RU2011110043A - Применение мишени для искрового напыления и способ получения подходящей для этого применения мишени - Google Patents
Применение мишени для искрового напыления и способ получения подходящей для этого применения мишени Download PDFInfo
- Publication number
- RU2011110043A RU2011110043A RU2011110043/02A RU2011110043A RU2011110043A RU 2011110043 A RU2011110043 A RU 2011110043A RU 2011110043/02 A RU2011110043/02 A RU 2011110043/02A RU 2011110043 A RU2011110043 A RU 2011110043A RU 2011110043 A RU2011110043 A RU 2011110043A
- Authority
- RU
- Russia
- Prior art keywords
- target
- aluminum
- metal
- oxide
- nitride
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract 5
- 238000005507 spraying Methods 0.000 title 1
- 229910052751 metal Inorganic materials 0.000 claims abstract 8
- 239000002184 metal Substances 0.000 claims abstract 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract 6
- 239000011159 matrix material Substances 0.000 claims abstract 6
- 239000002245 particle Substances 0.000 claims abstract 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract 4
- 238000000576 coating method Methods 0.000 claims abstract 4
- 150000004767 nitrides Chemical class 0.000 claims abstract 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract 4
- 238000004663 powder metallurgy Methods 0.000 claims abstract 4
- 239000011248 coating agent Substances 0.000 claims abstract 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract 2
- 238000004519 manufacturing process Methods 0.000 claims abstract 2
- 238000002844 melting Methods 0.000 claims abstract 2
- 230000008018 melting Effects 0.000 claims abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract 2
- 150000004706 metal oxides Chemical class 0.000 claims abstract 2
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
- Powder Metallurgy (AREA)
Abstract
1. Применение мишени в процессе нанесения покрытия искровым напылением для получения металлооксидных и/или металлонитридных покрытий, причем применяют мишень, в которой непроводящий оксид и/или нитрид металла мишени, внедрен в матрицу этого металла мишени и благодаря этому с мишенью можно работать при температуре, которая выше температуры плавления использованного в мишени металла. ! 2. Применение мишени по п.1, причем мишень содержит алюминиевую матрицу, в которую внедрены непроводящие частицы оксида алюминия и/или частицы нитрида алюминия. ! 3. Применение мишени по п.2, причем частицы оксида алюминия в основном имеют диаметр, который меньше, чем типичный диаметр искрового разряда, и тем самым меньше 100 мкм, предпочтительно меньше 50 мкм. ! 4. Применение мишени по п.2 или 3, причем содержание оксида алюминия в алюминиевой матрице составляет менее 70 об.%. ! 5. Применение мишени по любому из пп.1-3, причем мишень является мишенью, полученной методом порошковой металлургии. ! 6. Применение мишени по п.4, причем мишень является мишенью, полученной методом порошковой металлургии. ! 7. Способ получения мишени, которая подходит для применения по любому из пп.2-6, причем мишень получают способом голографического структурирования, при этом слой оксида алюминия структурируют в виде решетки, и при этом возникшие в решетке канавки заполняют алюминием.
Claims (7)
1. Применение мишени в процессе нанесения покрытия искровым напылением для получения металлооксидных и/или металлонитридных покрытий, причем применяют мишень, в которой непроводящий оксид и/или нитрид металла мишени, внедрен в матрицу этого металла мишени и благодаря этому с мишенью можно работать при температуре, которая выше температуры плавления использованного в мишени металла.
2. Применение мишени по п.1, причем мишень содержит алюминиевую матрицу, в которую внедрены непроводящие частицы оксида алюминия и/или частицы нитрида алюминия.
3. Применение мишени по п.2, причем частицы оксида алюминия в основном имеют диаметр, который меньше, чем типичный диаметр искрового разряда, и тем самым меньше 100 мкм, предпочтительно меньше 50 мкм.
4. Применение мишени по п.2 или 3, причем содержание оксида алюминия в алюминиевой матрице составляет менее 70 об.%.
5. Применение мишени по любому из пп.1-3, причем мишень является мишенью, полученной методом порошковой металлургии.
6. Применение мишени по п.4, причем мишень является мишенью, полученной методом порошковой металлургии.
7. Способ получения мишени, которая подходит для применения по любому из пп.2-6, причем мишень получают способом голографического структурирования, при этом слой оксида алюминия структурируют в виде решетки, и при этом возникшие в решетке канавки заполняют алюминием.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08014592.3 | 2008-08-17 | ||
| EP08014592 | 2008-08-17 | ||
| EP08017715 | 2008-10-09 | ||
| EP08017715.7 | 2008-10-09 | ||
| PCT/EP2009/005803 WO2010020362A1 (de) | 2008-08-17 | 2009-08-10 | Verwendung eines targets für das funkenverdampfen und verfahren zum herstellen eines für diese verwendung geeigneten targets |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2011110043A true RU2011110043A (ru) | 2012-09-27 |
| RU2501885C2 RU2501885C2 (ru) | 2013-12-20 |
Family
ID=41328518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2011110043/02A RU2501885C2 (ru) | 2008-08-17 | 2009-08-10 | Применение мишени для искрового напыления и способ получения подходящей для этого применения мишени |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8828499B2 (ru) |
| EP (1) | EP2326742B8 (ru) |
| JP (1) | JP5562336B2 (ru) |
| KR (1) | KR20110047191A (ru) |
| CN (1) | CN102124138A (ru) |
| RU (1) | RU2501885C2 (ru) |
| WO (1) | WO2010020362A1 (ru) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011084804A (ja) * | 2009-09-18 | 2011-04-28 | Kobelco Kaken:Kk | 金属酸化物−金属複合スパッタリングターゲット |
| DE102010042828A1 (de) | 2010-10-22 | 2012-04-26 | Walter Ag | Target für Lichtbogenverfahren |
| DE102010053751A1 (de) * | 2010-10-28 | 2012-05-03 | Oerlikon Trading Ag, Trübbach | Molybdänmonoxidschichten und deren Herstellung mittels PVD |
| DE102013006633A1 (de) * | 2013-04-18 | 2014-10-23 | Oerlikon Trading Ag, Trübbach | Funkenverdampfen von metallischen, intermetallischen und keramischen Targetmaterialien um Al-Cr-N Beschichtungen herzustellen |
| CA2920906A1 (en) | 2013-08-20 | 2015-02-26 | Mds Coating Technologies Corp. | Coating containing macroparticles and cathodic arc process of making the coating |
| CN105986228B (zh) * | 2015-02-10 | 2018-11-06 | 汕头超声显示器技术有限公司 | 一种用于制作氧化铝薄膜的溅射靶材及其制作方法 |
| RU178867U1 (ru) * | 2016-05-04 | 2018-04-20 | Общество с ограниченной ответственностью Научно-производственное предприятие "НОК" | Вакуумная микроразмерная кристаллизационная ячейка |
| KR20190099394A (ko) * | 2016-12-28 | 2019-08-27 | 스미토모덴키고교가부시키가이샤 | 피막 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1595280A (en) * | 1978-05-26 | 1981-08-12 | Hepworth & Grandage Ltd | Composite materials and methods for their production |
| GB2103246A (en) * | 1981-07-01 | 1983-02-16 | Diamond Shamrock Corp | Electrolytic production of aluminum |
| US4828008A (en) * | 1987-05-13 | 1989-05-09 | Lanxide Technology Company, Lp | Metal matrix composites |
| US5518597A (en) * | 1995-03-28 | 1996-05-21 | Minnesota Mining And Manufacturing Company | Cathodic arc coating apparatus and method |
| DE19547305A1 (de) * | 1995-12-18 | 1997-06-19 | Univ Sheffield | Verfahren zum Beschichten von metallischen Substraten |
| RU2108212C1 (ru) * | 1996-02-19 | 1998-04-10 | Юрий Львович Чистяков | Способ электроискрового нанесения покрытий |
| US20020139662A1 (en) * | 2001-02-21 | 2002-10-03 | Lee Brent W. | Thin-film deposition of low conductivity targets using cathodic ARC plasma process |
| DE102005021927A1 (de) * | 2005-05-12 | 2006-11-16 | Fette Gmbh | Legierter Körper als Target für das PVD-Verfahren, Verfahren zur Herstellung des legierten Körpers und PVD-Verfahren mit dem legierten Körper |
| JP4846519B2 (ja) * | 2006-10-23 | 2011-12-28 | 日立ツール株式会社 | 窒化物含有ターゲット材 |
-
2009
- 2009-08-10 EP EP09777791.6A patent/EP2326742B8/de not_active Not-in-force
- 2009-08-10 JP JP2011522423A patent/JP5562336B2/ja not_active Expired - Fee Related
- 2009-08-10 US US13/059,257 patent/US8828499B2/en active Active
- 2009-08-10 KR KR1020117002931A patent/KR20110047191A/ko not_active Ceased
- 2009-08-10 CN CN2009801320288A patent/CN102124138A/zh active Pending
- 2009-08-10 WO PCT/EP2009/005803 patent/WO2010020362A1/de not_active Ceased
- 2009-08-10 RU RU2011110043/02A patent/RU2501885C2/ru not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| US20110143054A1 (en) | 2011-06-16 |
| CN102124138A (zh) | 2011-07-13 |
| RU2501885C2 (ru) | 2013-12-20 |
| WO2010020362A1 (de) | 2010-02-25 |
| EP2326742B8 (de) | 2018-12-26 |
| US8828499B2 (en) | 2014-09-09 |
| KR20110047191A (ko) | 2011-05-06 |
| EP2326742A1 (de) | 2011-06-01 |
| JP5562336B2 (ja) | 2014-07-30 |
| EP2326742B1 (de) | 2018-11-07 |
| JP2012500331A (ja) | 2012-01-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20190811 |