TW200408800A - Method and apparatus for inspecting display panel - Google Patents
Method and apparatus for inspecting display panel Download PDFInfo
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- TW200408800A TW200408800A TW091137619A TW91137619A TW200408800A TW 200408800 A TW200408800 A TW 200408800A TW 091137619 A TW091137619 A TW 091137619A TW 91137619 A TW91137619 A TW 91137619A TW 200408800 A TW200408800 A TW 200408800A
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- 238000000034 method Methods 0.000 title claims abstract description 13
- 230000007547 defect Effects 0.000 claims abstract description 30
- 238000007689 inspection Methods 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims description 15
- 239000004973 liquid crystal related substance Substances 0.000 claims description 15
- 230000010287 polarization Effects 0.000 claims description 12
- 239000000523 sample Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 208000032544 Cicatrix Diseases 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 231100000241 scar Toxicity 0.000 description 3
- 230000037387 scars Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000739 chaotic effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Analytical Chemistry (AREA)
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
200408800 五、發明說明α) 【發明所屬之技術領域】 本發明係有關於液晶顯不面板及玻璃基板寺之#員不板 之檢查方法及裝置。 【先前技術】 如液晶顯示面板之顯示板，將會被進行閃光檢查其含 有液晶元件的晝素是否正確。就此種自動閃光檢查方法及 裝置之一而言，已知有專利文獻1所揭示之技術。 專利文獻1 :日本特開平1 0 - 1 6 0 6 2 8號公報 於此習知技術中，係在將可變更偏光方向之偏光濾鏡 予以配置於CCD照相機與顯示板之間，使透過顯示板之光 通過偏光濾鏡並以CCD照相機進行檢測之際，藉由將偏光 濾鏡所導致的偏光方向予以依序變更，而檢測出易於看出 的突起及異物等之偏光依存性部。 【發明内容】 惟在此習知技術中，由於經常須使透過顯示板之光通 過偏光濾鏡，故在以CCD照相機獲得晝像資訊之際必須變 更因偏光滤鏡造成的偏光角度’同時檢測出顯不板本身的 缺陷。因之，使得偏光濾鏡本身或該驅動機構之構造複雜 並且價格高昂。 本發明之目的，係在於毋須使用複雜的構造之偏光濾 鏡或驅動機構即可檢測出顯示板的缺陷。 有關本發明之檢查方法，係包含：採用由顯示板朝向 光檢測手段之第1光所形成之第1晝像信號；以及相對於前 述顯示板所形成之偏光角度，將前述第1光予以通過具有200408800 V. Description of the invention α) [Technical field to which the invention belongs] The present invention relates to a method and device for inspecting liquid crystal display panels and glass substrates. [Prior art] If the display panel of a liquid crystal display panel is flashed, it is checked whether the daylight element containing the liquid crystal element is correct. As one of such automatic flash inspection methods and devices, a technique disclosed in Patent Document 1 is known. Patent Document 1: Japanese Unexamined Patent Publication No. 10-16 0 6 2 8 In this conventional technique, a polarizing filter capable of changing the direction of polarizing light is arranged between a CCD camera and a display panel so as to transmit the display. When the plate light passes through a polarizing filter and is detected by a CCD camera, the direction of the polarized light caused by the polarizing filter is sequentially changed to detect a polarization-dependent part such as protrusions and foreign objects that are easy to see. [Summary of the Invention] However, in this conventional technique, since the light passing through the display panel often needs to pass through a polarizing filter, it is necessary to change the polarization angle caused by the polarizing filter when the daylight image information is obtained with a CCD camera. It shows the defects of the board itself. Therefore, the structure of the polarizing filter itself or the driving mechanism is complicated and expensive. The object of the present invention is to detect defects in a display panel without using a polarizing filter or a driving mechanism having a complicated structure. The inspection method of the present invention includes: using a first day image signal formed by the first light directed from the display panel toward the light detection means; and passing the first light with respect to the polarization angle formed by the display panel. have
314291.ptd 第5頁 200408800 五、發明說明（2) 蓍· 9 0°不同之偏光角度之偏光濾鏡的第2光所形成之第2晝像 信號，而獲得前述顯示板之真實的缺陷資訊者。 有關本發明之檢查裝置，係包含：接受應檢查之顯示 板之夾座頂部（chuck top);備有通電至前述顯示板之 複數個探針之探測單元；將來自前述顯示板之光檢測出作 —為電氣信號之光檢測手段；相對於前述顯示板所形成之偏 -光角度具有9 0°不同偏光角度，並配置成可在從前述顯示 板朝向前述光檢測手段之光之通路中進出之偏光濾鏡；以 及使用來自前述顯示板之光之中不透過前述偏光濾鏡之第 所形成之第1晝像信號與透過前述偏光濾鏡之第2光所 形成之第2晝像信號，而獲得前述顯示板之真實的缺陷資 訊之晝像處理裝置。 第1光，係可藉由使偏光濾鏡置換至第1光之通路外之 位置獲得。相對於此，第2光，則係可藉由使偏光濾鏡置 換至此將第1光之通路遮斷之位置獲得。第1及第2晝像信 號，係可分別藉由如CCD照相機般之光檢測手段以檢測第1 及第2光之方式獲得。 以未經偏光濾鏡之第1光所形成的第1畫像信號，係含 有顯現顯示板本身之狀態之基板信號（包含真實的缺陷信 Φ);以及顯現導致光之亂反射之塵埃及傷痕等異物存在 之異物信號。但是，經由偏光濾鏡之第2光所形成之第2晝 像信號，雖含有異物信號，但不含基板信號。 因此，顯示板之真實的缺陷資訊，係可藉由採用第2 晝像信號中之異物信號並去除第1畫像信號中的異物信號314291.ptd Page 5 20040800 V. Description of the invention (2) 蓍 · 90 ° The second day image signal formed by the second light of a polarizing filter with a different polarization angle, and obtain the true defect information of the aforementioned display panel By. The inspection device of the present invention includes: a chuck top of a display panel to be inspected; a detection unit provided with a plurality of probes energized to the display panel; and detecting light from the display panel As a light detection means for electrical signals; it has a different polarization angle of 90 ° relative to the polarization-light angle formed by the aforementioned display panel, and is configured to be able to enter and exit the light path from the display panel to the aforementioned light detection means And a second day image signal formed by using the first day image signal formed by the light from the display panel without passing through the first polarized filter and a second light transmitted by the aforementioned polar filter, A day image processing device that obtains the true defect information of the aforementioned display panel. The first light is obtained by replacing the polarizing filter to a position outside the path of the first light. In contrast, the second light can be obtained by changing the polarizing filter to a position where the path of the first light is blocked. The first and second day image signals can be obtained by detecting the first and second light by a light detection means such as a CCD camera, respectively. The first image signal formed by the first light without a polarizing filter is a signal containing a substrate showing the state of the display panel itself (including the real defect letter Φ); and the dust marks that cause the chaotic reflection of light in Egypt, etc. Foreign body signal of foreign body presence. However, the second day image signal formed by the second light passing through the polarizing filter includes a signal of a foreign substance, but does not include a signal of a substrate. Therefore, the true defect information of the display panel can be obtained by using the foreign object signal in the second day image signal and removing the foreign object signal in the first image signal.
314291.ptd 第6頁 200408800 五、發明說明（3) 而獲得。 根據本發明，僅須使偏光濾鏡選擇性地在形成第1光 之通路外之位置與遮斷第1光之位置間置換即可，故不須 採用複雜結構的偏光濾鏡及驅動機構即可檢測出顯示板之 真實的缺陷。 前述真實的缺陷資訊，係可藉由以前述第1晝像信號 與第2晝像信號之減除處理而獲得。前述顯示板，係可為 含有液晶元件者，亦可以是不含液晶元件之玻璃基板，以 及含有相對向於該玻璃基板之偏光板者。 檢查裝置，又於前述第1光之通路上，包含使前述偏 光濾鏡選擇性地在不位於該通路上的第1位置、以及位於 該通路上的第2位置間置換的置換機構。此外，夾座頂 部，亦可具有對所接受之顯示板予以照射光的背光裝置。 【實施方式】 茲參照第1圖以進行說明，檢查裝置1 0，係以封入液 晶元件之液晶顯不面板作為顯不板1 2。顯不板1 2，在以下 說明中雖為具有矩形之平面形狀者，但亦可以是具有其他 平面形狀者。顯示板1 2，在與矩形之至少2邊對應所在位 置具有實施驅動用之通電之複數個電極。 檢查裝置1 0，係包含：接受應檢查之顯示板1 2之夾座 頂部1 4 ;使夾座頂部1 4置換之檢查台1 6 ;與所接受之顯示 板1 2通電之探測單元1 8 ;將通過顯示板1 2之光予以檢測出 作為電氣信號之光檢測器2 0 ;配置成可在顯示板1 2與光檢 測器2 0之間的光路進出之偏光濾鏡2 2 ;使偏光濾鏡2 2可在314291.ptd Page 6 200408800 V. Description of Invention (3). According to the present invention, it is only necessary to selectively replace the polarizing filter between a position outside the path of forming the first light and a position blocking the first light, so a polarizing filter and a driving mechanism with a complicated structure are not necessary. Can detect the real defects of the display board. The aforementioned real defect information can be obtained by subtracting the first day image signal and the second day image signal. The display panel may be a liquid crystal element-containing glass substrate, a glass substrate without a liquid crystal element, or a polarizing plate opposite to the glass substrate. The inspection device further includes a replacement mechanism for selectively replacing the polarizing filter between a first position not on the path and a second position on the path in the first light path. In addition, the top of the holder may include a backlight device for irradiating the received display panel with light. [Embodiment] A description will be given with reference to Fig. 1. The inspection device 10 uses a liquid crystal display panel sealed with a liquid crystal element as the display panel 12. The display panels 12 are those having a rectangular planar shape in the following description, but may be those having other planar shapes. The display panel 12 has a plurality of electrodes for energizing driving at positions corresponding to at least two sides of the rectangle. The inspection device 10 includes: the top 14 of the clip base 12 that receives the display board 12 to be inspected; the inspection table 16 that replaces the top 14 of the clip base; and the detection unit 1 8 that is powered on with the accepted display board 12 ; Photodetector 20 that detects the light passing through display panel 12 as an electrical signal; Polarizing filter 2 2 that is configured to be able to enter and exit the optical path between display panel 12 and photodetector 20; Polarizing light Filter 2 2 available in
314291.ptd 第7頁 200408800314291.ptd Page 7 200408800
五、發明說明（4) 顯，示板1 2與光檢測器20之間z ^ 3X ικ 用光檢測器2 0之輸出信號而獲得$ 出之驅動機構2 4 ;採 訊的晝像處理裝置26 ;以及收二=$板1 2之真實的缺陷‘ (shield case) 28。 等機械裝置之遮蔽箱體 夾座頂部1 4，係為已知之耳 示板1 2之複數個吸附溝者，且^，有真空吸附所接受之_ 從下方照射白色光之背光裝置。 受又之顯示板1 2收容 檢查台1 6，除使基座頂部丨4向χ、γ 移動外，並同時形成使其在向上、、Ζ之方向三次元 籲線0之周圍依角度旋轉之X、γ、 ϋ (Ζ方向）延伸之 )。 Υ Ζ、 Θ 之平台（stage 探測單元1 8，係將具有個 之複數個接觸子3 0之複數個探 配置在中央區域具有與顯示板 之開口 3 4之基板3 6。 別被按壓至顯示板1 2之電極 測塊（probe block) 32， 1 2之平面形狀相對應之矩形 接觸子3 0，在圖式例中，雖係為探針型的探測器，但 亦可以是刀片型、彈性觸針（p〇g op in)型、凸塊（bump )型等任何其他形態者。各探測塊（p r o b e b 1 o c k) 3 2， 係於接觸子3 0之前端（針尖）貫通基板3 6之開口 3 4而突出 Θ基板3 6之下方的狀態下，安裝於基板3 6的上面。 光檢測器2 0，係如CCD照相機及線性感應器（1 i ne sensor)等已知之照相機，其係檢測透過顯示板1 2之光， 而產生顯現顯示板1 2之畫像之電氣信號，以輸出至晝像處 理裝置2 6。V. Description of the invention (4) Display, display board 12 and photodetector 20 z ^ 3X ικ Drive unit 2 4 obtained by using the output signal of photodetector 2 0; daylight image processing device 26 ; And closing two = $ 12 12 true defects' (shield case) 28. Shielding box of other mechanical devices. The top 14 of the clamp base is a plurality of adsorption grooves of the known ear display board 12 and ^, there is a vacuum absorption accepted _ a backlight device that radiates white light from below. The receiving panel 12 accommodates the inspection table 16 in addition to moving the top of the base 丨 4 to χ, γ, and simultaneously forming it to rotate around the three-dimensional appeal line 0 in the directions of upward, and ZO at an angle. X, γ, ϋ (in the direction of Z)).平台 、, Θ platforms (stage detection unit 1 8) are a plurality of probes with a plurality of contacts 30 and a substrate 3 6 with an opening 3 4 with the display panel in the central area. Do not be pressed to the display The electrode probe block 32 of the plate 12 and the rectangular contactor 30 corresponding to the planar shape of the plate 12 are shown in the figure. Although they are probe type probes, they can also be blade type, Any other shape such as elastic pin (bump op), bump (bump), etc. Each probe (rock 1 ock) 3 2 is connected to the front end (needle tip) of the contact 3 30 through the substrate 3 6 It is mounted on the upper surface of the substrate 36 in a state in which the opening 34 is projected below the Θ substrate 36. The photodetector 20 is a known camera such as a CCD camera and a linear sensor (1 i ne sensor). The system detects the light transmitted through the display panel 12 and generates an electrical signal showing the image of the display panel 12 for output to the day image processing device 26.
31429].ptd 第8頁 200408800 _、發明說明（5) 偏光濾鏡2 2，係相對於通過顯示板1 2之光之偏光角度 具有9 0°不同偏光角度（阻止與顯示板1 2所形成之光之偏 光角度相同方向振動之光之通過）者，其係從顯示板1 2入 射至光檢測器2 0之光之中，使相對於顯示板1 2通過之光之 振動方向，向90°不同方向振動之光通過。 偏光濾鏡2 2，係藉由驅動機構2 4，在不會遮斷偏光渡 鏡22從顯示板12朝向光檢測器20之第1光之第1位置，以及 會遮斷其之第2位置間選擇性地移動。 檢查時，顯示板1 2，係載置於夾座頂部1 4，在來自背 光裝置單元之光通過顯示板1 2狀態並使各電極在維持背光 裝置單元之狀態下按壓至接觸子3 0。在此狀態下，偏光濾 鏡2 2即藉由驅動機構2 4選擇性地在第1以及第2位置間置 換。 晝像處理裝置2 6，係以偏光濾鏡2 2移動於第1位置時 之光檢測器2 0之輸出信號；以及移動於第2位置時之光檢 測器2 0之輸出信號為基礎，產生第1以及第2晝像信號，並 採用兩晝像信號而求出顯示板1 2之真實的缺陷資訊。 在當偏光濾鏡2 2移動於第1位置時，從顯示板1 2朝向 光檢測器2 0之第1光不用經過偏光濾鏡2 2，即入射至光檢 測器2 0。因此，光檢測器2 0之輸出信號將成為不經由偏光 濾鏡2 2之第1光所形成之第1信號，而晝像處理裝置2 6將產 生與第1信號對應之第1晝像信號。 在當偏光濾鏡2 2移動於第2位置時，由於從顯示板1 2 朝向光檢測器2 0之第1光入射至偏光濾鏡2 2，故通過光偏31429] .ptd page 8 200408800 _, description of the invention (5) Polarizing filter 2 2 has a different polarizing angle of 90 ° with respect to the polarizing angle of light passing through the display panel 12 (prevents the formation from the display panel 12 2 The light passing through the light with the same polarization angle of the light passing through it) is incident from the display panel 12 into the light of the photodetector 20, so that the direction of the vibration of the light passing through the display panel 12 is 90. ° Vibration light passing in different directions passes. The polarizing filter 22 is a first position of the first light that does not block the polarizing beam 22 from the display panel 12 toward the photodetector 20 and a second position that blocks it by the driving mechanism 24. Selectively move from time to time. During the inspection, the display panel 12 is placed on the top 14 of the holder, and the light from the backlight unit passes through the display panel 12 and the electrodes are pressed to the contactor 30 while the backlight unit is maintained. In this state, the polarizing filter 22 is selectively switched between the first and second positions by the driving mechanism 24. The day image processing device 26 is based on the output signal of the photodetector 20 when the polarizing filter 22 is moved to the first position, and the output signal of the photodetector 20 when it is moved to the second position. The first and second day image signals are used to obtain the true defect information of the display panel 12 using the two day image signals. When the polarizing filter 22 is moved to the first position, the first light from the display panel 12 toward the photodetector 20 does not pass through the polarizing filter 22 and is incident on the photodetector 20. Therefore, the output signal of the photodetector 20 will become the first signal formed by the first light of the polarizing filter 22, and the day image processing device 26 will generate the first day image signal corresponding to the first signal . When the polarizing filter 22 is moved to the second position, since the first light from the display panel 12 toward the photodetector 20 is incident on the polarizing filter 22, the light passes through
314291.ptd 第9頁 200408800 五、發明說明（6) 光，濾鏡2 2之第2光即入射至檢測器2 0。因此，光檢測器2 0 之輸出信號將成為由第2光所形成之第2信號，而晝像處理 裝置2 6將產生與第2信號對應之第2晝像信號。 不經過偏光濾鏡2 2之第1光所形成之第1晝像信號，係 含有顯現顯示板1 2本身狀態之基板信號（包含真實的缺陷 信號）；以及顯現導致光之散射或亂反射之塵埃及傷痕 等、異物之存在之異物信號。 但是，經過偏光濾鏡2 2之第2光所形成之第2晝像信 號，雖允許偏光濾鏡2 2相對於第1光之振動方向向9 0°不 _方向振動之光的通過，但由於阻止與第1光振動方向相 同方向振動之光之通過，故含有因光之散射或亂反射所導 致之異物信號，但不含包括真實的缺陷信號之基板信號。 具體而言，如第2圖所示，茲就將許可光之通過之偏 光角度相互為90°不同之2個偏光薄膜40以及42分別配置 於液晶元件層4 4之下面以及上面之顯示用面板1 2之情況進 行以下說明。 首先，來自夾座頂部1 4内之背光裝置單元之光4 6，係 為白色光之外，並同時以光軸為中心包含向3 6 0°方向振 動之光成分。 當此光4 6在通向使水平方向振動之光成分通過之偏光 薄膜4 0時，通過偏光薄膜4 0之光即成為向水平方向振動之 成分的光。 其次，通過偏光薄膜4 0之光，係藉由通過液晶元件層 4 4而偏光為向垂直方向振動之光。314291.ptd Page 9 200408800 V. Description of the invention (6) The second light of the filter 22 is incident on the detector 20. Therefore, the output signal of the photodetector 20 will become a second signal formed by the second light, and the day image processing device 26 will generate a second day image signal corresponding to the second signal. The first day image signal formed by the first light without passing through the polarizing filter 22 is a signal containing the substrate showing the state of the display panel 12 (including the real defect signal); Dust Egypt scars, etc., the presence of a foreign body signal. However, the second daylight image signal formed by the second light passing through the polarizing filter 22 allows the polarization filter 22 to pass the light that is not vibrating in the direction of 90 ° with respect to the vibration direction of the first light, but Since the vibration of the light in the same direction as the first light vibration direction is prevented from passing, it contains the signal of foreign objects caused by the scattering or random reflection of the light, but does not include the signal of the substrate including the real defect signal. Specifically, as shown in FIG. 2, two polarizing films 40 and 42 whose polarizing angles at which light is allowed to pass are different from each other are respectively disposed below and above the liquid crystal element layer 4 4 and the display panel. The case of 12 is explained below. First, the light 4 6 from the backlight unit inside the top 14 of the clip base is not white light, and at the same time, it contains a light component that vibrates in the direction of 360 ° around the optical axis. When this light 46 is passed to the polarizing film 40 which passes the light component vibrating in the horizontal direction, the light passing through the polarizing film 40 becomes the light of the component vibrating in the horizontal direction. Next, the light passing through the polarizing film 40 is polarized light that passes through the liquid crystal element layer 44 and vibrates in a vertical direction.
314293.pld 第10頁 200408800 五、發明說明（7) 其次，通過液晶元件層4 4之光，係穿過使垂直方向振 動之光成分通過之偏光薄膜4 2。藉此，通過顯示板1 2之光 48，即成垂直方向振動之光。 通過顯示板1 2之光4 8，係因應偏光濾鏡2 2置換於第1 以及第2位置之其中之一，而直接入射至光檢測器2 0，或 隔著阻止垂直方向振動之光（通過顯示板1 2之光）之通過 之偏光〉慮鏡2 2而入射至光檢測^§ 2 0。 當偏光濾鏡2 2置換至第1位置時，則由於光4 8不經過 偏光濾鏡2 2，故入射至光檢測器2 0之光包含顯現顯示板1 2 本身之狀態之光。 此外，當導致光之亂反射之塵埃及傷痕等之異物5 0存 在於顯示板1 2時，將使通過顯示板1 2之光或所通過之光由 於異物5 0而散射或亂反射。因此，由異物5 0造成之散射或 亂反射光5 2亦入射至光檢測器2 0。 相對於此，當偏光濾鏡2 2置換至第2位置時，朝向光 檢測器2 0之所有的光將會入射至偏光濾鏡2 2，而且由於偏 光濾鏡2 2具有顯示板1 2所形成之偏光角度與9 0°不同之偏 光角度，故光4 8雖將因偏光濾鏡2 2而被阻止通過，但散射 或亂反射光5 2之中水平方向振動之成分之光5 4將通過偏光 濾鏡2 2。因此，對於光檢測器2 0，水平方向振動之光雖會 入射，但通過顯示板1 2而於垂直方向振動之光則不會入 射。 綜上所述，晝像處理裝置2 6，係當偏光濾鏡2 2置換於 第1位置時，將產生包含顯現顯示板1 2本身狀態之基板信314293.pld Page 10 200408800 V. Description of the invention (7) Next, the light passing through the liquid crystal element layer 44 passes through the polarizing film 42 which passes the light component vibrating in the vertical direction. Thereby, the light 48 passing through the display panel 12 becomes the light vibrating in the vertical direction. The light 4 8 passing through the display panel 12 is directly incident on the photodetector 20 in response to the polarizing filter 22 being replaced at one of the first and second positions, or through a light that prevents vertical vibration ( Light passing through the display panel 12) Polarized light passing through> Considering the mirror 22 2 and incident to the light detection ^ § 20. When the polarizing filter 22 is replaced to the first position, since the light 48 does not pass through the polarizing filter 22, the light incident on the photodetector 20 includes the light showing the state of the display panel 12 itself. In addition, when foreign matter 50, such as dust, scars, or scars, which causes disorderly reflection of light, exists on the display panel 12, the light passing through the display panel 12 or the light passing therethrough is scattered or randomly reflected by the foreign object 50. Therefore, the scattered or randomly reflected light 5 2 caused by the foreign object 50 is also incident on the photodetector 20. In contrast, when the polarizing filter 22 is replaced to the second position, all the light directed to the photodetector 20 will be incident on the polarizing filter 22, and since the polarizing filter 22 has a display panel 12 The polarization angle formed is different from 90 °. Therefore, although the light 4 8 will be prevented from passing by the polarizing filter 2 2, the light component 5 5 which scatters or randomly reflects the horizontally vibrating component 5 2 will Pass the polarizing filter 2 2. Therefore, with the photodetector 20, light that vibrates in the horizontal direction is incident, but light that vibrates in the vertical direction through the display panel 12 is not incident. To sum up, the day image processing device 26 is that when the polarizing filter 22 is replaced at the first position, a substrate signal including the state of the display panel 12 is generated.
31429].ptd 第11頁 200408800 ，五、發明說明（8) 號·（包含真實的缺陷信號）；以及顯現導致光之亂反射之 異物之存在之異物信號之第1晝像信號。相對於此，當偏 光濾鏡2 2置換於第2位置時，則晝像處理裝置2 6，雖會包 含異物信號，但將會產生不包含基板信號之第2畫像信 號。 晝像處理裝置2 6，係採用第2畫像信號中之異物信 號，去除第1晝像信號中的異物信號，藉此求出顯示板12 之真實的缺陷資訊。具體而言，晝像處理裝置2 6，係藉由 從第1晝像信號扣除第2晝像信號方式，而求出顯示板1 2之 #實的缺陷資訊，並將所求出之缺陷資訊儲存於記憶體。 換言之，從異物5 0直接入射至光檢測器2 0之光5 2，與 通過光5 2之中之偏光濾鏡2 2之光5 4，係存在於檢查裝置1 0 以及兩晝像信號内之相同座標位置。因此’如果從第1晝 像信號減除第2畫像信號，則可去除異物信號而求出顯現 顯示板1 2之真實的缺陷位置之缺陷資訊。 所獲得之缺陷資訊，在未圖示之區隔裝置中，將用以 區分成為未具有缺陷處之正常的顯示板；以及具有缺陷處 之缺陷顯示板。 如上述所示根據檢查裝置1 0，藉由使偏光濾、鏡2 2在形 顯示板1 2朝向光檢測器2 0之光之通路外之第1位置； 以及遮斷該光之通路之第2位置間選擇性地置換，而得以 求出顯示板1 2之真實的缺陷資訊，故不須採用複雜構造的 偏光濾鏡及其驅動機構即可檢測出顯示板1 2之真實的缺 陷。31429] .ptd Page 11 200408800, V. Invention Description No. (8) (including the real defect signal); and the first day image signal showing the presence of a foreign object signal that causes the foreign reflection of the light. On the other hand, when the polarizing filter 22 is replaced at the second position, the day image processing device 26 may include a foreign object signal, but a second image signal that does not include a substrate signal will be generated. The day image processing device 26 uses the foreign body signal in the second image signal to remove the foreign body signal in the first day image signal, thereby obtaining the true defect information of the display panel 12. Specifically, the day image processing device 26 obtains the actual defect information of the display panel 1 2 by subtracting the second day image signal method from the first day image signal, and calculates the obtained defect information. Stored in memory. In other words, the light 5 2 directly incident from the foreign object 50 to the photodetector 20 and the light 5 4 passing through the polarizing filter 22 of the light 5 2 exist in the inspection device 1 0 and the diurnal image signal. Same coordinate position. Therefore, if the second image signal is subtracted from the first day image signal, the foreign object signal can be removed and the defect information showing the true defect position of the display panel 12 can be obtained. The obtained defect information will be used to distinguish between a normal display panel without defects in a partition device (not shown) and a defective display panel with defects. As described above, according to the inspection device 10, the polarizing filter and the mirror 22 are positioned at the first position outside the path of the light of the photodetector 20 toward the light display panel 12; The two positions are selectively replaced to obtain the real defect information of the display panel 12. Therefore, the real defect of the display panel 12 can be detected without using a complex structured polarizing filter and its driving mechanism.
314291.ptd 第12頁 200408800 五、發明說明（9) 如第3圖所示，當僅於液晶元件層4 4之其中一方（在 圖中係為下面）具有偏光薄膜4 0之顯示板時，縱橫振動之 光4 6，首先將藉由偏光薄膜4 0去除垂直方向振動之光成 分，並使水平方向振動之光成分之光通過偏光薄膜4 0。 其次，通過偏光薄膜4 0之光將在液晶元件層4 4偏光成 垂直方向振動之光成分，而從顯示板1 2指向至光檢測器 2 0。因此，畫像處理裝置2 6，如當偏光濾鏡2 2移動於第1 位置時，則將產生第1晝像信號，如移動於第2位置時，則 將產生第2畫像信號。 本發明，不僅不會受到存在於顯示板1 2之表面之異物 影響，亦如第4圖所示，不會受到存在於顯示板1 2之内部 之異物，及光檢測器2 0之光檢測元件之缺陷等之影響而可 獲得真實的缺陷資訊。 - 本發明，不僅可適用在採用將光照射在顯示板1 2之背 光裝置單元之檢查技術，亦可適用在將反射鏡配置在顯示 板1 2之背後而採用反射光之檢查技術。 本發明，並不以上述實施例為限，只要不悖離本發明 之主旨均可作各種變更。314291.ptd Page 12 200408800 V. Description of the invention (9) As shown in Fig. 3, when only one of the liquid crystal element layers 44 (below in the figure) has a display panel with a polarizing film 40, The light 4 6 that is vibrating in the vertical and horizontal directions first removes the light component that is vibrating in the vertical direction by the polarizing film 40 and passes the light component that is vibrating in the horizontal direction through the polarizing film 40. Next, the light passing through the polarizing film 40 polarizes the light in the liquid crystal element layer 44 into a light component vibrating in a vertical direction, and points from the display panel 12 to the photodetector 20. Therefore, if the image processing device 26 is moved to the first position, the first day image signal will be generated, and if it is moved to the second position, the second image signal will be generated. The present invention is not only not affected by the foreign matter existing on the surface of the display panel 12, but as shown in FIG. 4, it is not affected by the foreign matter existing inside the display panel 12 and the light detection of the light detector 20. The actual defect information can be obtained by the influence of component defects. -The present invention is applicable not only to the inspection technology using a backlight device unit that irradiates light to the display panel 12 but also to the inspection technology that uses a reflected light to dispose a reflector behind the display panel 12. The present invention is not limited to the above embodiments, and various changes can be made as long as they do not depart from the gist of the present invention.
314291.ptd 第13頁 200408800 I圖式簡單說明 r圖式簡單說明】 第1圖係顯示本發明之檢查裝置之一實施例圖。 第2圖係光之偏光狀態之說明圖。 第3圖係光之偏光狀態之另一說明圖。 第4圖係光之偏光狀態之又一說明圖。314291.ptd Page 13 200408800 I Schematic description r Schematic description] Figure 1 is a diagram showing an embodiment of the inspection device of the present invention. Fig. 2 is an explanatory diagram of a polarization state of light. FIG. 3 is another explanatory diagram of the polarization state of light. Fig. 4 is another explanatory diagram of the polarization state of light.
10 檢 查 裝 置 12 顯 示 板 14 夾 座 頂 部 16 檢 查 台 18 探 測 單 元 20 光 檢 測 器 偏 光 濾 鏡 24 驅 動 機 構 26 晝 像 處 理 裝 置 28 遮 敝 箱 體 30 接 觸 子 32 探 測 塊 34 開 V 36 基 板 40 > 42 偏 光 薄 膜 44 液 晶 元 件層 46 > 48 1 ' 54 光 50 異 物 52 亂 反 射 光 314291.ptd 第14頁10 Inspection device 12 Display board 14 Clamping top 16 Inspection table 18 Detection unit 20 Photodetector polarizing filter 24 Driving mechanism 26 Day image processing device 28 Covering box 30 Contactor 32 Detection block 34 Open V 36 Substrate 40 > 42 polarizing film 44 liquid crystal element layer 46 > 48 1 '54 light 50 foreign matter 52 random reflected light 314291.ptd page 14
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|---|---|
| JP (1) | JP2004170495A (en) |
| KR (1) | KR20040044071A (en) |
| CN (1) | CN1249426C (en) |
| SG (1) | SG119174A1 (en) |
| TW (1) | TW571079B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101825781B (en) * | 2009-03-06 | 2012-02-29 | 北京京东方光电科技有限公司 | Optical test device |
| TWI391647B (en) * | 2006-01-11 | 2013-04-01 | Nitto Denko Corp | Production method of deposition films, defect detection method of deposition films, defect detection device of deposition films, deposition films and image display device |
| TWI422815B (en) * | 2006-10-11 | 2014-01-11 | Nitto Denko Corp | Test data processing apparatus and test data processing method |
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| KR100722223B1 (en) * | 2004-12-11 | 2007-05-29 | 주식회사 매크론 | Apparatus for inspecting back light unit |
| JP4884738B2 (en) * | 2005-09-26 | 2012-02-29 | 株式会社日本マイクロニクス | LCD panel inspection equipment |
| KR100783309B1 (en) * | 2006-02-15 | 2007-12-10 | 주식회사 동진쎄미켐 | Inspection system of flat panel display |
| TWI409450B (en) * | 2006-05-04 | 2013-09-21 | Au Optronics Corp | Optical metrology mechanism |
| JP4842034B2 (en) * | 2006-07-12 | 2011-12-21 | 株式会社日本マイクロニクス | Liquid crystal panel inspection method and image processing apparatus |
| KR100834730B1 (en) * | 2006-09-04 | 2008-06-05 | 케이 이엔지(주) | Defect Inspection System of Liquid Crystal Display Panel Using Vision Sensor System |
| KR101286534B1 (en) | 2008-02-29 | 2013-07-16 | 엘지디스플레이 주식회사 | inspection apparatus of Liquid crystal display apparatus and inspection method using the same |
| TWI376500B (en) | 2008-03-28 | 2012-11-11 | Ind Tech Res Inst | System for detecting defect of panel device |
| CN102914889B (en) * | 2012-11-15 | 2016-05-04 | 昆山迈致治具科技有限公司 | LCD measurement jig |
| TWI502186B (en) * | 2014-05-08 | 2015-10-01 | Utechzone Co Ltd | A bright spot detection device for filtering foreign matter noise and its method |
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| CN105806850A (en) * | 2016-03-10 | 2016-07-27 | 惠州高视科技有限公司 | LCD (Liquid Crystal Display) glass defect detection device and LCD (Liquid Crystal Display) glass defect detection method |
| CN106444105A (en) * | 2016-10-18 | 2017-02-22 | 凌云光技术集团有限责任公司 | Method, device and system for detecting defects of liquid crystal screen |
| CN107515222A (en) * | 2017-09-20 | 2017-12-26 | 哈尔滨工程大学 | An ice microstructure observation device |
| JP6834903B2 (en) * | 2017-10-20 | 2021-02-24 | トヨタ自動車株式会社 | Inspection equipment and inspection equipment failure confirmation method |
| CN108267453B (en) * | 2017-12-20 | 2021-05-25 | 张家港康得新光电材料有限公司 | Defect detection method of switchable 3D module |
| JP7051445B2 (en) * | 2018-01-10 | 2022-04-11 | 日東電工株式会社 | Continuous inspection method and continuous inspection device for optical display panel, and continuous manufacturing method and continuous manufacturing system for optical display panel. |
| CN109632829B (en) * | 2018-12-26 | 2021-09-24 | 江苏宏芯亿泰智能装备有限公司 | Glass substrate macroscopic inspection device |
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| JPS61178648A (en) * | 1985-02-04 | 1986-08-11 | Seiko Epson Corp | Liquid crystal display element inspection equipment |
| JPH03217817A (en) * | 1990-01-24 | 1991-09-25 | Nippon Maikuronikusu:Kk | Method and device for inspecting liquid crystal dpsplay panel |
| JPH07146253A (en) * | 1993-11-25 | 1995-06-06 | Sekisui Chem Co Ltd | Defect inspection device for adhesive polarizing film |
| JPH08292406A (en) * | 1995-04-24 | 1996-11-05 | Advantest Corp | Lcd panel inspecting device |
| JPH09257641A (en) * | 1996-03-26 | 1997-10-03 | Seiko Epson Corp | Method and apparatus for inspecting display surface of liquid crystal panel |
| JPH10111237A (en) * | 1996-10-07 | 1998-04-28 | Hitachi Ltd | Manufacturing method of liquid crystal display device, optical inspection device and optical inspection method |
| JPH10160628A (en) * | 1996-11-29 | 1998-06-19 | Advantest Corp | Image quality inspection device for lcd panel |
| JP3533946B2 (en) * | 1998-06-25 | 2004-06-07 | セイコーエプソン株式会社 | Liquid crystal display panel inspection apparatus and liquid crystal display panel inspection method |
-
2002
- 2002-11-18 JP JP2002333450A patent/JP2004170495A/en active Pending
- 2002-12-27 TW TW091137619A patent/TW571079B/en not_active IP Right Cessation
-
2003
- 2003-01-23 KR KR1020030004634A patent/KR20040044071A/en not_active Ceased
- 2003-03-05 SG SG200301150A patent/SG119174A1/en unknown
- 2003-03-07 CN CNB031205127A patent/CN1249426C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI391647B (en) * | 2006-01-11 | 2013-04-01 | Nitto Denko Corp | Production method of deposition films, defect detection method of deposition films, defect detection device of deposition films, deposition films and image display device |
| TWI422815B (en) * | 2006-10-11 | 2014-01-11 | Nitto Denko Corp | Test data processing apparatus and test data processing method |
| CN101825781B (en) * | 2009-03-06 | 2012-02-29 | 北京京东方光电科技有限公司 | Optical test device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004170495A (en) | 2004-06-17 |
| SG119174A1 (en) | 2006-02-28 |
| KR20040044071A (en) | 2004-05-27 |
| CN1249426C (en) | 2006-04-05 |
| CN1501073A (en) | 2004-06-02 |
| TW571079B (en) | 2004-01-11 |
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