KR920004055Y1 - Wafer cassette positioning device of semiconductor processing equipment - Google Patents

Abstract

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Description

Wafer cassette positioning device of semiconductor processing equipment

1 is a front view of the cassette position adjusting device according to the present invention.

2 is a plan view of FIG.

Figure 3 is an exploded perspective view of the main part of the technical configuration of the present invention.

* Explanation of symbols for main parts of the drawings

1: Ball screw 2, 3: Up and down bracket

5: ball bearing 6: carriage

7: guide roller 9: roller mount

The present invention is a semiconductor process for adjusting the wafer cassette position when the wafer arm enters the cassette tank so that the wafer stacked on the wafer cassette at a small interval can be processed through the transfer tank by the wafer arm to process the semiconductor process in the reaction tank. It relates to a wafer cassette positioning device of the.

Conventional devices for adjusting the position of wafer cassettes use a linear shaft and a linear bearing to perform only the top and bottom guides of the table. Therefore, when a large load is applied, the ball screw is exerted and a large driving torque is required. There is a drawback that there is a problem that the manufacturing cost is increased because the gap between the linear shaft and the linear bearing must be strictly maintained as the position of high accuracy (high sentiment) is required.

Therefore, the present invention transfers the wafer cassette by using the ball screw and ball bearing for shanghai conveying the wafer table to solve the above-mentioned problems. It is an object of the present invention to provide a wafer cassette position adjusting device for semiconductor processing equipment to adjust the position of the wafer cassette placed on the wafer table by implementing a smooth vertical movement.

In one aspect of the present invention for achieving the above object, a wafer cassette in which a wafer is stacked in a cassette tank, a wafer table on which the wafer cassette is placed on an upper surface, a carriage to which the wafer table is fastened, and the wafer are placed on a peninsula. In the wafer cassette position adjusting apparatus which is equipped with wafer arms and the like transferred to the reaction tank to be processed, the guide rail having a V groove on the left and right sides attached to a predetermined height of one side wall of the cassette tank and the V groove of the guide rail. A guide roller which is brought into contact with each other and rotates, a roller mount where the guide roller is fastened and the guide pin is coupled to a long hole formed on the left and right sides of the guide roller, and the roller mount penetrates the carriage to be in contact with the roller mount. Left and right adjusting bolts to adjust the position of the, and the wafer cassette is installed at the end to raise and lower the carriage installed Characterized in that with a ball screw comprising, configuring the upper and lower ball bearings for supporting the ball screw.

Hereinafter, the technical configuration and preferred embodiments of the present invention will be described in detail based on the accompanying drawings.

In FIG. 1, the wafer cassette 16 in which the wafers 17 are stacked in the cassette bath 21, the wafer table 12 on which the wafer cassette 16 is placed on the upper surface, and the wafer table 12 A wafer cassette position adjusting device including a fastened carriage 6 and a wafer arm 19 for transferring the wafer 7 to a reaction tank subjected to a semiconductor process, wherein a predetermined height of one side wall of the cassette tank 21 is provided. A guide rail 18 attached to the guide rail having a V groove 8a on the left and a right side, a guide roller 7 pivotally moving in contact with the V groove 8a of the guide rail 8, and the guide The roller 7 is fastened to the roller mount 9 through which the guide pin 6a is coupled to the long hole 9a formed at the left and right sides, and the carriage mount penetrates the roller mount 9 so as to contact the roller mount 9. Left and right adjusting bolts 10 and 11 for adjusting the left and right positions of the carriage 6 and the carriage 6 provided with the wafer cassette 16 are provided. The ball screw (1) coupled to the motor (B) at the end to move up and down, and the up and down ball bearing (5) for supporting the ball screw.

Reference numeral 3 is an upper bracket, 3 is a lower bracket, 18 is a glove valve, 20 is a moving tank.

1 and 2 show a front view and a plan view of the cassette position adjusting device according to the present invention.

3 is an exploded perspective view of the technical components of the present invention.

As shown, the ball screw 1 installed in the vertical direction by the upper and lower brackets 2 and 3 attached to one side wall of the cassette jaw 21 has a ball bearing in the center of rotation of the brackets 2 and 3. It is supported by 5) and installed rotatably.

In addition, the end of the ball screw 1 is connected to the motor 4 is to drive the ball screw (1).

At this time, the adjustment of the vertical drive amount is possible by controlling the rotation by controlling the motor (4) installed at the end of the ball screw (1).

In addition, the carriage 6 is moved in the vertical direction of the shaft along the ball screw (1).

At this time, the guide roller 7 formed of a triangular tread is guided by the guide rail 8 having one side wall attached to the cassette tank 21 and having the V groove 8a.

The guide roller 7 is also mounted by a roller mount 9 attached to the carriage 6 as shown in FIG.

The adjustment holes 9a provided on both sides of the roller mount 9 are coupled so as not to be separated by the guide pins 6a of the carriage 6.

In addition, the left and right adjusting bolts 10 and 11 penetrating the body of the carriage 6 induce a stress R parallel to the load load P, so that the left and right are properly adjusted so that smooth movement and precise positioning are possible. This becomes possible.

The wafer table 12 on which the wafer cassette is loaded is loaded on the frame 13 as shown in Fig. 1 and fixed to the carriage 6, and the leaf spring 14 is inserted therebetween so as to enable vertical adjustment.

In addition, a gage connecting the transfer tank 20 and the cassette tank 21 through which the wafer arm 19, which is a semiconductor process for transferring the stacked wafers 17, and the reaction tank (not shown) are passed through before the wafer passes. The valve 18 is fastened to the upper portion of the cassette tank 21.

More specifically, the wafer cassette 16 is located on the wafer cassette table 12, and the wafers 17 are stacked on the wafer cassette 6 at a small interval (about 4 mm).

A mechanical arm called a predetermined wafer arm 18 is used to straighten the wafers 17 into the transfer tank 20 connected by the gate valve 19.

The end of the wafer arm 19 is inserted into the empty space between the wafers 17, which enters the cassette tank 21 through the gate valve 18 and is aligned with the wafer cassette 16 at regular intervals. When the ball screw 1 is driven by the motor 4, the table 12 on which the wafer cassette 16 is placed is lowered by a predetermined amount so that the wafer 17 is placed on the upper surface of the wafer arm 17.

The wafer arm 19 is then retracted into the transfer tank 20 to move the specific wafer set in the wafer cassette 16 into the transfer tank 20.

As the above operation is repeated, the wafers 17 arranged in the wafer cassette 16 are corrected with the transfer tank 20 to process a predetermined semiconductor process, and the processed wafers 17 are wafer cassettes in the reverse order described above. It will be rearranged to the specific position of (16).

In order to take out and bring in the wafers 17 arranged at such intervals from the wafer cassette 16 to the wafer arm 19, the wafer table 12 on which the wafer cassette 16 is placed is precisely driven up and down to adjust the position. There is a need.

This position adjustment can be precisely eliminated the problem that the wafer arm 19 is bumped or dropped in the process of withdrawing and loading the wafer.

According to the above embodiment, the wafer cassette 6 without flow is adjusted by adjusting the contact gap between the guide rail 8 and the guide roller 7 formed of the sensor tread with the left and right adjusting bolts 10 and 11 of the carriage 6. The wafer table 12 to be loaded can be smoothly transported up and down and realized by precise positioning of the wafer table.

Claims (1)

The wafer cassette 16 on which the wafers 17 are stacked in the cassette 21, the wafer table 12 on which the wafer cassette is placed on the upper surface, the carriage 6 supporting the wafer table, and the wafer In the wafer cassette position adjusting device provided with the wafer arm 19 etc. which are transferred to the reaction tank processed by a semiconductor process, it has the V groove 8a in the left and right sides attached to the predetermined height of one side wall of the cassette tank 21. A guide pin (8), a guide roller (7) which rotates in contact with the V groove (8a) of the guide rail and moves up and down, and a guide pin (9a) formed on the left and right sides of the guide roller are fastened to each other. 6a) and the left and right adjusting bolts 10, which adjust the position of the left and right sides of the carriage by passing through the carriage 5 and the carriage 5 and abutting the roller mount 9; Wafer cassette position of the semiconductor processing equipment, characterized in that it comprises a 11) Section devices.