TH2075A - The coating is obtained from the chemical reaction of the vapor. - Google Patents

Abstract

Improved vapor-chemical reaction coatings Which has a place that gives the heat that it is Surround the coating cavity To make the condition The temperature inside the chamber is constant or precisely controlled. The internal part of the channel is made of quartz. Or similar materials capable of transferring energy through radiation. Special protection Heat sensitive sealing ring Making the structure of the components It is a glass that will have to undergo severe stress while working. Strengthening and modular design to make and Replace all glass components that come into contact with the gas that Easy to use for coating reaction

Claims (1)

1.Temperature-controlled coating equipment consisting of an inner coating reaction chamber with a gas diffuser. For feeding gases into the inner cavity and removing gases from that cavity, such as a vacuum surround the coating reaction chamber that Is the inner cavity and away from the wall of the inner cavity to maintain Medium vacuum in that compartment Where is the vacuum chamber It consists of a dome-shaped hull and a base that acts in conjunction with the hull. The materials used to make the hull and the base are considered to permit. Radiation That heated by tag: