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SG79289A1 - A method and an apparatus for plasma treating the surface of substrates - Google Patents

A method and an apparatus for plasma treating the surface of substrates

Info

Publication number
SG79289A1
SG79289A1 SG9905452A SG1999005452A SG79289A1 SG 79289 A1 SG79289 A1 SG 79289A1 SG 9905452 A SG9905452 A SG 9905452A SG 1999005452 A SG1999005452 A SG 1999005452A SG 79289 A1 SG79289 A1 SG 79289A1
Authority
SG
Singapore
Prior art keywords
substrates
plasma treating
plasma
treating
Prior art date
Application number
SG9905452A
Inventor
Silvano Keller
Original Assignee
Sulzer Metco Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=4232779&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SG79289(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Sulzer Metco Ag filed Critical Sulzer Metco Ag
Publication of SG79289A1 publication Critical patent/SG79289A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
SG9905452A 1998-12-02 1999-11-03 A method and an apparatus for plasma treating the surface of substrates SG79289A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH02395/98A CH697036A5 (en) 1998-12-02 1998-12-02 A method for plasma surface treatment of substrates, as well as means for performing the method.

Publications (1)

Publication Number Publication Date
SG79289A1 true SG79289A1 (en) 2001-03-20

Family

ID=4232779

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9905452A SG79289A1 (en) 1998-12-02 1999-11-03 A method and an apparatus for plasma treating the surface of substrates

Country Status (6)

Country Link
EP (1) EP1006211B2 (en)
JP (1) JP4636641B2 (en)
CA (1) CA2289873C (en)
CH (1) CH697036A5 (en)
DE (1) DE59911235D1 (en)
SG (1) SG79289A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2402628C1 (en) * 2009-03-23 2010-10-27 Государственное образовательное учреждение высшего профессионального образования "Кубанский государственный технологический университет" (ГОУВПО "КубГТУ") Device for production of nano-structured coating of parts with cylinder surface and shape memory effect
EP2439305A1 (en) 2010-10-07 2012-04-11 Sulzer Metco AG Thermal spray process avoiding the blockage of cooling holes in turbine components
RU2475567C1 (en) * 2011-06-17 2013-02-20 Государственное образовательное учреждение высшего профессионального образования "Кубанский государственный технологический университет " (ГОУВПО "КубГТУ") Plant for obtaining nanostructured coatings from material with shape memory effect on cylindrical surface of parts
RU2674532C1 (en) * 2018-06-15 2018-12-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный технологический университет" (ФГБОУ ВО "КубГТУ") Vacuum unit for nanostructured coating made of material with shape memory effect on part surface
RU2762082C1 (en) * 2020-12-14 2021-12-15 Федеральное государственное казенное военное образовательное учреждение высшего образования "Военный учебно-научный центр Военно-воздушных сил "Военно-воздушная академия имени профессора Н.Е. Жуковского и Ю.А. Гагарина" (г. Воронеж) Министерства обороны Российской Федерации Unit for applying composite materials on the surface of parts by plasma spraying
CN112974071B (en) * 2021-02-23 2022-07-15 山东大学 A coating surface modification device and working method based on thermal spraying process
CN115323307A (en) * 2022-08-15 2022-11-11 奈文摩尔洛阳科技有限公司 Nano zirconia thermal barrier coating plasma spraying device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD291783A5 (en) * 1990-02-05 1991-07-11 Fi "Manfred Von Ardenne",De Zersteubungseinrichtung with rotating substrate carrier
DE4135326C1 (en) * 1991-10-25 1993-06-09 Siemens Ag, 8000 Muenchen, De Coating components by thermal spraying - using preheating kiln to heat workpiece before plasma spraying in vacuum chamber

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1447754A (en) † 1972-06-15 1976-09-02 Secr Defence Apparatus for and process of metal coating
CH611938A5 (en) † 1976-05-19 1979-06-29 Battelle Memorial Institute
US4090941A (en) † 1977-03-18 1978-05-23 United Technologies Corporation Cathode sputtering apparatus
DE2812271C2 (en) † 1978-03-21 1983-01-27 Leybold-Heraeus GmbH, 5000 Köln Device with several lock chambers for the batch coating of substrates
US4500564A (en) † 1982-02-01 1985-02-19 Agency Of Industrial Science & Technology Method for surface treatment by ion bombardment
GB2178227B (en) † 1985-06-17 1990-01-24 Honda Motor Co Ltd Vacuum treating method and apparatus
JPS6212693A (en) † 1985-07-05 1987-01-21 Nissin Electric Co Ltd Epitaxial growth apparatus
DE3618665A1 (en) † 1986-06-03 1987-12-10 Aesculap Werke Ag METHOD FOR APPLYING A PROTECTIVE LAYER ON JOINT OPROSTHESES
JPH0677216A (en) † 1990-09-28 1994-03-18 Applied Materials Inc Plasma annealing method for enhancement of barrier characteristic of vapor-deposited thin film
JPH0586451A (en) * 1991-09-27 1993-04-06 Nippon Steel Corp Vacuum plasma thermal spraying method and device therefor
DE4228499C1 (en) † 1992-09-01 1993-10-07 Dresden Vakuumtech Gmbh Plasma-aided coating of substrates - with a low-voltage arc discharge between a cathode and an anodic electrode
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma
JPH07305158A (en) † 1994-05-06 1995-11-21 Nippon Steel Corp Thermal spray pretreatment method
DE4427259A1 (en) † 1994-07-30 1996-02-01 Mtu Muenchen Gmbh Method and apparatus for cleaning or preheating the surface of workpieces

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD291783A5 (en) * 1990-02-05 1991-07-11 Fi "Manfred Von Ardenne",De Zersteubungseinrichtung with rotating substrate carrier
DE4135326C1 (en) * 1991-10-25 1993-06-09 Siemens Ag, 8000 Muenchen, De Coating components by thermal spraying - using preheating kiln to heat workpiece before plasma spraying in vacuum chamber

Also Published As

Publication number Publication date
DE59911235D1 (en) 2005-01-13
EP1006211B2 (en) 2011-03-16
CH697036A5 (en) 2008-03-31
CA2289873C (en) 2006-02-28
EP1006211B1 (en) 2004-12-08
JP4636641B2 (en) 2011-02-23
EP1006211A1 (en) 2000-06-07
CA2289873A1 (en) 2000-06-02
JP2000169950A (en) 2000-06-20

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