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SE9202093L - Kondensator med hög kapacitans i ett integrerat funktionsblock eller en integrerad krets, förfarande för framställning av kondensatorn och användning av kondensatorn som en integrerad avkopplingskondensator - Google Patents

Kondensator med hög kapacitans i ett integrerat funktionsblock eller en integrerad krets, förfarande för framställning av kondensatorn och användning av kondensatorn som en integrerad avkopplingskondensator

Info

Publication number
SE9202093L
SE9202093L SE9202093A SE9202093A SE9202093L SE 9202093 L SE9202093 L SE 9202093L SE 9202093 A SE9202093 A SE 9202093A SE 9202093 A SE9202093 A SE 9202093A SE 9202093 L SE9202093 L SE 9202093L
Authority
SE
Sweden
Prior art keywords
capacitor
integrated
producing
function block
decoupling
Prior art date
Application number
SE9202093A
Other languages
English (en)
Other versions
SE9202093D0 (sv
SE470415B (sv
Inventor
T Johansson
J-M Gobbi
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to SE9202093A priority Critical patent/SE470415B/sv
Publication of SE9202093D0 publication Critical patent/SE9202093D0/sv
Priority to DE4322354A priority patent/DE4322354A1/de
Priority to GB9313951A priority patent/GB2268829B/en
Publication of SE9202093L publication Critical patent/SE9202093L/sv
Publication of SE470415B publication Critical patent/SE470415B/sv
Priority to US08/466,448 priority patent/US5606197A/en
Priority to US08/470,145 priority patent/US5587333A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
    • H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
    • H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/014—Capacitor

Landscapes

  • Semiconductor Integrated Circuits (AREA)
SE9202093A 1992-07-06 1992-07-06 Kondensator med hög kapacitans i ett integrerat funktionsblock eller en integrerad krets, förfarande för framställning av kondensatorn och användning av kondensatorn som en integrerad avkopplingskondensator SE470415B (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9202093A SE470415B (sv) 1992-07-06 1992-07-06 Kondensator med hög kapacitans i ett integrerat funktionsblock eller en integrerad krets, förfarande för framställning av kondensatorn och användning av kondensatorn som en integrerad avkopplingskondensator
DE4322354A DE4322354A1 (de) 1992-07-06 1993-07-05 Kondensator in einem integrierten Funktionsblock oder in einer integrierten Schaltung mit großer Kapazität; Verfahren zur Herstellung des Kondensators; und Benutzung des Kondensators als integrierter Entkopplungskondensator
GB9313951A GB2268829B (en) 1992-07-06 1993-07-06 Capacitor
US08/466,448 US5606197A (en) 1992-07-06 1995-06-06 High capacitance capacitor in an integrated function block or an integrated circuit
US08/470,145 US5587333A (en) 1992-07-06 1995-06-06 Capacitor in an integrated function block or an integrated circuit having high capacitance, a method for manufacturing said capacitor and utilizing of said capacitor as an integrated decoupling capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9202093A SE470415B (sv) 1992-07-06 1992-07-06 Kondensator med hög kapacitans i ett integrerat funktionsblock eller en integrerad krets, förfarande för framställning av kondensatorn och användning av kondensatorn som en integrerad avkopplingskondensator

Publications (3)

Publication Number Publication Date
SE9202093D0 SE9202093D0 (sv) 1992-07-06
SE9202093L true SE9202093L (sv) 1994-01-07
SE470415B SE470415B (sv) 1994-02-14

Family

ID=20386723

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9202093A SE470415B (sv) 1992-07-06 1992-07-06 Kondensator med hög kapacitans i ett integrerat funktionsblock eller en integrerad krets, förfarande för framställning av kondensatorn och användning av kondensatorn som en integrerad avkopplingskondensator

Country Status (4)

Country Link
US (2) US5606197A (sv)
DE (1) DE4322354A1 (sv)
GB (1) GB2268829B (sv)
SE (1) SE470415B (sv)

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JP3369296B2 (ja) * 1994-03-25 2003-01-20 三菱電機株式会社 Ｍｏｓ型コンデンサ
KR0144242B1 (ko) * 1995-07-21 1998-07-01 김광호 반도체 메모리장치의 모오스 캐패시터의 크랙 방지구조
KR0183739B1 (ko) * 1995-09-19 1999-03-20 김광호 감결합 커패시터를 포함하는 반도체 장치 및 그 제조방법
US5872697A (en) * 1996-02-13 1999-02-16 International Business Machines Corporation Integrated circuit having integral decoupling capacitor
US5894163A (en) * 1996-04-02 1999-04-13 Motorola, Inc. Device and method for multiplying capacitance
JP3592028B2 (ja) * 1997-04-03 2004-11-24 富士通株式会社 昇圧回路および半導体集積回路
US7336468B2 (en) 1997-04-08 2008-02-26 X2Y Attenuators, Llc Arrangement for energy conditioning
US9054094B2 (en) 1997-04-08 2015-06-09 X2Y Attenuators, Llc Energy conditioning circuit arrangement for integrated circuit
US7321485B2 (en) 1997-04-08 2008-01-22 X2Y Attenuators, Llc Arrangement for energy conditioning
CN1263637A (zh) 1997-07-11 2000-08-16 艾利森电话股份有限公司 制作用于射频的集成电路器件的工艺
DE19736197C1 (de) * 1997-08-20 1999-03-04 Siemens Ag Integrierte Schaltung mit Kondensatoren
US6010939A (en) 1998-03-31 2000-01-04 Vlsi Technology, Inc. Methods for making shallow trench capacitive structures
US6020616A (en) * 1998-03-31 2000-02-01 Vlsi Technology, Inc. Automated design of on-chip capacitive structures for suppressing inductive noise
US6222260B1 (en) 1998-05-07 2001-04-24 Vlsi Technology, Inc. Integrated circuit device with integral decoupling capacitor
KR100294449B1 (ko) * 1998-07-15 2001-07-12 윤종용 본딩패드하부에형성되는커패시터를구비한반도체집적회로장치
KR20010040904A (ko) * 1998-12-16 2001-05-15 인피니언 테크놀로지스 아게 용량성 성분들을 가지는 집적 회로
JP2001118988A (ja) * 1999-10-15 2001-04-27 Mitsubishi Electric Corp 半導体装置
KR100311179B1 (ko) * 1999-10-21 2001-11-02 박종섭 모스캐패시터
US6232154B1 (en) * 1999-11-18 2001-05-15 Infineon Technologies North America Corp. Optimized decoupling capacitor using lithographic dummy filler
JP2003100887A (ja) * 2001-09-26 2003-04-04 Nec Corp 半導体装置
US6898769B2 (en) 2002-10-10 2005-05-24 International Business Machines Corporation Decoupling capacitor sizing and placement
US7323928B1 (en) 2003-04-11 2008-01-29 Linear Technology Corporation High capacitance integrated circuits
DE10324066A1 (de) 2003-05-27 2004-12-30 Texas Instruments Deutschland Gmbh Stapelkondensator und Verfahren zur Herstellung eines solchen
JP2006059939A (ja) * 2004-08-19 2006-03-02 Fujitsu Ltd Ｍｉｓキャパシタおよびｍｉｓキャパシタ作成方法
GB2439862A (en) 2005-03-01 2008-01-09 X2Y Attenuators Llc Conditioner with coplanar conductors
US7600208B1 (en) 2007-01-31 2009-10-06 Cadence Design Systems, Inc. Automatic placement of decoupling capacitors
US9438225B1 (en) 2015-06-11 2016-09-06 Applied Micro Circuits Corporation High efficiency half-cross-coupled decoupling capacitor

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
US3619735A (en) * 1970-01-26 1971-11-09 Ibm Integrated circuit with buried decoupling capacitor
JPS52102690A (en) * 1976-02-25 1977-08-29 Hitachi Ltd Semiconductor capacitance device
EP0043372A1 (en) * 1980-01-11 1982-01-13 Mostek Corporation Method for making a semiconductor device
EP0053213B1 (fr) * 1980-11-28 1984-04-04 International Business Machines Corporation Nouveau condensateur à structure de quadripôle dont l'intégrité peut être contrôlée à l'aide de tests en courant continu
US4453176A (en) * 1981-12-31 1984-06-05 International Business Machines Corporation LSI Chip carrier with buried repairable capacitor with low inductance leads
EP0093818A1 (de) * 1982-05-07 1983-11-16 Deutsche ITT Industries GmbH Monolithisch integrierte Schaltung mit integrierten Kondensatoren
JPS6018948A (ja) * 1983-07-12 1985-01-31 Nec Corp 半導体集積回路装置
JPS6370550A (ja) * 1986-09-12 1988-03-30 Nec Corp 半導体集積回路装置
JPS6386554A (ja) * 1986-09-30 1988-04-16 インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション 電子的パッケ−ジ
JPS63131561A (ja) * 1986-11-18 1988-06-03 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 電子パツケージ

Also Published As

Publication number Publication date
DE4322354A1 (de) 1994-01-13
SE9202093D0 (sv) 1992-07-06
US5606197A (en) 1997-02-25
GB2268829A (en) 1994-01-19
SE470415B (sv) 1994-02-14
US5587333A (en) 1996-12-24
GB9313951D0 (en) 1993-08-18
GB2268829B (en) 1995-02-01

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