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SE520097C2 - Mikropositioneringsanordning - Google Patents

Mikropositioneringsanordning

Info

Publication number
SE520097C2
SE520097C2 SE0004471A SE0004471A SE520097C2 SE 520097 C2 SE520097 C2 SE 520097C2 SE 0004471 A SE0004471 A SE 0004471A SE 0004471 A SE0004471 A SE 0004471A SE 520097 C2 SE520097 C2 SE 520097C2
Authority
SE
Sweden
Prior art keywords
intermediate part
contact surface
acceleration unit
acceleration
clamping
Prior art date
Application number
SE0004471A
Other languages
English (en)
Swedish (sv)
Other versions
SE0004471D0 (sv
SE0004471L (sv
Inventor
Haakan Olin
Fredrik Althoff
Krister Svensson
Original Assignee
Nanofactory Instruments Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanofactory Instruments Ab filed Critical Nanofactory Instruments Ab
Priority to SE0004471A priority Critical patent/SE520097C2/sv
Publication of SE0004471D0 publication Critical patent/SE0004471D0/xx
Priority to AT01999851T priority patent/ATE385579T1/de
Priority to EP01999851A priority patent/EP1340112B1/de
Priority to JP2002548496A priority patent/JP3776084B2/ja
Priority to DE60132713T priority patent/DE60132713T2/de
Priority to PCT/SE2001/002642 priority patent/WO2002046821A1/en
Priority to US10/433,575 priority patent/US6917140B2/en
Priority to AU2002224304A priority patent/AU2002224304A1/en
Publication of SE0004471L publication Critical patent/SE0004471L/xx
Publication of SE520097C2 publication Critical patent/SE520097C2/sv

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/32—Micromanipulators structurally combined with microscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Control Of Position Or Direction (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
  • Machine Tool Units (AREA)
  • Fluid-Damping Devices (AREA)
  • Die Bonding (AREA)
  • Micromachines (AREA)
  • Motorcycle And Bicycle Frame (AREA)
  • Prostheses (AREA)
SE0004471A 2000-12-05 2000-12-05 Mikropositioneringsanordning SE520097C2 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE0004471A SE520097C2 (sv) 2000-12-05 2000-12-05 Mikropositioneringsanordning
AT01999851T ATE385579T1 (de) 2000-12-05 2001-12-03 Mikropositionierungseinrichtung
EP01999851A EP1340112B1 (de) 2000-12-05 2001-12-03 Mikropositionierungseinrichtung
JP2002548496A JP3776084B2 (ja) 2000-12-05 2001-12-03 マイクロポジショニング装置
DE60132713T DE60132713T2 (de) 2000-12-05 2001-12-03 Mikropositionierungseinrichtung
PCT/SE2001/002642 WO2002046821A1 (en) 2000-12-05 2001-12-03 Micropositioning device
US10/433,575 US6917140B2 (en) 2000-12-05 2001-12-03 Micropositioning device
AU2002224304A AU2002224304A1 (en) 2000-12-05 2001-12-03 Micropositioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0004471A SE520097C2 (sv) 2000-12-05 2000-12-05 Mikropositioneringsanordning

Publications (3)

Publication Number Publication Date
SE0004471D0 SE0004471D0 (sv) 2000-12-05
SE0004471L SE0004471L (sv) 2002-06-06
SE520097C2 true SE520097C2 (sv) 2003-05-27

Family

ID=20282086

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0004471A SE520097C2 (sv) 2000-12-05 2000-12-05 Mikropositioneringsanordning

Country Status (8)

Country Link
US (1) US6917140B2 (de)
EP (1) EP1340112B1 (de)
JP (1) JP3776084B2 (de)
AT (1) ATE385579T1 (de)
AU (1) AU2002224304A1 (de)
DE (1) DE60132713T2 (de)
SE (1) SE520097C2 (de)
WO (1) WO2002046821A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006057300A1 (ja) * 2004-11-27 2006-06-01 Japan Advanced Institute Of Science And Technology ポジショニング機構、及び、それを用いた顕微鏡
US8059346B2 (en) 2007-03-19 2011-11-15 New Scale Technologies Linear drive systems and methods thereof
EP3918209B1 (de) * 2019-02-01 2024-09-11 Thorlabs, Inc. Piezoelektrische bremsvorrichtung
EP3843120A1 (de) * 2019-12-23 2021-06-30 University of Vienna Probenhalter für elektronenbeugungsexperimente mit goniometer und kontaktkühlung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4219755A (en) * 1977-03-18 1980-08-26 Physics International Company Electromotive actuator
US4195243A (en) * 1978-11-06 1980-03-25 Sperry Corporation Piezoelectric wafer mover
JPS63299785A (ja) 1987-05-29 1988-12-07 Res Dev Corp Of Japan 圧電・電歪素子を用いた衝撃力による微小移動装置
DE3844821C2 (en) * 1988-07-03 1993-07-22 Kfa Juelich Gmbh, 5170 Juelich, De Micromanipulator for raster tunnel microscope
DE3933296C2 (de) * 1988-12-28 1994-06-01 Prima Meat Packers Ltd Mikromanipulator
DE69302084T2 (de) * 1992-09-07 1996-09-12 Stephan 72074 Tuebingen Kleindiek Elektromechanische positionierungsvorrichtung.
EP0599582B1 (de) * 1992-11-20 1998-04-08 Topometrix Linearisierungs- und Eichungssystem für einen Abtastungsapparat
US5332942A (en) * 1993-06-07 1994-07-26 Rennex Brian G Inchworm actuator

Also Published As

Publication number Publication date
ATE385579T1 (de) 2008-02-15
EP1340112A1 (de) 2003-09-03
WO2002046821A1 (en) 2002-06-13
AU2002224304A1 (en) 2002-06-18
SE0004471D0 (sv) 2000-12-05
JP2004515769A (ja) 2004-05-27
SE0004471L (sv) 2002-06-06
EP1340112B1 (de) 2008-02-06
JP3776084B2 (ja) 2006-05-17
DE60132713T2 (de) 2009-02-12
US6917140B2 (en) 2005-07-12
DE60132713D1 (de) 2008-03-20
US20040051424A1 (en) 2004-03-18

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Legal Events

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