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SG67475A1 - Purification of electronic specialty gases by vapor phase transfiling - Google Patents

Purification of electronic specialty gases by vapor phase transfiling

Info

Publication number
SG67475A1
SG67475A1 SG1998000161A SG1998000161A SG67475A1 SG 67475 A1 SG67475 A1 SG 67475A1 SG 1998000161 A SG1998000161 A SG 1998000161A SG 1998000161 A SG1998000161 A SG 1998000161A SG 67475 A1 SG67475 A1 SG 67475A1
Authority
SG
Singapore
Prior art keywords
transfiling
purification
vapor phase
specialty gases
electronic specialty
Prior art date
Application number
SG1998000161A
Other languages
English (en)
Inventor
John Borzio
Tracey Jacksier
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of SG67475A1 publication Critical patent/SG67475A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0706—Purification ; Separation of hydrogen chloride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/09—Bromine; Hydrogen bromide
    • C01B7/093—Hydrogen bromide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B9/00—General methods of preparing halides
    • C01B9/02—Chlorides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B9/00—General methods of preparing halides
    • C01B9/08—Fluorides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
    • C01C1/00—Ammonia; Compounds thereof
    • C01C1/02—Preparation, purification or separation of ammonia
    • C01C1/024—Purification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Gas Separation By Absorption (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Manufacture And Refinement Of Metals (AREA)
SG1998000161A 1997-02-03 1998-01-22 Purification of electronic specialty gases by vapor phase transfiling SG67475A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/794,346 US6004433A (en) 1997-02-03 1997-02-03 Purification of electronic specialty gases by vapor phase transfilling

Publications (1)

Publication Number Publication Date
SG67475A1 true SG67475A1 (en) 1999-09-21

Family

ID=25162385

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998000161A SG67475A1 (en) 1997-02-03 1998-01-22 Purification of electronic specialty gases by vapor phase transfiling

Country Status (11)

Country Link
US (3) US6004433A (pt)
EP (1) EP0856715B1 (pt)
JP (2) JPH10323501A (pt)
KR (1) KR100559109B1 (pt)
CN (1) CN1225297C (pt)
BR (1) BR9800538A (pt)
CA (1) CA2227715A1 (pt)
DE (1) DE69829788T2 (pt)
SG (1) SG67475A1 (pt)
TW (1) TW346536B (pt)
ZA (1) ZA98582B (pt)

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US20040038803A1 (en) * 2002-02-19 2004-02-26 Derong Zhou Adsorbent for removing water vapor during corrosive gas purification and method for preparing the adsorbent
US7175696B2 (en) * 2002-02-19 2007-02-13 American Air Liquide, Inc. Method and apparatus for corrosive gas purification
GB0404270D0 (en) * 2004-02-26 2004-03-31 Sonander Sven O Flash distillation system
US7297181B2 (en) * 2004-07-07 2007-11-20 Air Liquide America L.P. Purification and transfilling of ammonia
US7850683B2 (en) * 2005-05-20 2010-12-14 Myoscience, Inc. Subdermal cryogenic remodeling of muscles, nerves, connective tissue, and/or adipose tissue (fat)
US20070163273A1 (en) * 2006-01-17 2007-07-19 American Air Liquide, Inc. Liquid Purge for a Vaporizer
US20070204631A1 (en) * 2006-03-03 2007-09-06 American Air Liquide, Inc. Liquefied Chemical Gas Delivery System
AU2008235231B2 (en) * 2007-04-04 2012-08-30 Markus Lehmann Method for distilling a starting material and installation for carrying out said method
CN103191682B (zh) * 2013-04-02 2015-11-11 北京大学 用于气体为介质的非接触固相无机反应的分离式反应炉
US11427907B2 (en) 2016-07-20 2022-08-30 Showa Denko K.K. Gas supply apparatus and gas supply method
CN108341078B (zh) * 2018-01-26 2020-05-08 中国工程物理研究院核物理与化学研究所 一种微升级液体注入控制方法
JP7144032B2 (ja) * 2018-06-25 2022-09-29 株式会社高純度化学研究所 蒸発原料用容器の製造方法
CN118480204B (zh) * 2024-04-18 2024-10-25 浙江陶特容器科技股份有限公司 一种溴化氢深度除水材料及其制备方法

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US2797145A (en) * 1953-08-12 1957-06-25 Allied Chem & Dye Corp Production of anhydrous hydrochloric acid gas from aqueous hydrochloric acid solution
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US3635664A (en) * 1969-08-20 1972-01-18 Daido Chem Eng Corp REGENERATION OF HYDROCHLORIC ACID PICKLING WASTE BY H{11 SO{11 {0 ADDITION, DISTILLATION AND FeSO{11 {0 Precipitation
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Also Published As

Publication number Publication date
JPH10323501A (ja) 1998-12-08
EP0856715A3 (en) 1998-12-09
KR19980070988A (ko) 1998-10-26
KR100559109B1 (ko) 2006-07-12
US6517686B2 (en) 2003-02-11
DE69829788D1 (de) 2005-05-25
JP5231155B2 (ja) 2013-07-10
CN1225297C (zh) 2005-11-02
JP2009072779A (ja) 2009-04-09
US20010015316A1 (en) 2001-08-23
ZA98582B (en) 1998-07-23
DE69829788T2 (de) 2006-01-19
CN1201078A (zh) 1998-12-09
TW346536B (en) 1998-12-01
CA2227715A1 (en) 1998-08-03
EP0856715A2 (en) 1998-08-05
US6277246B1 (en) 2001-08-21
US6004433A (en) 1999-12-21
EP0856715B1 (en) 2005-04-20
BR9800538A (pt) 1999-08-10

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