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RU2004114599A - METHOD FOR DETERMINING THE TIGHTNESS OF THE ISOLATED VOLUME OF THE WORKING BODY SYSTEM WITH THE PLASMA SOURCE, PREVIOUSLY IN VACUUM CONDITIONS - Google Patents

METHOD FOR DETERMINING THE TIGHTNESS OF THE ISOLATED VOLUME OF THE WORKING BODY SYSTEM WITH THE PLASMA SOURCE, PREVIOUSLY IN VACUUM CONDITIONS Download PDF

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Publication number
RU2004114599A
RU2004114599A RU2004114599/28A RU2004114599A RU2004114599A RU 2004114599 A RU2004114599 A RU 2004114599A RU 2004114599/28 A RU2004114599/28 A RU 2004114599/28A RU 2004114599 A RU2004114599 A RU 2004114599A RU 2004114599 A RU2004114599 A RU 2004114599A
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RU
Russia
Prior art keywords
pressure
isolated volume
plasma source
control
tightness
Prior art date
Application number
RU2004114599/28A
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Russian (ru)
Other versions
RU2272265C2 (en
Inventor
Дмитрий Анатольевич Калинкин (RU)
Дмитрий Анатольевич Калинкин
Владимир Семенович Ковтун (RU)
Владимир Семенович Ковтун
Денис В чеславович Сысоев (RU)
Денис Вячеславович Сысоев
Original Assignee
Открытое акционерное общество "Ракетно-космическа корпораци "Энерги " им. С.П. Королева" (RU)
Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" им. С.П. Королева"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Открытое акционерное общество "Ракетно-космическа корпораци "Энерги " им. С.П. Королева" (RU), Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" им. С.П. Королева" filed Critical Открытое акционерное общество "Ракетно-космическа корпораци "Энерги " им. С.П. Королева" (RU)
Priority to RU2004114599/28A priority Critical patent/RU2272265C2/en
Publication of RU2004114599A publication Critical patent/RU2004114599A/en
Application granted granted Critical
Publication of RU2272265C2 publication Critical patent/RU2272265C2/en

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  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)

Claims (1)

Способ определения герметичности изолированного объема системы подачи рабочего тела с источником плазмы, преимущественно в условиях вакуума, включающий измерение давления и температуры в изолированном объеме в начальный момент времени, тарированный расход газовой фазы рабочего тела в течение контрольного времени с последующим измерением давления и температуры в изолированном объеме, по измеренным давлению и температуре определение контрольной скорости изменения давления за контрольное время, через фиксированные интервалы времени измерение давления и температуры в изолированном объеме во время перерыва в подаче рабочего тела, определение на каждом фиксированном интервале времени текущей скорости изменения давления, по сравнению текущей и контрольной скоростей изменения давления определение герметичности изолированного объема, отличающийся тем, что в качестве тарированного расхода газовой фазы рабочего тела используют истечение ионизированного газа из изолированного объема через источник плазмы, и за контрольное время принимают время работы указанного источника плазмы, производят измерения параметров, характеризующих работу источника плазмы, по которым определяют контрольный расход рабочего тела из изолированного объема, и по нему, в свою очередь, определяют контрольную скорость изменения давления, а определение герметичности производят путем сравнения текущей скорости изменения давления с контрольной скоростью изменения давления, полученной по параметрам, характеризующим работу источника плазмы.A method for determining the tightness of an isolated volume of a working fluid supply system with a plasma source, mainly under vacuum conditions, including measuring pressure and temperature in an isolated volume at the initial time, a calibrated flow rate of the gas phase of the working fluid during a control time, followed by measuring pressure and temperature in an isolated volume , based on the measured pressure and temperature, the determination of the control rate of pressure change over the control time, at fixed time intervals measuring pressure and temperature in an isolated volume during a break in the supply of the working fluid, determining at each fixed time interval the current rate of change of pressure, comparing the current and control rates of pressure change, determining the tightness of the isolated volume, characterized in that as a calibrated flow rate of the gas phase of the working bodies use the outflow of ionized gas from an isolated volume through a plasma source, and the operating time of the specified source is taken as a control time plasma source, measure the parameters characterizing the work of the plasma source, which determine the control flow rate of the working fluid from an isolated volume, and in turn, determine the control rate of change of pressure, and determine the tightness by comparing the current rate of change of pressure with the control speed changes in pressure obtained by parameters characterizing the operation of the plasma source.
RU2004114599/28A 2004-05-13 2004-05-13 Method for determining impermeability level of isolated volume belonging to system for feeding working body with plasma source, primarily under conditions of vacuum RU2272265C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2004114599/28A RU2272265C2 (en) 2004-05-13 2004-05-13 Method for determining impermeability level of isolated volume belonging to system for feeding working body with plasma source, primarily under conditions of vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2004114599/28A RU2272265C2 (en) 2004-05-13 2004-05-13 Method for determining impermeability level of isolated volume belonging to system for feeding working body with plasma source, primarily under conditions of vacuum

Publications (2)

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RU2004114599A true RU2004114599A (en) 2005-10-27
RU2272265C2 RU2272265C2 (en) 2006-03-20

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RU2004114599/28A RU2272265C2 (en) 2004-05-13 2004-05-13 Method for determining impermeability level of isolated volume belonging to system for feeding working body with plasma source, primarily under conditions of vacuum

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2327132C1 (en) * 2006-10-09 2008-06-20 Федеральное государственное унитарное предприятие Федерального космического агентства "Опытное конструкторское бюро "Факел" Method of determination of working medium rate in plasma engine incorporated with spacecraft electrojet power plant
RU2377522C1 (en) * 2008-06-02 2009-12-27 Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" имени С.П. Королева" Method for tightness detection of system for working fluid supply to source of plasma, preferably under vacuum conditions
RU2392589C2 (en) * 2008-06-02 2010-06-20 Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" имени С.П. Королева" Method for definition of flow rate of system for supply of working medium to plasma source

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU947667A1 (en) * 1980-12-29 1982-07-30 Предприятие П/Я В-2190 Device for checking fluid-tightness
DE4038266A1 (en) * 1990-11-30 1992-06-04 Siemens Ag METHOD AND DEVICE FOR TESTING THE GAS TIGHTNESS OF COMPONENTS, ESPECIALLY SF (ARROW DOWN) 6 (ARROW DOWN) SEALANCE OF CAPACITORS
RU2112946C1 (en) * 1996-05-21 1998-06-10 Ракетно-космическая корпорация "Энергия" им.С.П.Королева Process of test for vacuum-tightness of systems of large-sized spacecraft having ampouled system in their mixes under atmospheric conditions
RU2176074C2 (en) * 1999-08-26 2001-11-20 Центральный научно-исследовательский институт машиностроения Procedure to test tightness of spacecraft compartment, gear for its implementation and process testing gear for implementation of procedure to test tightness of spacecraft compartment
RU2213943C2 (en) * 2001-05-28 2003-10-10 Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" им. С.П.Королева" Method for determination of air-tightness of spacecraft isolated volume in the conditions of space flight

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MM4A The patent is invalid due to non-payment of fees

Effective date: 20180514