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SE9602993D0 - A bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC - Google Patents

A bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC

Info

Publication number
SE9602993D0
SE9602993D0 SE9602993A SE9602993A SE9602993D0 SE 9602993 D0 SE9602993 D0 SE 9602993D0 SE 9602993 A SE9602993 A SE 9602993A SE 9602993 A SE9602993 A SE 9602993A SE 9602993 D0 SE9602993 D0 SE 9602993D0
Authority
SE
Sweden
Prior art keywords
sic
semiconductor device
junction
layers
producing
Prior art date
Application number
SE9602993A
Other languages
English (en)
Inventor
Henry Bleichner
Mietek Bakowski
Ulf Gustavsson
Original Assignee
Abb Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abb Research Ltd filed Critical Abb Research Ltd
Priority to SE9602993A priority Critical patent/SE9602993D0/sv
Publication of SE9602993D0 publication Critical patent/SE9602993D0/sv
Priority to US08/706,264 priority patent/US5831287A/en
Priority to PCT/SE1997/001137 priority patent/WO1998008259A1/en
Priority to JP51064398A priority patent/JP4626893B2/ja
Priority to EP97932077A priority patent/EP0958610B1/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01Manufacture or treatment
    • H10D12/031Manufacture or treatment of IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/441Vertical IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325Silicon carbide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/01Manufacture or treatment
    • H10D8/043Manufacture or treatment of planar diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/01Manufacture or treatment
    • H10D8/051Manufacture or treatment of Schottky diodes

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
SE9602993A 1996-08-16 1996-08-16 A bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC SE9602993D0 (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9602993A SE9602993D0 (sv) 1996-08-16 1996-08-16 A bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC
US08/706,264 US5831287A (en) 1996-08-16 1996-09-04 Bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC
PCT/SE1997/001137 WO1998008259A1 (en) 1996-08-16 1997-06-25 A BIPOLAR SEMICONDUCTOR DEVICE HAVING SEMICONDUCTOR LAYERS OF SiC AND A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC
JP51064398A JP4626893B2 (ja) 1996-08-16 1997-06-25 SiCから構成された半導体層を有するバイポーラ半導体デバイスおよびSiCから構成された半導体デバイスを製造する方法
EP97932077A EP0958610B1 (en) 1996-08-16 1997-06-25 A BIPOLAR SEMICONDUCTOR DEVICE HAVING SEMICONDUCTOR LAYERS OF SiC AND A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9602993A SE9602993D0 (sv) 1996-08-16 1996-08-16 A bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC
US08/706,264 US5831287A (en) 1996-08-16 1996-09-04 Bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC

Publications (1)

Publication Number Publication Date
SE9602993D0 true SE9602993D0 (sv) 1996-08-16

Family

ID=26662733

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9602993A SE9602993D0 (sv) 1996-08-16 1996-08-16 A bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC

Country Status (4)

Country Link
US (1) US5831287A (sv)
EP (1) EP0958610B1 (sv)
SE (1) SE9602993D0 (sv)
WO (1) WO1998008259A1 (sv)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3955396B2 (ja) * 1998-09-17 2007-08-08 株式会社ルネサステクノロジ 半導体サージ吸収素子
JP2001177114A (ja) * 1999-12-17 2001-06-29 Fuji Electric Co Ltd 半導体装置
US7061021B2 (en) * 2003-05-01 2006-06-13 The University Of South Carolina System and method for fabricating diodes
US7408235B2 (en) * 2003-07-08 2008-08-05 Los Alamos National Security, Llc Quantum coherent switch utilizing commensurate nanoelectrode and charge density periodicities
CN101271871B (zh) * 2003-08-22 2011-05-25 关西电力株式会社 半导体装置及制造方法、使用该半导体装置的电力变换装置
US8901699B2 (en) 2005-05-11 2014-12-02 Cree, Inc. Silicon carbide junction barrier Schottky diodes with suppressed minority carrier injection
KR101529331B1 (ko) 2006-08-17 2015-06-16 크리 인코포레이티드 고전력 절연 게이트 바이폴라 트랜지스터
US8835987B2 (en) 2007-02-27 2014-09-16 Cree, Inc. Insulated gate bipolar transistors including current suppressing layers
US8232558B2 (en) 2008-05-21 2012-07-31 Cree, Inc. Junction barrier Schottky diodes with current surge capability
US8294507B2 (en) * 2009-05-08 2012-10-23 Cree, Inc. Wide bandgap bipolar turn-off thyristor having non-negative temperature coefficient and related control circuits
US9117739B2 (en) 2010-03-08 2015-08-25 Cree, Inc. Semiconductor devices with heterojunction barrier regions and methods of fabricating same
JP5872327B2 (ja) 2011-03-10 2016-03-01 株式会社東芝 半導体整流素子
US9142662B2 (en) 2011-05-06 2015-09-22 Cree, Inc. Field effect transistor devices with low source resistance
US9029945B2 (en) 2011-05-06 2015-05-12 Cree, Inc. Field effect transistor devices with low source resistance
US9673283B2 (en) 2011-05-06 2017-06-06 Cree, Inc. Power module for supporting high current densities
US9171977B2 (en) * 2011-06-17 2015-10-27 Cree, Inc. Optically assist-triggered wide bandgap thyristors having positive temperature coefficients
US8723218B2 (en) 2011-09-08 2014-05-13 The United States Of America, As Represented By The Secretary Of The Navy Silicon carbide rectifier
US9373617B2 (en) 2011-09-11 2016-06-21 Cree, Inc. High current, low switching loss SiC power module
US8664665B2 (en) 2011-09-11 2014-03-04 Cree, Inc. Schottky diode employing recesses for elements of junction barrier array
US9640617B2 (en) 2011-09-11 2017-05-02 Cree, Inc. High performance power module
US8680587B2 (en) 2011-09-11 2014-03-25 Cree, Inc. Schottky diode
US8618582B2 (en) 2011-09-11 2013-12-31 Cree, Inc. Edge termination structure employing recesses for edge termination elements
JP6065303B2 (ja) 2012-06-15 2017-01-25 ローム株式会社 スイッチングデバイス
DE102013210805A1 (de) * 2013-06-10 2014-12-11 Robert Bosch Gmbh Leistungshalbleiter
US10177228B2 (en) 2015-01-14 2019-01-08 Mitsubishi Electric Corporation Semiconductor device and method for manufacturing semiconductor device
JP6526981B2 (ja) 2015-02-13 2019-06-05 ローム株式会社 半導体装置および半導体モジュール

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU438364A1 (ru) * 1972-09-15 1976-07-05 В. И. Павличенко Диодный источник света на карбтде кремни
US4497773A (en) * 1981-03-03 1985-02-05 Vernitron Corporation Process and apparatus for shortening the drying stage of a steam sterilization cycle
US5243204A (en) * 1990-05-18 1993-09-07 Sharp Kabushiki Kaisha Silicon carbide light emitting diode and a method for the same
US5043773A (en) * 1990-06-04 1991-08-27 Advanced Technology Materials, Inc. Wafer base for silicon carbide semiconductor devices, incorporating alloy substrates
US5322802A (en) * 1993-01-25 1994-06-21 North Carolina State University At Raleigh Method of fabricating silicon carbide field effect transistor
US5396085A (en) * 1993-12-28 1995-03-07 North Carolina State University Silicon carbide switching device with rectifying-gate
US5385855A (en) * 1994-02-24 1995-01-31 General Electric Company Fabrication of silicon carbide integrated circuits

Also Published As

Publication number Publication date
EP0958610A1 (en) 1999-11-24
EP0958610B1 (en) 2012-11-14
WO1998008259A1 (en) 1998-02-26
US5831287A (en) 1998-11-03

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