RU2009112917A - METHOD FOR DETERMINING THIN FILM PARAMETERS DURING VACUUM DEPOSITION - Google Patents
METHOD FOR DETERMINING THIN FILM PARAMETERS DURING VACUUM DEPOSITION Download PDFInfo
- Publication number
- RU2009112917A RU2009112917A RU2009112917/28A RU2009112917A RU2009112917A RU 2009112917 A RU2009112917 A RU 2009112917A RU 2009112917/28 A RU2009112917/28 A RU 2009112917/28A RU 2009112917 A RU2009112917 A RU 2009112917A RU 2009112917 A RU2009112917 A RU 2009112917A
- Authority
- RU
- Russia
- Prior art keywords
- thin film
- film
- radiation
- intensities
- reflected
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract 5
- 239000010409 thin film Substances 0.000 title claims abstract 5
- 238000001771 vacuum deposition Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 claims abstract 8
- 239000010408 film Substances 0.000 claims abstract 6
- 230000003287 optical effect Effects 0.000 claims abstract 4
- 230000003595 spectral effect Effects 0.000 claims abstract 4
- 238000001228 spectrum Methods 0.000 claims abstract 4
- 239000000758 substrate Substances 0.000 claims abstract 4
- 230000008021 deposition Effects 0.000 claims abstract 2
- 230000001678 irradiating effect Effects 0.000 claims abstract 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Способ определения параметров тонкой пленки в процессе осаждения в вакууме на поверхности подложки, имеющей две зоны с различными показателями преломления, включающий облучение пленки оптическим излучением и измерение интенсивностей отраженного и прошедшего излучения для каждой зоны подложки, по которым определяют параметры тонкой пленки, отличающийся тем, что пленку облучают сплошным спектром излучения с постоянной интенсивностью, отраженное и прошедшее излучение раскладывают в спектр и измеряют значения их интенсивностей в заданном спектральном диапазоне длин волн, по которым определяют спектральные характеристики оптических постоянных пленки и толщину. A method for determining the parameters of a thin film in the process of deposition in vacuum on a surface of a substrate having two zones with different refractive indices, including irradiating the film with optical radiation and measuring the intensities of reflected and transmitted radiation for each zone of the substrate, which determine the parameters of the thin film, characterized in that the film is irradiated with a continuous spectrum of radiation with a constant intensity, the reflected and transmitted radiation is laid out in the spectrum and their intensities are measured at a given spectral range of wavelengths, which determine the spectral characteristics of the optical constants of the film and thickness.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2009112917/28A RU2009112917A (en) | 2009-04-06 | 2009-04-06 | METHOD FOR DETERMINING THIN FILM PARAMETERS DURING VACUUM DEPOSITION |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2009112917/28A RU2009112917A (en) | 2009-04-06 | 2009-04-06 | METHOD FOR DETERMINING THIN FILM PARAMETERS DURING VACUUM DEPOSITION |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RU2009112917A true RU2009112917A (en) | 2010-10-20 |
Family
ID=44023502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2009112917/28A RU2009112917A (en) | 2009-04-06 | 2009-04-06 | METHOD FOR DETERMINING THIN FILM PARAMETERS DURING VACUUM DEPOSITION |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2009112917A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013105870A1 (en) * | 2012-01-10 | 2013-07-18 | Labusov Vladimir Alexandrovich | Method for measuring thicknesses of nanometric layers of a multi-layered coating during spraying of said coating |
-
2009
- 2009-04-06 RU RU2009112917/28A patent/RU2009112917A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013105870A1 (en) * | 2012-01-10 | 2013-07-18 | Labusov Vladimir Alexandrovich | Method for measuring thicknesses of nanometric layers of a multi-layered coating during spraying of said coating |
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