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SG135137A1 - Flowing liquid type cleaning apparatus - Google Patents

Flowing liquid type cleaning apparatus

Info

Publication number
SG135137A1
SG135137A1 SG200701277-6A SG2007012776A SG135137A1 SG 135137 A1 SG135137 A1 SG 135137A1 SG 2007012776 A SG2007012776 A SG 2007012776A SG 135137 A1 SG135137 A1 SG 135137A1
Authority
SG
Singapore
Prior art keywords
liquid
cleaning
exhausted
tank portion
cleaning tank
Prior art date
Application number
SG200701277-6A
Inventor
Hiroaki Eiki
Kazutoshi Nagaoka
Original Assignee
Speedfam Clean System Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Clean System Co Ltd filed Critical Speedfam Clean System Co Ltd
Publication of SG135137A1 publication Critical patent/SG135137A1/en

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

A flowing liquid type cleaning apparatus features a drain plate fitted with many drain pipes opening to a cleaning tank portion, the drain pipes having flow rate regulators respectively. Cleaning liquid containing contaminants is continuously exhausted from the cleaning tank portion through the drain pipes and flow rate distribution of cleaning liquid in the cleaning tank portion is adjusted by the regulators. As cleaning liquid is exhausted without falling down over the upper edge of a drain plate like as a prior art, exhausted liquid is not foamed. Thus contaminants contained in exhausted liquid are prevented from returning to the cleaning tank portion over the drain plate by assuming the form of foam.
SG200701277-6A 2006-02-28 2007-02-23 Flowing liquid type cleaning apparatus SG135137A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006053276A JP4559981B2 (en) 2006-02-28 2006-02-28 Flowing water cleaning device

Publications (1)

Publication Number Publication Date
SG135137A1 true SG135137A1 (en) 2007-09-28

Family

ID=38550725

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200701277-6A SG135137A1 (en) 2006-02-28 2007-02-23 Flowing liquid type cleaning apparatus

Country Status (3)

Country Link
JP (1) JP4559981B2 (en)
MY (1) MY146331A (en)
SG (1) SG135137A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5054502B2 (en) * 2007-12-14 2012-10-24 ハスクバーナ・ゼノア株式会社 Scavenging cover and 2-cycle engine
JP2010267340A (en) * 2009-05-15 2010-11-25 Showa Denko Kk Flowing water cleaning method and flowing water cleaning device
KR101155618B1 (en) 2009-11-12 2012-06-13 세메스 주식회사 Tank for storing process liquid
WO2011121631A1 (en) * 2010-03-29 2011-10-06 株式会社技術開発総合研究所 Gas-liquid supply device
JP5551496B2 (en) * 2010-04-06 2014-07-16 昭和電工株式会社 Method for manufacturing magnetic recording medium
JP5582850B2 (en) * 2010-04-06 2014-09-03 昭和電工株式会社 Method for manufacturing magnetic recording medium
SG181190A1 (en) 2010-11-23 2012-06-28 Jcs Group Improved flow tank
CN116202594A (en) * 2023-03-08 2023-06-02 上海烟草集团有限责任公司 Flowmeter online cleaning and calibrating device and method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06164112A (en) * 1992-11-19 1994-06-10 Sharp Corp Cleaning device
JPH06182304A (en) * 1992-12-16 1994-07-05 Brother Ind Ltd Ultrasonic cleaning equipment
JPH07302777A (en) * 1994-04-28 1995-11-14 Tokyo Electron Ltd Cleaning device, foam suppressing method and foam suppressing device
JPH08323311A (en) * 1995-05-30 1996-12-10 Mizusawa Denki Kogyo Kk Closed loop type circulation washing method for water feed system pipeline
JPH10308377A (en) * 1997-05-07 1998-11-17 Kaijo Corp Drying of substrate surface
JP3878547B2 (en) * 2001-12-21 2007-02-07 常石造船株式会社 High-pressure washing apparatus and coating pretreatment method

Also Published As

Publication number Publication date
MY146331A (en) 2012-07-31
JP4559981B2 (en) 2010-10-13
JP2007229595A (en) 2007-09-13

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