[go: up one dir, main page]

SE9902081L - Lågeffektsensor - Google Patents

Lågeffektsensor

Info

Publication number
SE9902081L
SE9902081L SE9902081A SE9902081A SE9902081L SE 9902081 L SE9902081 L SE 9902081L SE 9902081 A SE9902081 A SE 9902081A SE 9902081 A SE9902081 A SE 9902081A SE 9902081 L SE9902081 L SE 9902081L
Authority
SE
Sweden
Prior art keywords
gas
low thermal
membrane
silicon
silicon island
Prior art date
Application number
SE9902081A
Other languages
Unknown language ( )
English (en)
Other versions
SE524102C2 (sv
SE9902081D0 (sv
Inventor
Danick Briand
Bart Van Der Schoot
N-F De Rooij
Hans Sundgren
Ingmemar Lundstroem
Original Assignee
Nordic Sensor Technologies Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordic Sensor Technologies Ab filed Critical Nordic Sensor Technologies Ab
Priority to SE9902081A priority Critical patent/SE524102C2/sv
Publication of SE9902081D0 publication Critical patent/SE9902081D0/sv
Priority to JP2001501874A priority patent/JP2003501657A/ja
Priority to AU54354/00A priority patent/AU5435400A/en
Priority to EP00939231A priority patent/EP1190242A1/en
Priority to PCT/SE2000/001134 priority patent/WO2000075649A1/en
Publication of SE9902081L publication Critical patent/SE9902081L/sv
Priority to NO20015916A priority patent/NO20015916L/no
Publication of SE524102C2 publication Critical patent/SE524102C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
SE9902081A 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor SE524102C2 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9902081A SE524102C2 (sv) 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor
JP2001501874A JP2003501657A (ja) 1999-06-04 2000-05-31 低消費電力センサ
AU54354/00A AU5435400A (en) 1999-06-04 2000-05-31 Low-power sensor
EP00939231A EP1190242A1 (en) 1999-06-04 2000-05-31 Low-power sensor
PCT/SE2000/001134 WO2000075649A1 (en) 1999-06-04 2000-05-31 Low-power sensor
NO20015916A NO20015916L (no) 1999-06-04 2001-12-04 Lavströms sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9902081A SE524102C2 (sv) 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor

Publications (3)

Publication Number Publication Date
SE9902081D0 SE9902081D0 (sv) 1999-06-04
SE9902081L true SE9902081L (sv) 2000-12-05
SE524102C2 SE524102C2 (sv) 2004-06-29

Family

ID=20415910

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9902081A SE524102C2 (sv) 1999-06-04 1999-06-04 Mikro-hotplate-anordning med integrerad gaskänslig fälteffektsensor

Country Status (6)

Country Link
EP (1) EP1190242A1 (sv)
JP (1) JP2003501657A (sv)
AU (1) AU5435400A (sv)
NO (1) NO20015916L (sv)
SE (1) SE524102C2 (sv)
WO (1) WO2000075649A1 (sv)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE514042C2 (sv) 1998-05-08 2000-12-18 Nordic Sensor Technologies Ab Sensoranordning
SE523918C2 (sv) 1999-01-25 2004-06-01 Appliedsensor Sweden Ab Förfarande för framställning av integrerade sensorgrupper på ett gemensamt substrat samt en mask för användning vid förfarandet
GB0110967D0 (en) * 2001-05-04 2001-06-27 Univ Paisley The Optically energised & Interrogated gas sensors
DE10219726A1 (de) * 2002-05-02 2003-11-27 Eads Deutschland Gmbh Verfahren zur Herstellung eines brückenartigen Halbleiter-Gassensors, sowie Halbleiter-Gassensor mit Brückenstruktur
DE102004017750B4 (de) * 2004-04-06 2006-03-16 Flechsig, Gerd-Uwe, Dr. rer. nat. Analyse-Array mit heizbaren Elektroden
EP1736768A1 (en) 2005-06-22 2006-12-27 Appliedsensor Sweden AB Device and method for gas sensing
DE102005033226A1 (de) * 2005-07-15 2007-01-25 Siemens Ag Verfahren zur gleichzeitigen Detektion mehrerer unterschiedlicher Luftbelastungen
JPWO2009011164A1 (ja) * 2007-07-19 2010-09-16 株式会社ルネサステクノロジ 半導体装置およびその製造方法
JP5507524B2 (ja) * 2011-11-07 2014-05-28 株式会社日立製作所 可燃性ガスセンサ
AU2012357007B2 (en) * 2011-12-23 2015-08-13 Sanofi-Aventis Deutschland Gmbh Sensor arrangement for a packaging of a medicament
EP2872882B1 (en) 2012-07-16 2018-10-31 SGX Sensortech SA Micro-hotplate device and sensor comprising such micro-hotplate device
DE102015104419B4 (de) 2014-04-02 2025-03-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidsensor und Verfahren zur Untersuchung eines Fluids
US20170067841A1 (en) * 2015-09-09 2017-03-09 Invensense, Inc. Gas sensor platform and the method of making the same
GB2542801A (en) * 2015-09-30 2017-04-05 Cambridge Cmos Sensors Ltd Micro gas sensor with a gas permeable region
DE102016203239B4 (de) 2016-02-29 2025-02-27 Robert Bosch Gmbh MEMS-Sensor mit einer Heizeinrichtung an einer Membran und entsprechendes Herstellungsverfahren
US10383967B2 (en) 2016-11-30 2019-08-20 Invensense, Inc. Substance sensing with tracers

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5356756A (en) * 1992-10-26 1994-10-18 The United States Of America As Represented By The Secretary Of Commerce Application of microsubstrates for materials processing
US5464966A (en) * 1992-10-26 1995-11-07 The United States Of America As Represented By The Secretary Of Commerce Micro-hotplate devices and methods for their fabrication

Also Published As

Publication number Publication date
NO20015916L (no) 2002-02-01
JP2003501657A (ja) 2003-01-14
WO2000075649A1 (en) 2000-12-14
AU5435400A (en) 2000-12-28
SE524102C2 (sv) 2004-06-29
NO20015916D0 (no) 2001-12-04
EP1190242A1 (en) 2002-03-27
SE9902081D0 (sv) 1999-06-04

Similar Documents

Publication Publication Date Title
SE9902081L (sv) Lågeffektsensor
AU4868901A (en) Flow sensor
WO2004003713A3 (en) Cooling unit for cooling heat generating component
WO2002066946A3 (en) Temperature measuring device
TW200717749A (en) Protection of an integrated circuit and method therefor
DE50205510D1 (de) Waage mit einer Vorrichtung zur Wärmeabfuhr
ATE409313T1 (de) Katalytischer sensor
NO892344D0 (no) Sensor med oppvarmbart maaleelement og utfoert som integrert krets.
DE59610297D1 (de) Durch Feldeffekt steuerbares Leistungs-Halbleiterbauelement mit Temperatursensor
AU2003253066A1 (en) Method using flux sensors to determine the output of a thermal reaction within a housing and device for carrying out such a method
ATE301280T1 (de) Modulare kraftmesszelle für eine waage und waage
WO2004042380A3 (en) Gas sensor
EP1619485B8 (de) Temperaturmessfühler
TW200721948A (en) Fan system and temperature-sensing protecting device thereof
ATE237801T1 (de) Vorrichtung zur hochtemperaturerfassung und verfahren zur herstellung derselben
Makinwa et al. A wind sensor with an integrated low-offset instrumentation amplifier
Iwaki et al. Design and simulation of resistive SOI CMOS micro-heaters for high temperature gas sensors
TW200518662A (en) Temperature measurement method and device
DE502004003250D1 (de) Leistungshalbleitermodul mit Sensorikbauteil
WO2003090497A3 (en) Microprocessor controlled heater/cooler system
DE60033412D1 (de) Temperaturregelungseinrichtung eines ein planares optisches element umfassenden gehäuses
RU52187U1 (ru) Датчик аспирационного психрометра
RU37415U1 (ru) Датчик температуры накладной
ATE419513T1 (de) Sensorverstärkungsvorrichtung
DK1207347T3 (da) Fremgangsmåde til regulering af en gasbrænder

Legal Events

Date Code Title Description
NUG Patent has lapsed