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LT4049071T - Segmentuotas spindulių formavimo elementas ir lazerinis apdirbimo įrenginys - Google Patents

Segmentuotas spindulių formavimo elementas ir lazerinis apdirbimo įrenginys

Info

Publication number
LT4049071T
LT4049071T LTEPPCT/EP2020/079570T LTEP2020079570T LT4049071T LT 4049071 T LT4049071 T LT 4049071T LT EP2020079570 T LTEP2020079570 T LT EP2020079570T LT 4049071 T LT4049071 T LT 4049071T
Authority
LT
Lithuania
Prior art keywords
working system
laser working
beamforming element
segmented beamforming
segmented
Prior art date
Application number
LTEPPCT/EP2020/079570T
Other languages
English (en)
Inventor
Daniel FLAMM
Keyou Chen
Original Assignee
TRUMPF Laser- und Systemtechnik SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRUMPF Laser- und Systemtechnik SE filed Critical TRUMPF Laser- und Systemtechnik SE
Publication of LT4049071T publication Critical patent/LT4049071T/lt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/001—Axicons, waxicons, reflaxicons
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Laser Beam Processing (AREA)
LTEPPCT/EP2020/079570T 2019-10-21 2020-10-21 Segmentuotas spindulių formavimo elementas ir lazerinis apdirbimo įrenginys LT4049071T (lt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019128362.0A DE102019128362B3 (de) 2019-10-21 2019-10-21 Segmentiertes Strahlformungselement und Laserbearbeitungsanlage
PCT/EP2020/079570 WO2021078772A1 (de) 2019-10-21 2020-10-21 Segmentiertes strahlformungselement und laserbearbeitungsanlage

Publications (1)

Publication Number Publication Date
LT4049071T true LT4049071T (lt) 2025-06-25

Family

ID=73198264

Family Applications (1)

Application Number Title Priority Date Filing Date
LTEPPCT/EP2020/079570T LT4049071T (lt) 2019-10-21 2020-10-21 Segmentuotas spindulių formavimo elementas ir lazerinis apdirbimo įrenginys

Country Status (8)

Country Link
US (1) US12383979B2 (lt)
EP (1) EP4049071B1 (lt)
KR (1) KR102769501B1 (lt)
CN (1) CN114600009B (lt)
DE (1) DE102019128362B3 (lt)
LT (1) LT4049071T (lt)
PL (1) PL4049071T3 (lt)
WO (1) WO2021078772A1 (lt)

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Publication number Priority date Publication date Assignee Title
DE102020108247A1 (de) 2020-03-25 2021-09-30 Trumpf Laser- Und Systemtechnik Gmbh Grossvolumiges entfernen von material durch laser-unterstütztes ätzen
DE102020121283A1 (de) 2020-08-13 2022-02-17 Trumpf Laser- Und Systemtechnik Gmbh Laserbearbeitung eines werkstücks mit einer gekrümmten oberfläche
DE102020121287B4 (de) 2020-08-13 2024-02-15 Trumpf Laser- Und Systemtechnik Gmbh Laserbearbeitung eines werkstücks mit einer gekrümmten oberfläche und laserbearbeitungsanlage
DE102020133145A1 (de) 2020-12-11 2022-06-15 Trumpf Laser- Und Systemtechnik Gmbh Laserbearbeitung eines teiltransparenten werkstücks mit einem quasi-nichtbeugenden laserstrahl
DE102021109579B4 (de) 2021-04-16 2023-03-23 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und vorrichtung zum ausbilden von modifikationen mit einem laserstrahl in einem material mit einer gekrümmten oberfläche
DE102021111879A1 (de) 2021-05-06 2022-11-10 Trumpf Laser- Und Systemtechnik Gmbh Laserschweißen von Fügepartnern mit einer gekrümmten Oberfläche
DE102021123801A1 (de) 2021-06-02 2022-12-08 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Vorrichtung zur Laserbearbeitung eines Werkstücks
WO2022253606A1 (de) 2021-06-02 2022-12-08 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und vorrichtung zur laserbearbeitung eines werkstücks
KR20230064664A (ko) 2021-11-03 2023-05-11 삼성디스플레이 주식회사 광학 시스템
WO2023225935A1 (en) 2022-05-26 2023-11-30 Trumpf (China) Co., Ltd. Method for the laser machining of a workpiece
DE102023122295A1 (de) * 2023-08-21 2025-02-27 TRUMPF Werkzeugmaschinen SE + Co. KG Variable optik für ein lasersystem, entsprechendes lasersystem und verfahren zum laserschneiden mittels eines solchen lasersystems
DE102024103217A1 (de) * 2024-02-06 2025-08-07 TRUMPF Laser SE Vorrichtung und Verfahren zum Bearbeiten eines Werkstücks aus einem doppelbrechenden Material

Family Cites Families (18)

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US6373633B1 (en) * 2000-07-06 2002-04-16 Mems Optical, Llc Shaping irradiance profiles using optical elements with positive and negative optical powers
JP4158481B2 (ja) * 2002-10-21 2008-10-01 セイコーエプソン株式会社 レーザー加工方法およびその装置、並びにその装置を用いた穴あけ加工方法
DE102004035489A1 (de) * 2004-07-19 2006-02-16 Jenoptik Laser, Optik, Systeme Gmbh Optisches System zur Umwandlung einer primären Intensitätsverteilung in eine vorgegebene, raumwinkelabhängige Intensitätsverteilung
KR101306503B1 (ko) * 2006-02-17 2013-09-09 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 노광 장치의 조명 시스템용 광 인터그레이터
US20080083886A1 (en) * 2006-09-14 2008-04-10 3M Innovative Properties Company Optical system suitable for processing multiphoton curable photoreactive compositions
CN103207530B (zh) * 2013-03-22 2014-12-17 中国科学院上海光学精密机械研究所 光刻机光瞳整形光学系统及产生离轴照明模式的方法
DE102014116958B9 (de) * 2014-11-19 2017-10-05 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung eines Laserstrahls, Laserbearbeitungsanlage, Verfahren zur Materialbearbeitung und Verwenden einer gemeinsamen langgezogenen Fokuszone zur Lasermaterialbearbeitung
DE102014116957A1 (de) * 2014-11-19 2016-05-19 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung
WO2016079275A1 (de) * 2014-11-19 2016-05-26 Trumpf Laser- Und Systemtechnik Gmbh System zur asymmetrischen optischen strahlformung
ES2670975T3 (es) * 2014-12-15 2018-06-04 Centre National De La Recherche Scientifique Dispositivo de láser con haz provisto de un momento angular orbital controlado
GB2536276B (en) * 2015-03-12 2019-11-13 Powerphotonic Ltd Field mapper
DE102015217523B4 (de) * 2015-04-28 2022-03-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur lokal definierten Bearbeitung an Oberflächen von Werkstücken mittels Laserlicht
DE102015216342B3 (de) * 2015-08-26 2016-12-22 Laser-Laboratorium Göttingen e.V. Technik zur Herstellung periodischer Strukturen
LT6428B (lt) * 2015-10-02 2017-07-25 Uab "Altechna R&D" Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys
WO2018020144A1 (fr) * 2016-07-25 2018-02-01 Amplitude Systemes Appareil et procédé de découpe de matériau par faisceau laser allongé non diffractif
KR102423775B1 (ko) * 2016-08-30 2022-07-22 코닝 인코포레이티드 투명 재료의 레이저 가공
DE102017208979A1 (de) * 2017-05-29 2018-11-29 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Tiefschweißen eines Werkstücks, mit Verteilung der Laserleistung auf mehrere Foki
JP6977609B2 (ja) * 2018-02-21 2021-12-08 株式会社リコー 光照射装置、光照射装置を用いた光加工装置、光照射方法、及び光加工方法

Also Published As

Publication number Publication date
US12383979B2 (en) 2025-08-12
KR102769501B1 (ko) 2025-02-17
CN114600009A (zh) 2022-06-07
WO2021078772A1 (de) 2021-04-29
PL4049071T3 (pl) 2025-09-08
CN114600009B (zh) 2024-02-20
US20220234135A1 (en) 2022-07-28
EP4049071B1 (de) 2025-05-14
DE102019128362B3 (de) 2021-02-18
KR20220079949A (ko) 2022-06-14
EP4049071A1 (de) 2022-08-31

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