200403187 玖、發明說明： 【發明所屬之技術領域】 本發明關於一種裝置及使用此裝置產氟之方法。 【先前技術】 舉例來說，半導體裝置通常係於真空處理室中藉化學氣 相沉積（C V D )複數矽層（舉例來說）而製得。組成的材料層經 蝕刻以便於製造期間提供所欲圖案於裝置上。此等於真空 室中之蝕刻導致一些基板材料經蝕刻（例如矽、氧化矽、氮 化矽）、超時沉積於處理室表面上。大部分未使用的化學試 劑及沉積或蝕刻程序之副產物係以每一處理步驟中自處理 室排放，然而，此等大體上不想要的試劑及副產物不可避 免地沉積於處理室壁及其表面，且變成潛在的污染物。舉 例來說，可能使此等沉積材料之一些自室壁掉落且變為合 併於裝置本身中，此將促使其成為碎片。於建立不想要及 潛在有害水平前，此等不想要的沉積物及殘餘物必須定期 地自處理室表面清潔。 雖然半導體裝置已可明確地參照如上述，但CVD係為用 於製造許多類型的電子元件之最廣泛使用的技術。舉例來 說，C V D係用於製造薄膜電晶體（T F T)平面面板顯示器，例 如於製造液晶顯示器（LCD)時，其係藉沉積材料膜於大基板 (例如玻璃基板）上。 慣例地，自CVD處理室表面清潔不想要的材料係藉使用 清潔氣體（例如三氟化氮、六氟乙烷及六氟化硫）而進行。 雖然此等氣體於自處理室移除污染物之工作效果佳，但其 5 312/發明說明書(補件)/92-09/92119518 200403187 具有促成全球溫暖化之缺點（倘若釋放於地球大氣中）。此 等氣體（於使用中）係藉電漿裝置分解，以便於處理室中釋 放原子氟，且其係為活性清潔組份。200403187 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a device and a method for producing fluorine using the device. [Prior Art] For example, a semiconductor device is usually made by a chemical vapor deposition (C V D) multiple silicon layer (for example) in a vacuum processing chamber. The composed material layer is etched to provide a desired pattern on the device during manufacturing. This is equivalent to etching in a vacuum chamber, which causes some substrate materials to be etched (eg, silicon, silicon oxide, silicon nitride) and deposited on the surface of the processing chamber over time. Most unused chemicals and by-products of the deposition or etching process are discharged from the processing chamber at each processing step. However, these generally unwanted reagents and by-products inevitably deposit on the walls of the processing chamber and Surface and become a potential contaminant. For example, it may be possible for some of these deposited materials to fall off the walls of the chamber and merge into the device itself, which will cause it to become fragmented. These unwanted deposits and residues must be regularly cleaned from the surface of the processing chamber before establishing unwanted and potentially harmful levels. Although semiconductor devices can be explicitly referred to as described above, CVD is the most widely used technology for manufacturing many types of electronic components. For example, C V D is used to manufacture thin film transistor (TFT) flat panel displays. For example, when manufacturing liquid crystal displays (LCD), it is deposited on a large substrate (such as a glass substrate). Conventionally, cleaning of unwanted materials from the surface of a CVD processing chamber is performed by using a cleaning gas such as nitrogen trifluoride, hexafluoroethane, and sulfur hexafluoride. Although these gases work well in removing pollutants from the processing chamber, their 5 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 has the disadvantage of contributing to global warming (if released into the Earth's atmosphere) . These gases (in use) are decomposed by a plasma device to facilitate the release of atomic fluorine in the processing chamber, and they are active cleaning components.
最近已確立，替代上述之習用氣體化合物，可直接地或 以原子氟（於用以C V D處理室清潔之電漿室中處理分子氟 後）使用氟氣。分子氟具附帶的優點為其不會促成全球溫暖 化。歐洲專利EP-A- 1 1 3 8 8 0 2揭示使用分子氟於自CVD 室移除污染材料。 然而，雖然以上討論之E P - A - 1 1 3 8 8 0 2確定分子氟本 身或經處理以產生原子氟之分子氟可有效於CVD清潔，但 未暗示如何產生此等氣態氟以便供應市售CVD工廠。 然而，電子元件製造工業無法妥善地設置，以便維持或 者處理習用的化學工廠設置，其將需要產生用於清潔一些 CVD室（存在於用於製造電子元件之典型現代化工廠）所需 用量之氟。工業上需要可靠、易膨脹的就地製造及傳送高 純度氟氣流。必要的是，可快速地進行產氟工廠之維修及 擴充，並且於此等維修及擴充期間僅有最少（或無）化學危 害物且重要地無製造損失。當一些使用者需要產氟容量隨 著電子元件所需的製造容量提高而增加，由於CVD室之增 加的數目’擴充的態樣是重要的。 由於安全考量及於28巴表壓力貯存之氟量僅1.4公斤 (於一般50升鋼瓶中）之事實，使用鋼瓶中之壓縮氟於大規 模CVD應用是不切實際的。因此，於正常商業工廠所需量 之壓縮氟代表無法接受的環境及安全性危害，因為當壓縮 6 312/發明說明書(補件)/92»09/92119518 200403187 時，氟之反應性大大地提高。再者，依此方式提供 之成本是過高的。 就地產氟目前存在於許多工廠中，然而產氟裝置 為符合有關產氟之化學工業標準，且需要大量的就 及經常的操作人員介入，且通常涉及化學藥劑（例如 氟氣之電解液）之控制或取樣。此程序在化學工業中 的，其中預期於該化學工業中，員工將穿戴適當的1¾ 且舉例來說，使用呼吸裝置防護本身免於釋放於環 害性氟氣（當電池連接破壞或電池開放時）。然而， 於電子工業中是無法被接受的，其中預期於該電子 中，員工將不需依賴防護衣及類似物，且於所有時 危害性氣體將被容納於容器中且於任何環境下未釋 境。 於缺乏由使用分子氟於CVD工具清潔產生之特殊 勢時，其表示至少3 0 %之成本節省對於使此等工業 方法及清潔化學藥劑改變是必要的。因此，最初可 一 CVD處理工具可耦合至習用的產氟電池。此方式 顯可明白的優勢，因為氟電池之輸出可能符合其供 殊工具的氟需求。此方式也可縮小氟處理之管件。 顯的優點為一個氟產生器之故障將不會造成全工廠 而僅會有一個CVD工具停工而已。然而，實際上， 式之實用上及經濟上的缺點比每一個CVD工具配有 產生器之表面上的吸引力更重要。每一氟產生器必 相同的製程模組，因而使不必要及昂貴的成分與保4 312/發明說明書(補件)/92>09/92119518 大量氟 經設計 地維修 自產生 是常見 f護衣， 境之危 此方式 工業 候任何 放至環 程序優 自現存 §忍為母 具有明 應之特 另一明 停工， 此一方 一個氟 須具有 卜（含無 7 200403187 水氟化氫供應、氟氣之下游純化、氣體壓縮及貯存以及產 生器流出物減少）加倍成為必要。因此，此激增將造成相當 危害的化學程序之分布，包括大量氟化氫存貨及遍及整個 製造工廠之氟氣貯存。因此，所有氟產生器操作及維修活 動將類似地分布，此具有涉及工廠安全性之不利暗示。 此外，氟氣品質係為CVD清潔應用中最重要者，且因為 連續線上分析係過度地昂貴，當數個設備將是必要的且自 複數個設備之週期性氟氣取樣具有許多實施及安全性缺點 時，氣體品質控制將更困難。 對照上述每一工具配有一個氟產生器之方式，具分開的 進料進入複數個CVD工具之單一大的習用產生器具勢不可 擋的缺點為用於修理或維修之產生器的故障或停工造成整 個製程終止（因為產生器長時間損壞）。 【發明内容】 本發明之第一態樣係關於一種藉電解氟化氫產氟之裝 置，該裝置包含：複數個個別產氟單元；該個別產氟單元 係可操作地連接至用於遠端使用及消費氟氣之氟氣分配系 統；該產氟單元可個別地自該氣體分配系統系統隔離且可 自用於遠端維修之裝置移除。 以上「維修」一詞係意欲涵蓋任一用以自該裝置移除個 別產氟單元之原因。於本發明中，舉例來說，「維修」一詞 包含電池之例行性維修、保養或修理。其另一目的係此一 需維修之電池可自裝置移除，且取至遠離工廠（氟係於此處 消耗，以致於對於製造工廠或員工而言，沒有不便利性、 8 312/發明說明書(補件)/92-09/92119518 200403187 污染物或安全危害物）之遠端區。 於本說明書中，裝置係為「整套的」產氟裝置。「整套 的」一詞意欲代表一工廠，其係於氟工廉供應公司（例如經 測試以確保裝置充分操作）建立及組裝、停工、密閉且接著 輸送為獨立的工廠至消費者區（例如使用氟於消費者處 理）。一般而言，裝置可完全地獨立；除了消費者提供的保 養（例如電、水、壓縮空氣或氮供應物）以便促使裝置可操 作外；於可由路運或海運之容器中且容器係為其中裝置將 存在且操作於消費者區。 整套氟產生工廠或裝置通常可分類為意欲每小時產生 總計0至2.7公斤F2之裝置。於化學工業中存在有每年可 產生數千噸氟之習知大規模產氟工廠，其中每一電池通常 將產生不小於每小時4公斤氟，此等工廠可由員工穿戴及 使用適當安全裝備移除個別的電池，其係原地針對複數電 池及相關設備（帶至操作區及組裝）建立。舉例來說，此等 工廠係用於核子工業以供製造核子燃料前驅物（例如六氟 化鈾）。此等工廠與「整套的」，可輸送的如形成本發明主 題之一單元產氟裝置相當不同且可區別。於本發明中，裝 置可含於具總體尺寸大體上不超過標準ISO容器（或更小） 之容器内，以下將更詳細地說明。 於本說明書中，此裝置包含複數個獨立的產氟單元。此 等單元可為單一電池（單元於此範圍内具有有效的一個陰 極及一個陽極）構成。另外，此等單元可能包含一組電池（單 元於此範圍内可能有超過一個陰極及陽極）。因此，根據本 9 312/發明說明書(補件)/92-09/92119518 200403187 發明之裝置包含複數個產氟單元，其係為可彼此隔離者， 且自裝置整體地隔離，且每一單元係個別地自裝置移除， 而不會中斷自裝置整體地供應氟。為了更易說明本發明， 個別產氟單元於此後將稱為「氟匣盒」。同樣地，產氟裝置 中之其他設施，例如氟純化單元及氟壓縮及貯存單元，亦 稱為匣盒，例如「純化匣盒」及「壓縮及貯存匣盒」。「匣 盒」一詞意欲傳達獨立的整套物之意義，其係具有所述之 特性或設施（可能容易地自裝置移除以供維修或修理，且可 能以相同的包裝物取代，而對於人們沒有危險或不損害於 順暢產氟）。 於產氟工業中之常見術語係將氟「電池」稱為一個容 器，但該容器可能於其中具有複數個陽極（容器本身通常構 成陽極）。先前技藝之氟電池可能通常地具有高達3 6個分 離的陽極。因此，於本發明中，每一氟電池或匣盒可能具 有例如6、1 2或2 4個陽極（視消費者之氟需求而定） 本案亦進一步意欲以另一大體上相同的氟匣盒取代移 除氟的匣盒，以致於該裝置之產氟容量未明顯地減弱。 根據本發明之裝置提供獨立的產氟系統，其具有用於工 廠之充足的產氟容量，例如作為用於其所連接的CVD室或 工具之清潔氣體，以致於可藉小於裝置中個別氟匣盒總數 符合總氟需求。因此，舉例來說倘若一個氟匣盒需要修理 或維修或保養，則裝置可持續產生總氟需求，而不需使根 據本發明之產氟裝置停工或其他的中斷。如上述，已移除 氟之匣盒可立即地以大體上相同的（基於重要材料及尺度 10 312/發明說明書(補件)/92»09/92119518 200403187 方面）氟匣盒取代，以致於總潛在產氟容量完全沒有減損。 舉例來說，就具有三個產氟匣盒之裝置而言，三個匣盒之 正常平均輸出將小於每一匣盒於最大需求時之66 %峰值輸 出。因此，倘若一個匣盒基於任何理由需要移除，則兩個 剩餘的匣盒將可符合工廠供應應用之總峰值氟需求。 因此，本發明裝置之氟匣盒的單點失效不會造成裝置整 體停工或減少供應峰值氟需求之能力。 如上述，產氟電池通常可原地維修、保養或修理，其需 要關閉電池且原地拆開，由於氟氣及所用電解液之極端危 害的本性，故表示適度裝扮的所有（但必要的）員工自進行 此工作之場所撤離。停工期通常有數日以便完成工作。此 代表工廠（藉氟裝置供料）中之破壞及損失的製造期間。 藉採用本發明之裝置，係意欲使需要氟匣盒之工作係電 力地隔離係藉閥構件（於考量氟氣方面）、自裝置移除及輸 送（例如藉卡車）至進行所需工作之遠端區。然而，原地更 換的氟匣盒（保持作為貯存之備用品）可立即地安裝於裝置 中。因此，對於使移走的電池可再度操作所需的時間沒有 時間限制；電池可於適當設置用於此工作之場所運行；對 於在工廠（氟匣盒係自此處移走）工作之人們而言沒有危害 產生；並且在工廠沒有損失製造時間。 根據本發明之裝置可相當小（基於總體尺寸）。舉例來 說，如上述，其可大於具標準ISO容器（國際上用於運送及 輸送許多種貨物）之尺寸。此等容器具總體尺寸為約2 . 4 4 公尺寬X 2. 4 4公尺高X 6 . 5公尺長（或於英制測量為約8英 11 312/發明說明書(補件)/92-09/92119518 200403187 寸寬x8英寸高x20英寸長）。因此，本發明之產氟裝置可 具小尺寸，且可容易地設於消費者製造工廠内之便利場所。 本發明之裝置包含整合、獨立的產氟工廠，其可以一單 元藉路運或海運運送。根據本發明之裝置（當以I S 0類型容 器為基準時）可含有至多三個氟匣盒、至少一個氟純化匣盒 及至少一個氟壓縮及貯存/緩衝匣盒。 本發明之一具體例包含具有三個氟匣盒、兩個氟純化匣 盒、一個氟壓縮及貯存匣盒及其他相關設備（全部圍在標準 I S0容器之外部範圍内）之產氟裝置。然而，有另一輸送態 樣，且其為輸送備用或更換的氟匣盒；標準ISO容器可容 納至多8個氟匣盒（以寬度約0 · 7 4公尺為基準），然而，此 僅提供作為例子，因為個別氟匣盒可能以個別尺寸範圍構 成。本發明裝置之匣盒係為自身容納的輸送整套物（藉由其 完全鑲框的外部殼體），使得匣盒為密閉單元且不需要進一 步包裝或保護以供運輸。 雖然用於根據本發明特殊裝置之氟匣盒可形成為外部 維度之特殊套組且具有保養連接點及氟出口及氫出口及類 似物（於預定方向）以便確保可交換性，但氟匣盒内之真實 氟電池可改變至符合消費者之氟需求。舉例來說，氟電池 最初可具產氟容量為0至3 8 5克/小時，且隨著需求降低， 可改變氟電池具輸出容量為例如0至7 0 0克/小時或0至 1 4 0 0克/小時。因此，根據本發明之裝置可隨著氟需求提 高而升級。 氟匣盒可設置於總體裝置殼體内，其中該總體裝置殼體 12 312/發明說明書(補件)/9249/92119518 200403187 可安置常見保養（針對所有於裝置殼體内之氟匣盒）。此等 一般保養可包含流體管件、電纜主體及電氣/設備接線挽 具。 對於氟匣盒之危害性流體保養係設置隔離閥。較佳地， 對於匣盒之危害性流體保養係藉雙重隔離閥（其間具真空 連接）而提供。因此，兩隔離閥可關閉，且施加真空以便於 破壞氟匣盒與相關管件間前移除危害性内容物（於自裝置 移除氟匣盒前）。用以移除危害性材料之真空萃取系統較佳 係連接至洗滌系統（用以移除及中和有害材料）。 可藉例如快速連接之聯接器提供非危害性流體保養。 一旦氟匣盒自裝置拆卸時，則其完全地自外界環境密封 且對於員工不會造成危險。同樣地，新更換的氟匣盒亦無 害，直到其連接於裝置且隔離闊開啟以便容許危害流體流 動為止。 備用氟匣盒可原地貯存，以便能夠快速更換。同樣地， 已移走的匣盒可安全地原地貯存，直到例如其可移走至遠 端修理或離位保養設施。 氟匣盒可設置用以便利移動匣盒進出裝置殼體之構 件。適合的構件可包含例如輪子。 於根據本發明裝置之一較佳具體例中，氟匣盒本身係於 產氟電池周圍設置獨立的殼體，以致於任何氟洩漏（舉例來 說）係包含殼體内。更佳地，匣盒殼體可連接至真空萃取系 統（設有洗滌構件以移除有害化學藥劑）。 於本發明之裝置中，每一氟匣盒具有自己的殼體（由強 13 312/發明說明書(補件)/92-09/92119518 200403187 金屬框架及嵌板提供）。當安裝於裝置中時，殼體係連接至 萃取及洗滌構件，以便處理任何潛在的洩漏物，因而提供 密閉的保護殼。當匣盒自裝置移除時，殼體提供雙重優點： 於未進一步包裝之輸送期間構成匣盒之保護以及人們控制 ϋ盒之保護。 根據本發明裝置之一較佳具體例亦提供至少一個（較佳 至少二個）氟純化匣盒，氟匣盒之輸出係通過其間，以便自 此移除不想要的微粒材料或不想要的氣態污染物（於達到 任一指定的處理設備前）。具兩個此等匣盒之目的係為於產 氟期間提供一個需要修理或替代之匣盒。此等不想要的材 料可包含例如氟化氫，其係自氟流中之電解液運送且可能 通過例如氟化鈉阱。藉著使氟與碳陽極反應形成之四氟化 碳可藉適當的已知吸附系統移除。 氟純化匣盒亦可以類似氟匣盒之方式自供修理及保養 用之裝置隔離及容易地移走。因此，較佳可藉雙重隔離閥 (以插入的真空萃取設施作為氟匣盒）進行此一隔離。 根據本發明裝置之又一較佳特徵在於其亦可提供連接 於氟純化匣盒下游管線之氟緩衝匣盒。實際上，緩衝匣盒 收集產生之純化氟且將其容納於塔槽中，以便提供氟貯 存，俾緩和供應波動且於固定壓力下提供氟。 根據本發明之裝置可完全安置於主殼體框架内，其中主 殼體框架設有適合的嵌板，以便有效地使殼體密封於外界 環境壓力。更佳地，主殼體設有排空構件，以致於任一洩 漏物經移除且不會污染外界區域。排空系統可連接至適合 14 312/發明說明書(補件)/92-09/92119518 200403187 的洗滌構件，俾移除及安全處理任何有害物質。 主殼體較佳亦可以已知方式設置必要的電源供應器及 電控制系統之全部，俾進行氟化氫電解液電解以便產生氟。 根據本發明裝置之一較佳具體例，氟匣盒之框架可用作 匣盒内之氟電池的陰極連接點，因此，僅主殼體内匣盒之 安裝實現對於匣盒内電池之必要陰極連接。 較佳地，根據本發明之裝置進一步設置潔淨構件，俾於 引入氟前自管件移除潛在反應性流體。此等潔淨構件可包 含閥構件，係連接至用於引入例如氮氣至管件之裝置管 件，俾自管件潔淨氧氣（舉例來說）。 於根據本發明裝置之另一具體例中，每一個別氟匣盒可 設有必要的設施，以致於可使裝置持續發揮功能（甚至倘若 一些「集中」裝置保養應失效）。於此另一具體例中，獨立 匣盒殼體亦可設有直流電源供應單元，俾用於電解、氟純 化及壓縮機構件及氟貯槽/緩衝設施。此等匣盒係具相當大 容積，且產氟單元係安置於匣盒殼體之底部中，因而留下 足夠的空間以容納額外的設施。亦可藉雙重隔離閥連接至 氟貯槽/緩衝設施。於此另一具體例中，自裝置殼體之拆卸 將自氟貯槽/緩衝單元（當氟電池本身、氟純化及壓縮設施 係於其上游時）。 本發明之第二態樣係提供一種操作及維修用以藉電解 氟化氫產氟之裝置的方法，該方法包含以下步驟：提供複 數個產氟匣盒，其係操作地連接於用於遠端使用及消費氟 氣之氟氣分配系統；提供用於自該氟氣分配系統及自彼此 15 312/發明說明書(補件)/92-09/92119518 200403187 隔離任一個別產氟匣盒之構件；及提供用於自該裝置分離 及移除該隔離的產氟匣盒之構件，而不中斷自剩餘的產氟 匣盒供應氟。 與根據本發明第一態樣之裝置中之產氟單元有關的相 同定義係用於根據本發明之方法中。 【實施方式】 此刻請看圖1，其係僅意欲用以解釋藉電解產氟之基本 理論。產氟電池係示意地於斷面圖中顯示為1 0。電池包含 容器1 2，其可能或可能亦不構成電池之陰極；於此例中， 分開的陰極係以1 4顯示。容器1 2之頂部1 6係安全地關 閉，因為出口 1 8、2 0具有分別用於氟及氫之閥構件。容器 1 2含有熔融態氟化鉀鹽之氟化氫的電解液2 2。分開的擋板 2 4係自容器頂壁1 6伸出，且其底端3 0延伸至電解液表面 3 2下方，因而有效地分開電解液表面上之容積為兩個分別 用於氫及氟分離室34、36。通常為高密度等向碳之陽極38 係延伸進入電解液2 2，且延伸低於擋板2 4最下方（雖然並 未總是如此）。容器1 2通常設置用以加熱及熔化電解液（當 於室溫下為固悲時）之構件（未顯不）。* 般而言’當電 >也未 活動時，電解液係藉加熱構件而維持於8 0至1 0 0 °C之範圍 内。於電解期間，熱產生且通常必須藉適當冷卻構件冷卻 電解液。可使用任一種適合的加熱構件，且例如可包含延 伸至容器且通過電解液之管式加熱器、容器周圍之電熱毯 或容器周圍之蒸汽夾套。適合的電源供應器4 0係用以進行 電解液之電解。一般而言，電壓相當低（約6至9伏特）， 16 312/發明說明書(補件)/92-09/92119518 200403187 但電流是高的（約5 0 0至2 4 0 0安培），係視匣盒中之陽極數 目而定。 電解反應如下： 2HF -> F2 + H2 產生的氟量係與施加的電流成正比。氣體（氟及氫）大體 上垂直地自陽極及陰極表面上升至電解液表面32上之個 別隔間。電解液溫度係如上述調整，且藉添加無水氟化氫 控制組成及液面。 此刻請看圖2至8，其中相同元件符號代表相同的特徵。 根據本發明第一具體例之裝置係以1 0 0顯示；此裝置包含 主殼體框架1 0 2，其係具可移除的嵌板（未顯示）以便形成 使用中之主密封殼體1 0 4，且該密封殼體係經由歧管 1 2 4 (亦連接至洗滌系統（未顯示）以中和有害化學藥劑）而 連接至真空萃取系統（未顯示）。主殼體1 0 2、1 0 4内係安置 三個氟匣盒1 0 6、1 0 8、1 1 0，全部於意義上大體上相同， 每一者可由另一者取代，且具有相同的連接配件（例如隔離 閥、管子、管配件、電氣保養及類似物）定位。氟匣盒係連 接至氟氣歧管114，俾當其藉氟匣盒產生時經由連接於匣 盒中電解電池之氟氣豎管116取出（請看以上圖1以及以下 氟匣盒之更詳細說明）。豎管1 1 6係經由雙重隔離閥1 1 8、 1 2 0而連接至歧管11 4，其間插入的空間係連接至真空萃取 氟歧管1 2 4 (亦連接至用以中和任何有害氣體之洗滌系統 (未顯示））。於電解期間產生的氟係經每一匣盒上之豎管 1 3 0用管線輸出，豎管係透過凸緣接頭1 3 2而連接至氫氣 17 312/發明說明書(補件)/92-09/92119518 200403187 歧管1 3 4 (將氫氣導離以便必要時用於處理或燒掉）。所有 氟流過之管件係經由適合的閥構件（未顯示）連接至潔淨氣 體源（未顯示），例如氮，以便於引入氟前容許氧及/或水分 自管件潔淨。 每一個別氟匣盒106、108、110包含一個匣盒殼體框架 140，其可水平地分為兩部分：安置產氟電池144之底部 1 4 2及安置電源供應器（用於電解）及類似物之頂部1 4 6。匣 盒殼體之分開容許於自主殼體102、104移走匣盒後容易接 近產氟電池。為了輔助移動，氟匣盒設置輪子148以促進 自主殼體102、104移走。圖3及4中所示之匣盒具有一個 產氟單元，但如上述視所需的產氟容量而定，電池可含有 6、12或24個陽極。每一匣盒中之氟輸出係向内引入具雙 重隔離閥118、120之單一氟外取管116。同樣地，於電解 期間產生的所有氫係引入單一外取豎管1 3 0。產氟電池1 4 4 具有製自鋼之常見包封容器150，且形成電池陰極，且其 係焊接至殼體框架1 4 0之底部1 4 2。因此，此殼體框架形 成整個匣盒之陰極連接點。每一匣盒可能具有自己的DC 電源供應器1 5 2及控制系統1 5 4，然而，所有匣盒之電源 供應器及控制系統可集中於主殼體1 0 4。主殼體1 0 2、1 0 4 之頂部1 6 0係容置匯流板（b u s b a r )及主電源供應器（未顯 示）及類似物（每一氟匣盒係連接於其上，藉插入電連接器 (未顯示）至接頭箱158)而安裝於主殼體中。 如上述，殼體框架可形成本發明裝置之陰極連接點。由 於框架係為陰極，故其亦傳送可達到約2 4 0 0安培（以陽極 18 312/發明說明書(補件)/92»09/92119518 200403187 匣盒）之電流。因此，框架係由大截面材料製成，俾防止達 到不想要的高溫（由於電阻加熱）。陰極連接係為對地0伏 特，而陽極連接係為6至9伏特。使用殼體框架作為陰極 連接點及電流載體使得裝置能以強框架更經濟地製得（由 於較厚截面材料且無不必要的額外銅纜線以製造陰極導 體）。由於框架係為對地0伏特，故裝置係為電力上安全的。 氟匣盒1 0 6、1 0 8、1 1 0之總氟輸出係連接至氟純化匣盒 1 7 0，其中氟係通過此處以移除微粒材料，例如氟化氫或其 他電解液組份（已藉氟流帶走）及電解期間形成的污染物。 將更詳細地於圖5及6中說明純化匣盒。純化匣盒包含安 置化學阱及濾器（未顯示）之容器1 7 2，俾以已知方式自氟 流移除不想要的材料。純化匣盒1 7 0具有圍住容器1 7 2之 殼體框架1 7 4，且以類似氟匣盒知方式而具有雙重隔離閥 1 7 8、1 8 0，俾容許設置於純化匣盒中且自裝置移走純化匣 盒（當必要時）。此單元設有輪子1 8 0以輔助移動。 純化過的氟氣自匣盒170通過至圖7及8中所示之氟壓 縮匣盒1 9 0。於此實施例中，壓縮匣盒包含三個具總容量 650升之容納槽192，且可安全地禁得起5巴壓力之氟（雖 然基於安全性，通常不使用此壓力之氟）。將來自純化匣盒 1 7 0之純化過的氟輸出投料至匣盒泵1 9 4，且透過壓力控制 器1 9 6供料至容納槽1 9 2。壓縮匣盒1 9 0係容納儲備的氟， 使得倘若基於任一理由必須使裝置停工（關於產氟一段時 間，舉例來說，以便更換純化匣盒1 7 0 )，則將有儲備的氟 持續符合製程需求直到重新開始產氟為止。壓縮匣盒亦平 19 312/發明說明書(補件)/92-09/92119518 200403187 緩產氟之波動，以致於可於固定壓力下供應氟至處理工 (舉例來說）。以類似氟匣盒及純化匣盒之方式，壓縮匣 具有殼體框架2 0 0及輪子2 0 2。如同氟匣盒及純化匣盒 壓縮匣盒再度藉雙重隔離閥（未顯示）而連接至氟歧管 1 1 4。氟輸出係經由第二壓力控制器1 9 8至氟歧管1 1 4， 至使用氟之處理工廠。 自圖2 A、2 B、3及4可發現，例如氟匣盒1 0 6可安裝 主殼體102、104且自主殼體102、104移走，而不需妨 兩個其他匣盒1 0 8、1 1 0 (可持續提供氟於裝置外部操作 所需程序）。裝置1 0 0之產氟容量經計算，使得例如藉所 裝置三個匣盒之任二個符合保養工廠之總製程需求，因 使一個匣盒是多餘的或視需要可移走或更換。 於上述實施例中，裝置1 0 0大約小於I S 0容器之尺寸（ 於長度），因而可容易地藉路運或海運運送。另外可能提 如上述之裝置，但稍大，但仍於標準I S 0容器之範圍内 其中具有空的空間，俾容納額外的氟匣盒（舉例來說）， 便當需求增加時提供產氟容量之擴充。空的空間可設置 要的閥及達到歧管之管連接件，以致於額外的氟匣盒可 僅連接至系統中（如與現存的匣盒）。 主殼體框架1 0 2設有可移除的嵌板，俾使大體上密封 殼體（於使用中）達到氟出路。殼體係連接至場所萃取及 滌系統，以便中和有害的化學藥劑。再者，每一氟匣盒 純化匣盒及壓縮匣盒於使用中係類似地設置，其中嵌板 位於框架1 4 0、1 7 4及2 0 0上，俾於主殼體1 0 2、1 0 4内 312/發明說明書(補件)/92-09/92119518 廠 盒 且 於 害 之 述 而 :基 供 且 以 必 能 的 洗 係 形 20 200403187 成大體上密封的次殼體，此等次殼體亦連接至場所萃取及 洗滌系統。 圖9顯示根據本發明第二具體例之產氟裝置3 0 0的單一 透視圖。鑒於製造、處理、控制及貯存氟的容量及能力， 圖9之裝置類似第一具體例之圖2至8所述者。裝置3 0 0 再度具主殼體框架3 0 2，其設有嵌板（未顯示），以便形成 大體上密封的殼體。提供三個氟匣盒3 0 4、3 0 6、3 0 8，每 一者具自己的殼體框架310、312、314(具嵌板），且每一 者可藉閥（未顯示）隔離及移除（如第一具體例）。氟係通過 含有負載純化器3 2 0及備用純化器匣盒3 2 4之純化匣盒， 且接著藉負載及備用壓縮器3 2 8、3 3 0至含有複數個貯槽 3 2 6之壓縮匣盒。接著將氟以管線輸送至C V D工具，例如 供使用。氟化氫之供應物係容納於貯槽3 3 2中。氟化氫蒸 發器3 3 4蒸發來自貯槽3 3 2之液態氟化氫，且將其供應至 匣盒3 0 4、3 0 6、3 0 8，俾維持固定濃度之電解液。氟抑制 匣盒3 4 0經提供以便自氟供料移除固形物、自管件移除氟 (例如當更換匣盒以供保養或修理時），且氟萃取未指定供 消費者處理使用。圖9之裝置具有第一具體例之全部管件 潔淨系統、安全萃取及洗滌系統。 【圖式簡單說明】 為了更完全地暸解本發明，請參照以下附圖，其中： 圖1顯示先前技藝產II電池之示意斷面圖； 圖2 A顯示根據本發明裝置之第一具體例的前視圖（無嵌 板）； 21 312/發明說明書(補件)/92-09/92119518 200403187 圖 2B顯示圖 2A 裝 置 之 側 視 圖 1 圖 3 顯 示 無 殼 體 嵌 板 之 圖 2 氟 匣 盒 的 側 視 圖 圖 4 顯 示 無 殼 體 嵌 板 之 圖 3 氟 匣 盒 的 前 視 圖 ， 圖 5 顯 示 無 圖 2 裝 置 之 嵌 板 之 氟 純 化 單 元 的 側 視圖， 圖 6 顯 示 圖 5 之 敦 純 化 單 元 的 前 視 圖 > 圖 7 顯 示 無 圖 2 裝 置 之 欲 板 之 缓 衝 單 元 的 側 視 圖； 圖 8 顯 示 圖 7 之 緩 衝 單 元 的 前 視 圖 圖 9 顯 示 根 據 本 發 明 裝 置 之 第 二 具 體 例 的 透 視 圖，其中 要 及 其 他 殼 體 嵌 板 係 為 了 簡 潔 之 必 要 而 移 除 〇It has recently been established that instead of the conventional gas compounds mentioned above, fluorine gas may be used directly or with atomic fluorine (after molecular fluorine treatment in a plasma chamber cleaned with a CVD processing chamber). The added benefit of molecular fluorine is that it does not contribute to global warming. European patent EP-A-1 1 3 8 8 0 2 discloses the use of molecular fluorine to remove contaminating materials from a CVD chamber. However, although EP-A-1 1 8 8 0 2 discussed above determines that molecular fluorine itself or molecular fluorine processed to produce atomic fluorine can be effective for CVD cleaning, it does not suggest how to generate such gaseous fluorine for supply to the market CVD plant. However, the electronic component manufacturing industry cannot properly set up to maintain or handle custom chemical plant settings, which will need to produce the amount of fluorine needed to clean some CVD chambers found in typical modern factories used to make electronic components. The industry needs reliable, expandable, on-site manufacturing and delivery of high-purity fluorine gas streams. It is necessary that the maintenance and expansion of the fluorine-producing plant can be performed quickly, and there are only minimal (or no) chemical hazards and, importantly, no manufacturing losses during these maintenance and expansion. When the amount of fluorine production capacity required by some users increases as the manufacturing capacity required for electronic components increases, the aspect of expansion due to the increased number of CVD chambers is important. Due to safety considerations and the fact that the amount of fluorine stored at a pressure of 28 bar is only 1.4 kg (in a typical 50-liter steel cylinder), it is impractical to use compressed fluorine in a steel cylinder for large-scale CVD applications. Therefore, the amount of compressed fluorine required in normal commercial plants represents an unacceptable environmental and safety hazard, because when 6 6312 / Invention Specification (Supplement) / 92 »09/92119518 200403187 is compressed, the reactivity of fluorine is greatly improved. . Furthermore, the cost provided in this way is excessive. As far as real estate fluorine is present in many factories, however, the fluorine-producing device conforms to the chemical industry standards related to fluorine production, and requires a large amount of and frequent operator intervention, and usually involves chemical agents (such as the electrolyte of fluorine gas). Control or sampling. This procedure is in the chemical industry, where it is expected that employees will wear appropriate 1¾ and, for example, use breathing apparatus to protect themselves from release of environmentally friendly fluorine gas (when the battery connection is broken or the battery is open) ). However, it is unacceptable in the electronics industry. It is expected that in this electronics, employees will not need to rely on protective clothing and the like, and at all times hazardous gases will be contained in containers and not released in any environment. territory. In the absence of the special potential created by the use of molecular fluorine in CVD tool cleaning, it represents a cost savings of at least 30% necessary to change these industrial processes and cleaning chemicals. Therefore, initially a CVD processing tool can be coupled to a conventional fluorine-producing cell. This method has obvious advantages, because the output of the fluorine battery may meet the fluorine requirements of its special tools. This method can also reduce the fluorinated pipe fittings. The obvious advantage is that the failure of a fluorine generator will not cause the entire plant and only one CVD tool will be stopped. In practice, however, the practical and economic disadvantages of this formula are more important than the attractiveness of the surface of each CVD tool with a generator. Each fluorine generator must have the same process module, so the unnecessary and expensive components are guaranteed. In this way, the industry is waiting for any process to be put into the environment. The existing § is tolerated by the mother and the other should be shut down. One fluorine on this side must be included. Purification, gas compression and storage, and reduction of generator effluent) are necessary. As a result, this surge will result in the distribution of hazardous chemical processes, including large hydrogen fluoride inventories and fluorine gas storage throughout manufacturing facilities. As a result, all fluorine generator operation and maintenance activities will be distributed similarly, which has a negative implication of plant safety. In addition, the quality of fluorine gas is the most important in CVD cleaning applications, and because continuous online analysis is excessively expensive, when several equipment will be necessary and periodic fluorine gas sampling from multiple equipment has many implementations and safety Disadvantages make gas quality control more difficult. In contrast to the way in which each tool is equipped with a fluorine generator, a single large conventional generator with separate feeds into a plurality of CVD tools is irresistible. The defect is the failure or shutdown of the generator used for repair or maintenance causing the entire process. Termination (because the generator was damaged for a long time). [Summary of the Invention] A first aspect of the present invention relates to a device for producing fluorine by electrolyzing hydrogen fluoride. The device includes: a plurality of individual fluorine-generating units; A fluorine gas distribution system that consumes fluorine gas; the fluorine generating unit can be individually isolated from the gas distribution system system and can be removed from a device for remote maintenance. The term "repair" is intended to cover any reason for removing an individual fluorine-producing unit from the device. In the present invention, the term "repair" includes, for example, the routine repair, maintenance or repair of a battery. The other purpose is that the repairable battery can be removed from the device and taken away from the factory (the fluorine is consumed here, so that there is no inconvenience to the manufacturing plant or employees, 8 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 Contamination or safety hazard). In this specification, the device is a "complete" fluorine-producing device. The term "whole set" is intended to represent a plant that is built and assembled, shut down, closed, and then transported as a separate plant to a consumer area (e.g., using Fluoride is handled by consumers). In general, the device can be completely self-contained; in addition to consumer-provided maintenance (such as electricity, water, compressed air, or nitrogen supplies) to make the device operational; in a container that can be transported by sea or sea, and where the container is The device will exist and operate in the consumer area. An entire fluorine-generating plant or plant can generally be classified as a plant intended to produce a total of 0 to 2.7 kg of F2 per hour. In the chemical industry, there are conventional large-scale fluorine-producing factories that can produce thousands of tons of fluorine per year. Each of these batteries will usually produce no less than 4 kg of fluorine per hour. These factories can be worn by employees and removed using appropriate safety equipment. Individual batteries are built in situ for multiple batteries and related equipment (brought to the operating area and assembled). These plants are used, for example, in the nuclear industry to make nuclear fuel precursors (such as uranium hexafluoride). These plants are quite different and distinguishable from the "full set" units that can be transported, such as a unit that produces one of the subject matter of the present invention. In the present invention, the device may be contained in a container having an overall size that does not substantially exceed a standard ISO container (or smaller), as will be described in more detail below. In this specification, the device includes a plurality of independent fluorine generating units. These cells can be composed of a single battery (the cell has an effective cathode and an anode within this range). In addition, these units may include a set of batteries (the unit may have more than one cathode and anode within this range). Therefore, the device according to this 9 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 contains a plurality of fluorine-producing units, which are isolated from each other, and are isolated from the device as a whole, and each unit is Individually removed from the device without interrupting the overall supply of fluorine from the device. For easier explanation of the present invention, the individual fluorine-producing units will be hereinafter referred to as "fluorine cassettes". Similarly, other facilities in a fluorine production unit, such as a fluorine purification unit and a fluorine compression and storage unit, are also called cassettes, such as a "purification cassette" and a "compression and storage cassette". The term "box" is intended to convey the meaning of a stand-alone package that has the stated characteristics or facilities (may be easily removed from the device for repair or repair, and may be replaced with the same packaging, but for people No danger or harm to smooth fluorine production). A common term in the fluorine-producing industry refers to a fluorine "battery" as a container, but the container may have a plurality of anodes therein (the container itself usually forms the anode). Prior art fluorine batteries may typically have up to 36 separate anodes. Therefore, in the present invention, each fluorine battery or cassette may have, for example, 6, 12, or 24 anodes (depending on the fluorine demand of the consumer). This case further intends to use another substantially the same fluorine cassette Instead of removing the cassette for fluorine, the fluorine production capacity of the device was not significantly reduced. The device according to the present invention provides a stand-alone fluorine production system with sufficient fluorine production capacity for the factory, for example, as a cleaning gas for the CVD chamber or tool to which it is connected, so that it can be borrowed less than individual fluorine cartridges in the device The total number of boxes meets the total fluorine requirements. Therefore, for example, if a fluorine cassette needs to be repaired or repaired or maintained, the device can continue to generate a total fluorine demand without the need to shut down or otherwise interrupt the fluorine producing device according to the present invention. As described above, the fluorine-removed cassette can be immediately replaced with a fluorine cassette that is substantially the same (based on important materials and dimensions 10 312 / Invention Specification (Supplement) / 92 »09/92119518 200403187), so that the total There is no impairment of the potential fluorine production capacity. For example, for a device with three fluorine cartridges, the normal average output of the three cartridges will be less than the 66% peak output of each cartridge at maximum demand. Therefore, if one cartridge needs to be removed for any reason, the two remaining cartridges will be able to meet the total peak fluorine demand of the factory-supplied application. Therefore, a single point of failure of the fluorine cassette of the device of the present invention will not cause the overall shutdown of the device or reduce the ability to supply peak fluorine demand. As mentioned above, fluorine-producing batteries can usually be repaired, maintained, or repaired in situ. They need to be closed and disassembled in place. Due to the extremely hazardous nature of fluorine gas and the electrolyte used, all of them (but necessary) are properly dressed Employees are evacuated from the place where this work is performed. The downtime is usually several days to complete the work. This represents the manufacturing period of damage and loss in the plant (supplying from a fluorine plant). By adopting the device of the present invention, it is intended that the work requiring a fluorine box is electrically isolated by means of a valve member (for the consideration of fluorine gas), removed from the device and transported (such as by a truck) to the distance required to perform the required work End zone. However, the replacement fluorine cartridges (retained as storage supplies) can be installed in the unit immediately. Therefore, there is no time limit on the time required for the removed battery to be operational again; the battery can be operated in a place that is properly set up for this job; for people who work in the factory (the fluorine box is removed from here) No harm occurs; and no manufacturing time is lost in the factory. The device according to the invention can be quite small (based on overall dimensions). For example, as mentioned above, it can be larger than the size of a standard ISO container (internationally used to transport and transport many types of goods). The overall dimensions of these containers are approximately 2. 4 4 meters wide X 2. 4 4 meters high X 6. 5 meters long (or about 8 inches as measured in inches) 11 312 / Invention Specification (Supplement) / 92 -09/92119518 200403187 inches wide x 8 inches high x 20 inches long). Therefore, the fluorine-producing device of the present invention can be small in size and can be easily installed in a convenient place in a consumer manufacturing plant. The device of the present invention includes an integrated, independent fluorine-producing plant, which can be shipped by road or by sea as a unit. The device according to the invention (when referenced to an ISO type 0 container) may contain up to three fluorine cassettes, at least one fluorine purification cassette and at least one fluorine compression and storage / buffer cassette. A specific example of the present invention includes a fluorine-producing device having three fluorine cassettes, two fluorine purification cassettes, one fluorine compression and storage cassette, and other related equipment (all enclosed within the outer range of a standard ISO container). However, there is another conveying aspect, and it is a fluorine cassette for transporting replacement or replacement; the standard ISO container can accommodate up to 8 fluorine cassettes (based on a width of about 0.74 meters), however, this only Provided as an example, as individual fluorine cassettes may be constructed in individual size ranges. The box of the device of the present invention is a self-contained transport package (with its completely framed outer casing), making the box a closed unit and without further packaging or protection for transportation. Although the fluorine cassette for the special device according to the present invention can be formed as a special set of external dimensions and has a maintenance connection point and a fluorine outlet and a hydrogen outlet and the like (in a predetermined direction) to ensure interchangeability, the fluorine cassette The actual fluorine battery inside can be changed to meet consumers' fluorine needs. For example, a fluorine battery may initially have a fluorine production capacity of 0 to 385 g / h, and as demand decreases, the output capacity of the fluorine battery may be changed to, for example, 0 to 700 g / h or 0 to 1 4 0 0 g / hour. Therefore, the device according to the present invention can be upgraded as the demand for fluorine increases. The fluorine box can be arranged in the overall device housing, wherein the overall device housing 12 312 / Invention Specification (Supplement) / 9249/92119518 200403187 can be installed for common maintenance (for all fluorine box inside the device housing). Such general maintenance may include fluid fittings, cable bodies, and electrical / equipment wiring harnesses. Isolation valves are provided for the maintenance of hazardous fluids in fluorine cassettes. Preferably, hazardous fluid maintenance for the cassette is provided by a double isolation valve with a vacuum connection in between. As a result, the two isolation valves can be closed and a vacuum applied to facilitate the removal of hazardous contents (before removing the fluorine cassette from the unit) before damaging the fluorine cassette and related tubing. A vacuum extraction system for removing hazardous materials is preferably connected to a washing system (for removing and neutralizing hazardous materials). Non-hazardous fluid maintenance can be provided by, for example, quick-connect couplings. Once the fluorine cassette is disassembled from the device, it is completely sealed from the external environment and poses no danger to employees. Similarly, the newly replaced fluorine cassette is harmless until it is connected to the device and the isolation cage is opened to allow the hazardous fluid to flow. Spare fluorine cassettes can be stored in place for quick replacement. Likewise, the removed cassette can be safely stored in situ until, for example, it can be removed to a remote repair or off-site maintenance facility. The fluorine cassette can be provided with a component for facilitating the movement of the cassette into and out of the device casing. Suitable components may include, for example, wheels. In a preferred embodiment of the device according to the present invention, the fluorine cassette itself is provided with a separate casing around the fluorine-producing battery, so that any fluorine leakage (for example) is contained within the casing. More preferably, the cassette housing can be connected to a vacuum extraction system (equipped with a washing means to remove harmful chemicals). In the device of the present invention, each fluorine cassette has its own case (provided by the metal frame and panel of the strong 13 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187). When installed in the unit, the housing is connected to the extraction and washing components in order to handle any potential leaks, thus providing a sealed protective enclosure. When the cassette is removed from the device, the housing provides two advantages: the protection of the cassette during transport without further packaging, and the protection of the man-controlled cassette. According to a preferred embodiment of the device of the present invention, at least one (preferably at least two) fluorine purification cassette is also provided, and the output of the fluorine cassette is passed therethrough in order to remove unwanted particulate materials or unwanted gaseous states thereafter. Contaminants (before reaching any designated treatment facility). The purpose of having two of these boxes is to provide one box that needs repair or replacement during the production of fluorine. Such unwanted materials may include, for example, hydrogen fluoride, which is transported from an electrolyte in a fluorine stream and may pass through, for example, a sodium fluoride trap. Carbon tetrafluoride formed by reacting fluorine with a carbon anode can be removed by a suitable known adsorption system. The fluorine purification box can also be isolated and easily removed from the device for repair and maintenance in a manner similar to the fluorine box. Therefore, it is preferable to perform this isolation by using a double isolation valve (using an inserted vacuum extraction facility as a fluorine cassette). Another preferred feature of the device according to the present invention is that it can also provide a fluorine buffer box connected to a downstream line of the fluorine purification box. In effect, the buffer box collects the purified fluorine produced and stores it in a tower tank to provide fluorine storage, mitigate supply fluctuations and provide fluorine at a fixed pressure. The device according to the invention can be completely housed in the main housing frame, wherein the main housing frame is provided with suitable panels in order to effectively seal the housing against the external environmental pressure. More preferably, the main casing is provided with an evacuation member so that any leakage is removed without contaminating the outside area. The evacuation system can be connected to a washing unit suitable for 14 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 to remove and safely dispose of any hazardous substances. The main casing is preferably provided with all necessary power supplies and electric control systems in a known manner, and electrolysis of hydrogen fluoride electrolyte is performed to generate fluorine. According to a preferred embodiment of the device of the present invention, the frame of the fluorine cassette can be used as the cathode connection point of the fluorine battery in the cassette. Therefore, only the installation of the cassette in the main casing realizes the necessary cathode for the battery in the cassette. connection. Preferably, the device according to the present invention is further provided with a clean member to remove potentially reactive fluid from the pipe before introducing fluorine. Such clean members may include valve members, which are connected to the device fittings for introducing, for example, nitrogen into the fittings, and clean oxygen from the fittings (for example). In another specific example of a device according to the present invention, each individual fluorine cassette may be provided with the necessary facilities so that the device can continue to function (even if some "centralized" device maintenance should fail). In another specific example, the independent box housing may also be provided with a DC power supply unit, which is used for electrolysis, fluorine purification and compressor components and fluorine storage tanks / buffer facilities. These cassettes have a relatively large volume, and the fluorine-generating unit is placed in the bottom of the cassette case, thus leaving enough space to accommodate additional facilities. It can also be connected to a fluorine tank / buffer facility by a double isolation valve. In another specific example, the removal of the device casing will be from a fluorine storage tank / buffer unit (when the fluorine battery itself, the fluorine purification and compression facilities are upstream of it). A second aspect of the present invention provides a method for operating and maintaining a device for producing fluorine by electrolytic hydrogen fluoride. The method includes the following steps: providing a plurality of fluorine-producing cassettes which are operatively connected for remote use And a fluorine gas distribution system that consumes fluorine gas; providing components for isolating any individual fluorine-producing box from the fluorine gas distribution system and from each other 15 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187; and Provides components for separating and removing the isolated fluorine-generating cassette from the device without interrupting the supply of fluorine from the remaining fluorine-generating cassette. The same definitions relating to the fluorine-generating unit in the device according to the first aspect of the invention are used in the method according to the invention. [Embodiment] Please refer to FIG. 1 at this moment, which is only intended to explain the basic theory of producing fluorine by electrolysis. The fluorine-generating battery is shown schematically as 10 in a sectional view. The battery contains a container 12 which may or may not constitute the cathode of the battery; in this example, the separate cathodes are shown as 14. The top 16 of the container 12 is safely closed because the outlets 18 and 20 have valve members for fluorine and hydrogen, respectively. The container 12 contains an electrolyte 22 containing hydrogen fluoride in a molten potassium fluoride salt. The separate baffle 24 is extended from the top wall 16 of the container, and its bottom end 30 extends below the surface of the electrolyte 32, so the volume on the surface of the electrolyte is effectively divided into two for hydrogen and fluorine, respectively. Separation chambers 34, 36. The anode 38, which is usually a high-density isotropic carbon, extends into the electrolyte 22 and extends below the bottom of the baffle 24 (although this is not always the case). The container 12 is usually provided with a component (not shown) for heating and melting the electrolyte (when solidified at room temperature). * In general, when electricity > is not active, the electrolyte is maintained in the range of 80 to 100 ° C by heating the member. During the electrolysis, heat is generated and the electrolyte must usually be cooled by a suitable cooling member. Any suitable heating member may be used, and may include, for example, a tubular heater extending to the container and passing the electrolyte, an electric blanket around the container, or a steam jacket around the container. A suitable power supply 40 is used for electrolysis of the electrolyte. Generally speaking, the voltage is quite low (approximately 6 to 9 volts), 16 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 but the current is high (approximately 5 0 to 2 4 0 0 amps), the system It depends on the number of anodes in the box. The electrolytic reaction is as follows: 2HF-> F2 + H2 The amount of fluorine generated is proportional to the applied current. The gas (fluorine and hydrogen) generally rises vertically from the anode and cathode surfaces to individual compartments on the electrolyte surface 32. The electrolyte temperature was adjusted as described above, and the composition and liquid level were controlled by adding anhydrous hydrogen fluoride. Look at Figures 2 to 8 at this moment, where the same component symbols represent the same features. The device according to the first specific example of the present invention is shown as 100; this device includes a main housing frame 102, which is provided with a removable panel (not shown) so as to form the main sealed housing 1 in use. 0, and the sealed housing is connected to a vacuum extraction system (not shown) via a manifold 1 2 4 (also connected to a washing system (not shown) to neutralize harmful chemicals). There are three fluorine cassettes 10, 10, 10, and 10 in the main casing 10, 10, and 4, all of which are substantially the same in meaning, each of which can be replaced by the other and has the same Positioning of connection fittings such as isolation valves, pipes, pipe fittings, electrical maintenance and the like. The fluorine box is connected to the fluorine gas manifold 114, and when it is produced by the fluorine box, it is taken out through the fluorine gas standpipe 116 connected to the electrolytic battery in the box (please see Figure 1 above and the fluorine box for more details below) Description). The standpipe 1 1 6 is connected to the manifold 11 4 via double isolation valves 1 1 8 and 1 2 0. The space inserted between them is connected to the vacuum extraction fluorine manifold 1 2 4 (also connected to neutralize any harmful Gas scrubbing system (not shown)). The fluorine generated during the electrolysis is output through the vertical pipe 130 on each box. The vertical pipe is connected to the hydrogen through the flange joint 1 3 2 17 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 Manifold 1 3 4 (direct hydrogen away for disposal or burning if necessary). All fittings through which fluorine flows are connected to a clean gas source (not shown), such as nitrogen, via a suitable valve member (not shown) to allow oxygen and / or moisture to be cleaned from the fittings before introducing fluorine. Each individual fluorine cassette 106, 108, 110 includes a cassette housing frame 140, which can be horizontally divided into two parts: the bottom 1 4 2 of the fluorine-producing battery 144, and the power supply (for electrolysis) and Tops of analogs 1 4 6. The separation of the cassette case allows easy access to the fluorine-producing battery after the cassette case 102, 104 is removed. To assist movement, the fluorine cassette is provided with wheels 148 to facilitate removal of the autonomous housings 102,104. The cassettes shown in Figures 3 and 4 have a fluorine-producing unit, but as described above, the battery may contain 6, 12, or 24 anodes depending on the required fluorine-producing capacity. The fluorine output in each box is inwardly introduced into a single fluorine take-out tube 116 with double isolation valves 118, 120. Similarly, all the hydrogen generated during the electrolysis was introduced into a single outer riser 130. The fluorine-producing battery 1 4 4 has a common encapsulation container 150 made of steel and forms a battery cathode, and it is welded to the bottom 1 2 4 of the case frame 1 4 0. Therefore, the housing frame forms the cathode connection point of the entire cassette. Each cassette may have its own DC power supply 152 and control system 154, however, the power supply and control system of all cassettes may be centralized in the main housing 104. The top of the main casing 1 0 2 and 1 0 4 is a bus bar, a main power supply (not shown), and the like (each fluorine box is connected to it, and by inserting electricity) Connectors (not shown) to the junction box 158) are installed in the main housing. As mentioned above, the housing frame can form the cathode connection point of the device of the present invention. Since the frame is a cathode, it also delivers a current that can reach approximately 240 amperes (with anode 18 312 / Invention Specification (Supplement) / 92 »09/92119518 200403187 box). The frame is therefore made of a large cross-section material, which prevents it from reaching undesirably high temperatures (due to resistance heating). The cathode connection is 0 volts to ground and the anode connection is 6 to 9 volts. The use of the housing frame as the cathode connection point and current carrier allows the device to be produced more economically with a strong frame (due to thicker cross-section materials and no unnecessary extra copper cables to make the cathode conductor). Because the frame is 0 volts to ground, the device is electrically safe. The total fluorine output of the fluorine box 10, 6, 10, 1 10 is connected to the fluorine purification box 170, where fluorine is passed to remove particulate materials such as hydrogen fluoride or other electrolyte components (already Take away by fluorine flow) and pollutants formed during electrolysis. The purification cassette will be explained in more detail in FIGS. 5 and 6. The purification cassette contains a container 172 containing a chemical trap and a filter (not shown) to remove unwanted material from the fluorine stream in a known manner. Purification cassette 1 70 has a housing frame 174 surrounding a container 17 2 and has a double isolation valve 1 7 8 and 1 0 0 in a manner similar to that of a fluorine cassette. It is allowed to be installed in the purification cassette. And remove the purification cassette from the device (if necessary). This unit is equipped with wheels 180 to assist movement. The purified fluorine gas passes from the cassette 170 to the fluorine compression cassette 190 shown in Figs. In this embodiment, the compression cassette contains three holding tanks 192 with a total capacity of 650 liters, and can safely withstand 5 bar pressure of fluorine (although for safety reasons, this pressure of fluorine is usually not used). The purified fluorine output from the purification cassette 170 is fed to a cassette pump 19 4 and supplied to a holding tank 19 2 through a pressure controller 19 6. The compression cassette 190 contains the stored fluorine, so that if the unit must be shut down for any reason (for a period of time to produce fluorine, for example, in order to replace the purification cassette 170), the stored fluorine will continue Meet the process requirements until the restart of fluorine production. The compression box is also flat. 19 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 Slows the fluctuation of fluorine production, so that fluorine can be supplied to the processor under a fixed pressure (for example). In a similar manner to the fluorine cassette and the purification cassette, the compression cassette has a housing frame 200 and wheels 202. Like the fluorine and purification cassettes The compression cassette is once again connected to the fluorine manifold via a double isolation valve (not shown). The fluorine output is from the second pressure controller 198 to the fluorine manifold 1 1 4 to the processing plant using fluorine. It can be found from Figs. 2 A, 2 B, 3, and 4 that, for example, the fluorine cassette 10 106 can be installed with the main casing 102 and 104 and removed from the autonomous casing 102 and 104 without the need for two other cassettes 10 8, 1 10 (Procedures for continuously supplying fluorine for external operation of the device). The fluorine production capacity of the device 100 has been calculated so that, for example, any two of the three cartridges installed meet the overall process requirements of the maintenance factory, because one cartridge is redundant or can be removed or replaced as needed. In the above embodiment, the device 100 is smaller than the size (in length) of the I S 0 container, and thus can be easily transported by road or sea. In addition, the device may be mentioned as above, but it is slightly larger, but still within the scope of the standard IS 0 container. It has empty space to accommodate additional fluorine cassettes (for example). expansion. The empty space can be provided with the required valves and pipe connections to the manifold, so that additional fluorine cassettes can only be connected to the system (eg with existing cassettes). The main housing frame 10 is provided with removable panels, so that the substantially sealed housing (in use) reaches the fluorine outlet. The enclosure is connected to the site extraction and cleaning system to neutralize harmful chemicals. In addition, each fluorine cartridge purification cartridge and compression cartridge are similarly arranged in use, wherein the panel is located on the frames 140, 174, and 2000, and is clamped on the main casing 10 02. 1 0 4 312 / Invention Specification (Supplement) / 92-09 / 92119518 Factory box and harm: the basic supply and the necessary washing system 20 200403187 into a substantially sealed secondary shell, etc. The secondary housing is also connected to the site extraction and washing system. Fig. 9 shows a single perspective view of a fluorine generating apparatus 300 according to a second specific example of the present invention. In view of the capacity and ability to manufacture, process, control, and store fluorine, the device of Fig. 9 is similar to that described in Figs. 2 to 8 of the first specific example. The device 3 0 0 again has a main housing frame 3 2 2 which is provided with panels (not shown) in order to form a substantially sealed housing. Provide three fluorine cassettes 3 0 4, 3 0 6, 3 0 8, each with its own housing frame 310, 312, 314 (with panel), and each can be isolated by a valve (not shown) And remove (as in the first specific example). The fluorine is passed through a purification cassette containing a load purifier 3 2 0 and a spare purifier cassette 3 2 4, and then a load and a spare compressor 3 2 8, 3 3 0 to a compression cassette containing a plurality of storage tanks 3 2 6 box. The fluorine is then piped to a CVD tool, for example, for use. The supply of hydrogen fluoride is contained in a storage tank 332. The hydrogen fluoride vaporizer 3 3 4 evaporates the liquid hydrogen fluoride from the storage tank 3 32 2 and supplies it to the cassettes 3 04, 3 06, 3 0, and 8 to maintain a constant concentration of the electrolyte. Fluoride suppression cassettes 3 40 are provided to remove solids from the fluorine supply, remove fluorine from the fittings (for example, when the cassettes are replaced for maintenance or repair), and fluorine extraction is not designated for consumer disposal. The apparatus of Fig. 9 has all the pipe cleaning systems, safe extraction and washing systems of the first specific example. [Brief description of the drawings] For a more complete understanding of the present invention, please refer to the following drawings, wherein: FIG. 1 shows a schematic cross-sectional view of a prior art II battery; FIG. 2A shows a first specific example of a device according to the present invention. Front view (without panel); 21 312 / Invention Specification (Supplement) / 92-09 / 92119518 200403187 Figure 2B shows the side view of the device of Figure 2A 1 Figure 3 shows the side of the fluorine cassette without the housing panel 2 View Figure 4 shows the front view of the fluorine cassette of Figure 3 without the shell panel, Figure 5 shows the side view of the fluorine purification unit without the panel of the device of Figure 2 and Figure 6 shows the front view of the Tun purification unit of Figure 5 & gt Figure 7 shows a side view of the buffer unit without the device of Figure 2; Figure 8 shows a front view of the buffer unit of Figure 7; Figure 9 shows a perspective view of a second specific example of a device according to the invention, among others Shell panels are removed for brevity.
(元件符號說明） 10 產氟電池 12、 150、 172 容器 14 陰極 16 容器頂部 1 8、20 出口 22 電 解 液 24 擋 板 30 底 端 32 電 解 液表面 34 氫 室(Description of component symbols) 10 Fluorine-producing batteries 12, 150, 172 Container 14 Cathode 16 Container top 1 8, 20 Outlet 22 Electrolyte 24 Baffle 30 Bottom end 32 Electrolyte surface 34 Hydrogen chamber
36 氟室 38 陽極 4 0 電源供應器 1 00、3 0 0 產氟裝置 312/發明說明書(補件)/92-09/92119518 22 200403187 102、302 主殼體框架 1 04 主密封殼體 106、 108、 110、 304、 306、 308 氟匣盒 114 歧 管 116' 130 氟 氣 豎 管 118、 120^ 178 180 124 氟 歧 管 132 凸 緣 接 頭 134 氫 氣 歧 管 140 匣 盒 殼 體 框 142 氟 匣 盒 底 部 144 產 氟 電 池 146 氟 匣 盒 頂 部 148、 180 > 202 152 DC 電 源 ,供 應 154 控 制 系 統 158 接 頭 箱 170 氟 純 化 匣 盒 174' 2 0 0、 31 0 、 31 2、 314 1 90 氟 壓 縮 匣 盒 192 容 納 槽 194 匣 盒 泵 196 壓 力 控 制 器 320 純 化 器 312/發明說明書(補件)/92-09/92119518 雙重隔離閥36 Fluoride chamber 38 Anode 4 0 Power supply 1 00, 3 0 0 Fluorine-producing device 312 / Invention manual (Supplement) / 92-09 / 92119518 22 200403187 102, 302 Main housing frame 1 04 Main sealed housing 106, 108, 110, 304, 306, 308 fluorine box 114 manifold 116 '130 fluorine gas standpipe 118, 120 ^ 178 180 124 fluorine manifold 132 flange joint 134 hydrogen manifold 140 cassette housing frame 142 fluorine cassette Bottom 144 Fluoride battery 146 Fluorine box top 148, 180 > 202 152 DC power supply, 154 control system 158 connector box 170 Fluorine purification box 174 '2 0 0, 31 0, 31 2, 314 1 90 Fluoro compression box Box 192 Receiving tank 194 Cassette pump 196 Pressure controller 320 Purifier 312 / Invention manual (Supplement) / 92-09 / 92119518 Double isolation valve
輪子wheel
殼體框架 23 200403187Housing frame 23 200403187
324 備 用 純 化 器 匣 盒 3 2 8 > 330 負 載 及 備 用 壓 縮器 3 2 6 > 332 貯 槽 334 氟 化 氫 蒸 發 器 340 氣 抑 制 匣 盒 312/發明說明書(補件)/92-09/92119518 24324 Spare Purifier Box 3 2 8 > 330 Load and Spare Compressor 3 2 6 > 332 Storage Tank 334 Hydrogen Evaporator 340 Gas Suppression Box 312 / Invention Manual (Supplement) / 92-09 / 92119518 24