', without generating unnecessary pressure drops. In addition, as shown in the figure Level 3 shown in 3 B
200419128 五、發明說明(21) 手指部1 1 8, 1 2 0中角落為曲始、,# 液體之壓力降。 ,彳乂降低沿手指部1 18流動之 對精於此技藝人士甚為明 106之構型僅係供範例目的。 及3B所不之支官層 部服構型,視以下因數包;;m通路"6及手指 置,流自及至介面熱點區之二仁不/=面熱點區之位 入口及出口手指部之交叉之二能7構型包括平行 .主 其如圖4-7A所示沿去瞢居 之見度交互安排’如以下所討論。 曰 手指部11 8之其他構型亦可考慮。 通道1 1 6及 圖4說明本發明熱交換器 & 圖4之支管層雜括複數個 411,412, #使單相或二相心之千订液體導官 生壓力降於熱交換器400及f统3〇巾%n ;丨面層4〇2而不發 示,入口手指部⑴與出4 圖A)·。如圖8所 姑蓺人丄叮▲女甘 也 于才日^ 4 1 2父互安排。但精於此 ^ Ζ 思文里之入口或出口手指部可彼此相鄰 :排主因此不限於圖4之構型。此外,手指部可設計使一 ::!部與另一 t行手指部分支或交鏈。故可有多於出 口手扎σ卩之入口手指部,反之亦然。 入口手指部或通道411供應液體進入熱交換器至介面 g 402,出口手指部或通道412自介面層4〇2移除液體,再 流出熱交換器40 0。所示之支管層4〇6之構型可使液體流入 介面層40 2’及在流至出口通道412之前在介面層4〇2中傳 輸一甚短距離。液體沿介面層4〇2傳輸長度之降低實際上200419128 V. Description of the invention (21) The middle corner of the finger 1 1 8 and 1 2 is the beginning of the song, and # the pressure drop of the liquid. The lowering of the flow along the fingers 1 18 is very clear to those skilled in this art. The configuration of 106 is for example purposes only. And 3B's configuration of the bureaucratic service, depending on the following factors; m channel " 6 and finger placement, flowing from and to the two hot spots of the interface hot spot area / = the hot spot area entrance and exit finger The intersection of the two energy 7 configurations includes parallelism. The main interactive arrangement of the views along the dwellings as shown in Figure 4-7A is as discussed below. Other configurations of the finger portion 118 can also be considered. Channels 1 1 6 and FIG. 4 illustrate the heat exchanger of the present invention. The branch pipe layer of FIG. 4 includes a plurality of 411, 412, # to make the single-phase or two-phase core thousands of liquid guide pressure drop to the heat exchanger 400. And the system 30 %%; the surface layer 402 is not issued, the entrance finger part ⑴ and out 4 Figure A) ·. As shown in Figure 8, Auntie Dingding ▲ Female Gan also Yu Cairi ^ 4 1 2 The father arranged each other. But be good at this ^ Z The entrance or exit fingers in the text can be adjacent to each other: the master is therefore not limited to the configuration of FIG. 4. In addition, the finger part can be designed such that one ::! Part is branched or linked with another t-line finger part. Therefore, there may be more fingers in the entrance than σ 卩 in the exit hand, and vice versa. The inlet finger or channel 411 supplies the liquid into the heat exchanger to the interface g 402, and the outlet finger or channel 412 removes the liquid from the interface layer 402 and flows out of the heat exchanger 400. The branch tube layer 406 shown is configured to allow liquid to flow into the interface layer 40 2 'and to travel a short distance in the interface layer 402 before flowing to the outlet channel 412. The reduction in the transmission length of the liquid along the interface layer 40
第28頁 200419128 五、發明說明(22) 可降低在熱交換器4 0 0及系統30中之降(圖2A)。 如圖4-5所示,另一支管層406包括通道414,其與二 入口通道411相通並提供液體至該處。圖8-9中之支管層 40 6包括三個出口通道412,其與通道41 8相通。支管層406 中之通道4 1 4有一平底表面以傳輸液體至手指部4 1 1,Page 28 200419128 V. Description of the invention (22) It can reduce the drop in the heat exchanger 400 and the system 30 (Figure 2A). As shown in Fig. 4-5, another branch pipe layer 406 includes a channel 414, which communicates with the two inlet channels 411 and provides liquid there. The branch pipe layer 406 in Figs. 8-9 includes three outlet channels 412, which communicate with the channels 418. The channels 4 1 4 in the branch pipe layer 406 have a flat bottom surface to transfer liquid to the fingers 4 1 1,
4 1 2。或者,入口通道4 1 4有一小斜率以協助液體傳輸至選 擇之液體通道4 1 1。或者,入口通道4 1 4包括一或多個孔隙 於其底表面,其可使部分液體向下流至介面層402。同 理,支管層中之通道41 8有一平底表面,其中包含液體並 傳輸液體至埠4 0 8。或者,通道4 1 8有一斜率以協助傳輸液 體至選擇之出口埠4 0 8。此外,通道4 1 4,4 1 8有一寬度約 為2毫米,其他寬度亦可考慮。 通道4 1 4,4 1 8與埠4 0 8,4 0 9相通,該埠♦馬合至系統3 〇 (圖2 A )中之液體線38。支管層40 6包括水平構型液體淳 4 08, 40 9。或者,支管層406包括垂直或對角線構= 體埠408,409,如以下討論者,但未示於圖4 — 7中。 者,支管層40 6不含通道414。因此液直接自埠4〇 = 手指部4U。此外,支管層41丨不包括通道4U, 中液體直接經崞4 1 8流出入交換器4 〇 〇。雖 曰σ 124 1 2. Alternatively, the inlet channel 4 1 4 has a small slope to assist liquid transfer to the selected liquid channel 4 1 1. Alternatively, the inlet channel 4 1 4 includes one or more pores on its bottom surface, which allows a portion of the liquid to flow down to the interface layer 402. Similarly, the channel 4118 in the branch pipe layer has a flat bottom surface, which contains liquid and transfers the liquid to port 408. Alternatively, the channel 4 1 8 has a slope to assist the transfer of liquid to the selected outlet port 4 0 8. In addition, the channels 4 1 4 and 4 1 8 have a width of about 2 mm, and other widths are also considered. Channels 4 1 4 and 4 1 8 communicate with ports 4 0 8 and 4 9 which are connected to the liquid line 38 in the system 3 0 (Fig. 2A). The branch tube layer 40 6 includes a horizontal configuration liquid spring 4 08, 40 9. Alternatively, the branch layer 406 includes vertical or diagonal structures = body ports 408, 409, as discussed below, but not shown in Figures 4-7. Or, the branch pipe layer 406 does not include the channel 414. So the liquid comes directly from port 40 = 4U on the finger. In addition, the branch pipe layer 41 does not include the channel 4U, and the medium liquid directly flows out into the exchanger 400 through the 418. Although σ 12
與通道414, 418相通,其他數目之璋亦可隹;^蜂408顯示 入口通道411之尺寸可使液體傳輸至介面。 沿通道411及系統30 (圖2A)發生壓力降。入曰’而不致 度在及包括〇.25-5.〇〇mm,雖然其他尺寸亦之寬 外,入口通道411有一長度尺寸在及包括 亏愿。此 i栝〇.5職至三倍熱源 200419128 五、發明說明(23) 之長度。或者,其他長度亦可考慮。如上所述,入口通道 4 1 1向下延伸至稍高於微通道4 1 0之高度,俾液体直接傳輸 至微通道410。入口通道411有一高度在及包括0.25 -5. 00mm。對精於此技藝人士而言,雖然入口通道4 1 1具有 相同尺寸,但其他不同尺寸亦屬可行。或者通道411具有 可變寬度,剖面積尺寸及相鄰手指部間之距離。特別是, 通道4 1 1在沿其長度上具有較大寬度或深度之區域,及具 有較窄寬度及深度之區域。此一變化尺寸可使更多液體經 較寬區域傳輸至介面層4 0 2之預定介面熱點區,而限制經 較窄之部分傳輸至溫點區域。 此外,出口通道41 2有一尺寸可使液體傳輸至介面 層,而不致沿出口通道4 1 2及系統3 0 (圖2 A )產生大壓力 降。出口通道4 1 2有一寬度尺寸在及包括0.25-5. 00mm,其 他尺寸亦屬可行。此外,出口通道41 2有一長度尺寸在及 包括0 . 5mm至熱源之三倍長度。此外,出口通道4 1 2向下延 伸至微通道4 1 0之高度,俾液體易於在沿微通道4 1 0水平流 動後於出口通道41 2中向上流動。入口通道41 1具有一高度 在及包括0.25-5. 0 0mm範圍,其他高度尺寸亦可考慮。對 精於此技藝人士甚為明顯,雖然出口通道4 1 2具有相同尺 寸,出口通道4 1 2可具有不同尺寸亦可考慮。此外,出口 通道4 1 2可具有不同寬度,剖面尺寸及/或相鄰手指部間之 不同距離。 入口及出口通道4 1 1,4 1 2為分段及彼此不同如圖4及5 所示,液體在通道中彼此不混合。特別是,如圖8所示,It communicates with the channels 414 and 418, and other numbers can also be used. ^ Bee 408 shows that the size of the inlet channel 411 allows liquid to be transmitted to the interface. A pressure drop occurs along channel 411 and system 30 (FIG. 2A). The entrance channel is not included in the range of 0.25 to 5.0 mm, although the other dimensions are also wide, the entrance channel 411 has a length dimension including the negative wish. This i 栝 0.5 position to triple the heat source 200419128 V. The length of the invention description (23). Alternatively, other lengths may be considered. As described above, the inlet channel 4 1 1 extends downward to a height slightly higher than the micro channel 4 1 0, and the thallium liquid is directly transmitted to the micro channel 410. The entrance channel 411 has a height at and includes 0.25-5. 00mm. For those skilled in the art, although the entrance channels 4 1 1 have the same size, other different sizes are also feasible. Alternatively, the passage 411 has a variable width, a cross-sectional area, and a distance between adjacent fingers. In particular, the channel 4 1 1 has a region with a larger width or depth along its length, and a region with a narrower width and depth. This change in size allows more liquid to be transmitted through the wider area to the predetermined interface hotspot area of the interface layer 402, while restricting transmission to the warm point area through the narrower portion. In addition, the outlet channel 4122 has a size that allows liquid to be transferred to the interface layer without causing a large pressure drop along the outlet channel 4 12 and the system 30 (Fig. 2A). The exit channel 4 1 2 has a width dimension including and including 0.25-5. 00mm, other dimensions are also feasible. In addition, the outlet channel 412 has a length dimension of and including 0.5 mm to three times the length of the heat source. In addition, the outlet channel 4 1 2 extends downward to the height of the micro channel 4 10, and the thallium liquid easily flows upward in the outlet channel 41 2 after flowing horizontally along the micro channel 4 10. The entrance channel 41 1 has a height in the range of 0.25-5. 0 0mm, and other height dimensions can also be considered. It is obvious to those skilled in this art that although the exit channel 4 1 2 has the same size, the exit channel 4 1 2 may have different sizes and may be considered. In addition, the exit channels 4 1 2 may have different widths, cross-sectional dimensions, and / or different distances between adjacent fingers. The inlet and outlet channels 4 1 1, 4 1 2 are segmented and different from each other. As shown in Figures 4 and 5, the liquids in the channel are not mixed with each other. In particular, as shown in Figure 8,
第30頁 200419128 五、發明說明(24) 二出口通道位於支管層4 0 6之外側邊緣,及一出口通道4 1 2 位於支管層40 6之中央。此外,二入口通道411構型為在中 央出口通道之相鄰側。此一特別構型造成進入介面層4 〇 2 之液體在經由出口通道41 2流出介面層4〇 2之前,在介面層 4 0 2中傳輸一短距離。但,對精於此技藝人士甚為明顯, 入口通運及出口通道可以任何其他適當構型配置,因此不 限於本發明所述之構型。入口及出口通道4丨丨,4 1 2之數目 在支官層406中多於三個,但跨支管層4〇 6之每一公分少於 1 0個。精於此技藝人士甚為明顯,入口通道及出口通道之 其他數目亦可使用,而不限於本發明所示及說明之數目。 支官層4 0 6耦合至中間層(未示出),中間層耦合至介 面層4 0 2以構成三層熱交換器4 〇 0。此處討論之中間層係指 圖3B所示實施例中之上。支管層4〇6亦可耦合至介面層 4 0 2 ’及配置在介面層4 〇 2之上以構成二層熱交換器4 〇 〇如 圖7A所不。圖6A-6C說明在二層熱交換器中耦合至介面層Page 30 200419128 V. Description of the invention (24) Two outlet channels are located on the outer edge of the branch pipe layer 4 06, and one outlet channel 4 1 2 is located in the center of the branch pipe layer 40 6. In addition, the two inlet passages 411 are configured on adjacent sides of the central outlet passage. This particular configuration causes the liquid entering the interface layer 4 02 to travel a short distance in the interface layer 4 02 before exiting the interface layer 4 02 through the outlet channel 4122. However, it is obvious to those skilled in this art that the entrance transportation and exit passage can be configured in any other suitable configuration, and therefore are not limited to the configuration described in the present invention. The number of entrance and exit channels 4 丨 丨, 4 1 2 is more than three in the officer layer 406, but each cm across the branch layer 406 is less than 10 pieces. It will be apparent to those skilled in the art that other numbers of entrance channels and exit channels may be used, and are not limited to those shown and described in the present invention. The officer layer 406 is coupled to an intermediate layer (not shown), and the intermediate layer is coupled to the interface layer 402 to form a three-layer heat exchanger 400. The intermediate layer discussed here refers to the upper layer in the embodiment shown in FIG. 3B. The branch pipe layer 406 can also be coupled to the interface layer 402 'and disposed on the interface layer 402 to form a two-layer heat exchanger 400 as shown in Fig. 7A. Figures 6A-6C illustrate coupling to the interface layer in a two-layer heat exchanger
4 0 2之另一支管層4 0 6之剖面圖。圖β a特別說明沿圖5中A - A 線之熱交換線4 0 0之剖面圖。此外,圖6㊆兒明沿線B _ B之熱 交換器4 0 0之剖面圖,圖6 C說明沿圖5之線C - C之熱交換器 4 0 0之剖面圖。如上所述,入口及出口通道4 ^ j,4 1 2自頂 表面延伸至支管層40 6之底表面。當支管層4〇 6及介面層 4 0 2彼此耦合時,入口及出口通道4丨丨,4丨2為稍高於介面 層402中微通道41 0之咼度。此一構型可使自入口通道411 之液體易於自通道4 1 1流過微通道4 1 〇。此外,此一構型時 流過微通道之液體在流過微通道4丨〇後容易向上流過出口Sectional view of another tube layer 4 0 4 of 4 0 2. FIG. Β a particularly illustrates a cross-sectional view of the heat exchange line 400 along line A-A in FIG. 5. In addition, FIG. 6 is a cross-sectional view of the heat exchanger 400 along the line B_B in FIG. 6 and FIG. 6C is a cross-sectional view of the heat exchanger 400 along the line C-C in FIG. As described above, the inlet and outlet channels 4 ^ j, 4 1 2 extend from the top surface to the bottom surface of the branch pipe layer 406. When the branch pipe layer 406 and the interface layer 402 are coupled to each other, the inlet and outlet channels 4 丨 丨, 4 丨 2 are slightly higher than the microchannel 410 in the interface layer 402. This configuration allows the liquid from the inlet channel 411 to easily flow from the channel 4 1 1 through the micro channel 4 1 0. In addition, in this configuration, the liquid flowing through the microchannel easily flows upward through the outlet after flowing through the microchannel 4
200419128 五、發明說明(25) 通道4U。 在另一實施例中,中間層104 (圖3B)配置在支管層4〇6 介面層4 0 2之間,但在圖中未示出·。中間層1 〇4 (圖3B)傳 别液體流通至介面層4 0 2中之指定介面熱點區。此外,中 間爲 1 曰1 〇 4 (圖3 B )可用以提供液體均勻流動進入介面層4 〇 2。 。外,中間層1 0 4可用以提供液體至介面層4 0 2中介面熱點 ’以適當冷卻熱點及造成熱源9 9中之均勻溫度。入口及 、口通道4 1 1,4 1 2之配置接近或在熱源9 9中熱點之上方, 乂適當冷卻熱點,但並非必需。200419128 V. Description of the invention (25) Channel 4U. In another embodiment, the intermediate layer 104 (FIG. 3B) is disposed between the branch tube layer 406 and the interface layer 402, but is not shown in the figure. The intermediate layer 104 (Fig. 3B) transmits the liquid to the designated interface hotspot in the interface layer 402. In addition, an intermediate of 1 to 104 (Fig. 3B) can be used to provide a uniform flow of liquid into the interface layer 402. . In addition, the intermediate layer 104 can be used to provide liquid to the interface hot spots in the interface layer 402 to properly cool the hot spots and cause a uniform temperature in the heat source 99. The configuration of the inlet and outlet channels 4 1 1, 4 1 2 is close to or above the hot spot in the heat source 9 9. 乂 Proper cooling of the hot spot is not necessary.
圖7 A說明本發明具有另一介面層i 〇 2之另一支管層4 0 6 體圖。介面層1 〇 2包括連續安排之微通道壁π 〇如圖3B 戶斤 一FIG. 7A illustrates a block diagram of another branch layer 4 0 6 with another interface layer i 02 according to the present invention. The interface layer 1 〇 2 includes a continuous arrangement of microchannel walls π 〇 as shown in Figure 3B
不°在作業時’與圖3 B所示之較佳支管層1 〇 6相似,液 、、二在液體埠4 0 8進入支管層4 〇 6及傳輸通過通道4丨4及流向 节。于指部或通道4 1 1。液體進入入口手指部4 1 1之開口及 ㉝向X方向中之手指部4 1 1之長度,如箭頭所示。此外,液 =在Z方向向下流動至介面層4〇2,其配置在支管層4〇6之 。如圖7A所示,介面層402中之液體以介面層40 2之X V 古 j- ^ 向橫向沿底表面流動,及與熱源9 9實施熱交換。加 熟之、、六 4'〇夜體以Z方向經出口手指部4 1 2向上流動而排出介面層 4〇^出σ手指部4 1 2將加熱之液體在X方向傳輸至支管層 中之通道4 1 8。該液體於是沿通道4 1 8流動並經埠4 0 9流 $而排出熱交換器。 圖7Α所示之介面層包括一係系列槽溝4 1 6配置在各組 ψν^Γ is ^41 0之間,其可協助傳輸液體自及至通道411,During operation, it is similar to the preferred branch pipe layer 106 as shown in FIG. 3B. Liquid and liquid enter the branch pipe layer 406 at the liquid port 408 and are transmitted through the channels 4 and 4 to the flow section. In the fingers or channels 4 1 1. The liquid enters the opening of the finger portion 4 1 1 and the length of the finger portion 4 1 1 in the X direction as shown by the arrow. In addition, the liquid flows downward in the Z direction to the interface layer 402, which is arranged in the branch pipe layer 406. As shown in FIG. 7A, the liquid in the interface layer 402 flows laterally along the bottom surface in the XV direction of the interface layer 402, and performs heat exchange with the heat source 99. The cooked body, the 4'night body, flows upward in the Z direction through the outlet finger 4 1 2 and discharges the interface layer 40. The σ finger 4 1 2 transmits the heated liquid in the X direction to the branch tube layer. Channel 4 1 8. The liquid then flows along the channel 4 18 and exits the heat exchanger via port 409. The interface layer shown in FIG. 7A includes a series of grooves 4 1 6 arranged between each group ψν ^ Γ is ^ 41 0, which can help transfer liquid from the channel 411,
200419128 五、發明說明(26) 4 1 2。槽溝4 1 6 A特別位於支管層4 〇 6之入口通道4 1 1之直 下,經入口通道4 1 1進入介面層1 〇 2之液體被導向鄰近槽溝 4 1 6 A之微通道。因此,槽溝4 1 6 A可使液體自入口通道4 ! } 直接傳輸至特殊指定之流量路徑如圖5所示。同理,介面 層402包括槽溝416B’其位於在z方向出口通道4 1 2之直 下。因此’沿微通道4 1 0水平傳輸至出口通道之液體被水 平傳輸至槽溝4 1 6B及垂直傳輸至槽溝4 1 6B上方之出口通道 412。 圖6A說明具有支管層40 6及介面層40 2之熱交換器400 之剖面圖。圖6 A特別顯示入口通道4 1 1與出口通道4 1 2交 織’因此入口通道4 1 1之液體向下流動及出口通道41 2之液 體向上流動。此外’如圖6 A所示,液體水平流過微通道 410,其配置在入口通道與出口通道之間,並由槽溝 4 1 6 A,4 1 6 B分隔。或者,微通道壁為連續的(圖3 B )及未有 微通道4 1 0分隔,如圖6 A所示,入口及出口通道4 1 1,4 1 2 在其末端及接近槽溝4 1 6之位置有一曲線表面4 2 0。曲線表 面4 2 0導引液體向下流動至通道4 1 1而流向微通道4 1 0,其 位於通道4 1 1之附近。因此,進入介面層1 〇 2之液體容易被 導向微通道4 1 〇,而非直接流向槽溝4 1 6 A。同理,出口通 道4 1 2中之曲線表面4 2 0協助液體自微通道4 1 〇流向出口通 道 412〇 在另一實施例中如圖7B所示,介面層4 0 2,包括入口通 道411,及出口通道412’,如與支管層40 6所討論者(圖8-9 )。在另一實施例中’液體自埠4 0 8 ’直接供應至介面層 200419128 五、發明說明(27) 4 0 2 ’。液體沿通道4 1 4 ’傳輸向入口通道4 1 1 ’。液體於是橫 向沿該組微通道4 1 0 ’傳輸及與熱源(未示出)實施熱交換, 及流向出口通道4 1 2 ’。液體於是沿出口通道4 1 2 ’流至通道 4 1 8 ’,液體在該處經璋4 0 9 ’流出介面層4 0 2 ’。該琿4 0 8 ’, 4 0 9’構型在介面層4 0 2’中,亦可構型在支管層4 0 6中(圖 7A) ° 對精於此技藝人士甚為明顯,雖然本發明中之所有熱 交換器顯示水平操作,熱交換器亦可在垂直位置操作。當 以垂直位置操作時,熱交換器可構型為使每一入口通道位 於相鄰出口通道之上方。因此,液體經由入口通道進入介 面層,並自然傳輸至出口通道。甚為明顯,支管層及介面 層之任何其他構型可以使用,以使熱交換器於垂直位置操 作。 圖8-C說明本發明之熱交換器之另一實施例之頂視 圖。圖8特別說明本發明另一支管層2 0 6之頂視圖。圖B及C 說明中間層2 0 4及介面層2 0 2之頂視圖。此外,圖9說明利 用另一支管層2 0 6之三層熱交換器,其中圖9說明利用另一 支管層2 0 6之二層熱交換器。 如圖8及9所示,支管層2 0 6包括複數個液體埠2 0 8成水 平及垂直構型。或者,液體埠2 0 8位於與支管層.2 0 6成對角 線或任何方向。液體埠2 0 8倍至於支管層2 0 6之選擇位置, 以有效傳輸液體至熱交換器2 0 0中之預定之介面熱點區。 多個液體埠2 0 8提供一足夠之優點,因為液體可被自一液 體埠直接傳輸至特殊介面熱點區,不致大幅增加壓力降至200419128 V. Description of the invention (26) 4 1 2 The groove 4 1 6A is located directly below the inlet channel 4 1 1 of the branch pipe layer 4 06, and the liquid entering the interface layer 1 0 2 through the inlet channel 4 1 1 is guided to the micro channel adjacent to the groove 4 16 A. Therefore, the groove 4 1 6 A can directly transfer liquid from the inlet channel 4!} To a specially designated flow path as shown in FIG. 5. Similarly, the interface layer 402 includes a groove 416B 'located directly below the outlet channel 4 1 2 in the z-direction. Therefore, the liquid transported horizontally to the outlet channel along the microchannel 4 10 is horizontally transferred to the groove 4 1 6B and vertically to the outlet channel 412 above the groove 4 16B. FIG. 6A illustrates a cross-sectional view of a heat exchanger 400 having a branch tube layer 40 6 and an interface layer 40 2. Fig. 6A particularly shows that the inlet channel 4 1 1 intersects with the outlet channel 4 1 2 and therefore the liquid in the inlet channel 4 1 1 flows downward and the liquid in the outlet channel 41 2 flows upward. In addition, as shown in FIG. 6A, the liquid flows horizontally through the microchannel 410, which is arranged between the inlet channel and the outlet channel, and is separated by grooves 4 1 6 A and 4 1 6 B. Alternatively, the microchannel wall is continuous (Fig. 3B) and is not separated by microchannels 4 1 0. As shown in Fig. 6A, the inlet and outlet channels 4 1 1, 4 1 2 are at their ends and close to the groove 4 1 Position 6 has a curved surface 4 2 0. The curved surface 4 2 0 directs the liquid down to channel 4 1 1 and to microchannel 4 1 0, which is located near channel 4 1 1. Therefore, the liquid entering the interface layer 102 is easily guided to the microchannel 4 10 instead of directly flowing to the groove 4 16 A. Similarly, the curved surface 4 2 0 in the outlet channel 4 1 2 assists the flow of liquid from the micro channel 4 1 0 to the outlet channel 412. In another embodiment, as shown in FIG. 7B, the interface layer 4 0 2 includes the inlet channel 411 , And the exit channel 412 ', as discussed with the branch layer 406 (Figure 8-9). In another embodiment, 'liquid is directly supplied from the port 4 0 8' to the interface layer 200419128 V. Description of the invention (27) 4 0 2 '. The liquid is transported along the channel 4 1 4 'to the inlet channel 4 1 1'. The liquid then travels laterally along the set of microchannels 4 1 0 ′ and performs heat exchange with a heat source (not shown), and flows to the outlet channel 4 1 2 ′. The liquid then flows along the outlet channel 4 1 2 'to the channel 4 1 8', where the liquid flows out of the interface layer 4 0 2 'via 璋 4 9'. The 珲 4 8 ', 409' configuration is in the interface layer 402 ', and it can also be configured in the branch layer 406 (Figure 7A) ° It is obvious to those skilled in this art, although this All heat exchangers in the invention show horizontal operation, and the heat exchangers can also be operated in a vertical position. When operating in a vertical position, the heat exchanger can be configured such that each inlet channel is positioned above an adjacent outlet channel. Therefore, liquid enters the interface layer through the inlet channel and is naturally transferred to the outlet channel. It is clear that any other configuration of the branch and interface layers can be used to operate the heat exchanger in a vertical position. Figure 8-C illustrates a top view of another embodiment of the heat exchanger of the present invention. Fig. 8 particularly illustrates a top view of another pipe layer 206 of the present invention. Figures B and C illustrate top views of the intermediate layer 204 and the interface layer 202. In addition, Fig. 9 illustrates a three-layer heat exchanger using another tube layer 206, and Fig. 9 illustrates a two-layer heat exchanger using another tube layer 206. As shown in Figs. 8 and 9, the branch pipe layer 206 includes a plurality of liquid ports 208 in a horizontal and vertical configuration. Alternatively, the liquid port 208 is located diagonally or in any direction with the branch layer .206. The liquid port 208 is as much as the selected position of the branch pipe layer 206 to efficiently transfer liquid to the predetermined interface hot spot in the heat exchanger 2000. The multiple liquid ports 208 provide a sufficient advantage, because liquid can be directly transferred from a liquid port to a special interface hotspot, without increasing the pressure significantly.
第34頁 200419128 五、發明說明(28) 熱交換器2 0 0。 此外,液體埠2 0 8亦配置在支管層2 0 6内以使介面熱點 區之液體傳輸一最短之距離至出口埠2 0 8,俾液體達到溫 度均勻性,並可維持入口及出口埠2 0 8間之最小壓力降。 此外,利用支管層2 0 6可協助穩定熱交換器2 0 0中之二相液 體流,及跨介面層2 0 2分布之均勻液體流。應注意,多於 一個之支管層20 6可包括於熱交換器200中,因此,一支管 層2 0 6可路由液體流入及流出熱交換器2 0 0,另一支管層 (未示出)控制至熱交換器2 0 0之液體流通速度。或者,所 有複數個支管層2 0 6流通液體至介面層2 0 2中之選擇對應之 熱點區。 另一支管層20 6有一橫向尺寸密切配合介面層20 2之尺 寸,支管層2 0 6與熱源9 9有相同尺寸。或者,支管層2 0 6較 熱源99為大。支管層2 0 6之垂直尺寸為0. 1-1 Omm之範圍。 此外,接受液體璋2 0 8之支管層2 0 6中之孔隙之尺寸為1 m m 及熱源9 9之全寬度或長度。 圖1 1說明本發明具有另一支管層2 0 6之三層熱交換器 之透視圖。圖1 1所示,熱交換器2 0 0被分為獨立區,視沿 熱源9 9之本體產生之熱量而定。各區由垂直中間層2 0 4所 分隔及/或介面層2 0 2中微通道壁2 1 0所分隔。對精於此技 藝人士甚為明顯,圖1 1中之總成不限所示之構型,而僅供 舉例目的。熱交換器2 0 0耦合至一或多個幫浦,一幫浦耦 合至入口 208A,另一幫浦耦合至入口 208B。 如圖3所示,熱源9 9在位置A有一熱點,位置B有一溫Page 34 200419128 V. Description of the invention (28) Heat exchanger 2 0 0. In addition, the liquid port 208 is also arranged in the branch pipe layer 206 so that the liquid in the hot area of the interface transmits a shortest distance to the outlet port 208. The liquid reaches temperature uniformity and can maintain the inlet and outlet port 2 Minimum pressure drop between 0 and 8. In addition, the use of the branch pipe layer 206 can help stabilize the two-phase liquid flow in the heat exchanger 200 and the uniform liquid flow distributed across the interface layer 202. It should be noted that more than one branch tube layer 20 6 may be included in the heat exchanger 200, and therefore, one tube layer 2 06 may route liquid to and from the heat exchanger 200, and the other tube layer (not shown) Control the liquid flow rate to the heat exchanger 2000. Alternatively, all the plurality of branch pipe layers 206 circulate liquid to the hot spot corresponding to the selection in the interface layer 202. The other branch pipe layer 20 6 has a lateral dimension closely matching the size of the interface layer 20 2. The branch pipe layer 2 06 and the heat source 9 9 have the same size. Alternatively, the branch pipe layer 206 is larger than the heat source 99. The vertical dimension of the branch pipe layer 2 0 6 is in the range of 0.1 to 1 Omm. In addition, the size of the pores in the branch pipe layer 206 receiving the liquid 璋 2 0 8 is 1 mm and the full width or length of the heat source 9 9. Figure 11 illustrates a perspective view of a three-layer heat exchanger according to the present invention having another tube layer 206. As shown in Fig. 11, the heat exchanger 2000 is divided into independent zones, depending on the heat generated along the body of the heat source 99. Each zone is separated by a vertical middle layer 204 and / or a microchannel wall 2 10 in the interface layer 202. It is obvious to those skilled in this art that the assembly shown in Figure 11 is not limited to the configuration shown, and is for example purposes only. The heat exchanger 200 is coupled to one or more pumps, one pump is coupled to inlet 208A, and the other pump is coupled to inlet 208B. As shown in FIG. 3, the heat source 9 9 has a hot spot at location A and a temperature at location B.
第35頁 200419128 五、發明說明(29) 點,位置A中之熱點較位置B中之溫點產生更多熱。甚為明 顯,熱源9 9在任何位置及一固定時間可有一個以上之熱點 及溫點。在此例中,因位置A為一熱點,位置A較多之熱轉 移至位置A上方之介面層2 0 2 (圖1 1中指定為介面熱點區 A ),更多液體及/或較高流速之液體被提供至熱交換器2 0 0 中之介面熱點區A以適當冷卻位置A。甚為明顯,雖然介面 熱點區B顯示較介面熱點區A為大,介面熱點區A及B及熱交 換器2 0 0中之其他介面熱點區可為任何尺寸及/或彼此相關 之構型。 或者,如圖1 1所示,液體經液體埠2 0 8 A進入,沿中間 層2 0 4流動而被導至介面熱點區A再流至進入流體導管 2 0 5 A。該液體於是在導管2 0 5 A以Z方向向下流入介面層2 0 2 中之介面熱點區A。液體在微通道2 1 0 A間流動,因此自位 置A之熱量經介面層2 0 2之傳導轉移至液體。加熱之液體沿 介面熱點區A中之介面層2 0 2流動向出口琿2 0 9 A,液體在該 處流出熱交換器2 0 0。對精於此技藝人士甚為明顯,任何 數目入口埠2 0 8及出口埠2 0 9可供一特別介面熱點區或一組 介面熱點區用。此外,雖然出口埠2 0 9 A顯示接近介面層 2 0 2 A,出口埠2 0 9 A亦可位於任何其他垂直位置,包括但不 限於至支管層209B。 同理,圖1 1所示之例中,熱源9 9在位置B有一溫點, 其產生較熱源99之位置A為熱量。經埠2 0 8B進入之液體由 沿中間層2 0 4B之流動而被導至介面熱點區B及流至進入流 體導管2 0 5B。該液體於是在進入流體導管2 0 5B以Z方向向Page 35 200419128 V. Description of the invention (29) point, the hot spot in position A generates more heat than the temperature point in position B. It is very obvious that the heat source 9 9 can have more than one hot spot and temperature point at any location and for a fixed time. In this example, because location A is a hot spot, more heat from location A is transferred to the interface layer 2 2 above location A (designated as interface hot spot area A in Figure 11), with more liquid and / or higher The liquid at a flow rate is supplied to the interface hot spot A in the heat exchanger 200 to appropriately cool the position A. It is obvious that although the interface hotspot area B is larger than the interface hotspot area A, the interface hotspot areas A and B and other interface hotspot areas in the heat exchanger 2000 may be of any size and / or related configuration. Alternatively, as shown in FIG. 11, the liquid enters through the liquid port 208 A, flows along the middle layer 204, and is guided to the interface hot spot area A and then to the fluid conduit 205 A. The liquid then flows downward in the Z direction in the conduit 2 05 A into the interface hotspot area A in the interface layer 2 02. The liquid flows between the microchannels 2 0 A, so the heat from the position A is transferred to the liquid through the conduction of the interface layer 2 2. The heated liquid flows along the interface layer 2 2 in the interface hotspot area A toward the outlet 珲 2 9 A, where the liquid flows out of the heat exchanger 2 0 0. It is obvious to those skilled in this art that any number of entrance ports 208 and exit ports 209 can be used for a special interface hotspot or a group of interface hotspots. In addition, although exit port 209 A shows close to the interface layer 202 A, exit port 209 A can also be located in any other vertical position, including but not limited to the branch pipe layer 209B. Similarly, in the example shown in FIG. 11, the heat source 99 has a temperature point at the position B, and the position A that generates the heat source 99 is heat. The liquid entering through the port 208B is guided to the interface hotspot B by the flow along the intermediate layer 203B and flows into the fluid conduit 205B. The liquid then enters the fluid conduit 2 5B in the Z direction
第36頁 200419128 五 、發明說明(30) 下 中 熱 介 向 流至介面層2 0 2中之介面熱點區B。該液體在微通道2〇1 =^及Y方向流動於其間,因此,熱源於位置B中產生之 ^ ί輸進入液體中。加熱之液體沿介面熱點區B中之全 =層2 0 2B流動並向經中間層2〇2中之流出導管2〇5似z方 σ ^級至出口埠2 〇 9 B,該處,液體排出熱交換器2 〇 〇 〇 a或者,如圖9A所示,熱交換器2〇〇可包括一可滲透蒸 配彳在介面層2〇2之上方。可滲透蒸氣隔膜214 個側壁為密封接觸。隔膜之構型具有數 ^ f介面層2 0 2產生之蒸氣可通過並至埠2 0 9。 構型為防水以防液體流體沿介面層202通過隔 專Γ Γ- Λ ° Γ渗透蒸氣隔膜114之細節討論於共同美國 =以=66,128?° 0 2,3,22提出,標題為||蒸氣 通道熱父換器”,該專利申請以參考方式併入此 明本=說明/發明較佳熱交換器300之立體圖。圖12B ; = 換器30°’之立體圖如圖12級示, :包括介面層,,3〇2,及支管層_, 源(未示出Μ = 〇上所述熱父換器3 0 0,3 0 0,耦合至熱 中)對精^此枯/、全面統合於熱源内(嵌入微處理器 =合的’圖12A所示之曝露者僅為舉;二際 外佳包括複數個枉體3 0 3沿底表面301配置。此 徑向分布之翼片3〇3E。介面層3〇2可有任何特性者如及上^Page 36 200419128 V. Description of the invention (30) The medium thermal direction flows to the interface hotspot B in the interface layer 202. The liquid flows between the micro-channels 001 = ^ and the Y direction. Therefore, heat is transferred from the ^ generated in the position B into the liquid. The heated liquid flows along the whole = layer 2 2B in the hotspot area B of the interface and flows out of the duct 2 0 2 in the middle layer 2 0 like the square σ ^ level to the outlet port 2 0 9 B, where the liquid Exhaust the heat exchanger 2000a. Alternatively, as shown in FIG. 9A, the heat exchanger 2000 may include a permeable steam composition over the interface layer 200. Vapor-permeable membranes have 214 side walls in sealed contact. The configuration of the diaphragm has a number of ^ f interface layer 2 0 2 vapor can pass through and reach port 2 0 9. The configuration is waterproof to prevent liquid fluid from permeating the vapor barrier 114 along the interface layer 202 through the spacer Γ Γ- Λ ° Γ. The details are discussed in Common United States = 66 = 128? ° 0 2,3,22, titled | "Steam channel heat parent converter", this patent application is incorporated by reference here = Description / invention perspective view of preferred heat exchanger 300. Figure 12B; = perspective view of converter 30 ° 'is shown in Figure 12, : Including the interface layer, 302, and the branch layer _, the source (not shown M = 〇 heat parent converter 3 0 0, 3 0 0, coupled to the heat) Integrated in the heat source (embedded microprocessor = combined) The exposed person shown in FIG. 12A is only an example; the second and third best include a plurality of carcasses 3 0 3 arranged along the bottom surface 301. The radially distributed wings 3 〇3E. The interface layer 302 can have any characteristics as above ^
200419128 五、發明說明(31) 論者(即微通道,粗糙表面)。介面層3 〇 2及層3 0 2中之特性 較佳具有相同之熱傳導率特性,如上所討論者並將再度以 較佳實施例討論。雖然介面層3 〇 2顯示較支管層3 〇 6為小, 對精於此技藝人士甚為明顯,介面層3 〇 2及支管層3 〇 6彼此 及與熱源9 9可為任何尺寸。介面層3〇2,30 2,之其他裝置 具有相同特性,如介面層所述,不再詳細說明。 、 通常,較佳熱交換器3 0 0可利用支管層3 0 6中之傳輸通 道322使熱交換器中之壓力降為最小。傳輸通道3 2 2為垂直 配f在支管層3 0 6中,及垂直供應液體至介面層3〇2以降低 熱父換Is 3 0 0中之壓力降。如上所述,壓力降被建立或增 加於熱交換器3 0 0中係由於液體沿介面層以級γ方向流動 一相當時間及/或一距離之故。該支管層3〇6以垂直強迫液 ,=,個傳輸通道3 2 2進入介面層3〇2以使在級γ方向之液 ,二取小。換言之,數個液體噴嘴自上方直接加在介面層 傳輸通迢3 2 2彼此間配置一最佳距離以使液體在X =方向流動最小及垂直向上流出介面層3〇2。目此,來自 =^,置之通道3 2 2之個別液體路徑力量自然促使液體在 2上液體路徑中流出介面層3 0 2。此外,個別通道32 2可使 ^丨面f 3 0 2中之數個通道3 2 2之液體流之分布最大,因此降 低$交換器中之壓力降並能有效冷卻熱源9 9。此外,較佳 熱交換器3 0 0之構型可使熱交換器較其他熱交換器之尺寸土 ,小,因為液體不需在X及Y方向傳輸一大距離、/因而可適 ®冷卻熱源9 9。 圖12A中所示之較佳支管層3〇6包括二個別位準。支管 200419128 五、發明說明(32) 層3 0 6特別包括位準3 (] a、、仕 、 3 0 2及位準3 1 2。雖銬gj丨2 3 1 2。位準3 0 8耦合至介面層 上,精於此技藝人兄^料312配置在位準3〇8之 上。對精於此技藝人準3 08可配置在位準川之 可以實施。 亦甚為明顯,任何數目根據本發明 圖1 2 B所示之另一古总庶0 Λ 312,。流通位準3 04,耗人3〇4’’ 一位準30 8,及一位準 308,耦合至流通位準3〇:,及二:,30 2 ?立準308,。位準 312,配置在位準”準312 ^然,12Β明位準 3 08,可配置在位準312,之上^此技藝人士可考慮位準 栌Μ太f日日Γ 對精於此技藝人士甚為明 顯,根據本發明任何數目之位準均可實施。 示本發明流通位準3〇4’之透視圖。流通位準 -=.甬付里^面304Α及底表面3 04Β,。如圖12Β及12C所 不,流通位準3 0 4 ’向;7丨tri , 匕栝數個孔隙322,延伸貫穿。在一實施 例中’:f 322’之開口底表面難,齊平。或者,孔隙 322’延t超過底表面3 04B,以供應液體接近介面層3〇2,。 此外,流通位準304,包括數孔隙324,自頂表面3〇4A,延伸 至底表面3 04B及在z方向一預定距離垂直突出如一圓筒 形突出物。對精於此技藝人士甚為明顯,孔隙3 2 2,, 3 24’亦可-角度延伸通過流通位準,,亦不必為完全垂直。 如上所述,,在一實施例中,介面層3〇2,(圖i2B)耦合至流 通位準304之底表面3〇4B’。因此,液體僅在z方向流過孔 隙322’而進入介面層3〇2’,而以z方向流過孔隙3£4,而排200419128 V. Description of the invention (31) Discussant (ie microchannel, rough surface). The characteristics in the interface layer 3 02 and the layer 3 02 preferably have the same thermal conductivity characteristics, as discussed above, and will be discussed again in a preferred embodiment. Although the interface layer 302 is smaller than the branch tube layer 306, it is obvious to those skilled in the art that the interface layer 302 and the branch tube layer 306 and each other and the heat source 99 can be of any size. The other devices of the interface layer 302, 302, and 2 have the same characteristics, as described in the interface layer, and will not be described in detail. Generally, the preferred heat exchanger 300 can use the transmission channel 322 in the branch pipe layer 306 to minimize the pressure drop in the heat exchanger. The transmission channel 3 2 2 is vertically arranged in the branch pipe layer 3 06 and the liquid is vertically supplied to the interface layer 30 2 to reduce the pressure drop in the thermal parent exchange Is 300. As described above, the pressure drop is established or increased in the heat exchanger 300 because the liquid flows along the interface layer in the direction of the stage γ for a considerable time and / or a distance. The branch pipe layer 306 forces the liquid vertically, =, and each of the transmission channels 3 2 2 enters the interface layer 30 to make the liquid in the level γ direction smaller. In other words, several liquid nozzles are directly added to the interface layer from above, and the transmission channels 3 2 2 are arranged at an optimal distance from each other to minimize the liquid flow in the X = direction and flow out of the interface layer 3 02 vertically. For this reason, the force of the individual liquid path from the channel 3 2 2 = ^, naturally forces the liquid to flow out of the interface layer 3 2 in the liquid path on 2. In addition, the individual channels 32 2 can maximize the distribution of the liquid flow in several channels 3 2 2 in the plane f 3 0 2, thus reducing the pressure drop in the exchanger and effectively cooling the heat source 9 9. In addition, the better configuration of the heat exchanger 300 can make the heat exchanger smaller than other heat exchangers, because the liquid does not need to transmit a large distance in the X and Y directions, and thus can be used as a cooling heat source. 9 9. The preferred branch pipe layer 306 shown in FIG. 12A includes two levels. Branch pipe 200419128 V. Description of the invention (32) Layer 3 0 6 especially includes level 3 (] a, ,, 3 0 2 and level 3 1 2. Although the shackle gj 丨 2 3 1 2. Level 3 0 8 coupling On the interface layer, the artist 312 who is proficient in this technology can be configured on the level 308. The artist who is proficient in this technology can be configured on the level of quanchuan. It is also obvious that any number According to the present invention, another ancient total 庶 0 Λ 312, shown in FIG. 12B. The circulation level 3 04, consumes 304 '' one bit 308, and one bit 308, coupled to the circulation level 3〇 :, and 2: 30, standing up to 308, level 312, configured at level "standard 312", 12B Ming level 3 08, can be configured at level 312, above ^ this artist It can be considered that the level of MM is too obvious to those skilled in this art, and any number of levels can be implemented according to the present invention. A perspective view showing the circulation level of the present invention is 304 '. The circulation level -=. 甬 付 里 ^ 304304A and bottom surface 04B. As shown in Figures 12B and 12C, the circulation level is 3 0 4 'direction; 7 丨 tri, several holes 322 extending through the dagger. One implementation Open bottom of ': f 322' in the example The surface is difficult and flush. Or, the pores 322 'extend beyond the bottom surface 304B to supply liquid close to the interface layer 302. In addition, the circulation level 304, including a number of pores 324, extends from the top surface 304A, extending To the bottom surface 3 04B and a predetermined distance vertically protruding like a cylindrical protrusion in the z direction. It is very obvious to those skilled in this art, the holes 3 2 2 ,, 3 24 'can also extend through the circulation level at an angle, Also, it need not be completely vertical. As described above, in one embodiment, the interface layer 302, (FIG. I2B) is coupled to the bottom surface 3004 'of the circulation level 304. Therefore, the liquid flows only in the z direction Passes through the aperture 322 'and enters the interface layer 302', and flows through the aperture 3 £ 4 in the z direction, and the row
200419128 五、發明說明(33) _ 出介面層302’。如下所討論,經孔隙322 3 0 2’之液體與經由孔隙324,排出介面;$入介面層 3 0 4,所分隔。 9 ,夜體由流通位碑 如圖12C所示,孔隙324,之一部分較 方向自流通位準3 04,之頂表面3〇4A,延伸^為圓筒構件在 3 24’之液體直接流至位準312,中之狹長丰流過孔隙 1 2 G )。圓筒突出物較佳為圓形如圖^ 2匸所八3 2 6 (圖1 2 F及 亦可。沿介面層3 0 2,,液體自每一孔隙3^,,、但其他形狀 方向流至相鄰孔隙3 24,。孔隙3 22,及3 24 ^橫向及垂直 絕緣,俾經支管層3 0 6,存在於介面層3〇2,^,為彼此成熱 不傳輸至經支管層306,流向介面層302,之冷/熱液體之熱 圖1 2 D說明本發明位準3 0 8之較佳實施彳丨P之’夜體。 示,位準3 0 8包括頂表面30 8 A及底表面3〇 8B如圖12D所 3〇2^〇3B;2™ 308包括一凹狹長通道320,其包括數個液體傳輸通道M2 以傳輸液體至介面層3 0 2。該凹狹長通道32〇與介面層3〇2 成密封接觸’其中存在於介面層30 2之液體圍繞及在狹長 通道3 2 0中之通道3 2 2之間流動並經埠3 1 4排出。應注音, 存在於介面層3〇2中之液體不進入傳輸通道322。 “ 圖12E說明本發明位準3 0 8’另一實施例下側之透視 。位準308,包栝一頂表面308A’及底表面3〇8B,,位準 3 0 8B’之底表面直接耦合至流通位準3 0 4,(圖12c)。位準 3〇8’較佳包括〆埠314’,一狹長通道32〇,及複數個孔隙 322 ,324,於底表面308B中。對精於此技藝人士甚為明 200419128 五、發明說明(34) 顯,位準3 0 8可包括許多數目之埠及狹長通道。圖i 2 E中 之孔隙3 2 2 ’ 3 2 4 ’之構型為面對流通位準3 〇 4,。特別是, 如圖1 2 E所述’孔隙3 2 2,導引進入狹長通道3 2 4,之液體流 至位準312 ]孔隙324’完全延伸通過位準308,中之狹長通 道3 2 0 °孔隙3 2 4為個別及分隔,俾流經孔隙3 2 4,之液體 不與流經相關孔隙3 2 4 ’之圓筒形之液體混合及接觸。孔隙 3 2 4 |為個別化以保證進入每一孔隙3 2 4,之液體沿孔隙 324’提供之液體路徑流過。孔隙3 24,較佳為垂直構型。因 此’液體被垂直傳輸通過支管層3 〇 6,之主要部分。同理此200419128 V. Description of the invention (33) _ Out interface layer 302 '. As discussed below, the liquid exiting the interface through the aperture 322 3 0 2 ′ and the aperture 324 are separated by the interface layer 3 0 4. 9, the night body is shown in Figure 12C by the circulation monument, a part of the aperture 324, from the top of the circulation level 3 04, the direction of the surface is 304A, extending ^ is the cylindrical member at 3 24 'the liquid flows directly to Level 312, where the narrow and long abundance flows through the pores 12 G). The cylindrical protrusions are preferably circular as shown in Figure ^ 2 匸 所 8 3 2 6 (Figure 1 2 F and also. Along the interface layer 3 0 2, the liquid flows from each pore 3 ^, but in other shapes. Flow to adjacent pores 3 24 ,. Pores 3 22, and 3 24 ^ Horizontal and vertical insulation, passing through the branch layer 3 0 6, exist in the interface layer 3 02, ^, and do not transfer heat to each other through the branch layer 306, the heat of the cold / hot liquid flowing to the interface layer 302, FIG. 12D illustrates a preferred implementation of the present invention at level 308. It is shown that the level 308 includes the top surface 30 8 A and the bottom surface 308B are shown in FIG. 12D as 302 ^ 〇3B; 2 ™ 308 includes a concave narrow channel 320, which includes a plurality of liquid transfer channels M2 to transfer liquid to the interface layer 302. The concave narrow channel 32〇 is in sealing contact with the interface layer 302 'where the liquid existing in the interface layer 30 2 surrounds and flows between the channels 3 2 2 in the narrow channel 3 2 0 and is discharged through the port 3 1 4. It should be noted that there is The liquid in the interface layer 302 does not enter the transmission channel 322. "FIG. 12E illustrates the perspective of the lower side of another embodiment of the level 308 'of the present invention. The level 308 includes a top surface 308A' and a bottom surface. 3〇 8B, the bottom surface of level 308B 'is directly coupled to the circulation level 304 (Fig. 12c). Level 308' preferably includes port 314 ', a narrow channel 32 °, and a plurality of The apertures 322, 324 are in the bottom surface 308B. It is very clear to those skilled in this art. 200419128 V. Description of the invention (34) It is obvious that the level 308 can include a large number of ports and narrow channels. Figure i 2 E The configuration of the pore 3 2 2 '3 2 4' is to face the circulation level 3 04. In particular, the pore 3 2 2 is guided into the narrow channel 3 2 4 as described in FIG. 1 2E. Liquid flows to level 312] Pore 324 'fully extends through level 308, the narrow channel 3 2 0 ° Pore 3 2 4 is individual and separated, and the liquid flowing through pore 3 2 4 does not flow through the relevant pores 3 2 4 'cylindrical liquid mixing and contact. Pore 3 2 4 | is individualized to ensure that each pore 3 2 4 flows, the liquid flows along the liquid path provided by the pore 324'. Pore 3 24, compared with It is preferably in a vertical configuration. Therefore, 'the liquid is transported vertically through the branch layer 3 06, the main part. Similarly,
驗頓A用於孔隙3 2 2,,特別是在位準配置在介面層與位準 之間之情況為然。Test A is used for pores 3 2 2, especially if the level is arranged between the interface layer and the level.
一雖然孔隙或洞3 2 2顯示具有相同尺寸,孔隙3 2 2可具有 不同或/〇 長度之變化直徑。例如,接近埠3 1 4之洞3 2 2可 具有較小直徑以限制液體流通。較小洞3 2 2因此可迫使液 體自孔隙3 2 2向下流,該孔隙距埠3 1 4更遠。洞3 2 2直徑之 又化可使液體之更均勻分布進入介面層3 〇 2。對精於此技 *人士甚為明顯’洞3 2 2之直徑可以變化以解決介面層302 中已知”面熱點區冷卻。對精於此技藝人士甚為明顯,上 述討論亦可應用於孔隙3 24,,孔隙324,之尺寸變化或不同 以適應自介面層3 0 2之均勻向外流量。 在一較佳實施例中,埠3 1 4提供液體至位準3 0 8及至介 面層3〇2。圖l2D中之埠314較佳自頂表面3 0 8A延伸通過位 準3 0 8之本體之一部分再至狹長通道3 2 0。或者,埠3丨4自 位準3 0 8之底。卩或側邊延伸至狹長通道3 2 〇。較佳為埠3 〇 $-Although the pores or holes 3 2 2 appear to have the same size, the pores 3 2 2 may have varying diameters of / or 0 length. For example, the hole 3 2 2 near the port 3 1 4 may have a smaller diameter to restrict liquid flow. The smaller holes 3 2 2 can therefore force the liquid to flow downward from the pore 3 2 2, which is further away from the port 3 1 4. The diameter of the holes 3 2 2 can be more uniformly distributed into the interface layer 3 2. It is obvious to those skilled in this technique that the diameter of the hole 3 2 2 can be changed to solve the cooling of the known “surface hotspot” in the interface layer 302. It is obvious to those skilled in this technique that the above discussion can also be applied to pore The dimensions of the 3, 24, and the pores 324 are varied or different to accommodate the uniform outward flow from the interface layer 3 0. In a preferred embodiment, the port 3 1 4 provides liquid to the level 3 0 8 and to the interface layer 3 〇 2. Port 314 in FIG. 12D preferably extends from the top surface 3 0 8A through a portion of the body at level 308 to the narrow channel 3 2 0. Alternatively, port 3 丨 4 is at the bottom of level 308卩 or the side extends to the narrow channel 3 2 0. Preferably, the port 3 0
第41頁 200419128 五、發明說明(35) 耦合至位準31 2中之埠315 (圖12A-12B)。埠31 4引導至狹長 通道3 2 0,其為閉合如圖1 2 C所示,或凹隙如圖1 2 D所示。 狹長通道3 2 0較佳可傳輸液體自介面層3 0 2至埠3 1 4。狹長 通道3 2 0亦可傳輸液體自埠3 1 4至介面層3 0 2。 如圖1 2 F及1 2 G所示’位準312中之埠31 5較佳與埠3 1 4 對齊並相通。如圖1 2 A所示,液體較佳經埠3 1 6進入熱交換 器3 0 0,及通過狹長通道3 2 8由傳輸通道3 2 2向下流動,逐、 漸流至介面層3 0 2。如圖1 2 B所示,液體可進入熱交換器 3 0 0 ’,較佳經埠3 1 5 ’進入及流過位準3 〇 8,中之埠3 1 4,,及 逐漸流至介面層3 0 2,。圖12F中之埠315較佳自頂表面31 延伸通過位準3 1 2之本體。或者,埠3丨5自位準3丨2之一側 邊延=。或者,位準3 1 2不包括埠3 1 5,液體經由埠3 1 4進 入熱父換器3 0 0 (圖1 2 D及1 2 E )。此外,位準3 1 2包括埠 3 1 6 ’、其較佳傳輸液體至狹長通道3 2 8,。對精於此技藝人 士甚為明顯,位準可包括任何數目之埠及狹長通道。狹 通道3 28較佳傳輸液體至傳輸通道3 2 2及逐漸流至介面層、 jl/G說明本發明位準312,另一實施例之透視圖。位 準3 1 2車父佳麵合至1 9 p由 住 進w七紅 中位準3 0 8,。如圖12F所示,位 。"~凹狹長通道區328,於本體内’其沿底表面 #路凹狹長通道328’與埠316’相通,因此液體可 通道328’傳輸至槔316,。凹狹長通道如,位 =,ίΓί表面3m’之上方’以使液體自孔隙 由向上傳輸至狹長通道328,。凹狹長通道32〇,及底Page 41 200419128 V. Description of the invention (35) Coupling to port 315 in level 31 2 (Figures 12A-12B). Port 31 4 leads to the narrow channel 3 2 0, which is closed as shown in Figure 1 2 C, or the recess is shown in Figure 12 D. The narrow channel 3 2 0 is preferably capable of transmitting liquid from the interface layer 3 2 to the port 3 1 4. The narrow channel 3 2 0 can also transfer liquid from port 3 1 4 to the interface layer 3 2. As shown in Figures 1 2 F and 1 2 G, port 31 5 in the 'level 312 is preferably aligned with and communicates with port 3 1 4. As shown in FIG. 12A, the liquid preferably enters the heat exchanger 3 0 through port 3 1 6 and flows downward through the transmission channel 3 2 2 through the narrow channel 3 2 8 and gradually flows to the interface layer 3 0 2. As shown in Figure 12B, the liquid can enter the heat exchanger 3 0 0 ', preferably through port 3 1 5' and enter and flow through level 3 08, middle 3 1 4 and gradually flow to the interface. Layer 3 0 2 ,. Port 315 in FIG. 12F preferably extends from the top surface 31 through the body of level 3 1 2. Or, port 3 丨 5 is extended from one of levels 3 丨 2. Alternatively, the level 3 1 2 does not include the port 3 1 5 and the liquid enters the heat exchanger 3 0 0 through the port 3 1 4 (Fig. 12 D and 1 2 E). In addition, the level 3 1 2 includes the port 3 1 6 ', which preferably transmits liquid to the narrow channel 3 2 8'. It is obvious to those skilled in this art that the level can include any number of ports and narrow passages. The narrow channel 3 28 preferably transmits liquid to the transmission channel 3 2 2 and gradually flows to the interface layer. Jl / G illustrates the perspective 312 of the present invention, another perspective view of another embodiment. Level 3 1 2 Chevrolet is up to 19 p. As shown in Figure 12F, bit. " ~ Concave and narrow channel area 328, in the body ‘It is along the bottom surface # 路 槽 长长 管 328’ is in communication with port 316 ’, so the liquid can be transferred to 槔 316 through channel 328’. The concave narrow channel is, for example, bit =, ίΓί 3m 'above the surface', so that the liquid is transmitted from the pores upward to the narrow channel 328. Concave narrow channel 32 °, and bottom
200419128 五、發明說明(36) 表面31 2B’之週邊為冑封,以抵住位帛312,之 面 3 〇 8 A ’,俾所有自孔隙3 2 4,之洛鲈可| 、 埠316 。底表面312Β,之每一孔隙33〇,與位 〇 3 0 8’中之對應孔隙321,(圖12}^斟赢、^ t 位舉3〇8’(圖12E )之丁頁i面目n隙33Qw 1 囬d U 8 A齊平。或去,:FI隙Μ f)右 /稍大於對應孔隙324,之直护,证楠、s〆者 孔隙3有 長通道328,。 直U申通過孔隙33。,進入狹 厂f兒二:明沿圖1 2A之H-H線之較佳熱交換器之 剖面圖。#圖12H所不’介面層3〇2耦合 述,熱交換器繼可與熱源99統合為— : 合至位準308之底表Φ 3 08Β。此外,位準 曰 準30 8,因此位準3 08之頂表面3〇8Α為密封抵住位準之位 底表面312B。準3 0 8之狹長通道32〇與介面層3〇2相通。 外,位準312中之狹長通道3 28與位準3〇8中孔隙32匕 位準312之底表面312B與位準308之頂表面3〇8A為密^ ° 液體不致在二位準3 0 8,31 2間漏出。 俾 圖121說明本發明沿圖12B之線之另一熱交換哭 剖面圖。如圖121所示,介面層3〇2,耦合至熱源99,、。&八之 層3 〇 2 ’耦合至流通位準3 0 4,之底表面3 〇 4 β,。流通位’丨面 亦耦合至位準3 0 8’,流通位準3 0 4,之頂表面3 0 4Α,與位f ^ 3〇8,之底表面308B’為密封。此外,位準312,較佳輕人準 位準3 0 8,,因而位準3 0 8,之頂表面3〇8A,與位準312/至 表面312B密封。位準308’之狹長通道320,之週邊與冷底 位準3 0 4,之頂表面3 04A,中之孔隙相通,俾液體不致$通 200419128 五、發明說明(37) 位準間漏出。此外,位準3 1 2 ’中之狹長通道3 2 8 ’與流通位 準3 0 8 ’之頂表面3 0 8 A ’中之孔隙相通,故液體不致在二位 準間漏出。 在較佳作業中,如圖1 2 A及1 2 Η之箭頭所示,冷卻之液 體經位準3 1 2 ’中之埠3 1 6進入熱交換器3 0 0。冷卻之液體自 埠3 1 6向下傳輸至狹長通道3 2 8,並向下流經傳輸通道3 2 2 至介面層302。狹長通道320中之冷卻液體不與熱交換器 3 0 0中之加熱液體混合及接觸。進入介面層3 0 2之液體與熱 源9 9實施熱交換及吸收熱源產生之熱。孔隙3 2 2為最佳安 排,俾液體在介面層3 0 2之X及Υ方向流動最少距離,以使 熱交換器3 0 0中之壓力降最小,並有效冷卻熱源9 9。 加熱之液體於是在介面層30 2以Ζ方向向上流動至位準3 0 8 中之狹長通道320。支管層30 6中存在之加熱液體不致與進 入支管層3 0 6之冷卻液體混合及接觸。加熱之液體進入狹 長通道3 2 0後傳輸至埠31 4,34 5再排出熱交換器3〇〇。對精 於此技藝人士甚為明顯,液體可以與圖1 2人及! 2狀斤示相反 之方向流動’而不致有悖本發明之範圍。 在另一作業申如圖1 2 B及1 2 I所示,冷卻之液體經位準 312中之璋316’進入熱交換器300,。冷卻之液體自埠 315’^向下傳輸至位準3 0 8,中之埠314,。液體於是流進狹 長通這3 2 0 ’及經流通位準3 04,中之孔隙3 2 2,向下流至介 f層3 0 2 °但’狹長通道320,中冷卻之液體不致與熱交換 杰3 〇 〇中加熱之任何液體混合或接觸。進入介面層3 0 2,之 液*與熱源9 9中產生熱實施熱交換並吸收該熱。如以下討200419128 V. Description of the invention (36) The perimeter of the surface 31 2B ′ is a seal to abut the bit 312, the surface 3 0 8 A ′, all the pores 3 2 4 are free, the bass can be |, port 316. The bottom surface 312B, each of the pores 33 °, and the corresponding pores 321 in the position 0308 ', (Figure 12) ^ 赢 Win, ^ t is 3408' (Figure 12E). The gap 33Qw 1 is flush with d U 8 A. Or go to: FI gap M f) right / slightly larger than the corresponding pore 324, the direct protection, and the pore 3 of Zhengnan and Shuang has a long channel 328. Straight U Shen through the pore 33. Enter the narrow factory f2: Sectional view of the preferred heat exchanger along line H-H of Fig. 12A. # 图 12H 所 不 'Interface layer 302 coupling As described above, the heat exchanger can then be integrated with the heat source 99 to form the bottom table 308, which fits to the level 308. In addition, the level is referred to as level 30 8, so the top surface 308A of level 3 08 is the bottom surface 312B which is sealed against the level. The narrow and long channel 32 of the quasi 308 communicates with the interface layer 302. In addition, the narrow channel 3 28 in level 312 and the pore 32 in level 30 and the bottom surface 312B in level 312 and the top surface 308A in level 308 are densely ^ ° The liquid will not be at level 3 0 8,31 2 rooms leaked.俾 FIG. 121 illustrates another cross-sectional view of a heat-exchange device according to the present invention along the line of FIG. 12B. As shown in FIG. 121, the interface layer 302 is coupled to the heat source 99 ′. & The eighth layer 3 0 2 ′ is coupled to the circulation level 3 04, the bottom surface 3 0 4 β. The circulation level 'is also coupled to level 3 0', the top surface 3 0 4A of circulation level 3 0 4 and the bottom surface 308B 'at level f ^ 308. In addition, level 312, preferably lighter level 308, so the top surface 308A of level 308 is sealed with level 312 / to surface 312B. The narrow channel 320 at level 308 ’is surrounded by the cold bottom level 3 0 4 and the top surface 3 04A. The pores in the top are communicated with each other and the liquid is not connected. 200419128 V. Description of the invention (37) Leakage between levels In addition, the narrow channel 3 2 8 ′ in the level 3 1 2 ′ communicates with the pores in the top surface 3 0 8 A ′ of the circulation level 3 0 8 ′, so that the liquid does not leak out between the two levels. In a preferred operation, as shown by the arrows in Figures 12 A and 12 (2), the cooled liquid enters the heat exchanger 300 through the port 3 1 6 in the level 3 1 2 '. The cooled liquid is transmitted downward from the port 3 1 6 to the narrow channel 3 2 8 and flows downwardly through the transmission channel 3 2 2 to the interface layer 302. The cooling liquid in the narrow channel 320 is not mixed and contacted with the heating liquid in the heat exchanger 300. The liquid entering the interface layer 3 0 2 and the heat source 9 9 perform heat exchange and absorb heat generated by the heat source. The pores 3 2 2 are the best arrangement. The rhenium liquid flows the minimum distance in the X and 介 directions of the interface layer 3 02 to minimize the pressure drop in the heat exchanger 300 and effectively cool the heat source 9 9. The heated liquid then flows upward in the Z direction in the interface layer 302 to the narrow channel 320 in the level 308. The heating liquid present in the branch pipe layer 306 is not mixed and contacted with the cooling liquid entering the branch pipe layer 306. The heated liquid enters the narrow channel 3 2 0 and is transferred to ports 31 4 and 3 4 5 and then discharged out of the heat exchanger 300. It is obvious to those skilled in this art that liquids can interact with people as shown in Figure 12! The two-pounds show flow in opposite directions' without departing from the scope of the present invention. In another operation, as shown in Figs. 12B and 12I, the cooled liquid enters the heat exchanger 300 through 璋 316 'in level 312. The cooled liquid is transferred down from port 315 ’^ to port 314, in level 308. The liquid then flows into the narrow and long pass 3 2 0 'and passes through the pore level 3 04, the pores 3 2 2 and down to the intermediate layer 3 0 2 ° but the narrow and narrow channel 320, and the cooled liquid does not exchange with heat Mix or contact any liquid heated in Jie 300. After entering the interface layer 3 02, the liquid * and the heat source 9 9 generate heat to perform heat exchange and absorb the heat. As discussed below
200419128 五、發明說明(38) ---:— 論,孔隙3 2 2’及孔隙3 24,之安排可使液體自每一孔隙 3 2 2,’沿介面層3〇2,傳輸一最佳之接近距離至一相鄰孔隙 3 2 4 :以降低期間之壓力降並有效冷卻熱源g 9。加熱之液 體於疋自介面層3 0 2 ’以Z方向經由數個孔隙3 2 4,向上傳輪 通過位準3 0 8,,並流至位準312,中之狹長通道3 2 8,。加熱 之液體不致與進入支管層3 〇 6,之冷卻液體在經孔隙3 2 4,向 上傳輸%混合或接觸。加熱之液體進入位準3丨2,中之狹長 通道3 2 8後、’流向埠3 1 6,並排出熱交換器3 〇 0,。對精於此 技藝人士甚為明顯,液體亦可與圖丨2β及丄2〗相反之方向流 動而不致有悖本發明之範圍。 ” 在較佳支管層3 0 6中,孔隙3 2 2之安排可使液體在介面 層3 Oj中流動之距離最小,並且可適當冷卻熱源9 9。在另 二支管層3 0 6’中,孔隙3 2 2,及孔隙324,之安排可使液體在 介面層3 0 2 ’流動距離最小,並可適當冷卻熱源9 9。孔隙 3 2 2 ’ 3 2 4 ’特別提供一垂直液體路徑俾液體流在熱交換器 3 〇 0 ’之X及Y橫向中液體流最小。因此,熱交換器3 〇 〇, 3 0 0可大幅降低液體必須流動之距離並可適當冷卻熱源 9 9 ’同時’大幅降低熱交換器3 〇〇,3 〇 〇,及系統3 〇, 30’(圖2A-2B)中之壓力降。 孔隙3 2 2及/或孔隙3 2 4之特殊安排及剖面尺寸於以下 因素有關,包括但不限於流體條件,溫度,熱源9 9產生之 熱及液體流速。應注意,雖然以下討論與孔隙3 2 2,3 2 4有 關,此一討論僅可應用在孔隙3 2 2或孔隙3 2 4。 孔隙3 2 2,3 2 4彼此空間分隔一最佳距離,因此當熱源200419128 V. Description of the invention (38) ---:-On the arrangement of the pores 3 2 2 'and the pores 3 24, the liquid can be transmitted from each pore 3 2 2', along the interface layer 3 02, an optimal The close distance to an adjacent pore 3 2 4: to reduce the pressure drop during the period and effectively cool the heat source g 9. The heated liquid passes through the interface layer 3 0 2 ′ in the Z direction through a number of holes 3 2 4 and passes to the upload wheel at level 3 0 8 and flows to level 312, the narrow channel 3 2 8. The heated liquid will not be mixed or contacted with the cooling liquid entering the branch tube layer 3 06, and transmitted upward through the pores 3 2 4. The heated liquid enters the level 3 丨 2, the middle of the narrow channel 3 2 8 and then flows to the port 3 1 6 and exits the heat exchanger 3 0 0. It is obvious to those skilled in this art that the liquid can also flow in the opposite direction to that shown in Figures 2β and 2 without departing from the scope of the present invention. In the preferred branch pipe layer 3 06, the arrangement of the pores 3 2 2 can minimize the distance that the liquid flows in the interface layer 3 Oj, and can properly cool the heat source 9 9. In the other two branch pipe layers 3 0 6 ', The arrangement of pores 3 2 2 and 324 can minimize the flow distance of the liquid in the interface layer 3 0 2 'and can properly cool the heat source 9 9. The pores 3 2 2' 3 2 4 'specially provide a vertical liquid path. Liquid The liquid flow is the smallest in the X and Y transverse direction of the heat exchanger 300 ′. Therefore, the heat exchanger 300 ′ 300 can greatly reduce the distance that the liquid must flow and can properly cool the heat source 9 9 ′ at the same time. Reduce the pressure drop in the heat exchanger 3,00, 3, and system 3, 30 '(Figure 2A-2B). The special arrangement of the pores 3 2 2 and / or pores 3 2 4 and the section size are due to the following factors Relevant, including but not limited to fluid conditions, temperature, heat generated by heat source 9 and liquid flow rate. It should be noted that although the following discussion is related to pores 3 2 2 and 3 2 4 this discussion can only be applied to pores 3 2 2 or Pore 3 2 4. Pore 3 2 2, 3 2 4 are spatially separated from each other by an optimal distance, so when Heat source
第45頁 200419128 五、發明說明(39) 99適當冷卻至理想溫度時,壓力降為最小。較佳實施例之 孔隙3 2 2及/或孔隙3 2 4之安排及最大距離,可使經介面芦 3〇2之孔隙322,324及液體路徑之獨立最佳化,通常,曰 即’經由改變個別孔隙之尺寸及位置而達成。此外,較佳 實施例中孔隙之安排亦大幅增加進入介面層之總流量=$ 布’及經每一孔隙3 2 2進入之液體所冷卻之面積之量。刀 在一實施例中,孔隙3 22,3 24於支管層3 0 6中配置為 交互構型或棋盤圖案,如圖1 3,1 4所示。每一孔隙3 2 2了 3 2 4以一小距離分隔,液體必須傳輸於棋盤圖案中。但 隙3 2 2,3 2 4彼此必須分隔一夠大之距離以提供冷卻液 介面層3 0 2—足夠之時間。如圖13,14所示,較佳為/ 多個孔隙3 2 2與對應數目之孔隙相鄰配置,及二 5' 進入介面層3 0 2之液體在排出介面層3 〇 2之前 、,L人、 “〜切’沿介面爲 3 0 2傳輸一最短之距離。因此如圖所示,鲂 曰 1 1 平又佳為孔隙q 9 9 3 2 4為彼此成徑向分布以協助液體自孔隙3 2 2傳於 ^乙、 離至最近之孔隙32 4。例如,如圖1 3所示,細别取短距 3 22進入介面層3 0 2之液體受到最小阻抗之路押寸&札丨永 孔隙3 24。此外,孔隙3 22,324較佳為圓刑^再至一相鄰 形狀。 料但亦可為其他 此外,如上所述,雖然孔隙3 2 4在圖中顯厂、 七 準3 0 4或位準3 0 8,3 1 2突出成一圓筒構件,节不自流通位 自支管層3 0 6中之任何位準突出。較佳為去=孔隙亦可不 改變方向之處有一圓形表面以協助降低埶」層3 0 6在液體 壓力降。 低熱父換器300中之Page 45 200419128 V. Description of the invention (39) 99 When properly cooled to the ideal temperature, the pressure drop is minimized. The arrangement and maximum distance of the pores 3 2 2 and / or pores 3 2 4 in the preferred embodiment can optimize the independence of the pores 322, 324 and the liquid path through the interface 302. Generally, Achieved by changing the size and location of individual pores. In addition, the arrangement of the pores in the preferred embodiment also significantly increases the total flow into the interface layer = $ cloth 'and the amount of area cooled by the liquid entering through each pore 3 2 2. Knife In an embodiment, the pores 3 22, 3 24 are arranged in the branch layer 3 06 as an interactive configuration or a checkerboard pattern, as shown in Figs. Each pore 3 2 2 3 2 4 is separated by a small distance, and the liquid must be transmitted in a checkerboard pattern. But the gaps 3 2 2 and 3 2 4 must be separated from each other by a sufficient distance to provide the coolant interface layer 3 2 2—enough time. As shown in Figs. 13 and 14, it is preferable that / a plurality of pores 3 2 2 be arranged adjacent to a corresponding number of pores, and the liquid entering the interface layer 3 0 2 at 5 '2, before being discharged from the interface layer 3 002, L People, "~ 切 'transmits a shortest distance along the interface for 3 02. Therefore, as shown in the figure, 1 1 flat and preferably pores q 9 9 3 2 4 are radially distributed to each other to assist the liquid from the pores. 3 2 2 is transmitted to ^ B, the closest pore 32 4. For example, as shown in Fig. 13, take the short distance 3 22 into the interface layer 3 0 2 and the liquid subjected to the path of the minimum resistance is pressed &丨 Permanent pores 3 24. In addition, pores 3 22,324 are preferably rounded ^ to an adjacent shape. However, it can be other. In addition, as mentioned above, although pores 3 2 4 are shown in the figure, seven The level 3 0 4 or level 3 0 8, 3 1 2 protrudes into a cylindrical member, and the nodes do not protrude from any level in the branch pipe layer 3 6 from the circulation level. It is preferable to go to the pores without changing the direction. There is a round surface to help reduce the pressure drop in the layer 306. Of the low-heat parent converter 300
200419128 五、發明說明(40) 孔隙3 2 2,3 2 4之最佳距離構型及尺寸與液體沿介面層 3 0 2曝露之溫度之量有關。孔隙3 2 2,3 2 4中液體路徑之剖 面尺寸必須夠大以降低熱交換器3 〇 〇中之壓力降,此點甚 為重要。當液體沿介面層3 〇 2僅遭受單相液體流動情況 下,每一孔隙較佳以對稱六角形安排由數個相鄰孔隙 3 2 4包圍,如圖13所示。此外,以單相液體流而言在流 位準3 0 4中之孔隙之數目較佳為大約相等。此外,以單相 液體流而言,孔隙3 2 2,3 2 4較佳具有相同直徑。對精於此 技藝人士甚為明顯’其他安排及孔隙3 2 2,3 2 4之任何屮如 當液體沿介面層3 0 2受到二相液體流之情況下, 3 2 2 ’ 3 2 4較佳為非對稱安排以配合二相液體之加速。 孔隙3 2 2,3 24之對稱安排亦可供二相液體流加以考慮。 如,孔隙3 2 2,3 2 4可在流通位準3 〇 4中成對稱安排, 孔隙3 2 4有一較孔隙3 2 2為大之開口。或者,圖丨3所示丄 角形對稱安排被用於流通位準3 〇 4供二相液體流之用,/、 此,較孔隙3 2 2為多之孔隙3 24出現在流通位準3〇4中。 .應注意,流通位準中之孔隙3 2 2,3 2 4可交互安排、、 卻熱源9 9之熱點。例如,二孔隙3 2 2彼此交互配置 Χ冷 於流通位準3 04中,因此,二孔隙322配置在接近或’在 面熱點區之上。甚為明顯,適當數目之孔隙3 24配一介 二孔隙3 2 2相鄰以降低介面層3 〇 2中之壓力降。因此,-轉 隙3 2 2供應冷卻液體至介面熱點區以迫使介面熱點孔 200419128 五、發明說明(41) —— 如上所述,較佳熱交換器3 0 〇較其他熱交換器具有重 要優點。較佳熱交換器3 0 0之構型,因為垂直液體路押& 成之壓力降降低,可利用中度性能之幫浦。此外,較=佳^ 交換器3 0 0之構型可使入口及沿介面層3 0 2之液體路彳^ ^獨' 立最佳化。此外,獨立位準可達成訂製設計基礎以^轉 移’壓力降降低,及各組件之尺寸最佳化。較佳熱交換器 3 0 0之構型亦可降低系統中之壓力降,其中液體受到二相° 液體流,因此可在單相及二相系統中使用。如下所討論, 較佳熱交換器可配合許多不同製造方法,及可調整組二 幾何形狀以供容差目的。 、 ^ 以:討論熱交換器100及熱交換器100中之各層如何製 ie之、、、田節。以下討論適用於本發明之較佳及另一熱交換 ^丄雖然圖3B中之熱交換器及各層為簡單之故分別' 顯示。 對精於此技藝人士甚為明顯,雖然構造/製造方法與本發 、有哥 製^方法之細節亦適用於其它熱交換器及利用一 液體入口埠及一液體璋之二及三層熱交換器,、如圖1 A- 1 C 所示。 ^面層較佳有一等於熱源9 9之熱擴張系數(CTE )之熱 擴張t數。因此’介面層較佳與熱源99擴張及收縮。或 者’介面層3 0 2之材料之CTE與熱源材料之CTE不同。介面 層⑽2如以石夕為材料,其CTE可配合熱源99之CTE,及具有 足夠之熱傳導率以自熱源9 9適當轉移熱至液體。但,其他 材料$可用於介面層3 0 2,其具有可與熱源99配合之CTE。 介面層較佳具有高熱傳導率以便有足夠之傳導以通過200419128 V. Description of the invention (40) The optimal distance configuration and size of the pores 3 2 2 and 3 2 4 are related to the amount of temperature at which the liquid is exposed along the interface layer 3 2. It is important that the cross-sectional dimensions of the liquid paths in the pores 3 2 2 and 3 2 4 are large enough to reduce the pressure drop in the heat exchanger 300. When the liquid is subjected to only a single-phase liquid flow along the interface layer 302, each pore is preferably surrounded by several adjacent pores 3 2 4 in a symmetrical hexagonal arrangement, as shown in FIG. 13. In addition, the number of pores in the flow level 304 for a single-phase liquid flow is preferably approximately equal. Furthermore, in the case of a single-phase liquid flow, the pores 3 2 2, 3 2 4 preferably have the same diameter. Very obvious to those skilled in this art 'Other arrangements and any of the pores 3 2 2, 3 2 4 such as when the liquid is subjected to a two-phase liquid flow along the interface layer 3 0 2 3 2 2' 3 2 4 Asymmetrical arrangements are preferred to facilitate the acceleration of the two-phase liquid. The symmetrical arrangement of pores 3 2 2, 3 24 can also be considered for two-phase liquid flow. For example, the pores 3 2 2 and 3 2 4 can be arranged symmetrically in the circulation level 3 04. The pores 3 2 4 have larger openings than the pores 3 2 2. Alternatively, the 丄 -angled symmetrical arrangement shown in Fig. 3 is used for the circulation level 3 04 for the two-phase liquid flow. Therefore, more pores 3 24 than the pores 3 2 2 appear at the circulation level 3 0. 4 in. It should be noted that the pores 3 2 2 and 3 2 4 in the circulation level can be arranged alternately, but the hot spots of the heat source 9 9. For example, the two pores 3 2 2 are arranged alternately with each other, and X is colder than the circulation level 304. Therefore, the two pores 322 are arranged close to or 'above the hot spot area. It is quite obvious that a proper number of pores 3 24 and a medium 2 pores 3 2 2 are adjacent to reduce the pressure drop in the interface layer 3 02. Therefore, the -turn gap 3 2 2 supplies cooling liquid to the interface hotspot area to force the interface hotspot hole 200419128 V. Description of the invention (41)-As mentioned above, the better heat exchanger 300 has important advantages over other heat exchangers . The preferred configuration of the heat exchanger 300 is because the pressure drop of the vertical liquid pump is reduced, and a medium-performance pump can be used. In addition, the relatively good configuration of the exchanger 3 0 0 can optimize the entrance and the liquid path along the interface layer 3 0 2 independently. In addition, the independent level can achieve a customized design basis to reduce the pressure drop and optimize the size of each component. The preferred configuration of the heat exchanger 300 can also reduce the pressure drop in the system, where the liquid is subjected to a two-phase ° liquid flow, so it can be used in single-phase and two-phase systems. As discussed below, the preferred heat exchanger can be used with many different manufacturing methods, and the group two geometry can be adjusted for tolerance purposes. , ^ To: Discuss how the heat exchanger 100 and the various layers in the heat exchanger 100 are made, ie, field sections. The following discussion applies to the preferred and another heat exchange of the present invention. Although the heat exchanger and each layer in FIG. 3B are simple, they are shown separately. It is very obvious to those skilled in this art, although the details of the construction / manufacturing method and the method of the present invention, and also the method of the brother ^ are also applicable to other heat exchangers and the use of a liquid inlet port and a liquid layer two and three layers of heat exchange Device, as shown in Figure 1 A- 1 C. The surface layer preferably has a thermal expansion t number equal to the thermal expansion coefficient (CTE) of the heat source 99. Therefore, the 'interface layer' is preferably expanded and contracted with the heat source 99. Or, the CTE of the material of the interface layer 302 is different from that of the heat source material. If the interface layer 2 is made of Shi Xi, its CTE can be matched with the CTE of the heat source 99, and has sufficient thermal conductivity to properly transfer heat from the heat source 9 to the liquid. However, other materials can be used for the interface layer 302, which has a CTE that can be matched with the heat source 99. The interface layer preferably has a high thermal conductivity so that it is sufficiently conductive to pass through
第48頁 200419128 五、發明說明(42) ~^_ 熱源99及沿介面層302流動之液體之間,俾埶 熱。介面層較佳由具有高熱傳導率$ '、、、'、 致過 成。但對精於此技藝人士甚為明顯 於或小於灣版熱傳導率,並受限於^值2可具有大 製成:、或者,二層㊁Π;:::佳由半導體基板如碎 晶介電材料,金屬::石包r不限於單 合物及任何適當合金。介 石墨,鑽石,混 製之有機網格。 a 3〇2之其他材料為圖案或模 如圖1 5所示,介面層較佳 介面層之材料,及改進介面芦之^上1?以塗層以保護 能特別提供化學保護,“消;::J特性。該塗層1 12 用。例如,銘製之介面層3(^在^與介面層3 0 2間化學作 介面層102在時間上將變壞 ^體:被蝕刻’因此 為25微米,以電鍍在 心:上1:為鎳之薄層,厚度約 能之反應,而不致大巾5改镞人之表面以化學淨化任何可 他材料及具有適軎犀;义)丨面層302之熱特性。任何其 之材料而;田層厂予度之塗層亦可考慮,視介面層302 介面層3 0 2利用鋼材料η @ ^ 成,以保護介面層3 0 2。或者 層塗層之蝕刻方法構 塑料或其他材料構成。介,面層302由鋁,矽基板, 所製時應以適當之塗層材30 2如以不良熱傳導率材料 傳導率。電形成介面^之方=層,以改進介面層3 0 2之熱 加鉻或其他適當金屬二 ’係沿介面層3 0 2之底表面施 9 ’及施加適當電壓至種子層Page 48 200419128 V. Description of the invention (42) ~ ^ _ Between the heat source 99 and the liquid flowing along the interface layer 302, heat is generated. The interface layer is preferably made of high thermal conductivity $ ',,,'. However, it is very obvious to those skilled in this art that the thermal conductivity is less than or equal to the bay plate, and is limited by the value of ^ 2. It can have a large size: or, two-layer ㊁Π; ::: preferably made of semiconductor substrate such as broken crystal dielectric Material, metal :: stone package r is not limited to a single compound and any suitable alloy. Graphite, diamond, mixed organic grid. a 302 other materials are patterns or molds as shown in Figure 15, the interface layer is preferably the material of the interface layer, and the interface is modified to provide a chemical protection, such as coating; :: J characteristics. The coating 1 12 is used. For example, the interface layer 3 (^ in ^ and the interface layer 3 02) is chemically used as the interface layer 102 will deteriorate in time. 25 micrometers, with electroplating in the heart: top 1: is a thin layer of nickel, the thickness of which can be reacted without causing the big towel 5 to change the surface of the person to chemically purify any other material and have suitable rhinoceros; meaning) 丨 surface layer The thermal characteristics of 302. Any other material; coatings pre-treated by the field layer factory can also be considered, depending on the interface layer 302. The interface layer 302 is made of steel material η @ ^ to protect the interface layer 302. Or the layer The etching method of the coating layer is made of plastic or other materials. The interface layer 302 is made of aluminum or silicon substrate. It should be made with a suitable coating material 30 2 if the material has a poor thermal conductivity. Electrically form the interface ^ = Layer, to improve the thermal layer of the interface layer 3 0 2 or other appropriate metal II 'is applied along the bottom surface of the interface layer 3 0 2 9 ′ and applying an appropriate voltage to the seed layer
200419128 五、發明說明(43) 之電連接而成。電 層於介面層302之π抑妾因此構成一熱傳導塗層材料ί 1 2— 微米之特性尺寸。^ 弘形成方法亦構成範圍在10-100 案電鍍。此外,介^ ^ 2可由電形成方法構成,如圖 研磨處理,或與電带二二、、1其他方法如光化學蝕刻或化學 微影組用以處理介面》之特组合處理。化學研磨之表準 可利用雷射協助化學生以改此進外’長寬比及容差 以上时論之柱體3 〇 3係以不方 柱體3 0 3製造後具有一高熱傳導柱體但應注意_, 導率材料如銅製成。但盆他 /體3 03車父佳為由南傳 士加以考慮、。柱體3。3由不同方了亦可由精於此技藝人 EDM線製造,壓印,MIM及機器^括仁不限於電形成, 研磨工具交互切割亦可產2二利用鑛及/或 ^制二、入 座生"面層3〇2之理想構型。以由 矽1成之;丨面層3 0 2而言,柱體3〇3將以電 影圖案及不同濕蝕刻等方法掣诰 鋸喊 之理相导寶比而一 U 視介面層3 0 2中柱體3〇3 之理心長見比而疋。徑向分布之矩形翼 以微影圖案法製造,其中利用雷將^ μ々 定之模具中。 」用電桌蝕刻或電鍍法於微影限 在一實施例中,用於介面層1〇2之微通道壁ιι〇所 製。微通道壁110亦可由其他材料萝&, 馮夕所 L ^ 7十氣仏 包括但不限於圖 案玻璃’聚合物’及模製聚合物網格。雖然微通道壁ιι〇 與介面層112之底表面103為相同材料所製,微通道壁 亦可由與介面層1 02其他組件不同材料所製。 在另一實施例中,微通道壁11〇之熱傳導率特性至少 第50頁 200419128 五、發明說明(44) 為1 0 W / m k。對精於此技藝人士甚為明顯,微通道壁1 1 〇亦 可具有小於1 OW/mk之熱傳導率特性,此時一塗層材料i i 2 加在微通道壁1 1 0上,如圖1 5所示,以增加微通道壁1 1 〇之 熱傳導率。如微通道壁110由具有良好熱傳導率之材料製 成日τγ ’塗層1 1 2之厚度至少為2 5微米,其可保護微通道壁 1 1 0之表面。微通道壁1 1 〇如由不良熱傳導率材料所製時, 塗層112之熱傳導率至少為5〇W/mk,並可高於25微米哄咏 精於此技藝人士甚為明顯,其他型式之塗層材料及厚度尺 寸亦可考慮。 為構型一微通道壁110具有一適當熱傳導率至少為 l〇W/mk時,微通道壁110必須以塗層材料112 (圖ι5)電形 成,材料如鎳或金屬如上所述。構型一微通道壁i丨〇具>有 至少50W/mk熱傳導率時,微通道壁110以銅電鍍於薄金屬 薄臈種子層上。或者,微通道壁i丨0不用以塗層材料塗 層0 微通道壁11 〇可利用熱壓成型技術以達成沿介面層!〇 之底表面1 03之通道壁}丨〇之高長寬比。微通道壁1丨可 構造為矽結構沉積在玻璃表面上,該結構以理想構型蝕 ^玻璃上。微通道壁丨10亦可由標準微影技術,壓印或鑄 k方、法或其他適當方法構成。微通道壁1 1 〇亦可與介面屑 1 〇 2刀別製、成,及由陽極或樹脂黏接輕合至介面層1 〇 2。 者,微通道壁110以傳統電形成技術如電鍍耦合至介面/ 1 0 2 〇 s 有數種方法可用以構造中間層104。中間層係由矽所 、發明說明(45) 對精於此技人士甚為 如国奋^ # 一 ^ d顯, 五 製 —C小、y刿顯 於雷射圖案玻璃,聚合物,Z屬住何適當材料包括但不限 材料及任何組合。•者,中間:,破螭,塑料,模製有機 造,或纟,中間層i 〇何利 曰战1 04利用電锻姓刻技術製 法包括機器法,蝕刻,擠壓,予蝕刻技術形成。其他方 型。中間層1 0 4亦可塑料網格盖/或鑄造金屬為理想構 者中間層1〇4可用雷射穿孔破:射出模製為理想構型。或 支官層3 0 6可用不同方法劁=成為一理想構型。中 -完整之一件。或者,較佳 ^。較佳支管層3 〇 6係製成 圖1 2所示,之後再耦合_起。s f 3 0 6可製成個別組件如 屬,聚合物混合物或其他滴二支管層3〇6可利用塑料,金 每一層由相同材料製成。式材料以射出模製方法形成, 料形成。支管声]n / 如上所述,每一層由不同材 對精於此技藝者甚為明_,用機^及^刻金屬技術形成。 形成。 巧月”員支官層m可用任何適當方法 、中間層104耦合至介面層1〇2及支管層1〇6以利用不同 方法構成熱父換器1 〇 〇。介面層1 〇 2,中間層1 〇 4及支管層 1 0 6由陽極’黏膠及易熔接合劑彼此耦合。中間層1 〇 4亦可 與支管層1 06及介面層1 〇2中之組件統合一起。中間層1 〇4 由化學接合法耦合至介面層1 0 2。中間層1 〇 4亦可由熱凸出 及軟微影技術形成,此時利用線EDM或矽主件以沖壓中間 層1 0 4 ’中間層1 〇 4於是與金屬或適當材料電鍍以改進中間 層1 〇 4之熱傳導率。 或者’中間層1 0 4以射出模製法與介面層1 〇 2中之微通200419128 V. Description of invention (43) is made by electrical connection. The π suppression of the electrical layer on the interface layer 302 therefore constitutes a characteristic dimension of a thermally conductive coating material. ^ Hong formation method also constitutes plating in the range of 10-100 cases. In addition, the medium ^ 2 can be formed by an electric forming method, such as grinding, or combined with other methods such as photochemical etching or chemical lithography to process the interface. The standard of chemical grinding can use laser to help students to change this. The column 3 of the aspect ratio and the tolerance is above 〇3 is made of square prism 3 0 3 and has a high thermal conductivity cylinder. However, it should be noted that the conductivity material is made of copper. But Potam / Body 3 03 Che Fujia was considered by the Southern Commissioner. The cylinder 3.3 is made by different parties, or it can be made by the skilled EDM line, embossing, MIM and machinery ^ The kernel is not limited to electric formation, the cutting of the grinding tool can also produce 2 ore and / or Second, the ideal configuration of seated students. In terms of silicon 1; surface layer 3 02, the pillar 3003 will use the film pattern and different wet etching methods to control the principle of the ratio of the saw and cry, and a U visual interface layer 3 0 2 The rationality and rationality of the middle pillar 3003 is rather obvious. Radially distributed rectangular wings are manufactured by the lithographic pattern method, in which ^ μ々 is fixed in a mold by using a lightning. "Using table etching or electroplating on the lithography limit In one embodiment, the microchannel wall is used for the interface layer 102. The microchannel wall 110 may also be made of other materials, such as but not limited to patterned glass 'polymer' and a molded polymer grid. Although the microchannel wall is made of the same material as the bottom surface 103 of the interface layer 112, the microchannel wall may also be made of a different material from other components of the interface layer 102. In another embodiment, the thermal conductivity characteristic of the microchannel wall 110 is at least page 50 200419128. V. Description of the invention (44) is 10 W / mk. It is obvious to those skilled in this art that the microchannel wall 1 1 0 can also have a thermal conductivity characteristic of less than 1 OW / mk. At this time, a coating material ii 2 is added to the microchannel wall 1 1 0, as shown in Figure 1 5 to increase the thermal conductivity of the microchannel wall 110. For example, if the microchannel wall 110 is made of a material with good thermal conductivity, the thickness of the daily τγ 'coating 1 12 is at least 25 microns, which can protect the surface of the microchannel wall 110. When the microchannel wall 1 1 〇 is made of a material with poor thermal conductivity, the thermal conductivity of the coating 112 is at least 50 W / mk, and can be higher than 25 micrometers. It is obvious for those skilled in this art. Other types of Coating materials and thickness dimensions can also be considered. To configure a microchannel wall 110 with a suitable thermal conductivity of at least 10 W / mk, the microchannel wall 110 must be electrically formed with a coating material 112 (Fig. 5), such as nickel or metal as described above. Configuration-a microchannel wall with a thermal conductivity of at least 50 W / mk, the microchannel wall 110 is plated with copper on a thin metal seed layer. Alternatively, the micro-channel wall i 丨 0 need not be coated with a coating material 0 The micro-channel wall 11 〇 can be hot-pressed to achieve along the interface layer! 〇bottom surface 10 03 channel wall} 丨 〇 high aspect ratio. The microchannel wall 1 丨 can be constructed as a silicon structure deposited on a glass surface, which is etched on the glass in an ideal configuration. The microchannel wall 10 can also be constructed by standard lithographic techniques, embossing or casting k-method, or other appropriate methods. The microchannel wall 1 10 can also be made and formed with the interface chip 102, and bonded to the interface layer 102 by anode or resin bonding. In addition, the micro-channel wall 110 is coupled to the interface using conventional electroforming techniques such as electroplating. There are several methods for constructing the intermediate layer 104. The middle layer is made by the Institute of Silicon and the invention description (45) is very good for those who are skilled in this technology. ^ # 一 ^ d, five systems-C small, y 刿 is visible in laser pattern glass, polymer, Z is Suitable materials include but are not limited to materials and any combination. • Intermediate: Broken, plastic, molded organic, or sintered, the intermediate layer i 〇 Heli Yue Zhan 1 04 is formed by electro-forging technology including machine method, etching, extrusion, pre-etching technology. Other square shapes. The intermediate layer 104 can also be a plastic mesh cover and / or cast metal as an ideal configuration. The intermediate layer 104 can be punctured by laser: injection molding is an ideal configuration. Or the tier 3 306 can use different methods 劁 = to become an ideal configuration. Medium-complete one piece. Or, preferably ^. The preferred branch pipe layer 3 06 is made as shown in Figure 12, and then coupled together. s f 3 0 6 can be made into individual components such as polymer, polymer mixture or other drip tube layers 3 06 can be made of plastic, each layer of gold is made of the same material. The material is formed by injection molding, and the material is formed. The sound of the branch pipe] n / As mentioned above, each layer is made of different materials to those skilled in the art, and is formed by mechanical and metal cutting techniques. form. The “Qiaoyue” staff and officer layer m can be coupled to the interface layer 102 and the branch layer 106 by any suitable method to form a thermal parent converter 100 using different methods. The interface layer 1 02, the intermediate layer 104 and the branch tube layer 106 are coupled to each other by the anode adhesive and the fusible bonding agent. The intermediate layer 104 can also be integrated with the components in the branch tube layer 106 and the interface layer 102. The intermediate layer 104 The chemical bonding method is used to couple to the interface layer 102. The intermediate layer 104 can also be formed by thermal projection and soft lithography technology. At this time, the wire layer EDM or silicon master is used to stamp the intermediate layer 104. The intermediate layer 1 〇 4 and then electroplated with a metal or suitable material to improve the thermal conductivity of the intermediate layer 104. Or the 'intermediate layer 104' is injection-molded to the micro-pass in the interface layer 102.
第52頁 200419128 五、發明說明(46) - 道壁11 0之製造共同形成。或者中間層1 04可以其他嘀♦方 法與微通道壁11 0之製造形成。熱交換器其他製造方^套曰包 括但不限於焊接,熔合黏接,易熔接合,金屬間接合,^及 任何適當技術,視該層使用之材料型式而定。 。 本發明熱父換器之另一製造方法如圖丨6之說明。如圖 1 6所示,製造熱交換器之另一方法包括建立一由石夕美板作 為介面層形成之硬掩膜(步驟5 〇 0 )。硬掩膜由二氧化'"或 者由玻璃上自旋製成。硬膜形成後,複數個下通道於$ ^掩 膜中形成,該下通道於微通道Π 〇之間構成液體之路徑(步 驟5 0 2 )。下通道由適當方法形成,包括但不限於& 術’化學研磨軟微影或氙去氟餘刻。此外,必須確保微通 道間之足夠空間,以免下微通道彼此間不致成橋路之ι 後’以傳統方法施加玻璃上自旋法於硬掩膜表面上,以構 成中間及支管層(步驟5 〇 4)。隨後,中間層及支管層以凝 結法硬化(步驟5 0 6 )。當中間層及支管層形成及硬/匕後= 多個液體埠形成在硬化層中(步驟5 〇 8 )。液體埠係钱列戍 鑽研於支管層中。雖然其他方法可製造介面層1 〇 2,中^ 層104及支管層1〇6,其他製造熱交換器1〇〇方法亦可曰 慮。 圖1 7說明本發明熱交換器之另一實施例。如圖6所 示’二熱交換器2 0 0,2 0 0 ’柄合至熱源9 9。熱源9 9,如一 電子裝置耦合至電路板9 6並以直立配置,故熱源9 9之每側 均曝露。本發明之熱交換器耦合至熱源9 9之一曝露側|因 此二熱交換器2 0 0,2 0 0 ’可提供熱源9 9最大冷卻。或者轨Page 52 200419128 V. Description of the invention (46)-The manufacturing of the road wall 110 is jointly formed. Alternatively, the intermediate layer 104 may be formed by other methods and the fabrication of the microchannel wall 110. Other manufacturers of heat exchangers include, but are not limited to, welding, fusion bonding, fusible bonding, intermetallic bonding, and any suitable technique, depending on the type of material used in the layer. . Another manufacturing method of the thermal parent converter of the present invention is illustrated in FIG. 6. As shown in FIG. 16, another method for manufacturing a heat exchanger includes establishing a hard mask formed by Shi Ximei plate as an interface layer (step 500). The hard mask is made of '" or by spin on glass. After the hard film is formed, a plurality of lower channels are formed in the mask, and the lower channels constitute a liquid path between the microchannels Π 0 (step 5 2). The lower channel is formed by a suitable method, including but not limited to & surgery 'chemical milling soft lithography or xenon defluorination. In addition, sufficient space must be ensured between the microchannels to prevent the lower microchannels from forming bridges with each other. 'On the conventional method, spin on glass is applied to the surface of the hard mask to form the middle and branch tube layers (step 5 〇4). Subsequently, the intermediate layer and the branch pipe layer are hardened by the coagulation method (step 5 06). When the middle layer and the branch tube layer are formed and hard / dark = multiple liquid ports are formed in the hardened layer (step 508). The liquid port is Qian Lieyu, who is studying in the branch pipe layer. Although other methods can be used to fabricate the interface layer 102, the intermediate layer 104, and the branch tube layer 106, other methods of manufacturing the heat exchanger 100 can also be considered. Figure 17 illustrates another embodiment of the heat exchanger of the present invention. As shown in FIG. 6, the 'two heat exchangers 200, 2000' are coupled to the heat source 99. The heat source 99, such as an electronic device, is coupled to the circuit board 96 and arranged in an upright position, so that each side of the heat source 99 is exposed. The heat exchanger of the present invention is coupled to one of the exposed sides of the heat source 9 9 | Therefore, the two heat exchangers 2 0, 2 0 0 'can provide the maximum cooling of the heat source 9 9. Or rail
第53頁 200419128 五、發明說明(47) 源水平耦合至電路板,因此一個以上之熱交換器堆疊在熱 源9 9之頂部(未示出),因此每一熱交換器耦合至熱源9 9。 本實施例之細節揭示於美國專利申請序號1 0 / 0 7 2,1 3 7,於 2 0 0 2,2,7曰提出,標題為π功率調整模組π,該專利以參 考方法併入此間。 如圖1 7所示,具有二層之熱交換器2 0 0耦合至熱源9 9 之左側,熱交換器2 0 0 ’柄合至熱源9 9之右側。對精於此技 藝者甚為明顯,可耦合至熱源9 9之各側。對精於此技藝者 甚為明顯,熱交換器2 0 0 ’之另一實施例亦可耦合至熱源9 9 之側邊。圖1 7所示之另一實施例可使熱源9 9之更精確之熱 點冷卻,因其施加液體以冷卻存在於熱源9 9厚度之熱點。 因此圖1 7之實施例由熱源9 9之二側交換熱而施加適當冷卻 至熱源9 9之中心。對精於此技藝者甚為明顯,圖1 7之實施 例係用以圖2Α-2Β中之冷卻系統30共用,雖然其他閉合系 統亦可考慮。 如上所述,熱源9 9具有其他特性,其中,因為熱源9 9 需要實施之不同任務,一或多個熱點之位置可能改變。為 適當冷卻熱源9 9,系統3 0可包括一感測及控制模組3 4 (圖 2Α-2Β),其動態改變流量及/或進入熱交換器1 00之液體流 速,以響應熱點位置之改變。 特別如圖1 7所示,一或多個偵測器1 2 4配置在熱交換 器2 0 0中之每一介面熱點區,及/或配置在熱源9 9之每一可 能熱點位置。或者,複數個熱源均勻配置在熱源及熱交換 器之間,及/或配置在熱交換器之中。控制膜組38(圖2Α-Page 53 200419128 V. Description of the invention (47) The sources are horizontally coupled to the circuit board, so more than one heat exchanger is stacked on top of the heat source 9 9 (not shown), so each heat exchanger is coupled to the heat source 9 9. The details of this embodiment are disclosed in U.S. Patent Application Serial No. 10/07, 2, 37, which was proposed in 2000, 2, 7, and titled π power adjustment module π. This patent is incorporated by reference here. As shown in FIG. 17, a heat exchanger 200 having two layers is coupled to the left side of the heat source 99, and the handle of the heat exchanger 200 'is connected to the right side of the heat source 99. It is obvious to those skilled in this art that it can be coupled to each side of the heat source 9 9. It is obvious to a person skilled in the art that another embodiment of the heat exchanger 200 'can also be coupled to the side of the heat source 9 9. Another embodiment shown in FIG. 17 enables more accurate hot spot cooling of the heat source 99, because it applies liquid to cool the hot spot existing in the thickness of the heat source 99. Therefore, the embodiment of Fig. 17 applies heat to the center of the heat source 99 by exchanging heat from both sides of the heat source 99. It is obvious to those skilled in this art that the embodiment of Fig. 17 is shared by the cooling system 30 in Figs. 2A-2B, although other closed systems may be considered. As mentioned above, the heat source 9 9 has other characteristics, where the location of one or more hot spots may change due to different tasks that the heat source 9 9 needs to perform. To properly cool the heat source 9 9, the system 30 may include a sensing and control module 3 4 (Figure 2A-2B), which dynamically changes the flow rate and / or the liquid flow rate into the heat exchanger 100 in response to the location of the hot spot. change. As shown in FIG. 17 in particular, one or more detectors 1 2 4 are arranged in each interface hotspot area of the heat exchanger 200, and / or each possible hotspot location of the heat source 99. Alternatively, a plurality of heat sources are uniformly arranged between the heat source and the heat exchanger, and / or are arranged in the heat exchanger. Control film group 38 (Fig. 2A-
第54頁 200419128 五、發明說明(48) 2 B )亦耦合至迴路3 0中之多個活瓣,用以控制液體至熱交 換器1 0 0之流量。一或多個活瓣配置在液體線中但亦可配 置在其他位置。複數個偵測器1 2 4搞合至控制模組3 4,該 控制模組3 4較佳配置在自熱交換器1 0 0之上游,如圖2所 示。或者,控制模組3 4配置在閉合迴路系統3 0任何位置。 偵測器1 2 4提供資訊至控制模組3 4,包括但不限於在 介面熱點區流動之液體之流速,介面熱點區中介面層1 0 2 及/或熱源9 9之溫度及液體之溫度。例如,參考圖1 7,配 置在介面之偵測器1 2 4提供資訊至控制模組3 4,指出熱交 換器2 0 0中一特殊介面熱點區之溫度正在增加,而熱交換 器2 0 0 ’中一特定介面熱點區之溫度正在降低。為響應此 舉,控制模組3 4增加流量至熱交換器2 0 0及降低流量至熱 交換器2 0 0 ’。或者,控制模組3 4可改變至一或多個熱交換 器中之一或多個介面熱點區之液體流量,以響應自偵測器 1 1 8接收之資訊。雖然偵測器1 1 8在圖1 7中與二熱交換器 2 0 0,2 0 0’顯示,甚為明顯,偵測器1 1 8亦可僅與一熱交換 器搞合。 本發明現已利用特殊實施例加以說明,其中併入細節 以便於瞭解本發明之結構及作業原理。對特殊實施例之參 考及細節並無限制申請專利範圍之範疇之意。對精於此技 藝人士甚為明顯,實施例中可作修改以供說明而不致有悖 本發明之精神與範圍。Page 54 200419128 V. Description of the invention (48) 2 B) is also coupled to a plurality of flaps in the loop 30 to control the flow of liquid to the heat exchanger 100. One or more flaps are arranged in the fluid line but can also be arranged in other positions. A plurality of detectors 1 2 4 are coupled to the control module 34, and the control module 34 is preferably arranged upstream of the self-heat exchanger 100, as shown in FIG. Alternatively, the control module 34 is arranged at any position of the closed loop system 30. The detector 1 2 4 provides information to the control module 34, including but not limited to the flow velocity of the liquid flowing in the interface hotspot area, the temperature of the interface layer 1 0 2 and / or the heat source 9 9 in the interface hotspot area, and the temperature of the liquid . For example, referring to FIG. 17, the detector 1 2 4 disposed on the interface provides information to the control module 34 and indicates that the temperature of a hot spot in a special interface in the heat exchanger 200 is increasing, and the heat exchanger 2 0 0 'The temperature in the hotspot of a particular interface is decreasing. In response to this, the control module 34 increases the flow to the heat exchanger 200 and decreases the flow to the heat exchanger 200 '. Alternatively, the control module 34 can change the liquid flow rate to one or more of the interface hot spots in one or more heat exchangers in response to the information received from the detector 1 1 8. Although the detector 1 1 8 is shown in FIG. 17 with the two heat exchangers 200, 2 0 ′, it is obvious that the detector 1 1 8 can be combined with only one heat exchanger. The present invention has been described using specific embodiments, in which details are incorporated to facilitate understanding of the structure and operating principle of the present invention. References and details of special embodiments are not intended to limit the scope of patent application. It will be apparent to those skilled in the art that modifications can be made in the embodiments for illustration without departing from the spirit and scope of the invention.
第55頁 200419128 圖式簡單說明 圖1 A說明傳統熱交換器側視圖。 圖1 B說明傳統熱交換器頂視圖。 圖2A說明包含本發明之軟性液體傳輸微通道熱交換器另一 實施例閉合迴路冷卻系統之略圖。 圖2 B說明併入本發明軟性液體傳輸微通道熱交換器另一實 施例閉合迴路冷卻系統略圖。 圖3A說明本發明熱交換器之另一支管層之頂視圖。 圖3B說明本發明具有另一支管層之另一熱交換器略圖。 圖4說明本發明交織支管層之透視圖。Page 55 200419128 Brief Description of Drawings Figure 1 A illustrates a side view of a conventional heat exchanger. Figure 1B illustrates a top view of a conventional heat exchanger. Fig. 2A illustrates a schematic diagram of a closed loop cooling system according to another embodiment of the flexible liquid transport microchannel heat exchanger including the present invention. Fig. 2B illustrates a schematic diagram of a closed loop cooling system of another embodiment incorporating a soft liquid transfer microchannel heat exchanger of the present invention. Figure 3A illustrates a top view of another tube layer of the heat exchanger of the present invention. Figure 3B illustrates a schematic view of another heat exchanger having another tube layer in accordance with the present invention. Figure 4 illustrates a perspective view of an interlaced branch pipe layer of the present invention.
圖5說明本發明具有介面層之交織支管層之頂視圖。 圖6A說明沿A-A線之介面層交織支管層剖面圖。 圖6B說明沿B-B、線之介面層交織支管層剖面圖。 圖6C說明沿C-C線之介面層交織支管層剖面圖。 圖7A說明本發明具有介面層交織支管層立體圖。 圖7B說明本發明介面層另一實施例透視圖。 圖8A說明本發明另一支管層頂視圖。 圖8 B說明本發明介面層頂視圖。 圖8 C說明本發明介面層頂視圖。 圖9 A說明本發明之三層熱交換器另一實施例側視圖。Fig. 5 illustrates a top view of an interlaced branch tube layer having an interface layer according to the present invention. Fig. 6A illustrates a cross-sectional view of an interfacial layer interlaced branch pipe layer along the A-A line. Fig. 6B illustrates a cross-sectional view of the interlayer branch pipe layer along the interface layer B-B. Fig. 6C illustrates a cross-sectional view of an interfacial layer interlaced branch pipe layer along the C-C line. FIG. 7A illustrates a perspective view of an interlaced branch pipe layer with an interface layer according to the present invention. FIG. 7B illustrates a perspective view of another embodiment of the interface layer of the present invention. Fig. 8A illustrates a top view of another branch layer of the present invention. Figure 8B illustrates a top view of the interface layer of the present invention. Figure 8C illustrates a top view of the interface layer of the present invention. Figure 9A illustrates a side view of another embodiment of the three-layer heat exchanger of the present invention.
圖9 B說明本發明二層熱交換器另一實施例側視圖。 圖1 0A- 1 0E說明本發明具有不同微銷陣列介面層透視圖。 圖1 1說明本發明另一熱交換器透視圖。 圖1 2 A說明本發明較佳熱交換器立體圖。 圖1 2 B說明本發明另一熱交換器立體圖。Figure 9B illustrates a side view of another embodiment of the two-layer heat exchanger of the present invention. 10A-10E illustrate perspective views of different micropin array interface layers of the present invention. Figure 11 illustrates a perspective view of another heat exchanger according to the present invention. Figure 1 2 A illustrates a perspective view of a preferred heat exchanger of the present invention. Figure 1 2B illustrates a perspective view of another heat exchanger according to the present invention.
第56頁 200419128 圖式簡單說明 圖1 2 C說明本發明另一流通位準透視圖。 圖1 2 D說明本發明較佳入口位準下側透視圖。 圖1 2 E說明本發明另一入口位準下側透視圖。 圖1 2 F說明本發明較佳出口位準下側透視圖。 圖1 2 G說明本發明另一出口位準下側透視圖。 圖1 2 Η說明本發明較佳熱交換器剖面圖。 圖1 2 I說明本發明另一熱交換器剖面圖。 圖1 3說明本發明具有較佳安排之入口及出口孔隙供單相液 體流動較佳實施例流通位準頂視圖。 圖1 4說明本發明具有較佳安排之入口及出口孔隙供二相液 體流動較佳實施例流通位準頂視圖。 圖1 5說明本發明具有塗層材料加於其上之熱交換器介面層 側視圖。 圖1 6說明本發明之熱交換器另一製造方法流程圖。 圖1 7說明本發明具有二熱交換器耦合至熱源之另一實施例 略圖。Page 56 200419128 Brief Description of Drawings Figure 1 2C illustrates a perspective view of another circulation level of the present invention. Figure 12D illustrates a perspective view of the lower side of the preferred entry level of the present invention. Figure 1 2E illustrates a perspective view of the lower side of another entry level of the present invention. Figure 1 2F illustrates a perspective view of the lower side of the preferred exit level of the present invention. Figure 12G illustrates a perspective view of the lower side of another exit level of the present invention. Fig. 12 (a) illustrates a sectional view of a preferred heat exchanger of the present invention. Fig. 12 illustrates a cross-sectional view of another heat exchanger according to the present invention. Figure 13 illustrates a top view of the flow level of a preferred embodiment of the present invention having a preferred arrangement of inlet and outlet apertures for single-phase liquid flow. Figure 14 illustrates a top view of the flow level of a preferred embodiment of the present invention having a preferred arrangement of inlet and outlet apertures for two-phase liquid flow. Figure 15 illustrates a side view of a heat exchanger interface layer having a coating material applied thereto according to the present invention. Figure 16 illustrates a flow chart of another method of manufacturing the heat exchanger of the present invention. Figure 17 illustrates a schematic view of another embodiment of the present invention having two heat exchangers coupled to a heat source.
元件符號說明: 1 0,2 0熱交換器 1 1底 1 4平行通道 16出 24出口瑋 26中 2 7底表面 3 0閉 3 2幫浦 3 4動 3 8液體線 96電 表面 1 2入口埠 口埠 2 2埠 間層 2 8多喷嘴 合迴路密封冷卻系統 態偵感及控制模組 路板 9 8熱介面材料Description of component symbols: 1 0, 2 0 heat exchanger 1 1 bottom 1 4 parallel channels 16 out 24 outlets 26 middle 2 7 bottom surface 3 0 closed 3 2 pump 3 4 moving 3 8 liquid line 96 electrical surface 1 2 inlet Port port 2 2 inter-layer 2 2 multi-nozzle combined circuit sealed cooling system state detection and control module circuit board 9 8 thermal interface material
第57頁 200419128Page 57 200419128
第58頁 圖式簡單說明 9 9,9 9 ’熱源 10 0熱交換器 104, 2 0 4中間 層 102, 202, 2 0 2A, 3 0 2, 302’, 402, 402’介面層 103, 132, 3 0 4B, ,3 0 8B ,3 0 8B’,312B’底表面 105, 105A, 105B ,105C ,105D, 205A, 205B導管 106, 206, 3 0 6, 3 0 6、 4 0 6支管層 1 2 4偵測 器 10 7區域 1 0 8,1 0 9液體埠 110, 111, 210A〇 410, 4 1 0 ’微通道 112, 116, 414, 414、 418,418’通道 108, 116, 118, 118A, 118B, 118C, 118D, 118E j 118F, 120, 1 20 A ,120F ,1 2 2手指部 1 19,121手指部孔隙 130 ’ 3 0 4A’,3 0 8A,3 0 8A’頂表 面 2 0 0,2 0 0,, 3 0 0, 3 0 0,, 4 0 0熱交換器 208, 208A, 2 0 8B入口 2 0 9,2 0 9A,2 0 9B出口淳 2 1 0微通道壁 2 1 4可滲透蒸氣隔膜 3 0 1微多孔結構 3 0 3糸列柱體 3 0 3 B方形 3 0 3C菱形,橢圓形 3 0 3D六角形 3 0 3 E距形翼片 3 04,,3 0 8, 3 0 8, ,312, 3 1 2 ’位準 314, 314,, 315, 315,, 316, 316, , 345, 408, 4 0 9埠 3 2 0,3 2 0,, 3 2 6, ,3 28, 3 2 8 ’狹長通道 3 2 2傳輸通道 321,,322, 32 2, ,324, 3 2 4 ’,3 3 0 ’ 孔隙 411,41 1,, 412, 4 1 2 ’平行液體導管 416, 416A, 416B槽溝 4 2 0曲線表面Schematic illustration on page 58 9 9, 9 9 'Heat source 10 0 Heat exchanger 104, 2 0 4 Intermediate layer 102, 202, 2 0 2A, 3 0 2, 302', 402, 402 'Interface layer 103, 132 3 0 4B, 3 0 8B, 3 0 8B ', 312B' bottom surface 105, 105A, 105B, 105C, 105D, 205A, 205B conduit 106, 206, 3 0 6, 3 0 6, 4 0 6 1 2 4 Detector 10 7 Zone 1 0 8, 1 0 9 Liquid port 110, 111, 210 A0410, 4 1 0 'Microchannel 112, 116, 414, 414, 418, 418' Channel 108, 116, 118 , 118A, 118B, 118C, 118D, 118E j 118F, 120, 1 20 A, 120F, 1 2 2 finger part 1 19, 121 finger hole 130 '3 0 4A', 3 0 8A, 3 0 8A 'top surface 2 0 0, 2 0 0 ,, 3 0 0, 3 0 0 ,, 4 0 0 heat exchanger 208, 208A, 2 0 8B inlet 2 0 9, 2 0 9A, 2 0 9B outlet 2 1 0 microchannel Wall 2 1 4 Vapor-permeable membrane 3 0 1 Microporous structure 3 0 3 Columns 3 0 3 B Square 3 0 3C Rhombic, oval 3 0 3D hexagonal 3 0 3 E distance wing 3 04 ,, 3 0 8 3 0 8, 312, 3 1 2 'levels 314, 314 ,, 315, 315 ,, 316, 316,, 345, 408, 4 0 9 port 3 2 0, 3 2 0 ,, 3 2 6,, 3 28, 3 2 8 'Slim channel 3 2 2 Transmission channels 321 ,, 322, 32 2,, 324, 3 2 4', 3 3 0 'Pore 411, 41 1 ,, 412, 4 1 2' Parallel liquid conduit 416, 416A, 416B groove 4 2 0 curved surface
Claims (1)
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| Application Number | Priority Date | Filing Date | Title |
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| US45572903P | 2003-03-17 | 2003-03-17 | |
| US10/439,635 US6988534B2 (en) | 2002-11-01 | 2003-05-16 | Method and apparatus for flexible fluid delivery for cooling desired hot spots in a heat producing device |
| US10/680,584 US7000684B2 (en) | 2002-11-01 | 2003-10-06 | Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device |
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| TWI295725B TWI295725B (en) | 2008-04-11 |
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| CN102790027B (en) * | 2012-08-27 | 2016-03-30 | 无锡市福曼科技有限公司 | The multiple flow passages water cooling plant of computer CPU |
| US9042100B2 (en) * | 2013-03-14 | 2015-05-26 | Aavid Thermalloy, Llc | System and method for cooling heat generating components |
| US9801313B2 (en) * | 2015-06-26 | 2017-10-24 | Microsoft Technology Licensing, Llc | Underwater container cooling via integrated heat exchanger |
-
2004
- 2004-02-23 TW TW93104503A patent/TWI295725B/en not_active IP Right Cessation
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| CN112912992A (en) * | 2018-11-15 | 2021-06-04 | 株式会社Kelk | Temperature control device and method for manufacturing temperature control device |
| US11955353B2 (en) | 2018-11-15 | 2024-04-09 | Kelk Ltd. | Temperature adjustment device and method for manufacturing temperature adjustment device |
| CN112912992B (en) * | 2018-11-15 | 2024-04-16 | 株式会社Kelk | Temperature regulating device and method for manufacturing the same |
| TWI695467B (en) * | 2019-07-10 | 2020-06-01 | 國立交通大學 | Integrated circuit heat dissipation structure |
| US11094609B2 (en) | 2019-07-10 | 2021-08-17 | National Chiao Tung University | Thermal dissipation structure for integrated circuits comprising thermal dissipation trench |
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| Publication number | Publication date |
|---|---|
| TWI295725B (en) | 2008-04-11 |
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