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SE8603963L - CONTACT WITH LAW RESISTANCE FOR A SEMICONDUCTOR ORGAN AND SETTING TO MAKE IT - Google Patents

CONTACT WITH LAW RESISTANCE FOR A SEMICONDUCTOR ORGAN AND SETTING TO MAKE IT

Info

Publication number
SE8603963L
SE8603963L SE8603963A SE8603963A SE8603963L SE 8603963 L SE8603963 L SE 8603963L SE 8603963 A SE8603963 A SE 8603963A SE 8603963 A SE8603963 A SE 8603963A SE 8603963 L SE8603963 L SE 8603963L
Authority
SE
Sweden
Prior art keywords
contact
setting
make
semiconductor
organ
Prior art date
Application number
SE8603963A
Other languages
Unknown language ( )
Swedish (sv)
Other versions
SE8603963D0 (en
Inventor
S T Hsu
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Publication of SE8603963D0 publication Critical patent/SE8603963D0/en
Publication of SE8603963L publication Critical patent/SE8603963L/en

Links

Classifications

    • H10D64/0112—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0212—Manufacture or treatment of FETs having insulated gates [IGFET] using self-aligned silicidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)

Abstract

A low-resistance contact on a zone of a semiconductor component which extends into a semiconductor body comprises a first layer of a metal which is difficult to fuse and a second layer composed of metal silicide between the first layer and the zone in contact with the adjacent regions.
SE8603963A 1985-09-27 1986-09-19 CONTACT WITH LAW RESISTANCE FOR A SEMICONDUCTOR ORGAN AND SETTING TO MAKE IT SE8603963L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US78095685A 1985-09-27 1985-09-27

Publications (2)

Publication Number Publication Date
SE8603963D0 SE8603963D0 (en) 1986-09-19
SE8603963L true SE8603963L (en) 1987-03-28

Family

ID=25121206

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8603963A SE8603963L (en) 1985-09-27 1986-09-19 CONTACT WITH LAW RESISTANCE FOR A SEMICONDUCTOR ORGAN AND SETTING TO MAKE IT

Country Status (4)

Country Link
JP (1) JPS6278817A (en)
KR (1) KR940009584B1 (en)
DE (1) DE3632217A1 (en)
SE (1) SE8603963L (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2624304B1 (en) * 1987-12-04 1990-05-04 Philips Nv METHOD FOR ESTABLISHING AN ELECTRICAL INTERCONNECTION STRUCTURE ON A SILICON SEMICONDUCTOR DEVICE

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575256A (en) * 1978-12-01 1980-06-06 Nec Corp Semiconductor device
JPS5780739A (en) * 1980-11-07 1982-05-20 Hitachi Ltd Semiconductor integrated circuit device and manufacture thereof
JPS60119750A (en) * 1983-12-02 1985-06-27 Hitachi Ltd Manufacturing method of semiconductor device

Also Published As

Publication number Publication date
JPS6278817A (en) 1987-04-11
KR940009584B1 (en) 1994-10-15
DE3632217A1 (en) 1987-04-02
SE8603963D0 (en) 1986-09-19
KR870003581A (en) 1987-04-18

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