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RU2006136761A - METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA - Google Patents

METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA Download PDF

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Publication number
RU2006136761A
RU2006136761A RU2006136761/28A RU2006136761A RU2006136761A RU 2006136761 A RU2006136761 A RU 2006136761A RU 2006136761/28 A RU2006136761/28 A RU 2006136761/28A RU 2006136761 A RU2006136761 A RU 2006136761A RU 2006136761 A RU2006136761 A RU 2006136761A
Authority
RU
Russia
Prior art keywords
deposition
film thickness
thickness control
application
control during
Prior art date
Application number
RU2006136761/28A
Other languages
Russian (ru)
Inventor
Ирина Павловна Корнева (RU)
Ирина Павловна Корнева
Константин Петрович Корнев (RU)
Константин Петрович Корнев
Original Assignee
ФГОУ ВПО Российский государственный университет имени Иммануила Канта (РГУ им. И. Канта) (RU)
ФГОУ ВПО Российский государственный университет имени Иммануила Канта (РГУ им. И. Канта)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ФГОУ ВПО Российский государственный университет имени Иммануила Канта (РГУ им. И. Канта) (RU), ФГОУ ВПО Российский государственный университет имени Иммануила Канта (РГУ им. И. Канта) filed Critical ФГОУ ВПО Российский государственный университет имени Иммануила Канта (РГУ им. И. Канта) (RU)
Priority to RU2006136761/28A priority Critical patent/RU2006136761A/en
Priority to PCT/RU2006/000643 priority patent/WO2008048136A1/en
Publication of RU2006136761A publication Critical patent/RU2006136761A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spray Control Apparatus (AREA)

Claims (1)

Способ контроля толщины пленки в процессе ее нанесения осаждением в вакуумной камере путем осуществления контроля по двум длинам волн λ1 и λ2, определяемым из условия 1/λ1+1/λ2=2/λ0, и фиксации разности фотоэлектрических сигналов, пропорциональных коэффициентам пропускания или отражения при λ1 и λ2, отличающийся тем, что контроль толщины пленок многослойного оптического покрытия осуществляют на трех длинах волн λ0, λ1 и λ2, удовлетворяющих соотношению 1/λ1+1/λ2=2/λ0, причем разность фотоэлектрических сигналов фиксируют для двух длин волн λ1 и λ2, а для третьей, λ0 определяют экстремум коэффициента пропускания (отражения), при этом сигнал на прекращение процесса напыления получают при одновременном достижении экстремума коэффициента отражения (поглощения) на длине волны λ0 и равенства нулю разности коэффициентов отражения (поглощения) при длинах волн λ1 и λ2.The method of controlling the film thickness during its deposition by deposition in a vacuum chamber by monitoring two wavelengths λ 1 and λ 2 determined from the condition 1 / λ 1 + 1 / λ 2 = 2 / λ 0 and fixing the difference of the photoelectric signals proportional to transmittance or reflection at λ 1 and λ 2 , characterized in that the thickness control of the films of the multilayer optical coating is carried out at three wavelengths λ 0 , λ 1 and λ 2 satisfying the ratio 1 / λ 1 + 1 / λ 2 = 2 / λ 0, and the difference of the photoelectric signals are fixed to two lengths of n λ 1 and λ 2, while the third, λ 0 determined extremum of the transmittance (reflectance), the signal at the termination of the spraying process is obtained while achieving an extremum of the reflection coefficient (absorption) at a wavelength λ 0 and zero difference of reflection coefficients ( absorption) at wavelengths λ 1 and λ 2 .
RU2006136761/28A 2006-10-18 2006-10-18 METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA RU2006136761A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
RU2006136761/28A RU2006136761A (en) 2006-10-18 2006-10-18 METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA
PCT/RU2006/000643 WO2008048136A1 (en) 2006-10-18 2006-11-30 Method for checking a film thickness during the application thereof by evaporating in a vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2006136761/28A RU2006136761A (en) 2006-10-18 2006-10-18 METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA

Publications (1)

Publication Number Publication Date
RU2006136761A true RU2006136761A (en) 2008-04-27

Family

ID=39314260

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2006136761/28A RU2006136761A (en) 2006-10-18 2006-10-18 METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA

Country Status (2)

Country Link
RU (1) RU2006136761A (en)
WO (1) WO2008048136A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013105870A1 (en) * 2012-01-10 2013-07-18 Labusov Vladimir Alexandrovich Method for measuring thicknesses of nanometric layers of a multi-layered coating during spraying of said coating

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110938A (en) * 1978-02-20 1979-08-30 Matsushita Electric Ind Co Ltd Method and apparatus for controlling film thickness
SU1233208A1 (en) * 1984-01-02 1986-05-23 Киевский Ордена Ленина Государственный Университет Им.Т.Г.Шевченко Method of measuring thickness of multilayer polymeric film
JPS6176904A (en) * 1984-09-21 1986-04-19 Oak Seisakusho:Kk Method for measuring film thickness
US4909631A (en) * 1987-12-18 1990-03-20 Tan Raul Y Method for film thickness and refractive index determination
RU2025675C1 (en) * 1992-08-06 1994-12-30 Научно-производственный концерн "Синтез" Device for measuring temperature and temperature difference

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013105870A1 (en) * 2012-01-10 2013-07-18 Labusov Vladimir Alexandrovich Method for measuring thicknesses of nanometric layers of a multi-layered coating during spraying of said coating

Also Published As

Publication number Publication date
WO2008048136A1 (en) 2008-04-24

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Legal Events

Date Code Title Description
FA93 Acknowledgement of application withdrawn (no request for examination)

Effective date: 20091019

FZ9A Application not withdrawn (correction of the notice of withdrawal)

Effective date: 20100423