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KR970046817U - 웨이퍼 적재용 보우트 - Google Patents

웨이퍼 적재용 보우트

Info

Publication number
KR970046817U
KR970046817U KR2019950037993U KR19950037993U KR970046817U KR 970046817 U KR970046817 U KR 970046817U KR 2019950037993 U KR2019950037993 U KR 2019950037993U KR 19950037993 U KR19950037993 U KR 19950037993U KR 970046817 U KR970046817 U KR 970046817U
Authority
KR
South Korea
Prior art keywords
wafer loading
loading boat
boat
wafer
loading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR2019950037993U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950037993U priority Critical patent/KR970046817U/ko
Publication of KR970046817U publication Critical patent/KR970046817U/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • H10P72/13
KR2019950037993U 1995-12-04 1995-12-04 웨이퍼 적재용 보우트 Withdrawn KR970046817U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950037993U KR970046817U (ko) 1995-12-04 1995-12-04 웨이퍼 적재용 보우트

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950037993U KR970046817U (ko) 1995-12-04 1995-12-04 웨이퍼 적재용 보우트

Publications (1)

Publication Number Publication Date
KR970046817U true KR970046817U (ko) 1997-07-31

Family

ID=60877202

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950037993U Withdrawn KR970046817U (ko) 1995-12-04 1995-12-04 웨이퍼 적재용 보우트

Country Status (1)

Country Link
KR (1) KR970046817U (ko)

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Legal Events

Date Code Title Description
R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

UA0108 Application for utility model registration

St.27 status event code: A-0-1-A10-A12-nap-UA0108

UG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-UG1501

UC1204 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-UC1204

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

UN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-UN2301

St.27 status event code: A-3-3-R10-R11-asn-UN2301

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000